KR101941028B1 - Apparatus for jetting mixed fluid with nozzle of slit type - Google Patents

Abstract

A mixed fluid injector having a slit-type injection hole according to an embodiment of the present invention includes a block portion having a region where a cross-sectional area of a fluid is narrowed according to a moving direction of a fluid, at least two different fluids are mixed, A first mixing unit provided in the block unit, a second mixing unit provided in the block unit to mix the first mixed fluid with at least one fluid to generate a second mixed fluid, and a discharge unit provided in the block unit for spraying the second mixed fluid out in a virtual plane form.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a mixed fluid ejecting apparatus having a slit type ejection orifice,

The present invention relates to a mixed fluid injector having a slit-type injection hole that uniformly injects a mixed fluid and is easy to process.

In general, a semiconductor device is manufactured by repeatedly carrying out various unit processes such as a thin film deposition process, a photolithography process, an etching process, a cleaning process, and a polishing process.

In particular, the cleaning process removes small particles, contaminants and unnecessary film remaining on the surface of the semiconductor substrate when performing these unit processes. In recent years, as the pattern formed on the semiconductor substrate has become finer, the importance of the cleaning process has increased.

Such a cleaning process includes a chemical solution treatment process for etching or removing contaminants on a semiconductor substrate by a chemical reaction, a rinsing process for cleaning a semiconductor wafer treated with a chemical solution by a chemical solution treatment process with deionizewater (DIW) And a drying step of drying the processed semiconductor wafer.

Generally, in the chemical solution treatment process, a nozzle for supplying a chemical liquid is disposed on an upper portion of a semiconductor substrate, and a nozzle cleans the semiconductor substrate by spraying a chemical solution on an upper surface of the semiconductor substrate. Such a chemical solution treatment process can cause environmental pollution in accordance with the used chemical solution, and a process for preventing environmental pollution is required, so that the cleaning cost is often high.

On the other hand, a technique for cleaning a semiconductor substrate without using such a chemical solution has been developed. For example, pure water and steam are injected into a semiconductor substrate to clean a washing surface.

At present, the technique of cleaning with pure water and steam has a disadvantage in that the structure of the nozzle for injecting the fluid is complicated and difficult to be processed, and the problem is that the washing face is not uniformly cleaned depending on the shape of the injection hole of the nozzle.

Particularly, when a plurality of injection holes are provided in one injection device, the cleaning performance of the areas where the plurality of injection holes are overlapped with each other and the areas where the plurality of injection holes are not overlapped can be different from each other. In this case, it is very difficult to remove the contamination when the inside of the injecting apparatus, especially the inside of the nozzle, is contaminated. There are disadvantages.

In addition, when a large number of structures are manufactured in an assembled form, gaps due to high-temperature and high-pressure steam are generated, and the rigidity of the assembled structure is lowered, and the pressure due to the assembled structure is reduced, .

On the other hand, when a large number of structures constituting the spraying apparatus are manufactured in an assembled form, it is difficult to assemble and disassemble the spraying apparatus for internal cleaning, and the processing cost of the structure increases.

SUMMARY OF THE INVENTION An object of the present invention is to provide a mixed fluid jetting apparatus having a slit-type jetting port uniformly jetting a mixed fluid onto a cleaning surface when jetting a mixed fluid including pure water (DIW), steam, I have to.

Another object of the present invention is to provide a mixed fluid ejection apparatus having a slit-type ejection orifice which is manufactured or processed by an assembly process other than a general welding process.

It is still another object of the present invention to provide a mixed fluid ejection apparatus having a slit-type ejection orifice including a slit-shaped ejection port with reduced contamination due to welding and easy internal cleaning.

Another object of the present invention is to provide a mixed fluid ejection apparatus having a slit-type ejection orifice having a prefabricated structure suitable for mass production and rigidity maintenance through a mold, thereby reducing manufacturing costs.

Another object of the present invention is to provide a mixed fluid ejection apparatus having a slit type ejection orifice which can be cleaned with at least one ejection port of at least about 25 mm to 3500 mm when a large area is applied.

According to an aspect of the present invention, there is provided a mixed fluid ejection apparatus having a slit-type ejection orifice according to an embodiment of the present invention includes a block having a region where a sectional area of a fluid is narrowed according to a moving direction of a fluid, The first mixed fluid, the first mixed fluid, and the at least one fluid are mixed to form a second mixed fluid, and the first mixed fluid, the second mixed fluid, And a discharging portion provided in the block portion, the discharging portion having a slit-shaped jetting port for spraying the second mixed fluid to the outside in a virtual plane shape.

In an exemplary embodiment, the block may include at least two or more blocks and may include a mixing space having a first inner surface and a second inner surface facing each other with respect to a moving direction of the fluid, the asymmetric cross- can do.

