1288812 九、發明說明： 【發明所屬之技術領域】 本發明是有關於-種平板^熱#製造方法，特別是^ % —種湘吸盤保持氣密及㈣封口的平板式熱管製造方^ 〇 • 【先前技術】 熱管為目前3C電子產品中效能極佳的導熱元件，通常 • f用於不易安裝大型散熱鰭片的熱源。例如筆記型電腦的 1〇 ^處理益、電視遊樂器主機，或是通訊主機。熱管的作用 ，即是將上述熱源所產生的熱量傳導至設有散熱"之散 熱器。熱管不但成本低廉，且因為熱管是屬於被動散熱元 件’所以熱官的工作週期長達數十年。與以往銅質或銘質 導熱元件不同的是，熱管的導熱係數不為固定常數。隨著 2管長向長度的延展，其導熱係數反而愈大。此外，以目 15 冑業界所製作的熱管而言，其導熱係數約為銅導熱係數的 g 數十倍至數萬倍。 參閱圖1，一般平板式熱管丨包含一中空封裝體u、一 ' 設於該封裝體11内表面的毛細結構12,及容置於該封裝體 • 11内的工作流體13。該封裝體11具有相反的一吸熱端111 20 及政熱端112，且該封裝體11内的壓力即為該工作流體 13自身的飽和蒸氣壓，即該工作流體13是常處於液、氣態 共存的穩定平衡態。此外，該毛細結構12具有多數由該工 作流體13所浸潤的毛細孔121。 當該吸熱端111受熱而略升溫時，破壞鄰近該吸熱端 1288812 111工作0 13 _定平衡態’使鄰近該吸熱端⑴的液 態工作流豸η蒸發。此時，該吸熱端⑴㈣氣壓大於該 散熱端in的蒸氣壓’使大量氣態工作流體13由該吸熱端 111流向該散熱端112。由於該散熱端112的溫度較低，使 鄰近該散熱端112的氣態卫作流體13凝結，過量的液態工 作流體13並沿該等毛細孔121流向該吸熱端m，此即完 成-將熱量由該吸熱端⑴傳導至該散熱端ιΐ2的導熱週期 Ο ίο 15 20 由於該導熱週期是藉破㈣卫作流體13 _定平衡態 而產生，所以即使該封裝體u二端的溫差不大，該導熱週 期仍然能持續循環不斷，並傳導大量的熱#。 雖然熱管的工作原理並不難理解，：何人皆可取材自 五金行並自行製造可短期運轉的熱管，但是實際上在Μ 的應用方面，製造可靠度高且能長期工作的熱管卻非容易 。早期的熱管製造技術未達成熟’不但製造速度奸，且 =品質參差不齊。原因是過去熱管成品在製造過程中極 —生肉眼無法辨別的缺陷，雖外觀與一般品質良好的献 官並無二致’但是長期使用下該熱 ’、，、 士南 y〇 ^ j具工度仍會遭受破 *。保持該封裝體U内的真空度即 被執行的關鍵。當該封裝體"表面有任何二:：否了 封裝體11内外的壓力差極易使外 ㊆A °亥1288812 IX. Description of the invention: [Technical field of the invention] The present invention relates to a method for manufacturing a flat plate heat, in particular, a flat-plate heat pipe manufacturing device which maintains airtightness and (4) sealing of the Xiangxiang suction cup. [Prior Art] Heat pipes are heat-transfer components that are excellent in current 3C electronics, and are usually used for heat sources that are difficult to install large heat sink fins. For example, the notebook computer's 1 〇 ^ processing benefits, TV game console, or communication host. The function of the heat pipe is to transfer the heat generated by the above heat source to the heat radiator provided with heat dissipation. Heat pipes are not only cheap, but because heat pipes are passive heat-dissipating components, the hot officials have a working cycle of several decades. Unlike previous copper or inscription heat conduction elements, the thermal conductivity of the heat pipe is not a fixed constant. With the extension of the length of the 2 tubes, the thermal conductivity is rather large. In addition, the thermal conductivity of the heat pipe produced by the industry is about ten to ten thousand times the thermal conductivity of copper. Referring to Fig. 1, a general flat heat pipe 丨 includes a hollow package u, a capillary structure 12 disposed on the inner surface of the package 11, and a working fluid 13 accommodated in the package 11. The package body 11 has an opposite heat absorbing end 111 20 and a politic heat end 112, and the pressure in the package body 11 is the saturated vapor pressure of the working fluid 13 itself, that is, the working fluid 13 is often in a liquid or gas state. Stable equilibrium state. Further, the capillary structure 12 has a plurality of capillary holes 121 which are infiltrated by the working fluid 13. When the endothermic end 111 is heated slightly to a slight temperature rise, the destruction of the liquid adjacent working end of the endothermic end (1) is caused to evaporate adjacent to the endothermic end 1288812. At this time, the air pressure of the heat absorbing end (1) (4) is greater than the vapor pressure of the heat radiating end in, so that a large amount of the gaseous working fluid 13 flows from the heat absorbing end 111 to the