KR102582796B1 - Testor socket - Google Patents

Abstract

A test socket according to a preferred embodiment of the present invention is disposed between a test apparatus and a test subject device to electrically connect the test apparatus and the test subject device, and is connected to a terminal of the test subject device. a plurality of conductive portions, each corresponding to a terminal of the inspection device, electrically connecting a terminal of the inspection device and a terminal of the device to be inspected; and an insulating part for insulating and supporting the conductive parts from each other, wherein the conductive part is disposed in a vertical direction of the insulating part, and the conductive part includes: a sheet; and a plurality of wires extending from the top to the bottom of the sheet.

Description

Test socket {TESTOR SOCKET}

The present invention relates to an inspection socket, and more specifically, to an inspection socket disposed between a device to be inspected and an inspection device and used in an inspection process to determine whether the device to be inspected is defective.

For electrical testing of a device to be inspected, a test socket that contacts the device to be inspected and the test device to electrically connect the device to be inspected and the test device is used in the field. The inspection socket transmits the electrical signal of the inspection device to the inspection device and transmits the electrical signal of the inspection device to the inspection device. As such inspection sockets, pogo pin sockets and conductive rubber sheets are known in the art.

The pogo pin socket has a pogo pin that is pressed up and down in response to external force applied to the device being inspected. Since the pogo pin socket requires a part to accommodate the pogo pin, it is difficult to have a thin thickness and is difficult to apply to terminals of a device under test having a fine pitch.

The conductive rubber sheet can be elastically deformed in response to external force applied to the device being inspected. The conductive rubber sheet has a plurality of conductive parts that electrically connect a device to be inspected and an inspection apparatus, and an insulating part that separates the conductive parts. The insulating portion may be made of cured silicone rubber. A conductive rubber sheet is advantageous compared to a pogo pin socket in that it can be manufactured at a low manufacturing cost, does not damage the terminal of the device under test, and has a very thin thickness. Therefore, attempts to replace pogo pin test sockets with conductive rubber sheets are being attempted in the field of inspection of devices under test.

This conductive rubber sheet has a plurality of conductive parts, and each conductive part has a large number of conductive particles arranged in a vertical direction within a soft elastic insulating material. During the test process, when the terminal of the device under test is pressed against the conductive part, the conductive part is compressed and electrical conduction is possible in the vertical direction. Later, when a predetermined electrical signal is applied from the test device, the signal passes through the conductive part. As it flows to the terminal of the device being tested, a certain electrical test is performed.

1 and 2 show a conventional inspection socket 10. The illustrated inspection socket 10 extends in the thickness direction and has a conductive portion 11 in which a plurality of conductive particles 11a are arranged in the thickness direction within the silicone rubber, and is disposed between the conductive portions 11 to conduct the conductor. It consists of a socket body that supports the parts 11 and includes an insulating part 12 made of silicone rubber.

With this inspection socket 10 seated on the inspection device 30, the terminal 21 of the device to be inspected 20 is pressed into contact with the upper end of the conductive portion 11 and then removed from the inspection device 30. When a predetermined electrical signal is applied, the electrical signal is transmitted from the pad 31 of the test device 30 through the conductive part 11 to the terminal 21 of the device under test 20, thereby performing a predetermined electrical test. .

However, such conventional inspection sockets made of conductive particles have a problem in that as the pitch becomes finer, bridges between conductive parts filled with conductive particles (a state in which particles between conductive parts are connected and short circuits occur) occur.

The present invention was conceived to solve the problems of the prior art as described above, and its purpose is to prevent bridging between conductive parts, stably perform electrical inspection of devices under inspection, and provide an inspection socket that is advantageous for high-frequency signal testing. There is.

A test socket according to a preferred embodiment of the present invention is disposed between a test apparatus and a test subject device to electrically connect the test apparatus and the test subject device, and is connected to a terminal of the test subject device. a plurality of conductive portions, each corresponding to a terminal of the inspection device, electrically connecting a terminal of the inspection device and a terminal of the device to be inspected; and an insulating part for insulating and supporting the conductive parts from each other, wherein the conductive part is disposed in a vertical direction of the insulating part, and the conductive part includes: a sheet; and a plurality of wires extending from the top to the bottom of the sheet.

In addition, the plurality of wires are characterized in that they are arranged to be spaced apart along the side direction of the sheet.

Additionally, the sheet is made of soft synthetic resin, preferably silicone.

