NL7507015A - SEMI-GUIDE DEVICE. - Google Patents

SEMI-GUIDE DEVICE.

Info

Publication number: NL7507015A
Authority: NL; Netherlands
Prior art keywords: semi; guide device; guide
Prior art date: 1974-06-13

Application number

NL7507015A

Other languages

Dutch (nl)

Original Assignee

Rca Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-06-13

Filing date

1975-06-12

Publication date

1975-12-16

1975-06-12 Application filed by Rca Corp filed Critical Rca Corp

1975-12-16 Publication of NL7507015A publication Critical patent/NL7507015A/en

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0682—Silicides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5893—Mixing of deposited material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Ceramic Engineering (AREA)
Thermal Sciences (AREA)
Manufacturing & Machinery (AREA)
Formation Of Insulating Films (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Electrodes Of Semiconductors (AREA)

NL7507015A 1974-06-13 1975-06-12 SEMI-GUIDE DEVICE. NL7507015A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US47904974A	1974-06-13	1974-06-13

Publications (1)

Publication Number	Publication Date
NL7507015A true NL7507015A (en)	1975-12-16

Family

ID=23902455

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL7507015A NL7507015A (en)	1974-06-13	1975-06-12	SEMI-GUIDE DEVICE.

Country Status (9)

Country	Link
JP (1)	JPS5112773A (en)
AU (1)	AU8195575A (en)
BE (1)	BE830034A (en)
DE (1)	DE2525482A1 (en)
FR (1)	FR2274579A1 (en)
GB (1)	GB1505165A (en)
IN (1)	IN143383B (en)
NL (1)	NL7507015A (en)
SE (1)	SE7506733L (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4128670A (en) *	1977-11-11	1978-12-05	International Business Machines Corporation	Fabrication method for integrated circuits with polysilicon lines having low sheet resistance
JPS5493990A (en) *	1978-01-06	1979-07-25	Cho Lsi Gijutsu Kenkyu Kumiai	Semiconductor
DE3141567C2 (en) *	1981-10-20	1986-02-06	Siemens AG, 1000 Berlin und 8000 München	Process for producing layers consisting of tantalum, tungsten or molybdenum at low temperatures and using these layers
US4432035A (en) *	1982-06-11	1984-02-14	International Business Machines Corp.	Method of making high dielectric constant insulators and capacitors using same
JPS596577A (en) *	1982-07-05	1984-01-13	Toshiba Corp	Semiconductor device and manufacture thereof
GB2139419A (en) *	1983-05-05	1984-11-07	Standard Telephones Cables Ltd	Semiconductor devices
JPS63265448A (en) *	1987-11-27	1988-11-01	Chiyou Lsi Gijutsu Kenkyu Kumiai	Manufacture of mos type semiconductor device
GB9307846D0 (en) *	1993-04-15	1993-06-02	Secr Defence	Pyrothechnic material
GB2291642B (en) *	1993-04-15	1997-06-04	Secr Defence	Pyrotechnic material
DE10207130B4 (en) *	2002-02-20	2007-09-27	Infineon Technologies Ag	A method of manufacturing a device and device comprising a noble metal layer, a noble metal silicide layer and an oxidized silicide layer

1975
- 1975-05-03 IN IN894/CAL/75A patent/IN143383B/en unknown
- 1975-05-20 GB GB21488/75A patent/GB1505165A/en not_active Expired
- 1975-06-07 DE DE19752525482 patent/DE2525482A1/en active Pending
- 1975-06-09 AU AU81955/75A patent/AU8195575A/en not_active Expired
- 1975-06-09 BE BE7000670A patent/BE830034A/en unknown
- 1975-06-11 FR FR7518277A patent/FR2274579A1/en not_active Withdrawn
- 1975-06-12 SE SE7506733A patent/SE7506733L/en unknown
- 1975-06-12 JP JP50071870A patent/JPS5112773A/ja active Pending
- 1975-06-12 NL NL7507015A patent/NL7507015A/en unknown

Also Published As

Publication number	Publication date
GB1505165A (en)	1978-03-30
IN143383B (en)	1977-11-12
AU8195575A (en)	1976-12-16
FR2274579A1 (en)	1976-01-09
JPS5112773A (en)	1976-01-31
BE830034A (en)	1975-10-01
DE2525482A1 (en)	1976-01-02
SE7506733L (en)	1975-12-15

Publication	Publication Date	Title
NL7513758A (en)	1976-05-28	AKOUSTO-OPTICAL DEVICE.
NL7511906A (en)	1976-04-13	SEMI-GUIDE DEVICE.
NL7503870A (en)	1975-10-02	SEMI-GUIDE DEVICE.
NL7507198A (en)	1975-12-30	TIRE-LEI DEVICE.
NL7511314A (en)	1976-03-30	URETHANOXAZOLIDINS.
NL7509859A (en)	1976-02-23	SEMI-GUIDE DEVICE.
NL7515076A (en)	1976-06-29	SEMI-GUIDE DEVICE.
NL7409766A (en)	1976-01-20	ESCAPE DEVICE.
NL7512559A (en)	1976-04-28	SEMI-GUIDE DEVICE.
SE7500031L (en)	1975-10-20	CALCULATING VAGAN DEVICE.
NL7401939A (en)	1975-08-15	LOAD-CONNECTED DEVICE.
NL7506450A (en)	1975-12-09	SEMI-GUIDE DEVICE.
NL7514587A (en)	1976-07-02	TENKSHIP.
NL7409067A (en)	1976-01-06	STOP DEVICE.
NL7510886A (en)	1976-03-18	THIOFEENSACCHARINES.
NL7506043A (en)	1975-11-25	COUNTER DEVICE.
NL7507015A (en)	1975-12-16	SEMI-GUIDE DEVICE.
NL156659B (en)	1978-05-16	FASTENING DEVICE.
DK135492B (en)	1977-05-09	Lastpalle.
NL7504673A (en)	1975-10-21	SEMI-GUIDE DEVICE.
NL7510856A (en)	1976-04-21	PIPELINE-STAND-CONTROL DEVICE.
NL7509804A (en)	1976-02-23	SEMI-GUIDE DEVICE.
NL7507348A (en)	1975-09-30	FIXING DEVICE.
NL7413207A (en)	1976-04-12	SEMI-GUIDE DEVICE.
NL7503713A (en)	1975-09-30	CONFIGURATION DEVICE.