heat radiating end 112. Since the temperature of the heat dissipating end 112 is low, the gaseous effluent fluid 13 adjacent to the heat dissipating end 112 is condensed, and the excess liquid working fluid 13 flows along the capillary holes 121 to the endothermic end m, which is completed - the heat is The heat conduction period of the heat absorbing end (1) to the heat dissipating end ι 2 is Ο ί ί 15 15 20 20 20 20 20 20 由于 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 20 The cycle continues to circulate continuously and conducts a large amount of heat#. Although the working principle of the heat pipe is not difficult to understand, everyone can take the hardware and manufacture the heat pipe that can run for a short period of time. However, in practice, it is not easy to manufacture a heat pipe with high reliability and long-term operation. Early heat pipe manufacturing technology was not mature enough to not only create speed, but also the quality is uneven. The reason is that in the past, the heat pipe finished product was extremely invisible to the naked eye in the manufacturing process, although the appearance was the same as that of the general good quality, but the long-term use of the heat was, and, Shi Nan y〇^ j Degree will still suffer. Maintaining the degree of vacuum within the package U is the key to being performed. When the package " surface has any two:: No, the pressure difference between the inside and outside of the package 11 is extremely easy to make the outer seven A °
Hi㈣平衡態，因此大多數曰 失去原有的功效。 W叫間而曰漸 以下即配合圖2的流程說明現有製造該平板式熱管〗 7 1288812 的方法。 配合參閱圖i與圖3,從步驟⑼ 延展性材質社成的平板 仏，提供—利用可 表面設有一毛細結構12，_般_ 相hii内 的組成材質均為銅或銘。此外、及该毛細結構 方弋亩接报成认兮 毛細結構12可以壓印的 万式直接形成於该封裝體丨丨 07 形成該封裝HU時，同時1的面，也可是獨立製造並在 u妗叹置的金屬網。 步驟192是在該封裝體u側 、 側邊預留上下相對的凹槽，也可為在__、；；“= 外加工鑽孔。然而不論是 名 持動作的挾持輔助，且由… 1外加工，皆需藉挾 j认行輔助，且由於該封裝體u报 動作極易破壞該封裝體u的—敕 ^ 口此该挾持 持應具有的完整性時，即非當 ’、 工度，並影響成品的品質。 人步驟193中’使—鋼管14接合至該通孔113。為了配 合以下步驟，該鋼管14及通孔113 I 了配 的氣宓许接。處必須保持足夠 孔山度然而貫際上目前常用的焊接或膠合等接合方法 ’在操作中極有可能出現影響氣密度的微小氣孔。除此之 外’在本步驟中’仍然有上—步驟中需要挾持的問題。 味步驟I94即可透過該鋼管14進行充填的作業。目前埶 e中常用的工作流體13為水，也有使用甲醇或丙醇等等作 為:作流體13。不同的工作流體13代表的是熱管適用的工 作溫度’例如’目前常見以水為工作流體13的熱管適用於 1288812Hi (4) is in equilibrium, so most 曰 lose their original function. The method of manufacturing the flat heat pipe 7 1288812 is described below with reference to the flow of Fig. 2 . Referring to Fig. i and Fig. 3, from the step (9), the flat material of the ductile material is provided, and the surface material is provided with a capillary structure 12, and the composition materials in the ii phase are all copper or Ming. In addition, and the capillary structure can be embossed, the embossed structure 12 can be directly formed on the package 丨丨07 to form the package HU, and the surface of the first one can also be independently manufactured and Sigh the metal mesh. In step 192, the upper and lower opposite grooves are reserved on the side and the side of the package u, and the holes can be drilled in the __,;; "= outer machining. However, regardless of the holding action of the holding action, and by... 1 For external processing, it is necessary to use the acknowledgment of the acknowledgment, and since the package u report action is very easy to destroy the integrity of the package u, the 应^ port should have the integrity, that is, improper And affecting the quality of the finished product. In step 193, the steel tube 14 is joined to