KR970052685A - Source reaction chamber with pollution prevention shield - Google Patents

Source reaction chamber with pollution prevention shield Download PDF

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Publication number
KR970052685A
KR970052685A KR1019950062040A KR19950062040A KR970052685A KR 970052685 A KR970052685 A KR 970052685A KR 1019950062040 A KR1019950062040 A KR 1019950062040A KR 19950062040 A KR19950062040 A KR 19950062040A KR 970052685 A KR970052685 A KR 970052685A
Authority
KR
South Korea
Prior art keywords
source
reaction chamber
chamber
source reaction
ion
Prior art date
Application number
KR1019950062040A
Other languages
Korean (ko)
Inventor
송화수
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950062040A priority Critical patent/KR970052685A/en
Publication of KR970052685A publication Critical patent/KR970052685A/en

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  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

이 발명은 이온소스 반응실의 오염실을 방지하기 위하여 차폐판을 소스반응실(Source Chamber)내부에 설치한 오염방지용 차폐판을 설치한 소스반응실(Source Chamber)에 관한 것이다.The present invention relates to a source chamber provided with a pollution preventing shield plate provided with a shield plate inside the source chamber to prevent the contamination chamber of the ion source reaction chamber.

이 발명의 구성은, 이온빔을 생성하는 소스반응실 본체; 소스반응실 본체의내부에 설치되어, 소스반응실 본체의 내부의 오염을 방지하는 차폐판; 생성된 이온소스를 방출하는 이온소스 헤드로 이루어진다.The configuration of the present invention, the source reaction chamber body for generating an ion beam; A shielding plate installed inside the source reaction chamber main body to prevent contamination of the inside of the source reaction chamber main body; It consists of an ion source head that emits the generated ion source.

이 발명의 효과는, 세정시간 및 소스반응실(Source Chamber)의 아웃개싱 시간을 감소시킬 수 있어서 대기압 상태에서 고진공 상태로 만드는 소요시간을 크게 줄여서 이온주입 공정의 생산성을 향상시킬 수 있는 오염방지용 차폐판을 설치한 소스반응실(Source Chamber)을 제공할 수 있다.The effect of the present invention is to reduce the cleaning time and the outgassing time of the source chamber, thus greatly reducing the time required to make the vacuum at atmospheric pressure and high vacuum, thereby improving the productivity of the ion implantation process. A source chamber with a plate can be provided.

Description

오염방지용 차폐판을 설치한 소스반응실Source reaction chamber with pollution prevention shield

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 이 발명의 실시예에 따른 오염방지용 차폐판을 설치한 소스반응실의 구조도2 is a structural diagram of a source reaction chamber in which a pollution prevention shielding plate is installed according to an embodiment of the present invention.

Claims (2)

소스반응실에 있어서, 이온빔을 생성하는 소스반응실 본체; 상기의 소스반응실 본체의 내부에 설치되어, 소스반응실 본체의 내부의 오염을 방지하는 차폐판; 생성된 이온소스를 방출하는 이온소스 헤드로 이루어진 것을 특징으로 하는 오염방지용 차폐판을 설치한 소스반응실.A source reaction chamber, comprising: a source reaction chamber body generating an ion beam; A shielding plate installed inside the source reaction chamber body to prevent contamination of the inside of the source reaction chamber body; Source reaction chamber with a pollution prevention shielding plate, characterized in that the ion source head for releasing the generated ion source. 제1항에 있어서, 상기의 차폐판은, 다수의 차폐판들을 결합하는 것을 특징으로 하는 오염방지용 차폐판을 설치한 소스반응실.The source reaction chamber of claim 1, wherein the shielding plate combines a plurality of shielding plates. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950062040A 1995-12-28 1995-12-28 Source reaction chamber with pollution prevention shield KR970052685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950062040A KR970052685A (en) 1995-12-28 1995-12-28 Source reaction chamber with pollution prevention shield

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950062040A KR970052685A (en) 1995-12-28 1995-12-28 Source reaction chamber with pollution prevention shield

Publications (1)

Publication Number Publication Date
KR970052685A true KR970052685A (en) 1997-07-29

Family

ID=66621664

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950062040A KR970052685A (en) 1995-12-28 1995-12-28 Source reaction chamber with pollution prevention shield

Country Status (1)

Country Link
KR (1) KR970052685A (en)

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