NO343314B1 - Optisk trykksensor - Google Patents

Optisk trykksensor

Info

Publication number
NO343314B1
NO343314B1 NO20151618A NO20151618A NO343314B1 NO 343314 B1 NO343314 B1 NO 343314B1 NO 20151618 A NO20151618 A NO 20151618A NO 20151618 A NO20151618 A NO 20151618A NO 343314 B1 NO343314 B1 NO 343314B1
Authority
NO
Norway
Prior art keywords
membranes
pressure sensor
diaphragms
partially
diaphragm
Prior art date
Application number
NO20151618A
Other languages
English (en)
Other versions
NO20151618A1 (no
Inventor
Ib-Rune Johansen
Original Assignee
Tunable As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tunable As filed Critical Tunable As
Priority to NO20151618A priority Critical patent/NO343314B1/no
Priority to US15/773,491 priority patent/US10739220B2/en
Priority to JP2018546759A priority patent/JP6783869B2/ja
Priority to CN201680069885.8A priority patent/CN108291849B/zh
Priority to CA3004523A priority patent/CA3004523A1/en
Priority to EA201890993A priority patent/EA034405B1/ru
Priority to EP16801821.6A priority patent/EP3380822B1/en
Priority to PCT/EP2016/079145 priority patent/WO2017089624A1/en
Priority to DK16801821.6T priority patent/DK3380822T3/da
Priority to BR112018010157-5A priority patent/BR112018010157B1/pt
Publication of NO20151618A1 publication Critical patent/NO20151618A1/no
Publication of NO343314B1 publication Critical patent/NO343314B1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

Oppfinnelsen omhandler en optisk trykksensor, for eksempel en mikrofon, som består av to membraner, men hvor lyden ikke treffer normalt på membranen, men kommer inn fra siden.Membranen kan være parallelle som i en Fabry-Perot, eller svakt uparallelle som i et Air-wedge shearing interferometer. Trykksensoren benytter interferometrisk utlesning, og er bestående av to membraner med essensielt like mekaniske egenskaper, hvorav minst en av membranene er både delvis transmitterende og delvis reflekterende, og hvor den andre membranen er minst delvis reflekterende, membranene er separert av et hulrom definert av et avstandsstykke, der avstanden mellom membranene er variabel for derved å tilveiebringe en forskyvningsfølsom Fabry-Perot resonator, og hvor de to membranene har et felles bakvolum, og hvor det felles bakvolumet er tett eller delvis tett på de frekvensene hvor en ønsker å måle, og hvor en trykk-økning medfører at avstanden mellom membranene endres med motsatt retning.
NO20151618A 2015-11-29 2015-11-29 Optisk trykksensor NO343314B1 (no)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NO20151618A NO343314B1 (no) 2015-11-29 2015-11-29 Optisk trykksensor
US15/773,491 US10739220B2 (en) 2015-11-29 2016-11-29 Optical pressure sensor
JP2018546759A JP6783869B2 (ja) 2015-11-29 2016-11-29 光学圧力センサ
CN201680069885.8A CN108291849B (zh) 2015-11-29 2016-11-29 光学压力传感器
CA3004523A CA3004523A1 (en) 2015-11-29 2016-11-29 Optical pressure sensor
EA201890993A EA034405B1 (ru) 2015-11-29 2016-11-29 Оптический датчик давления
EP16801821.6A EP3380822B1 (en) 2015-11-29 2016-11-29 Optical pressure sensor
PCT/EP2016/079145 WO2017089624A1 (en) 2015-11-29 2016-11-29 Optical pressure sensor
DK16801821.6T DK3380822T3 (da) 2015-11-29 2016-11-29 Optisk tryksensor
BR112018010157-5A BR112018010157B1 (pt) 2015-11-29 2016-11-29 Sensor óptico de pressão, unidade de sensor de pressão, sensor de gás e uso do sensor de pressão

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20151618A NO343314B1 (no) 2015-11-29 2015-11-29 Optisk trykksensor

Publications (2)

Publication Number Publication Date
NO20151618A1 NO20151618A1 (no) 2017-05-30
NO343314B1 true NO343314B1 (no) 2019-01-28