the through hole 113. In order to cooperate with the following steps, the steel pipe 14 and the through hole 113 I are matched with the gas. However, the commonly used joining methods such as welding or gluing are very likely to have tiny pores affecting the gas density during operation. In addition, 'in this step' there is still a problem that needs to be maintained in the above steps. The filling step I94 can be filled through the steel pipe 14. At present, the working fluid 13 commonly used in the 埶e is water, and methanol or propanol is used as the fluid 13. Different working fluids 13 represent heat pipes. Working temperature 'for example' The common heat pipe with water as working fluid 13 is suitable for 1288812
ίο 15 24 C至94°C的溫度範圍’以曱醇為工作流體13的熱管適用 於46°C至125°C的溫度範圍。當工作環境超出適用的溫度 範圍時，該導熱週期皆無法被執行。因為在低於適用的溫 度範圍時，該工作流體13恆為液態，無法進行相變化反應 ，同樣地，在高於適用的溫度範圍時，該工作流體13怪為 氣態’也無法進行相變化反應。 為使該導熱週期可順利的被執行，該封|體丨丨内的最 佳工作壓力應保持在該工作流體13的蒸氣壓，也就是使該 工作流體13呈穩定平衡態。因此，在接下來的步驟195即 疋進行除氣作業，排除氣態的該工作流體丨3以外的氣體。 y般只要使該封裝體η内的壓力等於該工作流體13的蒸氣 壓即可確認已完全排除該工作流體13以外的氣體。 配合參閱圖4與圖5,步驟196是使一機具夹合該則 Η管口’㈣197是使―機具剪斷經步驟i96所產生的』 平封嘴端141。至此，該封裝體u (見圖3)已完全封閉 然而’在持續下一步驟之前，該封裝體u (見圖3)内… 密度完全依賴該封嘴端⑷二側薄板之間的迫緊，以達至 暫時氣密的效果’因此在夹合機具釋放該封嘴#⑷後， 仍然可能會有漏氣的現像。 :此，在最後一步驟198即是在該蝴⑷的端 進仃點谭，才能完全達到封口氣密的效果。 時明的是，為保證在進行步驟196至步驟I =封“ :1(見圖3)的氣密，所以上述步驟中的夹合 及點知動作皆必須一次完成，也就是步驟196至 20 ίο 15 20 1288812 驟198必須在同一機a卜& 枝口上凡成，不但使機具成本較 耗電垔較大，因此極不符合成本效益。 /上述過程可知，過去製造平板式熱管^的流程未告 =二在過程中無法確保品質，多數步驟的執行“ 石壞6亥封裝體U的完整性，而降低平板式熱管！的使用 年限及工作效能，且製造過程極不經濟。 【發明内容】 因此，本發明之一目的即在提供一種可以口 質的平板式熱管製造方法。 ”成-口口口 本發明之其-目的即在提供一種製造過程中不因 具挾持而破壞的平板式熱管製造方法。 又、 本發明之另-目的即在提供一種製造過程中 密的平板式熱管製造方法。 ，、持乳 本毛月之X目的即在提供_種㈣吸 的平板式熱管製造方法。 隹保乳在 於是，本發明平板式熱管製 下列步驟·· 貝轭例疋包含 (A)以可延展性材質形一 該封裝體界定一空腔； 、工封裝體’且 ⑻提供-設於該封裝體的表面，並於 連通該空腔的開口； 、 /成 一設—吸盤於該.，該吸盤包括—變形部及一 面的吸著環緣； 卜、，表亚形成—附著於該表 10 1288812 (D )透過該穿孔抽除該封裝體内空腔的氣體； 及 ⑻透過該穿孔充填一工作流體至該封裝體内空腔;Ίο 15 24 C to 94 ° C temperature range 'The heat pipe with decyl alcohol as working fluid 13 is suitable for the temperature range of 46 ° C to 125 ° C. This thermal cycle cannot be performed when the operating environment is outside the applicable temperature range. Since the working fluid 13 is always in a liquid state below the applicable temperature range, the phase change reaction cannot be performed. Similarly, when the working temperature is higher than the applicable temperature range, the working fluid 13 is in a gaseous state and cannot undergo a phase change reaction. . In order for the thermal conduction cycle to be performed smoothly, the optimum working pressure in the sealing body should be maintained at the vapor pressure of the working fluid 13, i.e., the working fluid 13 is in a stable equilibrium state. Therefore, in the next step 195, the degassing operation is performed, and the gas other than the working fluid 丨3 in the gaseous state is removed. As long as the pressure in the package η is equal to the vapor pressure of the working fluid 13, the gas other than the working fluid 13 is completely excluded. Referring to Figures 4 and 5, step 196 is to clamp a tool to the port. The fourth port 197 is the flat end 141 of the machine that is cut by the step i96. At this point, the package u (see Fig. 3) is completely enclosed. However, the density of the package u (see Fig. 3) is completely dependent on the tension between the two side sheets of the mouth end (4) before continuing the next step. In order to achieve a