Additionally, the sheet is characterized in that it is arranged in a circularly rolled form in the conductive portion.

In addition, the conductive part is characterized in that a plurality of conductive particles and an elastic material are disposed inside the sheet rolled into a circle.

Additionally, the conductive particles are characterized in that they are distributed in the center of the elastic material.

In addition, the conductive part is characterized in that an air charging part is disposed inside the sheet rolled into a circle.

Additionally, in the conductive portion, the sheet is arranged in a rolled form multiple times.

Additionally, the sheet is characterized in that it is arranged in a rolled form from the center of the conductive portion to the outer periphery of the conductive portion.

Additionally, a rubber pad is attached to the top or bottom of the conductive portion, and the rubber pad includes an elastic material and a plurality of conductive particles.

Additionally, the elastic material is characterized in that it is silicone rubber.

The method of manufacturing a test socket according to the present invention is disposed between a test apparatus and a test subject device and electrically connects the test equipment and the test subject device, wherein the test socket is a plurality of conductive parts, each corresponding to a terminal of the test device, each corresponding to a terminal of the test device, and electrically connecting the terminal of the test device and the terminal of the test device; and an insulating part for insulating and supporting the conductive parts from each other, comprising: a) forming a plurality of wires along the lateral direction of the sheet and arranging the wires extending from the top to the bottom of the sheet; and b) after step a), the sheet is placed in the insulating part in a rolled form.

In addition, c) it is characterized by further comprising the step of filling the inside of the sheet rolled into a circle after step a) with a liquid elastic material in which a plurality of conductive particles are dispersed.

In addition, c-1) after filling the liquid elastic material, it further includes the step of placing upper and lower magnetic molds on the upper and lower sides of the center of the liquid elastic material and applying magnetism to collect the conductive particles in the center of the liquid elastic material. It is characterized by:

The inspection socket according to the present invention has the advantage of preventing bridging between conductive parts, stably performing electrical inspection of the device to be inspected, and being advantageous for high-frequency signal testing.

Figure 1 is a diagram showing a conventional inspection socket,
Figure 2 is a diagram illustrating a state in which the device to be tested is pressed into contact with a test socket for the test in Figure 1;
Figure 3 is a diagram showing a state in which the inspection socket of the present invention is mounted on an inspection device;
Figure 4 is a plan view of a socket for inspection according to a first embodiment of the present invention;
Figure 5 is a diagram showing a wire sheet for forming a conductive portion in a socket for inspection according to the first embodiment of the present invention;
Figure 6 is a perspective view of the conductive portion in the inspection socket according to the first embodiment of the present invention;
7 to 9 are diagrams showing examples of longitudinal cross-sectional views of inspection sockets according to the present invention;
Figure 10 is a plan view of a socket for inspection according to a second embodiment of the present invention;
Figure 11 is a perspective view of the conductive part in the inspection socket according to the second embodiment of the present invention;
Figure 12 is a plan view of a socket for inspection according to a third embodiment of the present invention;
Figure 13 is a perspective view of the conductive part in the inspection socket according to the third embodiment of the present invention;
Figure 14 is a longitudinal cross-sectional view of a socket for inspection according to a fourth embodiment of the present invention;
Figure 15 is a perspective view of a socket for inspection according to a fifth embodiment of the present invention.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and will be implemented in various different forms. The present embodiments only serve to ensure that the disclosure of the present invention is complete and that common knowledge in the technical field to which the present invention pertains is not limited. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Accordingly, in some embodiments, well-known process steps, well-known device structures, and well-known techniques are not specifically described to avoid ambiguous interpretation of the present invention. Like reference numerals refer to like elements throughout the specification.

In the drawing, the thickness is enlarged to clearly express various layers and areas. Throughout the specification, similar parts are given the same reference numerals. When a part of a layer, membrane, region, plate, etc. is said to be "on" another part, this includes not only being "directly above" the other part, but also cases where there is another part in between. Conversely, when a part is said to be “right on top” of another part, it means that there is no other part in between. Additionally, when a part of a layer, membrane, region, plate, etc. is said to be “beneath” another part, this includes not only cases where it is “directly below” another part, but also cases where there is another part in between. Conversely, when a part is said to be "right below" another part, it means that there is no other part in between.

