KR20080107754A

KR20080107754A - Scribing apparatus using ultrasonic wave

Info

Publication number: KR20080107754A
Application number: KR1020070055954A
Authority: KR
Inventors: 황운기
Original assignee: 주식회사 효광
Priority date: 2007-06-08
Filing date: 2007-06-08
Publication date: 2008-12-11
Also published as: KR100899384B1

Abstract

An ultrasonic wave scribing apparatus is provided to cut minutely and cleanly cut materials by generating a vertical crack at the cut material by a perpendicular vibration of a scribing wheel and preventing influence of a horizontal vibration. An ultrasonic wave scribing apparatus contains a stage(110) in which a cut material is positioned, a support unit(120) which is installed on the stage, a cutting part(100) which is installed at a support unit and scribes the cut material and a vibration absorbing part installed between the support unit and the cutting part. The vibration absorbing part comprises buffer member which is one of natural rubber, synthetic rubber, silicon resin, urethane resin and poly vinyl alcohol.

Description

Ultrasonic scribing apparatus using ultrasonic wave

1 is a cross-sectional view showing a first embodiment of the ultrasonic scribing apparatus according to the present invention.

2 is an exploded perspective view showing a first embodiment of the present invention.

3 is a partial cross-sectional view showing a second embodiment of the present invention.

4 is a partial sectional view showing a third embodiment of the present invention.

5 is a partial cross-sectional view showing a fourth embodiment of the present invention.

6 is a partial sectional view showing a fifth embodiment of the present invention.

7 is an exploded perspective view showing a sixth embodiment of the present invention.

8 is a plan sectional view of a sixth embodiment.

9 is an exploded perspective view showing a seventh embodiment of the present invention.

Fig. 10 is a side sectional view of the seventh embodiment.

W: Cutting Material 110: Stage

120: support unit 130: horn

132: first seating groove 140: scribing wheel

150: ultrasonic oscillator 160: horn holder

162: second seating groove 164: pin hole

166: pin 168: leaf spring

170: buffer member 172: irregularities

180: jacket

The present invention relates to an ultrasonic scribing apparatus, and more particularly, to prevent the horizontal vibration from being transmitted to the scribing wheel that marks the cutting line on the cutting material, thereby promoting the formation of vertical cracks on the cutting material. The formation of directional cracks relates to an ultrasonic scribing apparatus which can be suppressed.

In general, a scribing device refers to a device for forming a continuous groove along a cut line on a ceramic substrate such as a glass plate, a silicon substrate, or alumina, and the scribed cut material is subjected to a stress or an impact Simply cut. Conventional scribing devices contact a scribing wheel or scribing tip made of diamond with the surface of the material to be cut and apply a static load to generate vertical cracks in the material to be cut along the cut line. The scribe wheel moves to form a continuous groove. Therefore, the thicker the material to be cut, the static load is increased so that the depth of the vertical crack is deeper. If the static static load is increased more than a certain amount, the lateral crack is formed and the cutting surface is not uniform, thus degrading the quality of the product. The ultrasonic scribing apparatus using ultrasonic vibration which applies the live load to the to-be-cutting material by momentarily applying a vertical load along the cutting target line of the to-be-cutting material is used.

In other words, the ultrasonic scribing apparatus includes a stage on which the cutting material is largely positioned, a support unit moving on the stage, a horn provided on the support unit, a scribing wheel provided on the bottom of the horn, and an upper portion of the horn. It is composed of an ultrasonic vibrator for transmitting live load to the scribing wheel. The horn is attached to the horn holder installed in the support unit with a fastening bolt to move in the X, Y, Z-axis direction on the stage in accordance with the operation of the support unit to position the scribing wheel on the cut line. As described above, when the scribing wheel is positioned to contact the cutting target line of the cutting material, the support unit installed on the stage moves the scribing wheel along the cutting target line. In addition, the ultrasonic vibrator installed on the top of the horn is operated to apply a live load to the scribing wheel to form a vertical crack on the material to be cut, and to cut the material to be subjected to stress or impact.

