TW202043127A - Conveying machine can save space and may not deform ring-shaped frame through support of sliding rails - Google Patents

Abstract

In a conveying machine, a workpiece holding portion and a ring-shaped frame grip portion are integrated to save space so that the workpiece and the ring-shaped frame can be conveyed, and the ring-shaped frame may not be deformed. A conveying machine 1 for conveying a plate-like workpiece and a ring-shaped frame has: a sucking pad 12 for holding the workpiece; a first moving means 3 enabling the sucking pad 12 to move forward or backward in an X-axis direction; sliding rails 16a, 16b for clamping the frame opening to be configured with two in parallel and supporting two sides of the frame; a second moving means 4 enabling the sliding rail to move forward or backward in the X-axis direction; a grip portion 50 for holding an outer peripheral edge of the ring-shaped frame; a third moving means 6 enabling the grip portion 50 to move forward or backward in the X-axis direction and moving the ring-shaped frame on the sliding rails 16a, 16b in the X-axis direction; a fourth moving means 7 for turning the sucking pad 12, the sliding rails 16a, 16b and the grip portion 50 in a horizontal direction or straightly moving them in a Y-axis direction; and a lifting means 8 for lifting or descending the sucking pad 12, the sliding rails 16a, 16b and the grip portion 50 in a Z-axis direction.

Description

Transport machine

The invention relates to a machine for conveying plate-shaped workpieces and a ring frame with openings.

A conventional conveying machine is provided with a workpiece holding part which sucks and holds a plate-shaped workpiece and conveys it, and a grip part which holds and conveys the ring frame (for example, refer to Patent Document 1). [Literature Technical Literature] [Patent Literature]

[Patent Document 1] JP 2017-130515 A

[The problem to be solved by the invention] Because the above-mentioned gripping portion grips a part of the ring frame and transports it, there is a problem that the ring frame is bent due to weight, and the ring frame is deformed with the place gripped by the gripping portion as a fulcrum. In addition, when conveying a plate-shaped workpiece to a device for grinding plate-shaped workpieces, a film sticking device for attaching an adhesive film to a plate-shaped workpiece, and a device for dividing the plate-shaped workpiece (for example, a cutting device or a laser processing device), There may be a problem of taking up space by requiring multiple conveying machines.

Therefore, the conveying machine has the following problem: by integrating the workpiece holding part holding the plate-shaped workpiece and the holding part holding the ring frame, it is possible to save space and to convey the plate-shaped workpiece and the ring The frame is transported without deforming the ring frame.

[Technical means to solve the problem] The present invention for solving the above-mentioned problems is a conveying machine that conveys a plate-shaped workpiece and a ring frame with an opening. The conveying machine includes: a suction pad having a suction surface for sucking and holding the plate-shaped workpiece; and a first moving means , Make the adsorption pad advance or retreat in the horizontal direction and in the X-axis direction; slide rail, sandwich the opening of the ring frame and arrange two parallel to support the two sides of the ring frame; the second moving means, Make the slide rail advance or retreat in the X-axis direction; the grip portion grip the outer periphery of the ring frame; the third moving means make the grip portion advance or retreat in the X-axis direction and make the The ring frame is above the slide rail and moves in the X-axis direction; the fourth moving means makes the suction pad, the slide rail and the grip part move in a horizontal direction or in a horizontal direction. The X-axis direction is linearly moved in the Y-axis direction orthogonal to the X-axis direction; and the lifting means moves the suction pad, the slide rail, and the grip part up and down in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.

The conveying machine of the present invention preferably has a box body that contains the suction pad, the gripping portion, the slide rail, the first moving means, the second moving means, and the third moving means, and has a The suction pad can be taken out and put into the holding part and the entrance and exit of the sliding rail.

The conveying machine of the present invention is preferably provided with an adhesive roller, the adhesive roller is arranged below the suction pad and is rotatable with a rotating shaft extending in a direction crossing the X-axis direction as an axis, and has an adhesive on the outer surface The lifting means is used to position the adsorption pad at a height where the adsorption surface is in contact with the outer surface of the adhesive roller, and the first movement means is used to advance or retreat the adsorption pad in the X axis direction to make the adsorption The surface is in contact with the outer surface of the adhesive roller, and the adhesive roller is rotated to perform dry cleaning on the adsorption surface.

[Invention Effect] The conveying machine of the present invention for conveying a plate-shaped workpiece and an open ring frame is provided with: an adsorption pad having a suction surface for sucking and holding the plate-shaped workpiece; and a first moving means to move the adsorption pad in the horizontal direction and in the X-axis direction Or retreat; two slide rails are arranged in parallel with the opening of the ring frame and support the two sides of the ring frame; the second moving means makes the slide rail move forward or backward in the X-axis direction; grip part, grip Holding the outer periphery of the ring frame; the third moving means makes the grip part move forward or backward in the X-axis direction and makes the ring frame move on the slide rail and in the X-axis direction; the fourth moving means makes The suction pad, the sliding rail and the gripper move in a horizontal direction or move linearly in the Y-axis direction orthogonal to the X-axis direction; and lifting means make the suction pad, slide rail and gripper It is lifted and lowered in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction; this saves space, and is supported by slide rails and taken out into the ring frame, so the ring frame can be transported without deforming the ring frame. Then, the plate-shaped workpiece or ring frame can be efficiently transported to, for example, a grinding device that grinds the plate-shaped workpiece, an adhesive film placement machine, or a cutting device, a laser processing device, and other dividing devices. The adhesive film placement machine After dividing the plate-shaped work piece, the singularized wafer is not scattered, forming an integrated work unit that supports the plate-shaped work piece through the glue film and supports the plate-shaped work piece through the ring frame.