temporary airtight effect 'so after the clamping machine releases the sealing mouth # (4), there may still be a phenomenon of air leakage. : This, in the last step 198 is to enter the point of the butterfly (4), in order to fully achieve the sealing airtight effect. It should be noted that in order to ensure that the airtightness of step 196 to step I = "1" (see FIG. 3) is performed, the clamping and clicking operations in the above steps must be completed once, that is, steps 196 to 20 Ίο 15 20 1288812 Step 198 must be on the same machine, not only makes the machine cost more power-hungry, so it is not cost-effective. / The above process shows that the process of manufacturing flat heat pipe ^ Not told = two in the process can not ensure the quality, the implementation of most steps "Shi bad 6 Hai package U integrity, while reducing the flat heat pipe! The age and performance of the work, and the manufacturing process is extremely uneconomical. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method for manufacturing a flat plate heat pipe which can be made of a mouth. The invention is directed to providing a flat heat pipe manufacturing method which is not damaged by holding during a manufacturing process. Further, another object of the present invention is to provide a flat plate in a manufacturing process. The method for manufacturing a heat pipe is to provide a flat heat pipe manufacturing method for the purpose of providing a type of heat pump. The following steps are the steps of the plate type heat control of the present invention. (A) defining a cavity in the form of a malleable material; the working package 'and (8) providing - an opening provided on the surface of the package and communicating with the cavity; / / forming a suction cup The suction cup includes a deformation portion and a suction ring edge on one side; and a surface sub-form is attached to the table 10 1288812 (D) through which the gas in the cavity of the package is removed; and (8) The perforation is filled with a working fluid to the cavity of the package body;
F)沿垂直該表面方向擠壓該封裝體 份延展變形並封閉該開口 ，使該封裝體部F) pressing the package body perpendicularly to the surface direction to extend the deformation and closing the opening to make the package body
此外，本發明平板式熱管製造方法之另一 含下列步驟： 匕 (I)以可延展性材質組成一平板狀的巾空封裳體 該封裝體界定一空腔； ^ 且 10 (J)提供分別設於該封裝體的一第一表面及—第二表 面，並於該第―、第二表面分別形成一連通該空腔的 口及一連通該空腔的充填口； 只 15 ⑴分別罩設-吸盤於該除氣口及該充填口，每—吸 盤包括一變形部及一貫穿該變形部的穿孔，該變形部外緣 並形成一附著於該表面的吸著環緣； (L)透過設於該除氣口的穿孔抽除該封裝體内空腔的 氣體； (M) 透過設於該充填口的穿孔充填一工作流體至該封 裝體内空腔；及 (N) 分別沿垂直該第一、第二表面方向擠壓該封裝體 ’使该封裝體部份延展變形並封閉該除氣口及該充填口。 【實施方式】 ~ 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之三個較佳實施例的詳細說明中，將可 1288812 清楚的呈現。 本务明被洋細描述之前， 音 明内容中，雜,、l _ 要庄心的疋，在以下的說 ^ "、似的兀件是以相同的編號來表示。 例包L本發明平板式熱管製造方法之第—較佳實施 ^ 3步驟801至817。 配合參閱圖7，在舟 歸驟801中，以現有的金屬加工方式 衣成形狀互補的—第一構件3 經濟的考量τ， 弟一構件32,在效能及 量…下—者的組成材質可為纖。在不同的考 ίο 15 20 Γ 改以其它具可延展性且導熱性佳的材質組成該 Γ、弟二構件31、32。該第-構件31具有-貫穿二:背 :面的開口 312 ’並提供-圍繞該開口 312周圍，且實質 平坦的表面311。 貝貝上 在步驟803中，以娟古&人s 槿4甘,^ 見有的金屬加工方式製成一毛細結 ’其組成材質可為銅、銘或其它導熱性佳的材質。該毛 細結構4在本較佳竇^^ ^丨士 、 m… 為—金制，並具有多數相互 通連的毛細孔41。這裡所㈣毛細孔41為可錢體產生毛 細現象的細微孔洞，也就是說，#該毛細結構4某 與;"液體接觸時，該液體即可迅速藉由該等毛細孔41擴; =亥毛細結構4其它部份’且所述擴散過程與重力盔 關。因此，該等毛細孔41的實際大小需視該毛細結構Μ 組成材質，及配合該毛細結構4所搭配使㈣液體而定。、 配合參閱圖8’在步驟805中，以膠合或焊接等現有的 接合技術組合該第一、第二構件31、32，以形成一 裝體3。該封裝體3並界定—空腔33,且開口 312連通至 12 ίο 15 20 1288812 該空腔33。