Family

ID=57406270

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20151618A NO343314B1 (no) 2015-11-29 2015-11-29 Optisk trykksensor

Country Status (10)

Country Link
US (1) US10739220B2 (no)
EP (1) EP3380822B1 (no)
JP (1) JP6783869B2 (no)
CN (1) CN108291849B (no)
BR (1) BR112018010157B1 (no)
CA (1) CA3004523A1 (no)
DK (1) DK3380822T3 (no)
EA (1) EA034405B1 (no)
NO (1) NO343314B1 (no)
WO (1) WO2017089624A1 (no)

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KR102519055B1 (ko) * 2015-11-03 2023-04-07 삼성전자주식회사 탄산수 제조 장치, 이를 포함하는 냉장고 및 그 제어 방법
NO20161086A1 (no) 2016-06-29 2018-01-01 Tunable As Modulerbar Fabry-Perot
GB2565376B (en) * 2017-08-11 2020-03-25 Cirrus Logic Int Semiconductor Ltd MEMS devices and processes
KR101985896B1 (ko) * 2017-10-18 2019-06-04 국방과학연구소 광 신호 처리 장치, 그 방법 및 기록매체에 저장된 컴퓨터 프로그램.
CN109870449B (zh) * 2019-02-25 2021-11-26 京东方科技集团股份有限公司 一种气体监控装置、系统和方法，以及橱柜
EP3754325B1 (en) * 2019-06-19 2022-02-16 Infineon Technologies AG Photoacoustic gas sensor
CN110441242A (zh) * 2019-08-14 2019-11-12 郑州大学 基于金刚石微悬臂梁的气体检测系统和方法
CN112087698B (zh) * 2020-10-15 2021-07-23 潍坊歌尔微电子有限公司 Mems麦克风
CN112576636B (zh) * 2020-11-18 2021-11-19 潍柴动力股份有限公司 弹性联轴器及具有其的发动机
US11666313B1 (en) * 2020-12-04 2023-06-06 Fonar Corporation Calibration technique, apparatus and system for pulsed phase-lock loop ultrasound intracranial pressure measurement systems
CN112630298B (zh) * 2020-12-15 2023-05-09 合肥科博慧科技管理有限责任公司 一种基于声表面波的土壤VOCs检测装置
NO20221394A1 (en) 2022-12-22 2024-06-24 Tunable As Improved noise canceling detector

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DE4023154A1 (de) * 1990-07-20 1992-01-30 Karl F Prof Dr Renk Fabry-perot-resonator
US6344647B1 (en) * 1997-09-19 2002-02-05 Commissariat A L' Energie Atomique Miniaturized photoacoustic spectrometer
CN204807443U (zh) * 2015-06-24 2015-11-25 中国计量学院 一种基于光纤光栅微腔的fpi氢气传感器

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EP0460357A3 (en) * 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
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DE4023154A1 (de) * 1990-07-20 1992-01-30 Karl F Prof Dr Renk Fabry-perot-resonator
US6344647B1 (en) * 1997-09-19 2002-02-05 Commissariat A L' Energie Atomique Miniaturized photoacoustic spectrometer
CN204807443U (zh) * 2015-06-24 2015-11-25 中国计量学院 一种基于光纤光栅微腔的fpi氢气传感器

Also Published As

Publication number Publication date
US10739220B2 (en) 2020-08-11
DK3380822T3 (da) 2019-10-14
NO20151618A1 (no) 2017-05-30
JP2019500625A (ja) 2019-01-10
EA201890993A1 (ru) 2018-11-30
US20180321103A1 (en) 2018-11-08
EP3380822A1 (en) 2018-10-03
CA3004523A1 (en) 2017-06-01
EA034405B1 (ru) 2020-02-05
JP6783869B2 (ja) 2020-11-11
CN108291849A (zh) 2018-07-17
BR112018010157A2 (pt) 2018-11-21
EP3380822B1 (en) 2019-08-14
WO2017089624A1 (en) 2017-06-01
CN108291849B (zh) 2020-05-22
BR112018010157B1 (pt) 2023-05-09

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Owner name: TUNABLE INFRARED TECHNOLOGIES AS, NO

CHAD Change of the owner's name or address (par. 44 patent law, par. patentforskriften)

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