However, in the ultrasonic scribing apparatus having the structure as described above, the vibration generated by the operation of the support unit interferes with the vibration generated by the ultrasonic vibrator, thereby lowering the cutting performance. That is, the vibration generated from the ultrasonic vibrator acts in the vertical direction on the stage, while the vibration generated from the support unit acts in the horizontal direction on the stage, so that the horizontal vibration is added to the vertical vibration of the scribing wheel to the side to be cut. The formation of directional cracks reduces the cutting performance of the ultrasonic scribing apparatus.

The present invention is to solve the above problems, to provide an ultrasonic scribing apparatus that can absorb the vibration energy to improve the precision and cutting performance so that the vibration generated in the support unit is not transmitted to the scribing wheel. The purpose is.

According to the technical idea of the present invention for achieving the above object, a stage in which the cutting material is located, a support unit installed on the stage, a cutting portion provided in the support unit and scribing the cutting material; It is achieved by an ultrasonic scribing device comprising a vibration absorbing portion provided between the support unit and the cut portion.

Here, the vibration absorbing unit preferably includes a buffer member which is any one of natural rubber, synthetic rubber, silicone resin, urethane resin, and foamed resin.

In addition, the cutting portion, the scribing wheel and the ultrasonic vibrator and the horn, it is preferable that a buffer member is provided between the horn and the support unit.

In addition, the buffer member is preferably formed to surround the outside of the horn.

In addition, the buffer member is preferably arranged along the circumference of the horn.

In addition, it is preferred that the support unit is different from the material and further includes a jacket installed between the support unit and the buffer member.

In addition, it is preferable that a pin hole having the same axis center is formed in the horn, the buffer member, and the support unit, and a pin is inserted into the pin hole to fix the horn and the support unit in a predetermined direction.

In addition, it is preferable that a pin hole having the same axial center is formed in the horn and the support unit, and a pin is inserted into the pin hole to fix the horn and the support unit in a predetermined direction.

In addition, the formation position of the pin hole is preferably formed in a portion where the vibrations of the horn and the support unit are transmitted to the minimum or a portion where vibrations of the horn and the support unit are not transmitted to each other.

In addition, it is preferable that irregularities are formed on at least one surface of the buffer member in contact with the horn and the support unit.

In addition, the vibration absorbing portion includes a leaf spring, the cutting portion, the scribing wheel and the ultrasonic vibrator and the horn, it is preferable that the leaf spring is installed between the horn and the support unit.

It is also preferred that the leaf spring is integrally formed with the horn and one end of the leaf spring is inserted into the groove of the support unit and fixed in a constant direction.

Hereinafter, embodiments according to the present invention will be described in more detail with reference to the accompanying drawings.

1 is a cross-sectional view showing a first embodiment of the ultrasonic scribing apparatus according to the present invention, Figure 2 is an exploded perspective view showing a first embodiment of the present invention. Referring to the drawings, the ultrasonic scribing apparatus according to the present invention includes a stage 110 in which the cutting material W is largely positioned, a support unit 120 moving on the stage 110, and the support. It is composed of a cutting unit 100 is installed in the unit 120 to apply a live load to the cutting material and a vibration absorbing unit provided between the support unit 120 and the cutting unit 100.

The upper surface of the stage 110 is in a state where the flatness is adjusted to maintain the flatness when the cutting material (W) is located, is installed to be movable in the horizontal direction. In addition, the support unit 120 moving in the direction crossing the moving direction of the stage 110 and the vertical direction on the stage 110, the moving block 122 moving in the direction crossing the moving direction of the stage 110. ), A server motor 124 installed on the moving block 122, a screw shaft 126 connected to the server motor 124, and a screw shaft 126 engaged with the screw shaft 126 to move along the screw shaft 126. The bracket 128 and the horn holder 160 provided on the bracket 128.

The support unit 120 moves in a direction in which the moving block 122 intersects with the moving direction of the stage 110 on the stage 100, and the bracket 128 moves to the horn holder (A) as the server motor 124 rotates. And move vertically along the screw axis 126 integrally with 160. That is, when the stage 110 moves in the Y-axis direction, the moving block 122 moves in the X-axis direction, and the bracket 128 moves along the screw axis 126 in the Z-axis direction. In addition, a rotating plate (not shown) is installed between the cutting material W and the stage 110 to rotate the cutting material W seated on the stage 110.