The conveying machine of the present invention is provided with a box body that contains an adsorption pad, a holding part, a slide rail, a first moving means, a second moving means, and a third moving means, and has a suction pad that can be taken out and put in and can be taken out and put in. The entrance and exit of the holding part and the slide rail; thereby, space can be saved, and the suction pad can be appropriately positioned relative to the plate-shaped workpiece, and the holding part or the slide rail can be appropriately positioned relative to the ring frame.

The conveying machine of the present invention is provided with an adhesive roller, the adhesive roller is arranged under the suction pad and is rotatable with a rotating shaft extending in a direction crossing the X-axis direction as an axis, and has an adhesive on the outer surface; thereby, The suction pad can be positioned at the height where the suction surface is in contact with the outer surface of the adhesive roller by lifting means, and the suction pad is advanced or retreated in the X-axis direction by the first moving means to make the suction surface contact the outer surface of the adhesive roller, and Rotate the adhesive roller to dry clean the suction surface.

Figures 1 to 3 show the overall conveying machine 1 of the present invention, which is movably arranged in, for example, a grinding device, a film placement machine, and a dividing device (cutting device, laser processing device, or Expansion device), etc., or in front of each device, etc., each device is arranged at a predetermined interval, or connected and installed in a clean room, etc. That is, for example, a guide rail or the like is arranged between or in front of each of the above-mentioned devices, and the space between or in front of each device becomes a moving path through which the conveying machine 1 moving along the guide rail can pass. Then, the conveying machine 1 that moves on the guide rails by a linear motor type moving mechanism or the like can smoothly move the plate-shaped workpiece W or the ring frame F between the devices with only the conveying machine 1 or the plate-shaped Loading and unloading or processing of the work unit composed of the work W, the circular film and the ring frame F not shown.

The plate-shaped workpiece W shown in FIG. 1 is, for example, a circular semiconductor wafer composed of silicon material, etc., but the type and shape of the plate-shaped workpiece W are not particularly limited, and gallium arsenide, sapphire, and gallium nitride can also be used. , Ceramic, resin or silicon carbide, etc. It can also be a rectangular package substrate. The substantially ring-shaped ring frame F shown in FIG. 1 is, for example, formed of SUS (stainless steel) in a substantially circular plate shape, and a circular opening penetrating from the front to the back is formed in the center. A part of the outer periphery of the ring frame F is cut into a plane to form a flat surface Fc for positioning.

The conveying machine 1 of the present invention conveys a plate-shaped workpiece W, a ring frame F having an opening, or a workpiece unit composed of a plate-shaped workpiece W, a circular film not shown, and a ring frame F, such as As shown in Figs. 1 to 3, the conveying machine 1 has at least: a suction pad 12 having a suction surface for sucking and holding a plate-shaped workpiece W; and a first moving means 3 (refer to Fig. 4) to make the suction pad 12 in the horizontal direction and on the X axis Forward or retreat in the direction; the slide rails 16a, 16b (refer to Figure 2), sandwich the opening of the ring frame F and are arranged in parallel two and support both sides of the ring frame F; the second moving means 4 (see Figure 5 , 6), make the slide rail 16a and the slide rail 16b advance or retreat in the X-axis direction; the grip 50, grip the outer periphery of the ring frame F; the third moving means 6, make the grip 50 on the X axis Move forward or backward in the direction and make the ring frame F move on the slide rail 16a and the slide rail 16b and in the X-axis direction; the fourth moving means 7 (refer to FIG. 3) makes the suction pad 12, slide rails 16a, 16b and The holding part 50 circulates and moves in the horizontal direction, or linearly moves in the Y-axis direction orthogonal to the X-axis direction in the horizontal direction; and the lifting means 8 makes the suction pad 12, the slide rails 16a, 16b and the holding part 50 moves up and down in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.

The suction pad 12 shown in FIGS. 2 and 3 has, for example, a circular shape and includes a suction part 120 composed of a porous member and the like and suctions a plate-shaped workpiece W, and a frame 121 surrounding and supporting the suction part 120. The suction part 120 is connected to a suction source of an ejector mechanism or a vacuum generator not shown through a joint 129 (refer to FIGS. 2 and 4) and a flexible resin tube not shown. Then, the generated suction force is transferred to the flat suction surface 120 a of the exposed surface (lower surface) of the suction portion 120 by the operation of the suction source not shown. In addition, the structure of the suction pad 12 is not limited to the above-mentioned example, and may be a structure in which a plurality of suction grooves are formed on the suction surface.

As shown in FIG. 4, the suction pad 12 is connected to the lower surface of the conveying arm 13 by the upper surface of the frame 121 through the connection tool 125 and the bolt 125a. The conveying arm 13 extends in the X-axis direction under the first substrate 30 of the first moving means 3 shown in FIG. 4 to be described later, and has a root 130 on the +X direction side and the first moving means 3 The arm connecting portion 341 is connected.

The first moving means 3 shown in FIG. 4 includes: a first substrate 30 whose X-axis direction is the longitudinal direction; a first ball screw 31 that extends in the X-axis direction in the central area of the upper surface of the first substrate 30; and a pair The first guide rail 32 sandwiches the first ball screw 31 and is arranged parallel to the first ball screw 31; the first rotation drive mechanism 33 is connected to the rear end side (+X direction side) of the first ball screw 31 and makes the first The ball screw 31 rotates; and the first movable member 34, the bottom surface of which is in sliding contact on the first guide rail 32.

