NL7901287A - Controlestelsel. - Google Patents

Controlestelsel.

Info

Publication number: NL7901287A
Authority: NL; Netherlands
Prior art keywords: control system; control
Prior art date: 1978-02-21

Application number

NL7901287A

Other languages

English (en)

Original Assignee

Texas Instruments Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-02-21

Filing date

1979-02-19

Publication date

1979-08-23

1979-02-19 Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc

1979-08-23 Publication of NL7901287A publication Critical patent/NL7901287A/nl

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
General Engineering & Computer Science (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Measuring Leads Or Probes (AREA)
Testing Of Individual Semiconductor Devices (AREA)

NL7901287A 1978-02-21 1979-02-19 Controlestelsel. NL7901287A (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US05/879,038 US4219771A (en)	1978-02-21	1978-02-21	Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing

Publications (1)

Publication Number	Publication Date
NL7901287A true NL7901287A (nl)	1979-08-23

Family

ID=25373314

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7901287A NL7901287A (nl)	1978-02-21	1979-02-19	Controlestelsel.

Country Status (7)

Country	Link
US (1)	US4219771A (nl)
JP (1)	JPS54158175A (nl)
DE (1)	DE2906041A1 (nl)
FR (1)	FR2417778A1 (nl)
GB (1)	GB2014743B (nl)
IT (1)	IT1162272B (nl)
NL (1)	NL7901287A (nl)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4951370A (en) *	1979-11-05	1990-08-28	Texas Instruments Incorporated	Method of making an intelligent multiprobe tip
EP0028719B1 (en) *	1979-11-05	1984-05-30	Texas Instruments Incorporated	Probe assembly for testing integrated circuits
US4390885A (en) *	1981-06-26	1983-06-28	Texas Instruments Incorporated	Apparatus and method for fluid transfer
US4888550A (en) *	1981-09-14	1989-12-19	Texas Instruments Incorporated	Intelligent multiprobe tip
US4780670A (en) *	1985-03-04	1988-10-25	Xerox Corporation	Active probe card for high resolution/low noise wafer level testing
IL79820A0 (en) *	1985-09-26	1986-11-30	Tektronix Inc	Wafer probe head,and method of assembling same
US4749942A (en) *	1985-09-26	1988-06-07	Tektronix, Inc.	Wafer probe head
JPS62134243U (nl) *	1986-02-14	1987-08-24
JPH0342682Y2 (nl) *	1986-02-18	1991-09-06
DE3628104A1 (de) *	1986-08-19	1988-02-25	Feinmetall Gmbh	Kontaktelement fuer pruefkarten
US4758785A (en) *	1986-09-03	1988-07-19	Tektronix, Inc.	Pressure control apparatus for use in an integrated circuit testing station
US5331275A (en) *	1991-12-09	1994-07-19	Fujitsu Limited	Probing device and system for testing an integrated circuit
US5608172A (en) *	1995-03-16	1997-03-04	Texas Instruments Incorporated	Die bond touch down detector
US5883519A (en) *	1996-02-23	1999-03-16	Kinetic Probe, Llc	Deflection device
US6252414B1 (en) *	1998-08-26	2001-06-26	International Business Machines Corporation	Method and apparatus for testing circuits having different configurations with a single test fixture
DE102004027886A1 (de) *	2004-05-28	2005-12-22	Feinmetall Gmbh	Prüfeinrichtung zur elektrischen Prüfung eines Prüflings sowie Verfahren zur Herstellung einer Prüfeinrichtung
KR101061593B1 (ko) *	2008-04-21	2011-09-01	윌테크놀러지(주)	프로브 카드
US8963567B2 (en)	2011-10-31	2015-02-24	International Business Machines Corporation	Pressure sensing and control for semiconductor wafer probing
CN109427923B (zh) *	2017-08-25	2020-06-16	中国科学院大连化学物理研究所	一种半导体薄膜四象限光照传感器及其制备方法
JP2023006993A (ja) *	2021-07-01	2023-01-18	株式会社日本マイクロニクス	検査装置、位置調整ユニット及び位置調整方法
CN114252753B (zh) *	2021-12-24	2022-08-19	中国科学院长春光学精密机械与物理研究所	一种用于筛选四象限探测器的方法和系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2558563A (en) *	1948-10-29	1951-06-26	Gen Electric	Piezoelectric strain gauge
US2782636A (en) *	1950-08-21	1957-02-26	Max P Peucker	Internal balances for wind force measurements on aerodynamic objects
US3093710A (en) *	1959-07-06	1963-06-11	Gulton Ind Inc	Piezoelectric electromechanical transducer
GB1063381A (en) *	1963-01-18	1967-03-30	Wilmot Breeden Ltd	Improvements in or relating to surface testing apparatus
US3446065A (en) *	1965-08-11	1969-05-27	Transistor Automation Corp	Automatic probing apparatus
US3810017A (en) *	1972-05-15	1974-05-07	Teledyne Inc	Precision probe for testing micro-electronic units
US3849728A (en) *	1973-08-21	1974-11-19	Wentworth Labor Inc	Fixed point probe card and an assembly and repair fixture therefor

