TW432217B - Method for evaluating electromigration lifetime of metal - Google Patents

Method for evaluating electromigration lifetime of metal Download PDF

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Publication number
TW432217B
TW432217B TW88107672A TW88107672A TW432217B TW 432217 B TW432217 B TW 432217B TW 88107672 A TW88107672 A TW 88107672A TW 88107672 A TW88107672 A TW 88107672A TW 432217 B TW432217 B TW 432217B
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Taiwan
Prior art keywords
voltage
unit
light
emitting device
adjustment
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TW88107672A
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Chinese (zh)
Inventor
Duen-Ren Jeng
Kuan-Yu Fu
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United Microelectronics Corp
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Priority to TW88107672A priority Critical patent/TW432217B/en
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Abstract

This invention is about a kind of method for evaluating electromigration lifetime of metal and has the characteristics such as no limit of temperature or linewidth range so as to estimate and complete fast wafer-level reliability test in short time to obtain the monitoring purpose. When the real linewidth of metal is smaller than a critical linewidth, the metal has the first activation energy and the electromigration lifetime can be deduced by using the relationship equation for the essential factors of the first activation energy, measurement temperature and the operating temperature. When the real linewidth is larger than the critical linewidth and real temperature is smaller than critical temperature, the metal has the second activation energy and the electromigration lifetime can be deduced by using the relationship equation for the second activation energy, measurement temperature and the operating temperature. On the contrary, when real linewidth is larger than critical linewidth and measurement temperature is larger than critical temperature, the electromigration lifetime can be deduced by using the relationship equation for the first activation energy, the second activation energy, measurement temperature and the operating temperature.

Description

M432217 五、新型說明: 【新型所屬之技術領域】 本新型是有關於一種電源系統,特別是指一種應用於 發光裝置的自動調整電壓系統。 【先前技術】 因為LED燈具具有耗電量小、無汞蒸氣有害物質、發 熱量低、使用壽命長,與反應速度快等優點,所以成為業 界認為在未來十年内有潛力替代日光燈管的發光裝置之一 〇 將現有的日光燈燈直接替換為LED燈具時,將遇到一 些困難:由於以往的日光燈管會與電感式安定器(Chocked Ballast)或電子式安定器(Electrical ballast)搭配使用。其 中,電感式安定器又稱為傳統式安定器(Traditional Ballast ),電感式安定器會與啟動器(starter ) —同使用,在電源 啟動時產生高壓,這樣的高壓將會毁損LED或是使得LED 不正常動作,因此,以往在將日光燈替換為LED時,需置 換為LED專用的啟動器。此外,不同廠商和不同款式之電 子式安定器有著不同準位的高電壓與高頻率輸出,無法直 _接用於LED,因此,以往在將日光燈替換為LED時,需置 換為LED專用的電源裝置。 因此,如何使得LED燈具可以利用現有日光燈燈具的 安定器,為目前相關業者的研發目標之一。 【新型内容】 因此,本新型之目的,即在提供一種可以使發光裝置 3 利用原有日光燈燈具之安定器的自動調整電壓系統。 於疋’本新型應用於發光裝置的自動調整電壓系統, 適用於安裝於一電源與一發光裝置間,該自動調整電壓系 統包含一電源供應裝置,及一自動電壓調整裝置,該電源 供應裝置電連接該電源,該電源供應裝置提供直流電輸出 ,該自動電壓調整裝置電連接於該電源供應裝置與該發光 裝置間,該自動電壓調整裝置包括一電連接於該電源供應 裝置與該發光裝置間的電壓調整單元、一電壓偵測單元及 一電壓控制單元,該電壓偵測單元跨接於該電壓調整單元 與該發光裝置間,且該電壓偵測單元電連接該電壓控制單 2,該電壓控制單元電連接該電壓調整單元與該電壓偵測 早π間,該電壓偵測單元偵測該電壓調整單元輸出電壓值 °亥電壓控制單元依據該電壓偵測單元迴授的電壓值控制 5亥電壓調整單元,使該電壓調整單元調整輸出電壓值。 本新型之功效在於透過該自動調整電壓系統調整輸入 該發光裝置的電壓,因此,無論是經過電感式安定器或電 子式安定器的電源’皆可以使輸入該發光裝置的電壓符合 該發光裝置的正常工作電壓,確實達到使發光裝置利用原 有曰光燈燈具的安定器的目的。 【實施方式】 有關本新型之前述及其他技術内容、特點與功效,在 、下配5參考圖式之較佳實施例的詳細說明中,將可清楚 的呈現。 3閱圖1,本新型應用於發光裝置的自動調整電壓系統 的第一較佳實施例,適用於安裝於一電源1與一發光裝置2 間,該自動調整電壓系統包含一電源供應裝置3,及一自動 電壓調整裝置4,在本第一較佳實施例中該發光裝置2包括 複數個LED。 該電源供應裝置3電連接該電源1,該電源供應裝置3 提供直流電輸出。 配合參閱圖2,該電源供應裝置3包括一電連接該電源 1的整流單元31,及一電連接於該整流單元31與該自動電 壓調整裝置4的濾波單元32。 其中,該整流單元31可以是橋式全波整流器(bridge rectifier )、半波整流器(Half-wave rectification )、中心抽 頭式全波整流器(center-tapped rectifier )、真空管式全波整 流器(vacuum tube rectifier )、三相橋式全波整流器(three-phase rectifier ) 等等 ,該遽 波單元 32 可 以是電 容濾波 ( capacitor filter)、電感渡波(inductor filter)、RC 濾波( resistance-capacitor filter )、LC 渡波(inductor-capacitor filter)、7Γ 型渡波(7Γ -type filter)等等。 