Spatially relative terms such as “below”, “beneath”, “lower”, “above”, “upper”, etc. are used as a single term as shown in the drawing. It can be used to easily describe the correlation between elements or components and other elements or components. Spatially relative terms should be understood as terms that include different directions of the element during use or operation in addition to the direction shown in the drawings. For example, if an element shown in the drawings is turned over, an element described as “below” or “beneath” another element may be placed “above” the other element. Accordingly, the illustrative term “down” may include both downward and upward directions. Elements can also be oriented in other directions, so spatially relative terms can be interpreted according to orientation.

In this specification, when a part is connected to another part, this includes not only the case where it is directly connected, but also the case where it is connected with another element in between. Additionally, when it is said that a part includes a certain component, this does not mean that other components are excluded, but that it may further include other components, unless specifically stated to the contrary.

In this specification, terms such as first, second, and third may be used to describe various components, but these components are not limited by the terms. The above terms are used for the purpose of distinguishing one component from other components. For example, without departing from the scope of the present invention, the first component may be named a second or third component, etc., and similarly, the second or third component may also be named alternately.

Unless otherwise defined, all terms (including technical and scientific terms) used in this specification may be used with meanings that can be commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless clearly specifically defined.

The test socket 100 in the present invention is for electrical connection of two electronic devices. One of the two electronic devices may be the test device 160, and the other can be tested by the test device 160. It may be a device to be inspected (150).

The test socket 100 of the present invention can be used for electrical connection between the test device 160 and the test device 150 during electrical testing of the test target device 150, and can be used for the manufacturing of the test target device 150. In post-processing, it can be used for final electrical inspection of the device under test 150.

As shown in Figure 3, the test socket according to the present invention is disposed between the test apparatus 160 and the test subject device 150 and electrically connects the test apparatus 160 and the test subject device 150.

Here, the device under test 150 may be a semiconductor package, but is not limited thereto. A semiconductor package is a semiconductor device that packages a semiconductor IC chip, multiple lead frames, and multiple terminals in a hexahedral shape. The semiconductor IC chip can be a memory IC chip or a non-memory IC chip. As the terminal, a pin, solder ball, etc. may be used. The device under test 150 has a plurality of hemispherical terminals 151 on its lower side.

The test device 160 can test the electrical characteristics, functional characteristics, operation speed, etc. of the device to be tested 150, and has a plurality of devices capable of outputting an electrical test signal and receiving a response signal within the board on which the test is performed. It may have a terminal 161.

The inspection socket 100 according to a preferred embodiment of the present invention includes a conductive rubber sheet 110 constituting the socket body and a support frame 140 supporting the conductive rubber sheet 110.

Figure 3 is a diagram showing a state in which the inspection socket of the present invention is mounted on an inspection device.

The terminal 151 of the device to be inspected 150 is electrically connected to the terminal 161 of the corresponding inspection device 160 through the socket for inspection 100, and the socket for inspection 100 is connected to the device to be inspected 150. ) and the corresponding terminal 161 of the inspection device 160 are electrically connected in the vertical direction to inspect the device to be inspected 150.

In the inspection socket 100 according to the present invention, the conductive rubber sheet 110 includes a plurality of conductive parts 120 and an insulating part 130.

The conductive portion 120 is intended to electrically connect each terminal 151 of the device to be inspected to the terminal of the corresponding inspection device 160. For this purpose, each conductive portion 120 is used to electrically connect each terminal 151 of the device to be inspected. It is disposed at a position corresponding to each terminal 151 of the device 150.

Figure 4 is a plan view of a test socket according to the first embodiment of the present invention, Figure 5 is a diagram showing a wire sheet for forming a conductive part in the test socket according to the first embodiment of the present invention, and Figure 6 is a perspective view of the conductive part in the inspection socket according to the first embodiment of the present invention.

In the inspection socket 100 according to the first embodiment of the present invention, the conductive portion 120 is formed by arranging a plurality of wires 122 spaced apart along the longitudinal direction on a sheet 121, and the sheet ( In this embodiment, 121) is made of a synthetic resin sheet 121 made of a soft material such as silicone.

As shown in Figure 5, the conductive portion 120 couples a plurality of wires 122 spaced apart in the lateral direction to a synthetic resin sheet 121 extending in the left and right lateral directions, and includes a synthetic resin sheet on which the wires 122 are disposed ( 121) is rolled into a circle to form the conductive portion 120.

Each metal wire 122 is formed to extend from the top to the bottom of the synthetic resin sheet 121 as shown, and there is no particular limitation as long as the material of the wire 122 is a conductive metal, but in this embodiment, the wire 122 is Copper or wire plated with gold, silver, or platinum may be used.