However, the movement of the stage 110 and the support unit 120 is not limited thereto and may be variously performed. For example, in the stage 110 in which the cutting material W is mounted, the support unit 120 may be moved in the X, Y, and Z directions in a fixed state, and the cutting material W is seated. The stage 110 may move in the X and Y axis directions, and the support unit 120 may move in the Z axis direction. In addition, the cutting material W may not rotate, and the horn 130 provided with the scribing wheel 140 to be described later may rotate to change the cutting direction of the scribing wheel 140.

The cutting part 100 installed on the support unit 120 to apply a live load to the cutting material W is largely equipped with a scribing wheel 140, an ultrasonic vibrator 150 for generating vertical vibration, and an ultrasonic wave in each of the upper and lower parts. The vibrator 150 and the scribing wheel 140 are installed, and the horn 130 is configured to amplify the vibration generated by the ultrasonic vibrator 150 and transmit the amplified vibration to the scribing wheel 140.

The scribing wheel 140 is made of cemented carbide or diamond sintered alloy, etc., and has a circular disk shape of about 2 to 3 mm obtained by grinding the edge of the scribing wheel 140 at a predetermined angle. In addition, the ultrasonic vibrator 150 that applies vertical vibration to the scribing wheel 140 has a stator (not shown) to which electric current is supplied so as to convert electrical energy into linear kinetic energy, and a lower part of the stator. When the current is supplied to the mover (not shown) installed to move up and down in the thrust is formed in the stator to move the mover up and down to generate vertical vibration.

And the horn 130 is installed in the lower portion of the ultrasonic vibrator 150, the horn 130 has a substantially cylindrical shape and the scribing wheel 140 is installed on the lower portion of the ultrasonic vibrator 150 generated The vibration is amplified and transmitted to the scribing wheel 140. The horn 130 is moved in the same manner as the support unit 120 in combination with the horn holder 160 provided on the bracket 128 of the support unit 120. In particular, a vibration absorbing part is installed between the horn 130 and the horn holder 160. The vibration absorbing part is configured to absorb physical energy while being deformed and restored when physical energy is applied to the support unit ( The vibration generated in the 120 (eg, horizontal vibration) and the vibration generated in the cutting unit 100 (vertical vibration) absorb each vibration energy so as not to be transmitted to each other. Therefore, when the vibration absorbing unit absorbs the horizontal vibration transmitted from the support unit 120 to the horn 130 and the scribing wheel 140 moves along the cutting target line, only the vertical vibration is applied to the cutting material W. Allow to be cut.

In other words, the scribing wheel 140 is moved by the support unit 120 when the scribing wheel 140 processes the cutting material W along the cutting line. The vibration according to the movement of the 120 is transmitted to the cutting unit 100 along the bracket 128 and the horn holder 160 of the support unit 120. In this case, the vibration transmitted to the cutting unit 100 is mostly horizontal vibration due to the movement of the moving block 122, and the vibration absorber absorbs the vibration absorber so that the horizontal vibration is not transmitted to the cutting unit 100, and is generated in the ultrasonic vibrator 150. Only vertical vibrations are transmitted to the scribing wheel 140.

In addition, the vibration generated in the ultrasonic scribing apparatus, in addition to the horizontal vibration caused by the movement of the moving block 122, the vertical vibration and vertical and horizontal generated by the operation of moving the support unit 120 or the operation of the mechanical parts It may be a combined vibration. In addition, vibration is also generated by an impact applied outside the ultrasonic scribing apparatus. The vibration absorber is installed between the support unit 120 and the horn 130 so as not to transmit the vibration generated by the above factors from the support unit 120 to the cutting unit 100 to absorb the vibrations transmitted to each other. .