The first rotation drive mechanism 33 is, for example, a pulley mechanism. The first rotation drive mechanism 33 includes a plate-shaped motor bracket 330 as shown in FIGS. 4 and 5 extending in the Z-axis direction. The motor bracket 330 is formed with two mounting holes on the top and bottom. The mounting hole on the upper side is inserted with the shaft of the first motor 331 as the rotation drive source and the drive pulley 332 mounted on the shaft. The mounting hole on the lower side is inserted The rear end side of the first ball screw 31 (refer to FIG. 4) and the driven pulley 333 attached to the rear end of the first ball screw 31 pass through. An endless belt 334 is wound around the driving pulley 332 and the driven pulley 333. The first motor 331 rotationally drives the driving pulley 332, whereby the endless belt 334 rotates with the rotation of the driving pulley 332, and the driven pulley 333 and the first ball screw 31 are rotated by the rotation of the endless belt 334.

The first movable member 34 shown in FIG. 4 includes, for example, a substantially rectangular long plate extending in the Y-axis direction, and sliding members that are in sliding contact with the first guide rail 32 are mounted on both outer sides of the lower surface of the long plate. 340, and the first ball screw 31 is screwed with a nut (not shown) arranged in the center of the lower surface.

In the central area of the first substrate 30, two elongated holes 300 formed by slits extending in the X-axis direction are formed at positions outside the respective first rails 32. For example, on the lower surface of the both end sides in the Y-axis direction of the long plate of the first movable member 34, arm connection portions 341 connected to the root portion 130 of the transport arm 13 supporting the suction pad 12 are formed. That is, after the arm connecting portion 341 hangs down in the −Z direction and passes through the elongated hole 300 of the first substrate 30, it is connected to the base 130 of the transport arm 13 located below the elongated hole 300 by a fixing bolt or the like.

Therefore, when the first rotation drive mechanism 33 rotates the first ball screw 31, the first movable member 34 is guided by the first guide rail 32 along with this, and simultaneously moves at the same time as the transport arm 13 located below the first base plate 30. It reciprocates in the X-axis direction, and accompanying this, the suction pad 12 arrange|positioned at the front end side of the conveyance arm 13 also reciprocates in the X-axis direction.

The upper part of the first ball screw 31, the first guide 32, and the elongated hole 300 shown in FIG. 4 is in a state covered with a sheet metal cover 39 as shown in FIGS. 2 and 5. For example, as shown in FIG. 5, the first The first motor 331 of the rotation drive mechanism 33 is attached to the upper surface of the sheet metal cover 39. Then, each component of the second moving means 4 described later is placed on the area on both sides of the upper surface of the first substrate 30 shown in FIGS. 2 and 5 that are not covered by the sheet metal cover 39 in the Y-axis direction.

The second moving means 4 that advances or retreats the pair of slide rails 16a and 16b shown in FIGS. 5 and 6 in the X-axis direction includes, for example, a second ball screw 41 (only shown in FIG. 5). The outer area of the upper surface of the substrate 30 in the Y-axis direction (the area not covered by the sheet metal 39) and extends in the X-axis direction; the second guide rail 42a and the second guide rail 42b are arranged parallel to the second ball screw 41 The second rotation drive mechanism 43 is connected to the rear end of the second ball screw 41 and rotates the second ball screw 41; and the second movable member 44a, 44b, the bottom surface of which is in sliding contact on the second guide rail 42a, 42b.

The second ball screw 41 and the second guide 42 a located on the −Y direction side on the upper surface of the first substrate 30 constitute a slider-type electric cylinder (ROBO Cylinder), and are protected by a ball screw cover 45. On the side surface of the ball screw cover 45, for example, a wire carrier 45a on which a bundled power cord or the like is placed is mounted. The second movable member 44a arranged on the second guide rail 42a is provided with a slider 45d on the lower surface side of the third base plate 60 of the third moving means 6, and is driven by the rotation of the second ball screw 41 The slider 45d becomes slidable and movable on the second rail 42a simultaneously with the third substrate 60. A slide rail 16a is attached to the front end side of the second movable member 44a.

For example, the above-mentioned slider 45d connected to the lower surface of the second movable member 44a through the third substrate 60 is arranged on the second rail 42a.

As shown in FIGS. 5 and 6, the flat plate-shaped second movable member 44b located in the area on the +Y direction side of the upper surface of the first substrate 30 has a shape symmetrical to the second movable member 44a with the X axis as the axis of symmetry, and A slide rail 16b is mounted on the front end side, and a slider (not shown) is mounted on the lower surface of the third base plate 60 of the third moving means 6, which is slidably connected to the second rail 42b loose fit.

As shown in FIGS. 5 and 6, the second rotation drive mechanism 43 is, for example, a pulley mechanism, and includes a plate-shaped motor bracket 430 extending in the Z-axis direction. A lower side of the motor bracket 430 is inserted as a rotation drive source. The shaft of the second motor 431 and the driving pulley 432 mounted on the shaft. On the upper side of the motor bracket 430, the rear end side of the second ball screw 41 and the driven pulley 433 installed at the rear end of the second ball screw 41 are inserted. An endless belt 434 is wound around the driving pulley 432 and the driven pulley 433. The second motor 431 rotationally drives the driving pulley 432, whereby the endless belt 434 rotates with the rotation of the driving pulley 432, and the driven pulley 433 and the second ball screw 41 are rotated by the rotation of the endless belt 434, the second guide rail The second movable member 44a on 42a moves in the X-axis direction.

The rear end side of the second movable member 44a and the rear end side of the second movable member 44b are connected by a cylinder mechanism 169 which will be described later extending in the Y-axis direction. The second movable member 44b is in contact with the second movable member 44a. The reciprocating movement in the X-axis direction is linked to the reciprocating movement in the X-axis direction.

As shown in Figs. 5 and 6, the two slide rails 16a, 16b have an L-shaped cross section and extend in parallel in the X-axis direction. The two slide rails 16a and 16b are respectively connected to the front end sides of the second movable member 44a and the second movable member 44b such that the step-shaped guide surfaces (inner side surfaces) face each other. Then, the ring frame F held by the holding portion 50 described later is placed on the two slide rails 16a, 16b, and the guide surface abuts against the positioning flat surface Fc of the ring frame F from the ±Y direction (Refer to Figure 1). For example, a detection sensor 163 such as a light sensor for detecting the ring frame F may be provided at the front ends of the two slide rails 16a and 16b.