在組合該第一、第二構件31、32的過程中，同 時設置該毛細結構4於該第―、第二構件3 μ封叙體3成型後，該毛細結構4位於該空腔μ，且一目 t封=刀別接觸㈣裝體3内表面，藉此，熱能即可自 ;;二33傳導至該毛細結構4’或自該毛細結構4傳導至 已，：二庫=步驟’至步驟805只是本較佳實施例而 已,際應用時，也可在步驟8〇3中使該毛細 以遷印或篆刻等現有的技術直接形成於該第 =::™5 一 即可獲得類似的構造。 1瓦 配合芬閱圖9,在該封裝體3及該毛細 以下即是配合—除氣充填機具6及一封口機且#4^後， 除氣充填作举及封口㈣i 械具7分別進行 6一除氣充二 氣充填機具6包含-吸盤 的功效*妒 —抽真空裳置（圖未示）。該吸盤 置方白;1用於工件傳送、工件氣密度測試、工件放 空起重心、點紙自動黏貼’及物料充填開袋等作業的直 :件_口機具7則包含一第一 件72,及一驅動裝置（圖未示）。該第-、第 「何轉7卜72皆是以具 組成，該驅動裳置（圖未示）作=剛性材質所 或以伺服馬達驅動。 、式可為油壓、水壓 在進行除氣充填作業及封口作業之前，在步驟8〇7中 13 1288812 【主要元件符號說明】 3 · ·. 封裝體 62· · · · 除氣充填管 31· ·. 第一構件 63· · · · 除氣管 311 · · 表面 64· · · · 充填管 i ^ 312 · 開口 65· · · · 汽化裝置 二 313 ·. 第一表面 ' 651 · · · 第一導熱件 314 ·. 除氣口 652 ·· · 第二導熱件 315 ·. 第二表面 653 ·· · 汽化流道 • 316 ·. 充填口 654 ··. 氣密封條 32· ·. 第二構件 655 ·· · 導流孔 33· · · 空腔 656 ·· · 操作孔 34· ·. 突出部 ^ · · · · 封口機具 341 · · 裁截端 71. · · · 第一荷重元件 /| · · · 毛細結構 72· · · · 第二荷重元件 41· ·. 毛細孔 721 ·· · 突頂部 5 · · · 工作流體 74· · · · 夾合裝置 6 · · · 除氣充填機具 75· · · · 裁切裝置 61·· · V • 吸盤 801〜817 步驟 . 611 · · 變形部 901〜923 步驟 612 · · 穿孔 201〜215 步驟 613 · · 吸著環緣 24In addition, the other method for manufacturing the flat-plate heat pipe of the present invention comprises the following steps: 匕 (I) forming a flat-shaped towel with a malleable material; the package defines a cavity; ^ and 10 (J) provide respectively Provided on a first surface and a second surface of the package body, and respectively forming a port connecting the cavity and a filling port connecting the cavity on the first and second surfaces; only 15 (1) respectively a suction cup at the gas removal port and the filling port, each of the suction cups comprising a deformation portion and a perforation extending through the deformation portion, the outer edge of the deformation portion forming a suction ring edge attached to the surface; (L) transmitting through Dissipating a gas in the cavity of the package through the perforation of the gas removal port; (M) filling a working fluid into the cavity of the package through a perforation provided in the filling port; and (N) respectively perpendicular to the first The second surface direction presses the package body to stretch the package portion and close the gas removal port and the filling port. [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the three preferred embodiments of the drawings. Before the facts are described in detail, the contents of the description, miscellaneous, l _ want to be awkward, in the following, ^ ", like the pieces are represented by the same number. Example L The preferred embodiment of the method for manufacturing a flat-plate heat pipe according to the present invention is a third step 801 to 817. Referring to FIG. 7, in the boat returning step 801, the existing metal processing method is used to complement the shape--the first component 3 economic consideration τ, the younger member 32, under the performance and quantity... For the fiber. The different members 31, 32 are formed of different ductile and thermally conductive materials in different tests. The first member 31 has a through-two: back: face opening 312' and provides a substantially flat surface 311 around the opening 312. In the step 803, in the 803, Juan Gu & s 槿 甘 4 Gan, ^ see some metal processing to make a capillary knot ‘the composition of the material can be copper, Ming or other materials with good thermal conductivity. The capillary structure 4 is made of gold in the preferred sinus, m..., and has a plurality of capillary holes 41 which are connected to each