配合參閱圖3,該自動電壓調整裝置4電連接於該電源 供應裝置3與該發光裝置2間,該自動電壓調整裝置4包 括一電連接於1¾電源供應裝置3與該發光裝置2間的電壓 調整單元41、一電壓偵測單元42及一電壓控制單元43。 該電壓偵測單元42跨接於該電壓調整單元41與該發光裝 置2間,且該電壓偵測單元42電連接該電壓控制單元43, 該電壓控制單元43電連接該電壓調整單元41與該電壓偵 測單元42間,該電壓偵測單元42偵測該電壓調整單元41 輸出電壓值。 更進一步說明的是,該電壓調整單元41内含負載阻抗 ,透過調整負載阻抗大小來調整輸出電壓值,例如利用場 效應電晶體(Held-effect transistor,FET )、雙載子接面電 晶體(Bipolar Junction Transistor,BJT)或運算放大器( Operational Amplifier,OPA )來調整負載數值,或利用開關 切換調整負載阻抗的串聯、並聯排列等,當負載數值很低 時,該電壓調整單元41的輸出電壓會變很低,當負載數值 逐漸變高時,該電壓調整單元41的輸出電壓會逐漸恢復到 原本高電壓狀態。或者,該電壓調整單元_41也可以透過調 整負載電流流量來調整輸出電壓值,例如利用控制雙載子 接面電晶體的基極電流來調整射極和集極的負載電流,或 控制場效應電晶體閘極電壓調整源極和汲極負載電流,或 控制運算放大器輸入電壓調整運算放大器負載電流等,當 負載電流很大時,該電壓調整單元41的輸出電壓會變很低 ,·當負載電流逐漸變小時,該電壓調整單元41的輸出電壓 會逐漸恢復到原本高電壓狀態。 更進一步說明的是,該電壓偵測單元42可以為類比數 位轉換器(Analog-to-Digital Converter)、電壓比較線路( Voltage Comparator Circuit)等等,其申該電壓偵測單元42 若為電壓比較線路則可由具有做為開關作用的電晶體、運 算放大器或電壓比較集成電路所組成,或是由準位偵測集 成電路(level detection 1C )來偵測電塵準位,取代電壓比 M432217 較集成電路。 首先’由該電壓偵測單元42偵測該電壓調整單元41 的輸出電麗,然後該電壓偵測單元42偵測到的電壓值迴授 給該電壓控制單元43,該電壓控制單元43依據該電壓偵測 單兀42迴授的電壓值自動判斷後,再控制該電壓調整單元 41的輸出電壓’以達到該發光裝置2的正常工作電壓。 更進一步說明的是,該電壓控制單元43也可以利用程 式運算或多個比較器連接組合,依據該電壓偵測單元42迴 授的電壓值,進而控制該電壓調整單元41的輸出電壓值。 更進一步說明的是,該電壓調整單元41、電壓偵測單 元42、電壓控制單元43也可以整合在一起,經由負載阻抗 和疋電流調節器(Constant Current Regulator)串聯、並聯 排歹1i ’或經由負載阻抗和定電壓調節器(C〇nstant voltage Regulator)串聯、並聯排列所組成。 其中,負載阻抗可利用場效應電晶體、雙載子接面電 晶體或運算放大器來調整負載數值,或利用開關切換調整 負載阻抗的串聯、並聯排列等,該定電流調節器可利用恆 流二極體(Constant Current Diode)、恆流電晶體(constant Current Transistor)、恆流源IC、恆流源電路組成,該定電 塵調節器可利用AC/DC轉換器(AC/DC converter)、DC/DC 轉換器(DC/DC converter)、低壓差穩壓器(L〇w DropoutM432217 V. Description of the new type: [Technical field to which the new type belongs] The new type relates to a power supply system, and particularly to an automatic voltage adjustment system applied to a light-emitting device. [Previous technology] Because LED lamps have the advantages of low power consumption, no mercury vapor harmful substances, low heat generation, long service life, and fast response, they have become the industry's light-emitting device that has the potential to replace fluorescent tubes in the next ten years. One: When directly replacing existing fluorescent lamps with LED luminaires, some difficulties will be encountered: Because conventional fluorescent tubes will be used in combination with inductive ballasts or electronic ballasts. Among them, the inductive ballast is also called a traditional ballast (Traditional Ballast). The inductive ballast will be used together with the starter (starter) to generate high voltage when the power is turned on. Such high voltage will damage the LED or make The LED does not operate normally. Therefore, conventionally, when a fluorescent lamp is replaced with an LED, it needs to be replaced with a starter dedicated to the LED. In addition, electronic ballasts of different manufacturers and different styles have different levels of high voltage and high frequency output, and cannot be directly connected to LEDs. Therefore, when replacing fluorescent lamps with LEDs, they need to be replaced with LED-specific power supplies. Device. Therefore, how to make the LED lamps can use the stabilizers of the existing fluorescent lamps is one of the research and development goals of the relevant industry. [New content] Therefore, the object of the present invention is to provide an automatic voltage adjustment system that enables the light-emitting device 3 to use the ballast of the original fluorescent lamp. The new automatic voltage adjustment system applied to a light-emitting device is suitable for installation between a power source and a light-emitting device. The automatic voltage-adjustment system includes a power supply device and an automatic voltage adjustment device. Connected to the power supply, the power supply device provides a direct current output, the automatic voltage adjustment device is electrically connected between the power supply device and the light-emitting device, and