In this embodiment, as shown in FIGS. 5 and 6, the second movable member 44a to which the slide rail 16a is mounted and the second movable member 44b to which the slide rail 16b is mounted are equipped with a cylinder mechanism 169, which can expand the slide rail The interval between 16a and the slide rail 16b is from the interval between the ring frame F that can support, for example, 200 mm to the interval between the ring frame F that can support, for example, 300 mm. With the cylinder mechanism 169, the second movable member 44a is guided by the guide portion 169a provided on the third substrate 60 described later and moved in the -Y direction, so that the second movable member 44b is provided on the third substrate The guide portion 169b on the 60 guides and moves in the +Y direction, and can be changed to a state where the ring frame F of 300 nm is supported by the slide rails 16a, 16b.

The third moving means 6 shown in FIGS. 6 and 7 moves the gripping portion 50 that has gripped the ring frame F in the X-axis direction, and includes, for example, a third substrate 60 having a rectangular shape in plan view, as shown in FIG. 6 Shown above the sheet metal cover 39 of the first moving means 3 are connected with second movable members 44a, 44b and movable in the X-axis direction; the third ball screw 61 has an axis in the X-axis direction; a pair of third The guide rail 62 is arranged on the third base plate 60 in parallel with the third ball screw 61; the third rotation drive mechanism 63 is connected to the rear end of the third ball screw 61 and rotates the third ball screw 61; and the third movable The bottom surface of the member 64 is in sliding contact with the third guide rail 62.

In the third substrate 60, the left and right outer regions are cut into, for example, a rectangular shape extending in the X-axis direction to form two cutout portions 600. For example, the cutout portion 600 on the +Y direction side in FIGS. Three ball screw 61.

The third rotation drive mechanism 63 is, for example, a pulley mechanism including a third motor 630 and an endless belt (not shown). The third motor 630 is arranged on the +Y direction side of the third substrate 60 through the motor bracket 633. The third ball screw 61 can be rotated by the rotation drive of the third motor 630.

The third movable member 64 is, for example, a long plate extending in the Y-axis direction, and a nut arranged inside the connecting portion 640 at the end of the +Y direction is screwed with the third ball screw 61. In addition, Each slider 641 provided on the lower surface of the two end sides thereof is slidably fitted loosely with the third guide rail 62. Then, the holding portion fixing plate 51 provided with the holding portion 50 is locked at a substantially central position on the lower surface of the third movable member 64. If the third rotation drive mechanism 63 rotates the third ball screw 61, the third movable member 64 is guided by the third guide rail 62 and simultaneously with the grip 50 on the third substrate 60 and on the X axis. Move back and forth in the direction.

The gripping portion 50 that grips the outer periphery of the ring frame F from the vertical direction is attached to the front end of the gripping portion fixing plate 51 extending from the third movable member 64 to the −X direction side. The gripping portion 50 is, for example, a mechanical jig that is substantially U-shaped when viewed from the side, and a pair of gripping claws 500 facing each other in the Z-axis direction are moved by a gripping portion drive source 501 such as an electric cylinder. By moving in the direction of approaching each other, the outer periphery of the ring frame F can be gripped.

For example, on the third substrate 60, between the third guide rail 62 and the holding portion 50 shown in FIG. 6, a fixing tool or a cable box 66 not shown is used to make the power cord crawl. Therefore, as shown in FIG. As shown, the movement path of the grip 50 on the third substrate 60 is eliminated, and a part of the third substrate 60 is covered by the sheet metal cover 67.

In this embodiment, the third moving means 6 can move the entire third moving means 6 in the X-axis direction above the sheet metal cover 39 of the first moving means 3. That is, as the slider 45d for moving the second movable member 44a shown in FIG. 5 and the not-shown slider for moving the second movable member 44b are moved on the second guide rails 42a, 42b, respectively, The third moving means 6 attached to the slider 45d and the slider not shown is also movable in the X-axis direction.

As shown in Figs. 1 and 3, the conveying machine 1 in this embodiment includes a box body 20 that houses the suction pad 12, the grip 50, the slide rails 16a, 16b, the first moving means 3, and the second moving The means 4 and the third moving means 6 have a first opening 201 through which the suction pad 12 can be taken out, and a second opening 202 through which the holding part 50 and the slide rails 16a, 16b can be taken out and placed. In this embodiment, the first opening 201 and the second opening 202 that have not been integrated are used to form an entrance that can be taken out and put into the suction pad 12, and can be taken out and put into the holding part 50 and the guide rails 16a, 16b. In addition, the first opening 201 and the second opening 202 can also be integrated, and the integrated large opening can be used as an inlet and outlet that can be taken out and put into the suction pad 12, and can be taken out and put into the holding part 50 and the guide rails 16a, 16b.

The box body 20 shown in FIGS. 1 and 3 has, for example, a polygonal shape larger than the first substrate 30 and similar to the first substrate 30 in plan view, and has a box body top wall 200 and an outer shape from the box body top wall 200. The box body side wall 203, the box body front wall 204, and the box body rear wall 205 whose lower surface hangs down in the -Z direction. For example, as shown in FIGS. 2 and 3, from the bottom surface on both sides of the Y-axis direction of the first substrate 30, the first connecting plate 307 hangs down in the -Z direction, and the box body mounting plate 302 extends from the side of the first connecting plate 307 It extends horizontally toward the outside in the Y-axis direction. Then, as shown in FIG. 3, in a state where the box body 20 has been placed on the box body mounting plate 302, the box body side wall 203 is fixed to the box body mounting plate by a fixing tool such as a spring lock or a bolt. 302. In addition, wires and the like not shown are also placed and fixed on the box body mounting plate 302 in a tied state.