other. Here, (4) the capillary hole 41 is a fine hole in which the capillary body can produce a capillary phenomenon, that is, the capillary structure 4 can be rapidly expanded by the capillary holes 41 when it is in contact with the liquid; The other part of the capillary structure 4 is 'and the diffusion process is closed with gravity. Therefore, the actual size of the capillary holes 41 depends on the composition of the capillary structure , and the liquid crystal 4 is matched with the (4) liquid. Referring to Fig. 8', in step 805, the first and second members 31, 32 are combined by a conventional joining technique such as gluing or welding to form a package 3. The package 3 defines a cavity 33 and the opening 312 is connected to the cavity 33 of 12 ίο 15 20 1288812. In the process of combining the first and second members 31, 32, the capillary structure 4 is disposed at the same time after the first and second members 3 μ sealing body 3 are formed, and the capillary structure 4 is located in the cavity μ, and One eye t seal = knife contact (four) the inner surface of the body 3, whereby the heat energy can be self-conducted; the second 33 is conducted to the capillary structure 4' or from the capillary structure 4 to the already,: the second library = step 'to the step 805 is only the preferred embodiment, and in the case of application, the capillary can be directly formed on the first =::TM5 in the prior art by imprinting or engraving in step 8〇3 to obtain a similar structure. . 1 watt and fen to read Figure 9, under the package 3 and below the capillary is the combination of the degassing filling machine 6 and a port machine and #4^, degassing filling and sealing (4) i tools 7 respectively 6 A degassing and filling two gas filling machine 6 includes the effect of the suction cup * 妒 - vacuuming (not shown). The suction cup is placed in white; 1 is used for workpiece transfer, workpiece gas density test, workpiece venting center of gravity, point paper automatic pasting, and material filling and bag opening operations: the piece _ mouth machine 7 includes a first piece 72, And a driving device (not shown). The first and the first "how to turn 7 Bu 72 are all composed of components, the driving skirt (not shown) is used as a rigid material or driven by a servo motor. The formula can be degassed by oil pressure and water pressure. Before the filling operation and sealing operation, in step 8〇7 13 1288812 [Main component symbol description] 3 · ·. Package 62 · · · · Degassing filling tube 31 · ·. First member 63 · · · · Degassing tube 311 · · Surface 64 · · · · Filling tube i ^ 312 · Opening 65 · · · · Vaporizer II 313 ·. First surface ' 651 · · · First heat conducting part 314 ·. Degassing port 652 ·· · Second Heat-conducting member 315 ·. Second surface 653 · · · Vaporization channel · 316 ·. Filling port 654 ··. Gas sealing strip 32 · ·. Second member 655 ·· · Inlet hole 33 · · · Cavity 656 · · · Operation hole 34 · ·. Projection ^ · · · · Sealing tool 341 · · Cutting end 71. · · · First load cell /| · · · Capillary structure 72 · · · · Second load cell 41 · ·. Capillary hole 721 ·· · Projection top 5 · · · Working fluid 74 · · · · Clamping device 6 · · · Degassing filling machine 75· · · · Cutting device 61·· · V • Suction cup 801~817 Steps . 611 · · Deformation part 901~923 Step 612 · · Perforation 201~215 Step 613 · · Suction ring edge 24