the automatic voltage adjustment device includes an electrical connection between the power supply device and the light-emitting device. A voltage adjustment unit, a voltage detection unit, and a voltage control unit; the voltage detection unit is connected between the voltage adjustment unit and the light-emitting device; and the voltage detection unit is electrically connected to the voltage control unit 2 and the voltage control The unit is electrically connected between the voltage adjustment unit and the voltage detection π. The voltage detection unit detects the output voltage value of the voltage adjustment unit. The voltage control unit controls the 5h voltage according to the voltage value returned by the voltage detection unit. An adjustment unit to cause the voltage adjustment unit to adjust an output voltage value. The function of the novel type is to adjust the voltage input to the light-emitting device through the automatic voltage adjustment system. Therefore, the voltage input to the light-emitting device can match the voltage of the light-emitting device regardless of whether it is a power source through an inductive ballast or an electronic ballast. The normal working voltage does achieve the purpose of making the light-emitting device use the ballast of the original fluorescent lamp. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be clearly presented in the detailed description of the preferred embodiment with reference to Figure 5 below. 3 Please refer to FIG. 1. The first preferred embodiment of the novel automatic voltage adjustment system applied to a light-emitting device is suitable for being installed between a power supply 1 and a light-emitting device 2. The automatic voltage adjustment system includes a power supply device 3, And an automatic voltage adjustment device 4, in the first preferred embodiment, the light-emitting device 2 includes a plurality of LEDs. The power supply device 3 is electrically connected to the power supply 1, and the power supply device 3 provides a DC power output. With reference to FIG. 2, the power supply device 3 includes a rectification unit 31 electrically connected to the power supply 1, and a filter unit 32 electrically connected to the rectification unit 31 and the automatic voltage adjustment device 4. The rectifying unit 31 may be a bridge full-wave rectifier, a half-wave rectification, a center-tapped rectifier, a vacuum tube rectifier, or a vacuum tube rectifier. ), Three-phase bridge full-wave rectifier (three-phase rectifier), etc., the chirp unit 32 may be a capacitor filter, an inductor filter, an RC filter (resistance-capacitor filter), and an LC wave. (inductor-capacitor filter), 7Γ-type filter (7Γ-type filter), and so on. With reference to FIG. 3, the automatic voltage adjustment device 4 is electrically connected between the power supply device 3 and the light-emitting device 2. The automatic voltage adjustment device 4 includes a voltage electrically connected between the power supply device 3 and the light-emitting device 2. The adjustment unit 41, a voltage detection unit 42 and a voltage control unit 43. The voltage detection unit 42 is connected between the voltage adjustment unit 41 and the light-emitting device 2. The voltage detection unit 42 is electrically connected to the voltage control unit 43. The voltage control unit 43 is electrically connected to the voltage adjustment unit 41 and the light-emitting device 2. Between the voltage detection units 42, the voltage detection unit 42 detects the output voltage value of the voltage adjustment unit 41. It is further explained that the voltage adjustment unit 41 includes a load impedance, and adjusts the output voltage value by adjusting the load impedance. For example, a field effect transistor (Held-effect transistor, FET), a double-carrier junction transistor ( Bipolar Junction Transistor (BJT) or Operational Amplifier (OPA) to adjust the load value, or use a switch to adjust the series or parallel arrangement of the load impedance. When the load value is very low, the output voltage of the voltage adjustment unit 41 will It becomes very low. When the load value gradually increases, the output voltage of the voltage adjustment unit 41 will gradually return to the original high voltage state. Alternatively, the voltage adjustment unit _41 can also adjust the output voltage value by adjusting the load current flow, for example, by controlling the base current of the bipolar junction transistor to adjust the load current of the emitter and collector, or controlling the field effect The transistor gate voltage adjusts the source and drain load currents, or controls the op amp input voltage to adjust the op amp load current. When the load current is large, the output voltage of the voltage adjustment unit 41 becomes very low. When the current gradually decreases, the output voltage of the voltage adjustment unit 41 will gradually return to the original high voltage state. To further explain, the voltage detection unit 42 may be an analog-to-digital converter, a voltage comparator circuit, etc., and it is claimed that the voltage detection unit 42 is a voltage comparison The circuit can be composed of a transistor, an operational amplifier, or a voltage comparison integrated circuit that functions as a switch, or a level detection integrated circuit (level detection 1C) to detect the level of the electric dust, instead of the voltage more integrated than M432217 Circuit. First, the output power of the voltage adjustment unit 41 is detected by the voltage detection unit 42, and then the voltage value detected by the voltage detection unit 42 is fed back to the voltage control unit 43, and the voltage control unit 43 is based on the After the voltage value fed back by the voltage detection unit 42 is automatically determined, the output voltage of the voltage adjustment unit 41 is controlled to reach the normal working voltage of the light-emitting device 2. To further explain, the voltage control unit 43 can also use program operation or multiple comparator connection combinations to control the output voltage value of the voltage adjustment unit 41 based on the voltage value returned by the voltage detection unit 42. It is further explained that the voltage adjustment unit 41, the voltage detection unit 42, and the voltage control unit 43 can also be integrated together, and connected in series or parallel via the load impedance and the CurrentConstant Current Regulator 歹 1i 'or via The load impedance and constant voltage regulator are composed of series and parallel arrangement. Among them, the load impedance can be adjusted by the field effect transistor, the bipolar junction transistor or the operational amplifier, or the series or parallel arrangement of the load impedance can be adjusted by the switch. The constant current regulator can use the constant current two. The body is composed of a constant current diode, a constant current transistor, a constant current source IC, and a constant current source circuit. The constant current dust regulator can use AC / DC converter, DC / DC converter (DC / DC converter), low dropout regulator (L〇w Dropout