The first opening 201 shown in FIGS. 1 and 3 where the suction pad 12 can be taken out and inserted is formed by cutting the area on the lower side of the box body front wall 204 on the -X direction side of the box body 20 into a substantially rectangular shape. In addition, the second opening 202 into which the holding portion 50 and the guide rails 16a and 16b can be taken out and placed is formed by notching the area on the upper side of the box front wall 204 into a substantially rectangular shape.

To the lower end of the first connecting plate 307, a horizontal plate 79 connecting the respective components of the lifting means 8 and the fourth moving means 7 is fixed. Therefore, the suction pad 12 can be accommodated in the space formed by the horizontal plate 79, the two first connecting plates 307 and the first substrate 30 on both sides of the Y-axis direction so as to advance and retreat in the X-axis direction.

As shown in Figures 1 to 3, the lifting means 8 that lifts the suction pad 12, the guide rails 16a, 16b, and the grip 50 in the Z-axis direction, for example, includes: a block 80 in the shape of a square column, which extends in the Z-axis direction The cross section is roughly concave; the lifting ball screw 82 (only shown in FIG. 3) has an axis in the Z-axis direction and is arranged on the front surface of the block 80 on the -X direction side; a pair of lifting rails 81, and lifting The ball screw 82 is arranged in parallel on the front surface of the block 80 and extends in the Z-axis direction; the lifting rotation drive mechanism 83 is connected to the lower end of the lifting ball screw 82 and rotates the lifting ball screw 82; and the lifting member 84, It is arranged between a pair of lifting rails 81.

A lifting ball screw 82 and a substantially quadrangular column-shaped lifting member 84 are allocated to a recess formed on the front surface of the block 80 on the -X direction side. As shown in FIG. 3, with respect to the block 80 in the fixed state, the lifting member 84 that can be raised has at least: a lifting column 840 fixed to the lower surface of the horizontal plate 79 and extending in the Z-axis direction. The body 80 moves up and down in the concave portion; and the slider 841 is integrally formed on the lower end side of the lifting column portion 840 and its side surface is loosely fitted with a pair of lifting rails 81. For example, as shown in FIG. 3, the power cord 88 that supplies power to the motors of the conveying machine 1 on the side of the block 80 is through a wire box 880 or a cable bear (not shown) (registered trademark) And equipped.

The elevating and rotating drive mechanism 83 shown in detail in FIG. 3 is, for example, a pulley mechanism, and includes an elevating motor 831 mounted on the lower end surface of the block 80 through a motor bracket 830. A drive pulley 832 is attached to the shaft of a lift motor 831 that is a drive source for rotating the lift ball screw 82, and an endless belt 833 is wound around the drive pulley 832. A driven pulley 834 is attached to the lower end side of the lifting ball screw 82, and the endless belt 833 is also wound around the driven pulley 834. The driving pulley 832 is rotationally driven by the lifting motor 831, the endless belt 833 rotates with the rotation of the driving pulley 832, and the driven pulley 834 and the lifting ball screw 82 are rotated by the rotation of the endless belt 833. Then, along with the rotation of the lifting ball screw 82, the lifting member 84 linearly moves in the Z-axis direction, and the suction pad 12, the slide rails 16a, 16b, and the grip 50, which are gradually arranged above the horizontal plate 79 Move in the Z axis direction.

The fourth moving means 7 is arranged on the upper side of the lifting column 840. The fourth moving means 7 in the present embodiment shown in FIGS. 3 and 4 is the one that makes the suction pad 12, the slide rails 16a, 16b, and the grip 50 move in a horizontal direction, that is, on the X-axis Y-axis plane. , Which includes: a base 70 installed on the front surface of the lifting column 840 on the -X direction side; a rotating shaft 71 extending from the base 70 in the +Z direction and its upper end connected to the lower surface of the horizontal plate 79; a fourth rotation drive The mechanism 73 is mounted on a bracket 77 that is mounted to extend from the side of the base 70 in the -Y direction and rotates the rotating shaft 71; and the horizontal plate 79. In addition, the fourth moving means 7 may be a ball screw mechanism or the like that linearly moves the suction pad 12, the slide rails 16a, 16b, and the grip 50 in the horizontal Y-axis direction.

The lower end side of the base 70 and the rotating shaft 71 are connected through a lower bearing not shown. By transmitting the rotational power generated by the fourth rotation drive mechanism 73, the rotating shaft 71 can be rotated on the base 70 by the lower bearing.

As shown in FIGS. 3 and 4, the fourth rotation driving mechanism 73 is, for example, a pulley mechanism, and includes a fourth motor 731 supported by a bracket 77. A drive pulley 732 is attached to the shaft of the fourth motor 731 that is a drive source for rotating the rotating shaft 71, and an endless belt 733 is wound around the drive pulley 732. A driven pulley (not shown) is attached to the lower end of the rotating shaft 71, and the endless belt 733 is also wound around the driven pulley (not shown). When the driving pulley 732 is rotationally driven by the fourth motor 731, the endless belt 733 rotates in accordance with the rotation of the driving pulley 732, and the driven pulley and the rotating shaft 71 not shown are rotated by the rotation of the endless belt 733. Then, with the rotation of the rotating shaft 71, the horizontal plate 79 orbits and moves on the horizontal surface, and the suction pad 12, the slide rails 16a, 16b, and the grip 50, which are gradually arranged above the horizontal plate 79, are also on the horizontal surface. Swivel movement. For example, as shown in FIGS. 1 and 2, the fourth rotation driving mechanism 73 is in a state of being covered by a protective cover 75 attached to the block 80.