In an embodiment, the first inner surface may include a plate surface shape depending on a direction of movement of the fluid.

In an embodiment, the second inner surface may include an inclined shape that approaches the first inner surface in accordance with the direction of movement of the fluid.

In an embodiment, the first mixing portion may reduce at least one of a time at which the at least two or more different fluids reach the second mixing portion, a reaching path, and an arrival speed at the moment of reaching the second mixing portion And may include at least one dispersing portion.

In an embodiment, the dispersing portion may be formed in at least one of a shape apart from the second inner surface or a shape formed integrally with the second inner surface.

In an embodiment, the first mixing portion may include at least two fluid supplying portions for supplying the at least two or more different fluids.

In an embodiment, the at least two or more different fluids include compressed dry air (CDA) and steam, and the first mixed fluid is selected from the group consisting of two streams of mixed dry air (CDA) Mixed phase fluid.

In an embodiment, the second mixing portion may include at least one or more other fluid supplying portions for supplying the at least one fluid.

In an embodiment, the at least one or more different fluids include deionizewater (DIW), and the second mixed fluid is a tertiary mixed fluid (CDW) mixed with compressed dry air (CDA), steam and DIW . ≪ / RTI >

In an embodiment, the discharge portion may include an acceleration flow passage having an expanding structure in the direction of the injection port.

In an embodiment, the first mixing portion, the second mixing portion, and the discharging portion may be simultaneously formed through an assembling process for at least two blocks.

In an embodiment, the at least two blocks may be manufactured by mass production through a mold.

In an embodiment, the block may include at least one shielding structure that prevents at least one of the at least two or more different fluids, the first mixed fluid, and the at least one fluid from leaking out.

In an embodiment, the width of the slit may be included in the range of 25 mm to 3500 mm corresponding to the area of the object to be ejected.

The apparatus may further include a controller for controlling at least one of a flow rate and a flow rate of the second mixed fluid injected to the outside in correspondence to the interval of the slits.

In an embodiment, the control unit rotates clockwise or counterclockwise, and the interval of the slits may be increased or decreased corresponding to the rotation of the control unit.

In one embodiment of the present invention, at least one or more holding portions may be provided to maintain at least one of a flow velocity and a flow rate of the second mixed fluid ejected to the outside in correspondence with the intervals of the slits.

In an exemplary embodiment, the at least one holding portion may be formed to penetrate through the discharging portion or may be inserted into the discharging portion, and the interval of the slits may be maintained to be constant in correspondence with the transverse length of the at least one holding portion .

The apparatus may further include a block provided outside the block and supplying the at least one fluid to the second mixer.

In the embodiment, at least one of the at least one liquid curtain-forming portion and at least one suction portion, which is provided outside the jetting port, includes at least one liquid curtain-forming portion and at least one suction portion, 2 mixed fluid is sprayed to the outside to prevent at least one of the generated contaminants from being scattered, the at least one suction portion being formed at the periphery of the injection opening, A suction region for sucking at least one of the generated contaminants and discharging the contaminants to the outside can be formed.

In an embodiment, the at least one liquid curtain-forming portion and the at least one suction portion may be located at least one of a front end and a rear end of the injection port.

In an embodiment, the distance between the suction area and the jetting port may be greater than the distance between the liquid curtain and the jetting port.

The effect of the mixed fluid ejecting apparatus having the slit-type ejection orifice according to the present invention will be described as follows.

According to at least one of the embodiments of the present invention, when a mixed fluid including pure water (DIW) and steam is sprayed onto the washing surface, the mixed fluid can be uniformly sprayed onto the washing surface.

Also, according to at least one of the embodiments of the present invention, it is possible to fabricate or process the assembly process rather than a general welding process.

Further, according to at least one of the embodiments of the present invention, contamination due to welding can be reduced, and a slit-shaped injection hole that facilitates internal cleaning can be included.

Also, according to at least one of the embodiments of the present invention, it is possible to have a prefabricated structure suitable for mass production and rigidity maintenance through a mold, thereby reducing manufacturing costs.

Also, according to at least one of the embodiments of the present invention, when large area is applied, it can be cleaned by at least one jet opening from about 25 mm to 3500 mm.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing one embodiment of a mixed fluid ejecting apparatus having a slit type ejection opening according to an embodiment of the present invention.
2 is a cross-sectional view of another embodiment of a mixed fluid ejection apparatus having a slit-type ejection orifice according to an embodiment of the present invention.
FIG. 3 is a perspective view of a mixed fluid ejection apparatus having a slit type ejection opening according to an embodiment of the present invention. Referring to FIG.
4 is a view showing an example in which a mixed fluid is injected in a perspective view of a mixed fluid injector having a slit-type injection hole according to an embodiment of the present invention.
5 is a view showing an example in which a mixed fluid is formed in a cross section of a mixed fluid ejecting apparatus having a slit type ejection opening according to an embodiment of the present invention.
FIG. 6 is a view showing an example of controlling at least one of a flow velocity and a flow rate of a mixed fluid in a mixed fluid injection device having a slit-type injection hole according to an embodiment of the present invention.
FIG. 7 is a view showing an example in which at least one of a flow rate and a flow rate of a mixed fluid is constantly maintained in a mixed fluid injection device having a slit-type injection hole according to an embodiment of the present invention.
Fig. 8 is a view showing a stream of mixed fluid in the example of Fig. 7; Fig.
9 is a view showing an example in which a liquid curtain forming unit and a suction unit are included in a mixed fluid ejecting apparatus having a slit type ejection opening according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