The vibration absorbing part includes a shock absorbing member 170 formed to surround the outside of the horn 130 as shown in the drawing, wherein the shock absorbing member 170 is deformed when horizontal vibration is applied, and horizontal vibration is When disappearing, it is preferable that the material is made of a material capable of absorbing vibration energy while being restored to its original shape. For example, the buffer member 170 is made of any one of natural rubber, synthetic rubber, silicone resin, urethane resin, foamed resin and has a cylindrical shape to surround the outside of the horn 130.

The buffer member 170 as described above is installed between the horn 130 and the horn holder 160, so that the horn 130 is fixed to the horn holder 160, the horn 130 and the horn holder 160 Each of the first mounting groove 132 and the second mounting groove 162 is formed. The first seating groove 132 is formed to be recessed toward the inside of the horn around the outer diameter of the horn 130, the second seating groove 162 of the horn holder 160 corresponding to the first seating groove 132 It is formed to be recessed toward the outside of the horn holder around the inner diameter. Then, a buffer member 170 having a shape corresponding to the shape of the first seating groove 132 and the second seating groove 162 formed in each of the outer and inner diameters of the horn 130 and the horn holder 160 is inserted. do. Accordingly, the upper and lower ends 170a and 170b of the buffer member 170 are caught by the upper and lower ends 132a and 132b of the first seating groove 132 and the upper and lower ends 162a and 162b of the second seating groove 162. The horn 130 in the horn holder 160 is supported so as not to leave.

As described above, the shock absorbing member installed between the horn 130 and the horn holder 160 to absorb the horizontal vibration transmitted from the support unit 120 to the horn 130 may be variously implemented. This will be described based on FIGS. 3 to 8.

3 is a partial cross-sectional view showing a second embodiment of the present invention. Referring to the drawings, a buffer member 170 is installed between the horn 130 and the horn holder 160, the jacket 180 of different materials from the horn holder 160 is the horn holder 160 And between the shock absorbing member 170. One surface of the jacket 180 has a shape corresponding to the second seating groove 162 of the horn holder 160 and is inserted into the second seating groove 162, and the other surface is embedded in the buffer member 170. The buffer member 170 is inserted into the first seating groove 132 of the horn 130 to support the horn 130 from being separated from the horn holder 160. By varying the materials of the horn holder 160 and the jacket 180 as described above, the horizontal vibration generated by the support unit 120 is primarily absorbed by the jacket 180, and the horizontal that is not absorbed by the jacket 180. The vibration absorbing member 170 is completely absorbed.

Meanwhile, it is necessary to replace the scribing wheel 140 by separating the horn 130 assembled to the horn holder 160 from the horn holder 160 according to the worn state of the scribing wheel 140. Accordingly, the separated horn 130 may be pinned to be correctly mounted to the horn holder 160. This will be described with reference to FIGS. 4 and 5.

4 is a partial sectional view showing a third embodiment of the present invention. Referring to the drawings, the horn 130 and the horn holder 160 are mounted so that the separated horn 130 is correctly mounted and fixed to the horn holder so that the scribing wheel 140 can be moved correctly along the cut line. The engagement position is determined and fixed by the pin 166. In particular, the pin hole 164 having the same axis center in the horn 130, the buffer member 170 and the horn holder 160 are formed in the upper and lower, respectively, and the horn 130 and the pin 166 The interference fitting is performed, and the pin 166 and the holder 160 are free in the vertical direction and the horizontal direction (the rotation direction from the center of the axis) is restrained and fixed in a constant direction.

Here, the pin hole is formed at the position of the entire horn due to the characteristics of the ultrasonic wave and the part of the vibration is canceled with each other there is a small amount of vibration, but the vibration of the horn is ideal that does not mutually transfer toward the horn holder, It is preferable that the pin horn 164 is formed at a portion with little vibration. In some cases, a male screw (not shown) may be formed at an outer diameter of the pin 166 and a female screw (not shown) may be formed in the pin hole 164 to be engaged with the male screw.