In this embodiment, as shown in FIGS. 1 to 4, the conveying machine 1 is provided with an adhesive roller 17 arranged below the suction pad 12 and in a direction crossing the X-axis direction (Y-axis direction) The rotating shaft extending upward (hereinafter referred to as the roller rotating shaft 17d) is a shaft that can rotate freely, and has an adhesive on the outer surface.

For example, as shown in FIG. 3, at a position below the horizontal plate 79, an adhesive roller support plate 14 that can move in the X-axis direction is arranged on the lower surface of the horizontal plate 79 that can move up and down at the same time as the lifting column 840. The adhesive roller support plate 14 is guided in the X-axis direction by a guide rail (not shown) arranged on the lower surface of the horizontal plate 79, and advances and retreats in the X-axis direction by the air cylinder 14a. The adhesive roller support plate 14 is installed on the front surface of the protective cover 75, and the protective cover 75 is installed on the block 80 of the lifting means 8. On the upper surface of the adhesive roller support plate 14, there are fixed support portions 143 that rotatably support both ends of the roller rotation shaft 17d.

In this embodiment, for example, the adhesive roller 17 forming a length greater than the diameter of the suction pad 12 is horizontally supported by a roller rotating shaft 17d inserted into the inside. The adhesive disposed on the outer surface of the adhesive roller 17 is made of synthetic rubber having adhesiveness and elasticity. If the suction pad 12 is positioned at the height where the suction surface 120a is in contact with the outer side surface of the adhesive roller 17 by the lifting means 8, and the suction pad 12 is moved forward or backward in the X-axis direction by the first moving means 3, the suction surface 120a and When the outer surface of the adhesive roller 17 is in contact, processing chips and the like will adhere to the adhesive and be removed from the adsorption surface 120a of the adsorption pad 12 (dry cleaning). In addition, when cleaning the suction surface 120a of the suction pad 12, the adhesive roller support plate 14 shown in FIG. 3 is moved in the -X direction, and after the cleaning is completed, the adhesive roller support plate 14 is moved in the +X direction. Thereby, it is possible to construct without enlarging the conveying machine 1 in the X-axis direction. In addition, the adhesive force of the adhesive is restored by removing the processing chips that have adhered to the outer peripheral surface of the adhesive roller 17.

Hereinafter, a case where the plate-shaped workpiece W shown in Figs. 1 and 4 is conveyed will be described using the aforementioned conveying machine 1.

For example, in the case of conveying a plate-shaped workpiece W placed on a holding table of a grinding apparatus not shown, the first moving means 3 shown in FIG. 4 advances the suction pad 12 to the -X direction side, and moves the suction pad 12 From the first opening 201 of the box body 20 shown in FIG. 1 into and out of the box body 20, the suction pad 12 is positioned in the plate shape in such a way that the center of the suction surface 120a of the suction pad 12 is approximately the same as the center of the plate-shaped workpiece W Above the workpiece W. In addition, the attraction force generated is transferred to the adsorption surface 120a of the adsorption pad 12 by the operation of a suction source not shown.

By the elevating means 8, the suction pad 12 is lowered in the -Z direction to a height position where the suction surface 120 a is in contact with the upper surface of the plate-shaped workpiece W, and then stops descending at this height position. Then, by the suction force transmitted to the suction surface 120a, the suction pad 12 sucks the upper surface of the plate-shaped workpiece W with the suction surface 120a. Thereafter, by the elevating means 8, the suction pad 12 that has sucked and held the plate-shaped workpiece W rises, and the plate-shaped workpiece W is moved away from a holding table (not shown).

The first moving means 3 shown in FIG. 4 retreats the suction pad 12 to the +X direction side, and accommodates the suction pad 12 that sucks and holds the plate-shaped workpiece W in the box body 20. Then, the plate-shaped workpiece W sucked and held by the suction pad 12 is accommodated by the horizontal plate 79 shown in FIG. 4, the two first connecting plates 307 and the first substrate 30 on both sides of the Y axis direction. In the state of the formed space, the entire conveying machine 1 moves to the vicinity of a cutting device (not shown), for example, from a grinding device (not shown), thereby conveying the plate-shaped workpiece W via the conveying machine 1 between the devices. In addition, the entire conveying machine 1 can also be moved between devices in a state where the suction pad 12 that sucks and holds the plate-shaped work W is extended to the outside of the box body 20.

Hereinafter, a case where, for example, the ring frame F shown in Figs. 1, 2 and 6 is conveyed using the conveying machine 1 will be described.

For example, the ring frame F is accommodated in a frame storage part (not shown) so that the slide rails 16a and 16b can support the flat surfaces Fc of both side surfaces. The second moving means 4 shown in FIG. 6 advances the slide rails 16a, 16b to the -X direction side, and causes the slide rails 16a, 16b to enter and exit the box body 20 from the second opening 202 of the box body 20 shown in FIG. . In addition, by the lifting means 8 shown in FIGS. 1 and 2, the slide rails 16 a and 16 b are raised or lowered in the Z-axis direction, and the height of the slide rails 16 a and 16 b and the ring frame F is aligned.

The second moving means 4 shown in FIG. 6 advances the slide rails 16a, 16b further to the -X direction side, and causes the stepped guide surfaces of the slide rails 16a, 16b to abut the two ring frames F from the ±Y direction The flat surface Fc of the side supports the ring frame F via the slide rails 16a and 16b. The second moving means 4 retreats the slide rails 16a, 16b to the +X direction side, and accommodates the slide rails 16a, 16b supporting the ring frame F into the box body 20 from the second opening 202 shown in FIG. 1. Then, in a state where the ring frame F supported by the slide rails 16a and 16b has been accommodated in the box body 20, the conveying machine 1 as a whole moves to a frame storage part (not shown) to, for example, an adhesive film patch (not shown) In the vicinity of the machine, conveyance between the devices via the ring frame F of the conveying machine 1 is thereby performed. In addition, the entire conveyance machine 1 can also be moved between devices in a state where the slide rails 16a and 16b supporting the ring frame F are extended to the outside of the box body 20. In addition, after the ring frame F is supported by the slide rails 16a and 16b, the outer periphery of the ring frame F may be gripped by the gripping portion 50 shown in FIG. 6.