Voltage Regulator)相關線路所組成。 透過調整負載阻抗大小來調整定電流調節器或定電壓 調節器輸入電壓值’再利用定電流調節器或定電壓調節器 7 来調整輸出電壓值,以達到該發光裝置2的正常工作電壓 由於該發光裝置2依照排列方式和選用元件不同,造 成正常工作電壓都會不同,因此,使用者依照排列方式和 選用元件不同计鼻出正常工作電壓值後,再將該發光裝置2 的正常工作電壓值設計至該電壓控制單元43,讓該電壓控 制單元43據以控制該電壓調整單元41的輸出電壓,以達 到該發光裝置2的正常工作電壓。 綜上所述,於透過該自動調整電塵系統調整輸入至該 發光裝置2的電壓’因此’無論是經過電感式安定器或電 子式安定器的電源卜皆可以使輸人該發光裝置2的電堡符 合該發光裝置2的需求,確實達到使㈣燈具利用原有日 光燈燈具的安^器的目#,禮實達成本㈣的目的。 钩尽新型的較佳實施例叩匕,嘗; 月t*以此限定本新型實絲夕网 咏 之祀圍,即大凡依本新型申請專与 範圍及新型說明内容所作銪 /7 TF間早的荨效變化與修鋅, 本新型專利涵蓋範圍内。 【圖式簡單說明】 動「是方塊示㈣,說明本新型應用於發光裝置的自 動調整電壓系統的第一較佳實施例; Ώ 2疋方塊示意圖, 一 ^ ^ 供應裳置;及 兑月本弟以貫施例的-電源 說明本第一較佳實施例的一自動 圖3是方塊示意圖 電壓調整裝置。 M432217 【主要元件符號說明】 1 ...........電源 2 ..........發光裝置 3 ..........電源供應裝置 31.........整流單元 濾波單元 4 置 41 32 42 43 43 自動電壓調整裝 電壓調整單元 電壓偵測單元 電壓控制單元Voltage Regulator). Adjust the input voltage value of the constant current regulator or constant voltage regulator by adjusting the size of the load impedance, and then use the constant current regulator or constant voltage regulator 7 to adjust the output voltage value to achieve the normal operating voltage of the light-emitting device 2 due to the The light-emitting device 2 has different normal operating voltages according to the arrangement and selection of components. Therefore, the user calculates the normal working voltage value of the light-emitting device 2 after calculating the normal operating voltage according to the arrangement and selection of components. To the voltage control unit 43, the voltage control unit 43 is used to control the output voltage of the voltage adjustment unit 41 to achieve the normal operating voltage of the light-emitting device 2. In summary, the voltage input to the light-emitting device 2 is adjusted by the automatic adjustment electric dust system, so whether it is through the power supply of the inductive ballast or the electronic ballast, the input of the light-emitting device 2 can be made. The electric castle meets the requirements of the light-emitting device 2, and indeed achieves the goal of making the lamp to use the fixture of the original fluorescent lamp, and the cost of Li Shida is low. The best embodiment of the new model is to be used. Try to limit the sacrifice of the new solid silk evening chant, which is based on the scope of the new application and the description of the new model. / 7 TF Changes in net effect and zinc repair are covered by this new patent. [Brief description of the figure] "The block diagram" illustrates the first preferred embodiment of the novel automatic voltage adjustment system applied to a light-emitting device; Ώ 2 疋 block diagram, a ^ ^ supply clothes set; and a monthly version This example illustrates the power supply of the first preferred embodiment. An automatic figure 3 is a schematic block diagram of a voltage adjustment device. M432217 [Description of main component symbols] 1 ........... Power supply 2. ......... Lighting device 3 .......... Power supply device 31 ......... Rectifier unit filter unit 4 Set 41 32 42 43 43 Automatic voltage adjustment device Voltage adjustment unit Voltage detection unit Voltage control unit

Claims (1)

M432217 、申請專利範圍: 一種應用於發光裝置的自動調整電m適用於安裝 於-電源與-發光裝置間,該自動調整電壓系統包含: -¾•源供應裝置,电連接該電源,該電源供應裝置 提供直流電輸出;及 -自動電壓調整裝置,電連接於該電源供應裝置與 該發光裝置間’該自動電塵調整裝置包括—電連接於該 電源供應裝置與該發光裝置間的電壓調整單元、一電壓 偵測單元及一電壓控制單元,該電壓偵測單元跨接於該 電壓調整單元與該發光裝置間,且該電壓㈣單元電連 接該電壓控制單元’該電壓控制單元電連接該電壓調整 單元與該電塵偵測單(間,該電μ偵測單s偵剛該電麼 調整單元輸4電屋值,該控制單元依據該電㈣測 單70迴授的電壓值控制該電壓調整單元,使該電壓調整 單元調整輸出電壓值。 2. 根據申請專利範圍第1項所述之應用於發光裝薏的自動 调整電壓系統,其中’該電壓調整單元透過調整負載阻 抗大小來調整輪出電壓值。 3. 根據申請專利範圍第1項所述之應用於發光裝置的自動 調整電壓系統,其中,該電壓調整單元透過調整負載電 流流量來調整輪出電壓值。 、 4·根據申請專利範圍第丨項所述之應用於發光裝置的自動 調整電壓系統,其中,該電壓偵測單元為類比數位轉換 器。 10 M432217 5.根據申請專利範圍第1項所述之應用於發光裝置的自動 調正電壓系統’纟中,該電壓偵測單元為電壓比較線路 〇 6’根據巾凊專利範圍第1項所述之應用於發光裝置的自動 調正:壓系統,其中,該電壓調整單元、電壓偵測單元 電壓控制單兀為負栽阻抗和定電流調節器所組成。 7.根據申請專利範圍第1項所述之應用於發光裝置的自動 調整電廢系統’其中,該電壓調整單元、電壓偵測單元 '電壓控制單元為負載阻抗和定電壓調節器所組成。 8·根據申請專利範圍第1項所述之應用於發光裝置的自動 調整電壓系统,其中,該電源供應裝置包括一電連接該 電源的整流單元,及一電連接於該整流單元與該自動電 壓調整裝置的濾波單元。 