In the present invention, the sheet 121 on which the wire 122 is arranged is cut to a desired length, and then the cut sheet 121 is rolled to correspond to the terminal 151 of the device to be inspected 150 on the conductive rubber sheet 110. The conductive parts 120 are formed by arranging them at respective positions.

The manufacturing process of the inspection socket 100 including the conductive portion 120 is a) a plurality of wires 122 are arranged along the side direction of the sheet 121, and the wire extends from the top to the bottom of the sheet 121. placing 122; and b) a step of placing the sheet 121 in the insulating portion 130 in a rolled form after step a).

That is, first, the conductive rubber sheet 110 is cured, a through hole penetrating upward and downward is drilled in the cured conductive rubber sheet 110, a wire 122 is placed in the through hole, and a synthetic resin sheet such as silicone is rolled into a circle. The conductive portion 120 is formed by inserting (121). Or, as another example, after fixing the circular rolled sheet 121 manufactured as above in a mold, a liquid elastic material for forming a conductive rubber sheet is injected and cured to produce a conductive rubber having a conductive portion 120 and an insulating portion 130. Sheet 110 is manufactured.

In this embodiment, in the conductive portion 120, a plurality of conductive particles and elastic materials 124 are disposed in the central space created by rolling the synthetic resin sheet 121 on which the wire 122 is disposed in a circle.

The elastic material 124 disposed at the center of the conductive portion 120 is made of silicon or silicone rubber in this embodiment, and a plurality of conductive particles may be distributed throughout the elastic material 124. It may be distributed only in the center of (124). For example, the conductive particles may be distributed within a 1/2 radius in the radial direction from the center of the cylindrical elastic material 124, and the conductive particles may not be distributed outside the radius.

Looking at the manufacturing process when distributing conductive particles only in the center of the elastic material 124, the empty space in the center created by rolling the synthetic resin sheet 121 on which the wire 122 is placed into a circle is filled with a liquid elastic material in which conductive particles are dispersed. Then, magnetic molds are placed on the upper and lower sides of the center of the liquid elastic material to apply magnetism. Then, the conductive particles dispersed in the liquid elastic material are aligned in the vertical direction and gather only at the center, and in this state, the liquid elastic material is hardened.

In this way, if the conductive particles are collected only in the center of the elastic material 124, a coaxial structure can be formed in the conductive portion 120 with the signal conductive portion in the center, the insulating portion in the middle, and the wire shielding portion on the outside, allowing for high-frequency testing. It has advantageous advantages.

Conductive particles are metal particles such as iron, nickel, and cobalt, or alloy particles thereof, or particles containing these metals, or these particles are core particles, and gold, silver, palladium, rhodium, etc. are deposited on the surface of the core particle. Examples include those in which a metal with good conductivity is plated, or inorganic material particles such as metal particles or glass beads, or polymer particles as core particles, and conductive metals such as nickel and cobalt are plated on the surface of the core particles. .

The insulating portion 130 is disposed around the conductive portion 120 to maintain the shape of the conductive portion 120 and maintain the conductive portion 120 in the vertical direction while insulating and supporting each conductive portion 120 from each other. In other words, the insulating portion 130 is formed of an elastic material and has elasticity in the vertical and horizontal directions.

The insulating portion 130 is made of an elastic insulating material and is formed by hardening the liquid insulating material. As an example, silicone or silicone rubber may be used as an elastic insulating material constituting the insulating portion 130, but is not necessarily limited thereto.

Next, the operational effects of the inspection socket 100 according to the present invention configured as described above will be described.

The inspection socket 100 according to the present invention is disposed on the inspection device 160. At this time, each conductive portion 120 of the inspection socket 100 is placed in contact with each terminal 161 of the inspection device 160 to be electrically connected.

As shown, the inspection socket 100 is disposed with the conductive rubber sheet 110 supported on the inspection device 160 by the support frame 140.

In this way, with the inspection socket 100 disposed on the inspection device 160, the inspection target device 150 is pressed from the top of the inspection socket 100 to conduct an electrical inspection of the inspection target device 150. At this time, each terminal 151 of the device to be inspected 150 is brought into contact with each conductive portion 120 of the socket for inspection 100, so that the terminal 151 of the device to be inspected 150 and the socket for inspection ( The conductive portion 120 of 100 is electrically connected.