Hereinafter, a case where the work unit WU shown in FIGS. 8 and 9 is transported using the transport machine 1 will be described. The plate-shaped workpiece W shown in FIG. 8 is in a state where a circular adhesive film T having a larger diameter than the plate-shaped workpiece W is pasted on its lower surface by an adhesive film placement machine not shown. In addition, the outer peripheral portion of the circular adhesive film T is stuck to the ring frame F. Thereby, the plate-shaped work W positioned in the opening of the ring frame F is integrated with the ring frame F through the circular adhesive film T, and becomes a work unit WU that can be processed by the ring frame F.

For example, as shown in FIG. 8, the workpiece unit WU is placed on two slide rails 16a, 16b, and the stepped guide surfaces of the slide rails 16a, 16b abut against the two rings of the ring frame F from the ±Y direction. In the state of the flat surface Fc for positioning of the side surface, the state is supported by the slide rails 16a and 16b.

The third moving means 6 shown in FIG. 8 moves the gripping portion 50 in the state where the pair of clamping claws 500 have been opened to the -X direction, and enters into the pair of clamping claws 500 so as to become the outer periphery of the ring frame F The grip 50 is positioned in the middle state. After that, the pair of gripping claws 500 are moved in a direction approaching each other by the grip driving source 501, thereby gripping the outer periphery of the ring frame F.

For example, when transporting the workpiece unit WU to the holding table of a grinding device not shown, the second moving means 4 shown in FIGS. 6 and 8 slides the second movable members 44a, 44b and the state of the supported workpiece unit WU. The rails 16a, 16b, the third moving means 6 and the holding part 50 in the state of holding the workpiece unit WU enter and exit the box 20 from the second opening 202 of the box 20 shown in FIG. 1. Then, for example, at a predetermined position in front of the holding table (not shown), the advancement of the above-mentioned respective components by the second moving means 4 is stopped.

As shown in FIG. 9, the third moving means 6 advances the grip 50 to the -X direction side, and moves the ring frame F in the X axis direction on the slide rails 16a and 16b. Then, the center of the plate-shaped workpiece W is substantially aligned with the center of the holding surface of the holding table.

By the lifting means 8, until the circular adhesive film T of the workpiece unit WU held by the holding part 50 is in contact with the holding surface of the holding table (not shown), the holding part 50 is moved to- Descent in the Z direction, and then stop descending at that height. Then, after the workpiece unit WU is sucked and held by the holding table, the grip part 50 releases the grip of the ring frame F and separates from the workpiece unit WU. In this way, the transfer machine 1 can transfer the workpiece unit WU in a grinding device or the like.

The conveying machine 1 of the present invention that conveys a plate-shaped workpiece W and an open ring frame F includes: a suction pad 12 having a suction surface 120a for sucking and holding the plate-shaped workpiece W; and a first moving means 3 to make the suction pad 12 horizontal Direction and advance or retreat in the X-axis direction; the slide rails 16a, 16b are arranged in parallel with the opening of the ring frame F and support the two sides of the ring frame F; the second moving means 4 makes the slide rails 16a, 16b advance or retreat in the X-axis direction; the grip part 50 holds the outer periphery of the ring frame F; the third moving means 6 makes the grip part 50 advance or retreat in the X-axis direction and make the ring The frame F moves on the sliding rails 16a, 16b and in the X-axis direction; the fourth moving means 7, which makes the suction pad 12, the sliding rails 16a, 16b, and the grip 50 move in a horizontal direction; and the lifting means 8, The suction pad 12, the slide rails 16a, 16b, and the grip 50 are raised and lowered in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction; thereby, space can be saved and the slide rails 16a, 16b are supported And take it out and put it in the ring frame F, so the ring frame F can be transported without deforming the ring frame F. Then, the plate-shaped workpiece W, the ring frame F, or the workpiece unit WU can be efficiently transferred to, for example, a grinding device for grinding the plate-shaped workpiece W, a film mounter, or a cutting device, a laser processing device, etc. Device, the film mounter is to divide the plate-shaped workpiece W and the singulated wafer will not be dispersed to form a work unit integrated with the plate-shaped workpiece W supported by the ring frame F through the circular adhesive film T WU.

The conveying machine 1 of the present invention is provided with a box body 20 that houses the suction pad 12, the grip 50, the slide rails 16a, 16b, the first moving means 3, the second moving means 4, and the third moving means 6, and It has, for example, a first opening 201 that can be taken out and put in the suction pad 12, and a second opening 202 that can be taken out and put in the holding part 50 and the slide rails 16a, 16b; thereby, it can save space and is compared with a plate-shaped workpiece. The suction pad 12 can be appropriately positioned. In addition, the grip 50 or the slide rails 16a, 16b can be appropriately positioned relative to the ring frame F.

The conveying machine 1 of the present invention is provided with an adhesive roller 17 which is arranged below the suction pad 12 and is rotatable with a rotating shaft 17d extending in a direction intersecting the X-axis direction as an axis, and has an outer surface Adhesive; thereby, the lifting means 8 can position the adsorption pad 12 at a height where the adsorption surface 120a is in contact with the outer surface of the adhesive roller 17, and the adsorption pad 12 is moved forward or backward in the X-axis direction by the first moving means 3 The suction surface 120a is brought into contact with the outer surface of the adhesion roller 17, and the adhesion roller 17 is rotated to dry clean the suction surface 120a.