In addition, as shown in FIG. 5, the pin 166 and the pin hole 164 may be provided except the buffer member 170. That is, the pin hole 164 having the same axis center is formed in the horn 130 and the horn holder 160 except for the buffer member 170, and the pin 166 is inserted into the pin hole 164. Horn 130 and horn holder 160 are fixed. Here, the pin coupling for fixing the position of the horn 130 and the horn holder 160 is not limited to the above-described examples can be implemented in various ways. For example, a protrusion (not shown) having the same role as the pin 164 is integrally formed with the horn 130 or the horn holder 160, and a groove (not shown) matching the protrusion is horn 130. Or the horn holder 160, the position of the horn 130 mounted to the horn holder 160 can be fixed correctly.

6 is a partial sectional view showing a fifth embodiment of the present invention. Referring to the drawings, the amount of vibration energy transmitted from one object to another is proportional to the area in which the objects contact each other. Therefore, minimizing the area where the horn 130 and the horn holder 160 contact each other reduces the path transmitted from the support unit 120 to the cutout 100 to reduce the amount of vibration energy. That is, the concave-convex 172 is formed on any one surface of the buffer member 170 installed between the horn 130 and the horn holder 160, the concave-convex 172 protrudes from the surface of the buffer member 170 It may be in the form of a dome, or may be in the form of a recessed from the surface of the buffer member 170. In addition, the unevenness 172 may be formed on one surface of the shock absorbing member 170 in contact with the horn 130 and the other surface of the shock absorbing member 170 in contact with the horn holder 160. As the concave-convex 172 is formed in the buffer member 170 as described above, the area where the horn holder 160 and the buffer member 170 is in contact with the concave-convex 172 is limited to the cutting unit 100 from the support unit 120 The amount of vibration energy can be reduced by reducing the transmission path of the transmitted horizontal vibration. In the reduced state, the horizontal vibration transmitted from the horn holder 160 to the shock absorbing member 170 along the unevenness 172 is absorbed by the shock absorbing member 170 so that only vertical vibration generated by the ultrasonic vibrator 150 is scribed. To the wheel 140.

7 is an exploded perspective view showing a sixth embodiment of the present invention, and FIG. 8 is a plan sectional view of the sixth embodiment. Referring to the drawings, the buffer member 170 installed between the horn 130 and the horn holder 160 may be arranged along the circumference of the horn 130. That is, the buffer members 173, 175, 177, and 179 divided along the outer circumference of the horn 130 are arranged as shown in the drawing. Each of the divided shock absorbing members is formed in the horn 130 and the horn holder 160, and the first seating recess 132 and the first shock absorbing member 173, 175, 177, and 179 have a shape corresponding to the divided shock absorbing members 173, 175, 177, and 179. 2 is inserted into the seating groove 162. Therefore, when the divided shock absorbing members 173, 175, 177, and 179 are installed between the horn 130 and the horn holder 160, the horn holder is supported by the horn holder 160 so that the horn 130 does not detach and at the same time, The contact area between the shock absorbing member 160 and the shock absorbing member 160 is reduced to reduce the amount of vibration energy transmitted from the horn holder 160 to the shock absorbing member 170, and the horizontal vibration transmitted to the shock absorbing member 170 in a reduced state is absorbed. ) Does not affect the vertical vibration of the scribing wheel 140.

9 is an exploded perspective view showing a seventh embodiment of the present invention, and FIG. 10 is a side cross-sectional view of the seventh embodiment. Referring to the drawings, the vibration absorbing portion is installed between the horn 130 and the support unit 120 so that the vibration generated in the support unit 120 and the cutting unit 100 does not transfer to each other includes a leaf spring 168. do. The leaf spring 168 is formed around the outer diameter of the horn 130, the leaf spring 130 has a predetermined modulus of elasticity, is arranged to be symmetrical up and down along the length of the horn 130. In some cases, the leaf spring 168 may be fixed by forming a groove into which the leaf spring 168 may be inserted around the outer diameter of the horn 130, and the leaf spring 168 may be integrally formed with the horn 130. It may be formed. One end of the leaf spring 168 is caught in the second seating groove 162 and the horn 130 is supported by the horn holder 160. Accordingly, the transmission path of the horizontal vibration transmitted from the support unit 120 to the cut portion 100 is limited to the leaf spring 168, and the horizontal vibration transmitted from the horn holder 160 along the leaf spring 168 is the leaf spring. It is extinguished by the elastic force of 168 and does not affect the vertical vibration of the scribing wheel 140.