In this way, the test is performed by the test device 160 while the terminal 161 of the test device 160 and the terminal 151 of the device to be tested 150 are electrically connected by the test socket 100. .

The inspection socket according to the present invention is constructed as described above, so that, firstly, it is simple to manufacture and is advantageous for mass production; second, the metal wire has a simple conductive path, which is advantageous for conducting electricity and has low resistance; and third, as described above, the coaxial The structure can be applied, which has the advantage of high-frequency testing.

Meanwhile, FIGS. 7 to 9 show longitudinal cross-sectional views of the inspection socket of the present invention. As shown in FIG. 7, the lower portion of the conductive portion 120 of the conductive rubber sheet 110 is protruded from the insulating portion 130. It may be formed so that both the upper and lower portions of the conductive portion 120 protrude from the insulating portion 130 as shown in FIG. 8, and the upper and lower portions of the conductive portion 120 may protrude from the insulating portion 130 as shown in FIG. 9. It can also be formed so that it does not protrude at all.

Next, the inspection socket 100 according to the second embodiment of the present invention will be described. Figure 10 is a plan view of a test socket according to a second embodiment of the present invention, and Figure 11 is a perspective view of a conductive portion in the test socket according to a second embodiment of the present invention.

The difference between the second embodiment and the first embodiment is that in the first embodiment, the conductive particles and the elastic material 124 are disposed in the center of the conductive portion 120, but in the second embodiment, the conductive particles and the elastic material 124 are arranged in a circular shape in the conductive portion 120. The point is that an air charging part 123 filled with air is formed in the internal space of the rolled sheet 121.

As in the present embodiment, the air charging part 123 is formed in the inner space of the sheet 121 rolled into a circle in the conductive part 120, so that the terminal 151 of the device to be inspected 150 is connected to the test socket 100. When the conductive portion 120 is pressed, a wide space for the sheet 121 of the conductive portion 120 to expand in the horizontal direction is secured, thereby increasing the elastic restoring force of the conductive portion 120.

Other configurations and effects are the same as the previous embodiment, so detailed description thereof will be omitted here.

Next, the inspection socket 100 according to the third embodiment of the present invention will be described. Figure 12 is a plan view of a test socket according to a third embodiment of the present invention, and Figure 13 is a perspective view of a conductive portion of the test socket according to a third embodiment of the present invention.

The difference between the third embodiment and the previous embodiment is that in the third embodiment, the sheet 121 on which the wire 122 is disposed is filled up to the center of the conductive portion 120.

That is, the conductive portion 120 arranges metal wires 122 at regular intervals in the lateral direction of the sheet 121, such as silicon, and rolls the sheet 121 on which the wires 122 are disposed to form the conductive portion 120. It is the same in that it forms.

However, in the third embodiment, as shown, the sheet 121 on which the wire 122 is disposed is wound multiple times to fill the center of the conductive portion 120.

In this way, when the sheet 122 on which the wires are arranged is rolled multiple times and filled to the center of the conductive portion 120, there is an advantage in that it is easy to manufacture a fine pitch conductive portion.

Other configurations and effects are the same as the previous embodiment, so detailed description thereof will be omitted here.

Next, the inspection socket 100 according to the fourth embodiment of the present invention will be described. Figure 14 is a longitudinal cross-sectional view of a socket for inspection according to a fourth embodiment of the present invention.

What makes the fourth embodiment different from the previous embodiment is that, in this embodiment, upper and lower high-density rubber pads 125 are disposed on the upper and lower sides of the circular or multiple-wound sheet 121.

That is, in this embodiment, high-density rubber pads 125 are attached to the upper and lower parts of the conductive portion 120, respectively.

In this embodiment, the high-density rubber pad 125 is made of a plurality of conductive particles distributed in an elastic material. As a specific example, the elastic material may be made of silicon or silicone rubber, and a plurality of conductive particles may be distributed within the silicone rubber.

Conductive particles are metal particles such as iron, nickel, and cobalt, or alloy particles thereof, or particles containing these metals, or these particles are core particles, and gold, silver, palladium, rhodium, etc. are deposited on the surface of the core particle. Examples include those in which a metal with good conductivity is plated, or inorganic material particles such as metal particles or glass beads, or polymer particles as core particles, and conductive metals such as nickel and cobalt are plated on the surface of the core particles. .