The conveying machine 1 of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that it can be implemented in various ways within the scope of its technical idea. In addition, the shapes and the like of the respective components of the conveying machine 1 illustrated in the accompanying drawings are not limited to this, and can be appropriately changed and implemented within the range where the effects of the present invention can be exhibited.

W: plate-shaped workpiece F: Ring frame: Fc: flat surface T: round film WU: Workpiece unit 1: transfer machine 12: Adsorption pad 120: Adsorption part 120a: Adsorption surface 121: Frame 129: Connector 125: connecting member 13: Transport arm 130: The root of the transport arm 17: Adhesive roller 17d: Roller rotation axis 14: Adhesive roller support plate 14a: cylinder 20: Box body 200: box top wall 201: first opening 202: second opening 203: Box side wall 204: box front wall 205: back wall of box 3: The first means of movement 30: First substrate 300: Long hole 302: Box mounting plate 307: first link plate 31: The first ball screw 32: The first rail 33: The first rotary drive mechanism 330: Motor bracket 331: First Motor 332: active pulley 333: driven pulley 334: Loop belt 34: The first movable member 340: Slider member 341: Arm link 39: sheet metal cover 16a, 16b: slide rail 4: The second means of movement 41: The second ball screw 42a, 42b: a pair of second rails 43: second rotary drive mechanism 44a: second movable member 44b: second movable member 50: grip 500: A pair of clamping jaws 501: Grip drive source 6: The third means of movement 60: third substrate 61: The third ball screw 62: Third rail 63 third rotary drive mechanism 64: third movable member 7: The fourth means of movement 70: Pedestal 71: Rotation axis 73: Rotary drive mechanism 79: horizontal board 8: Lifting means 80: block 81: A pair of lifting rails 82: Ball screw 83: Lifting and rotating drive mechanism 84: Lifting member

Fig. 1 is a perspective view showing an example of the entire conveying machine from above. Fig. 2 is a perspective view showing an example of the entire conveying machine in a state where the cassette body is removed from above. Fig. 3 is a perspective view showing an example of the entire conveying machine from below. Fig. 4 is a perspective view showing the suction pad, the first moving means, the fourth moving means, and the elevating means of the conveying machine from above. Fig. 5 is a perspective view showing an example of the structure of the first moving means, the second moving means, the third moving means, the grip and the slide rail of the conveying machine from above the back of the conveying machine. Fig. 6 is a perspective view showing an example of the structure of the second moving means, the third moving means, the grip and the slide rail of the conveying machine from above the front side of the conveying machine. Fig. 7 is a perspective view illustrating an example of a grip portion and a third moving means of the conveying machine. Fig. 8 is a perspective view illustrating a state in which the conveying machine supports and conveys the workpiece unit with slide rails. Fig. 9 is a perspective view illustrating a state in which the workpiece unit held by the ring frame is moved on the slide rail by the third moving means.

4: The second means of movement

6: The third means of movement

8: Lifting means

12: Adsorption pad

14: Adhesive roller support plate

16a, 16b: slide rail

17: Adhesive roller

17d: Roller rotation axis

30: First substrate

33: The first rotary drive mechanism

39: sheet metal cover

42a, 42b: a pair of second rails

44a: second movable member

44b: second movable member

45a: Wire carrier

50: grip

51: Grip fixing plate

60: third substrate

61: The third ball screw

63: Third rotary drive mechanism

64: third movable member

66: Wire box

67: Sheet metal cover

75: protective cover

79: horizontal board

80: block

81: A pair of lifting rails

83: Lifting and rotating drive mechanism

84: Lifting member

120a: Adsorption surface

121: Frame

129: Connector

143: Support

163: Detection Sensor

169: cylinder mechanism

302: Box mounting plate

307: first link plate

330: Motor bracket

331: First Motor

500: A pair of clamping jaws

501: Grip drive source

840: Lifting column

841: Slider

W: plate-shaped workpiece

F: ring frame

Fc: flat surface

Claims (3)

A conveying machine that conveys a plate-shaped workpiece and a ring frame with an opening. The conveying machine has: The adsorption pad has an adsorption surface that attracts and maintains the plate-shaped workpiece; The first moving means makes the adsorption pad move forward or backward in the horizontal direction and in the X-axis direction; Two slide rails are arranged in parallel with the opening of the ring frame and support the two sides of the ring frame; The second moving means makes the slide rail move forward or backward in the X-axis direction; The grip part, grip the outer periphery of the ring frame; The third moving means makes the grip part move forward or backward in the X-axis direction and make the ring frame move in the X-axis direction on the slide rail; The fourth moving means makes the suction pad, the slide rail and the grip part move in a horizontal direction orbitally, or move linearly in the Y axis direction orthogonal to the X axis in the horizontal direction; The raising and lowering means raises and lowers the suction pad, the slide rail, and the grip in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. The conveying machine according to claim 1, wherein the conveying machine is provided with a box body that houses the suction pad, the holding portion, the slide rail, the first moving means, the second moving means, and the first Three moving means, and it has an entrance that can be taken out and put into the adsorption pad and can be taken out and put into the holding part and the slide rail. The conveying machine according to claim 1 or 2, wherein the conveying machine is provided with an adhesive roller, the adhesive roller is arranged below the suction pad and has a rotation axis extending in a direction crossing the X-axis direction as an axis And it rotates freely and has adhesive on the outer surface; The suction pad is positioned at the height where the suction surface is in contact with the outer side surface of the adhesive roller by the lifting means, and the suction pad is moved forward or backward in the X-axis direction by the first moving means to make the suction surface and The outer surface of the adhesive roller contacts, and the adhesive roller is rotated to perform dry cleaning on the adsorption surface.

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