1978
- 1978-02-21 US US05/879,038 patent/US4219771A/en not_active Expired - Lifetime
1979
- 1979-02-08 GB GB7904456A patent/GB2014743B/en not_active Expired
- 1979-02-14 FR FR7903696A patent/FR2417778A1/fr active Granted
- 1979-02-16 DE DE19792906041 patent/DE2906041A1/de not_active Withdrawn
- 1979-02-19 NL NL7901287A patent/NL7901287A/nl not_active Application Discontinuation
- 1979-02-20 JP JP1795579A patent/JPS54158175A/ja active Granted
- 1979-02-20 IT IT48061/79A patent/IT1162272B/it active

Also Published As

Publication number	Publication date
IT7948061A0 (it)	1979-02-20
FR2417778B1 (nl)	1983-06-03
US4219771A (en)	1980-08-26
GB2014743A (en)	1979-08-30
GB2014743B (en)	1982-08-04
DE2906041A1 (de)	1979-10-11
IT1162272B (it)	1987-03-25
FR2417778A1 (fr)	1979-09-14
JPS6330585B2 (nl)	1988-06-20
JPS54158175A (en)	1979-12-13

Legal Events

Date	Code	Title	Description
1985-01-01	A85	Still pending on 85-01-01
1986-04-01	BV	The patent application has lapsed

Publication	Publication Date	Title
NO792277L (no)	1980-01-11	Marint stigeroersystem.
NO790073L (no)	1979-07-12	Naervaer-foelesystem.
FI792866A (fi)	1980-03-20	Kontrollsystem foer klordioxidanlaeggning
NL7903045A (nl)	1979-11-06	Geheugenstelsel.
NL7900700A (nl)	1979-07-31	Servobesturingsstelsel.
NL7900256A (nl)	1979-07-20	Vuurleidingtoestel.
NL7902653A (nl)	1979-10-12	Draaistel-veerstelsel.
NL7901554A (nl)	1979-08-29	Servobesturingsinrichting.
NL7900527A (nl)	1979-07-26	Afstandbedieningsstelsel.
NL7901287A (nl)	1979-08-23	Controlestelsel.
NL7904548A (nl)	1979-12-11	Digitaal aandrijfbesturingsstelsel.
IT7919467A0 (it)	1979-01-19	Complesso ventola-comando per ventola.
NL176624C (nl)	1985-05-01	Diversiteitsstelsel.
NL189732C (nl)	1993-07-01	Radarstelsel.
NL7904553A (nl)	1979-12-28	Geluidssysteembesturing.
IT7925647A0 (it)	1979-09-12	Impianto radar.
NO163344C (no)	1990-05-09	Styreventil.
NL7903229A (nl)	1979-10-29	Radarstelsel.
NL7812668A (nl)	1979-07-05	Lasergyroscoopstelsel.
NL7805115A (nl)	1979-11-13	Bedieningsmechanisme.
NL7901309A (nl)	1979-09-10	Tabulatorbesturingssysteem.
NO784009L (no)	1980-04-08	Profilsystem.
NL7901541A (nl)	1979-11-06	Direkt-verhit kathodestelsel.
NL7812634A (nl)	1979-07-05	Konstruktiestelsel.
NO780920L (no)	1978-09-29	Styresystem.