In the ultrasonic scribing apparatus of the present invention having the configuration as described above, the scribing wheel moves along the cutting target line of the cutting material, and the vertical vibration generated by the ultrasonic vibrator is transmitted to the scribing wheel to the cutting material. When the live load is applied, the vibration absorbing portion absorbs the horizontal vibration transmitted from the support unit to the horn, thereby promoting the formation of vertical cracks in the material to be cut, thereby enabling precise cutting and improving cutting performance.

On the other hand, the present invention is not limited only to the above-described embodiment, but can be modified and modified within the scope not departing from the gist of the present invention, it should be seen that such modifications and variations are included in the technical idea of the present invention. do.

For example, in the present invention, the mounting groove is formed in the inner diameter of the horn holder and the outer diameter of the horn so that the horn is supported on the horn holder, and the cushioning member is inserted into the seating groove. It may be applied and adhered to the inner diameter of the horn holder and the outer diameter of the horn. In addition, a cushioning member is interposed between the horn and the horn holder to support the horn from being detached from the horn holder.

According to the ultrasonic scribing apparatus according to the present invention, a vibration absorbing unit is installed between the support unit and the horn to absorb vibrations transmitted to each other. In particular, the vibration absorbing portion provided between the horn and the horn holder absorbs the horizontal vibration transmitted from the support unit to the scribing wheel so as not to affect the vertical vibration of the scribing wheel.

In addition, since the influence of horizontal vibration is suppressed in the scribing apparatus of the present invention, vertical cracks are generated in the cut material by the vertical vibration of the scribing wheel, so that the cut material can be precisely and cleanly cut. In addition, the present invention can improve the cutting efficiency and productivity from this.

Claims

The stage where the cutting material is located,

A support unit installed on the stage,

A cut portion installed in the support unit and scribing a cut material;

Ultrasonic scribing apparatus including a vibration absorbing portion provided between the support unit and the cut.

The ultrasonic scribing apparatus according to claim 1, wherein the vibration absorbing unit comprises a buffer member which is any one of natural rubber, synthetic rubber, silicone resin, urethane resin, and foamed resin.

The method according to claim 1 or 2,

The cutting unit includes an scribing wheel, an ultrasonic vibrator and a horn, and an ultrasonic scribing device, characterized in that a cushioning member is installed between the horn and the support unit.

The method according to claim 3,

The cushioning member is ultrasonic scribing apparatus, characterized in that formed to surround the outside of the horn.

The method according to claim 3,

And the buffer member is arranged along the circumference of the horn.

The method according to claim 3,

Ultrasonic scribing apparatus different in material from the support unit and further comprising a jacket installed between the support unit and the buffer member.

The method according to claim 3,

And a pin hole having the same axis center in the horn, the buffer member, and the support unit, and a pin is inserted into the pin hole to fix the horn and the support unit in a predetermined direction.

The method according to claim 3,

And a pin hole having the same axial center in the horn and the support unit, and a pin is inserted into the pin hole to fix the horn and the support unit in a predetermined direction.

The method according to any one of claims 7 to 8,

And the pin hole is formed at a portion where vibrations of the horn and the support unit are transmitted to each other at least.

The method according to any one of claims 7 to 8,

Ultrasonic scribing apparatus, characterized in that the formation position of the pin hole is formed in a portion where the vibration of the horn and the support unit is not transmitted to each other.

The method according to claim 3,

Ultrasonic scribing apparatus, characterized in that irregularities formed on at least one surface of the buffer member in contact with the horn and the support unit.

The ultrasonic scribing apparatus according to claim 1, wherein the vibration absorbing portion comprises a leaf spring.

The method according to any one of claims 1 to 12,

The cutting unit includes an scribing wheel, an ultrasonic vibrator and a horn, and an ultrasonic scribing apparatus, characterized in that a leaf spring is installed between the horn and the support unit.

The ultrasonic scribing apparatus according to claim 13, wherein the leaf spring is integrally formed with the horn and one end of the leaf spring is inserted into the groove of the support unit and fixed in a constant direction.