11M432217 Scope of patent application: An automatic adjustment voltage m applied to a light-emitting device is suitable for installation between a power source and a light-emitting device. The automatic voltage adjustment system includes:-a source supply device, which is electrically connected to the power source, and the power supply The device provides a direct current output; and-an automatic voltage adjustment device electrically connected between the power supply device and the light emitting device. The automatic electric dust adjustment device includes a voltage adjustment unit electrically connected between the power supply device and the light emitting device, A voltage detection unit and a voltage control unit. The voltage detection unit is connected between the voltage adjustment unit and the light-emitting device, and the voltage unit is electrically connected to the voltage control unit. The voltage control unit is electrically connected to the voltage adjustment. The unit and the electric dust detection unit (between, the electric detection unit, the electric detection unit, the electric unit, and the electric unit adjust the 4 electric house values, and the control unit controls the voltage adjustment according to the voltage value of the electric unit 70 feedback. Unit for the voltage adjustment unit to adjust the output voltage value. 2. The self-applied light-emitting device according to item 1 of the scope of patent application. Adjust the voltage system, where 'the voltage adjustment unit adjusts the wheel-out voltage value by adjusting the load impedance. 3. The automatic adjustment voltage system applied to the light-emitting device according to item 1 of the scope of patent application, wherein the voltage adjustment unit Adjust the wheel-out voltage value by adjusting the load current flow. 4. The automatic voltage adjustment system applied to the light-emitting device according to item 丨 of the patent application scope, wherein the voltage detection unit is an analog digital converter. 10 M432217 5. According to item 1 of the scope of the patent application, the voltage detection unit is applied to the automatic adjustment voltage system '纟 of the light-emitting device, and the voltage detection unit is a voltage comparison circuit. In the automatic adjustment: voltage system of the light-emitting device, the voltage adjustment unit and the voltage detection unit voltage control unit are composed of a load impedance and a constant current regulator. 7. According to item 1 of the scope of the patent application Applied to the automatic adjustment of electric waste system of light-emitting device 'wherein the voltage adjustment unit and voltage detection unit' voltage control The element is composed of a load impedance and a constant voltage regulator. 8. The automatic voltage adjustment system for a light-emitting device according to item 1 of the scope of the patent application, wherein the power supply device includes a rectifier unit electrically connected to the power source, And a filter unit electrically connected to the rectifier unit and the automatic voltage adjustment device.
TW88107672A 1999-05-12 1999-05-12 Method for evaluating electromigration lifetime of metal TW432217B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7851237B2 (en) 2007-02-23 2010-12-14 Infineon Technologies Ag Semiconductor device test structures and methods
US7858406B2 (en) 2007-02-06 2010-12-28 Infineon Technologies Ag Semiconductor device test structures and methods
CN111856283A (en) * 2019-04-24 2020-10-30 株式会社日立制作所 Battery evaluation system, battery evaluation method, and program

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7858406B2 (en) 2007-02-06 2010-12-28 Infineon Technologies Ag Semiconductor device test structures and methods
US8633482B2 (en) 2007-02-06 2014-01-21 Infineon Technologies Ag Semiconductor device test structures and methods
US9188625B2 (en) 2007-02-06 2015-11-17 Infineon Technologies Ag Semiconductor device test structures and methods
US7851237B2 (en) 2007-02-23 2010-12-14 Infineon Technologies Ag Semiconductor device test structures and methods
US8847222B2 (en) 2007-02-23 2014-09-30 Infineon Technologies Ag Semiconductor device test structures and methods
CN111856283A (en) * 2019-04-24 2020-10-30 株式会社日立制作所 Battery evaluation system, battery evaluation method, and program

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