Accordingly, the high-density rubber pad 125 is compressed in the thickness direction by pressure, and the conductive particles come into close contact with each other to become electrically conductive. As a result, the terminals 151 of the device under test 150 are connected to the conductive portion 120. They are electrically connected, and the conductive portion 120 is electrically connected to the terminal 161 of the inspection device 160.

As such, in this embodiment, the high-density rubber pad 125 is attached to the top or bottom, or both the top and bottom of the conductive portion 120 in the previous embodiment, which has the advantage of improving the elastic recovery force and preventing damage to the terminals of the semiconductor device. there is.

Other configurations and effects are the same as the previous embodiment.

Next, the inspection socket 100 according to the fifth embodiment of the present invention will be described. Figure 15 is a perspective view of a socket for inspection according to a fifth embodiment of the present invention.

The difference between the fifth embodiment and the previous embodiment is that in the fifth embodiment, the wire 122 is arranged in a spiral shape on the circularly rolled sheet 121, as shown. In this embodiment, the wire 122 is arranged in a spiral shape on the sheet 121, so that when the terminal 151 of the inspection object 150 presses the sheet 121, it serves as an elastic spring in addition to electrical connection. Resilience is improved.

Other configurations and effects are the same as the previous embodiment.

Above, the present invention has been described with reference to preferred embodiments, but the present invention is not limited thereto, and various modifications may be made by those skilled in the art without departing from the gist of the present invention as set forth in the claims below. There will be.

100: Socket for inspection 110: Conductive rubber sheet
120: conductive part 130: insulating part
140: support frame 150: test device
160: inspection device

Claims (16)

In the test socket disposed between the test apparatus and the test subject device and electrically connecting the test apparatus and the test subject device,
a plurality of conductive parts, each corresponding to a terminal of the test device, each corresponding to a terminal of the test device, and electrically connecting the terminal of the test device and the terminal of the test device; and
It includes an insulating part for insulating and supporting the conductive parts from each other,
The conductive portion is disposed in a through hole formed in a vertical direction of the insulating portion,
The conductive part
A sheet disposed in a circular rolled shape in contact with the surface of the through hole to form a central space; and
A socket for inspection, comprising: a plurality of wires inserted at regular intervals in the circumferential direction inside the sheet and extending from the top to the bottom of the sheet. delete According to paragraph 1,
The sheet is an inspection socket made of soft synthetic resin. According to paragraph 1,
The sheet is an inspection socket made of silicone. delete According to paragraph 1,
An inspection socket in which a plurality of conductive particles and elastic materials are disposed in the central space. According to clause 6,
A socket for inspection in which the conductive particles are distributed in the center of the elastic material. According to paragraph 1,
An inspection socket in which an air charging part is placed in the central space. According to paragraph 1,
A socket for inspection in which the sheet is arranged in a rolled form multiple times in the conductive portion. delete According to paragraph 1,
A rubber pad is attached to the top or bottom of the conductive part,
The rubber pad is
elastic material and
An inspection socket containing a large number of conductive particles. According to clause 11,
An inspection socket where the elastic material is silicone rubber. In the method of manufacturing a test socket disposed between a test apparatus and a test subject device to electrically connect the test apparatus and the test subject device,
The test socket includes a plurality of conductive portions corresponding to terminals of the test device and electrically connecting terminals of the test device and terminals of the test device, respectively, corresponding to terminals of the test device. and
It includes an insulating part for insulating and supporting the conductive parts from each other,
The conductive portion is disposed in a through hole formed in a vertical direction of the insulating portion,
The manufacturing method of the inspection socket is,
a) forming a plurality of wires along the side direction of the sheet on a straight line inside the sheet, inserting and arranging the plurality of wires extending from the top to the bottom of the sheet; and
b) After step a), the sheet is placed in a circular rolled shape in contact with the surface of the through hole to form a central space, and the plurality of wires are arranged at regular intervals in the circumferential direction inside the sheet. A method of manufacturing a socket for inspection, comprising the steps: delete According to clause 13,
c) A method of manufacturing a socket for inspection, further comprising filling the inside of the sheet rolled into a circle after step a) with a liquid elastic material in which a plurality of conductive particles are dispersed. According to clause 15,
c-1) After filling the liquid elastic material, the test further includes the step of placing upper and lower magnetic molds on the upper and lower sides of the center of the liquid elastic material and applying magnetism to cause the conductive particles to gather in the center of the liquid elastic material. Method of manufacturing a socket for a dragon.

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