However, the mixed fluid injector having the slit-type injection port described with reference to FIGS. 1 to 9 will be described with respect to only the necessary components in introducing the characteristic functions according to the present invention. It will be apparent to those skilled in the art that the element may be included in a mixed fluid ejection apparatus having a slit type ejection opening.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing one embodiment of a mixed fluid ejecting apparatus having a slit type ejection opening according to an embodiment of the present invention. 2 is a cross-sectional view of another embodiment of a mixed fluid ejection apparatus having a slit type ejection orifice according to an embodiment of the present invention.

Referring to FIGS. 1 and 2, a mixed fluid ejecting apparatus having a slit type ejection opening may include a block 110. The block unit 110 may include a mixing unit 120 and a discharging unit 130. The mixing unit 120 may include a first mixing unit 121 and a second mixing unit 122. [ have.

First, the block 110 may have a region where the cross-sectional area of the fluid is narrowed according to the moving direction of the fluid. For this purpose, a first inner surface 111 and a second inner surface 112, which have at least two blocks and are opposed to each other with respect to the moving direction of the fluid, may be formed. At this time, a mixed space having an asymmetrical cross section in the longitudinal direction can be formed. Here, the cross-sectional area of the fluid may be a mixing space, and the mixing space may be a first mixing portion 121 and a second mixing portion 122.

At this time, the first inner surface 111 may include a plate shape according to the moving direction of the fluid, and the second inner surface 112 may include an inclined shape approaching the first inner surface 111 according to the moving direction of the fluid .

The mixing space formed inside the block 110 may mix different fluids.

For this purpose, the first mixing unit 121 may include a first fluid supply unit 150 and a second fluid supply unit 160 that can receive different fluids.

As a result, the two different fluids supplied from the first fluid supply part 150 and the second fluid supply part 160 can be mixed with each other in the mixing space.

Particularly, according to the present invention, two different fluids supplied from the first fluid supply part 150 and the second fluid supply part 160 may include compressed dry air (CDA) and steam. In this case, the first mixed fluid (second-phase mixed fluid: CDA + steam) mixed with compressed dry air (CDA) and steam is accommodated in the mixing space 113.

The first mixing unit 121 according to the present invention may include a dispersion unit 115 in the mixing space. Here, the dispersion part 115 may be formed in at least one of a shape separated from the second inner surface 112 or a shape formed integrally with the second inner surface 112.

In other words, the dispersion portion 115 may be formed at any position of the first mixing portion 121 in the mixing space.

As a result, the mixed fluid (second-phase mixed fluid) supplied and mixed at the upper portion of the mixing space can be uniformly (uniformly) supplied to the second mixing portion 122 located at the lower portion of the mixing space. The dispersion unit 115 also reduces at least one of the time at which at least two or more different fluids reach the second mixing unit 122, the arrival path, and the arrival velocity at the moment when the second fluid reaches the second mixing unit 122 .

The second mixing portion 122 may mix at least two or more different fluids. Specifically, the second mixing unit 122 may receive the first mixed fluid (the second mixed fluid) mixed in the first mixing unit 121 by the block unit 110. The second mixing portion 122 may include a third fluid supply portion 170 and an introduction portion 140 that can receive another fluid to be mixed with the supplied first mixing fluid .

Here, the third mixing unit 122 includes the third fluid supply unit 170 and the introduction unit 140 for supplying another fluid. However, this is only one example for convenience of explanation, and the second mixing portion 122 according to the present invention is not limited to including only one third fluid supply portion 170 and one introduction portion 140, Will be apparent to those skilled in the art.

As a result, the first mixed fluid (second-phase mixed fluid) supplied from the first mixing portion 121 and another fluid supplied through the third fluid supply portion 170 and the introduction portion 140 are supplied to the second mixing portion 122 So that they can mix and stay together.

In particular, according to the present invention, another fluid supplied through the third fluid supply part 170 and the introduction part 140 may include pure water DIW. In this case, a second mixed fluid (third-class mixed fluid: CDA + steam + DIW) in which compressed dry air (CDA), steam, and DIW are mixed is received in the second mixed portion 122.

The discharge portion 130 is physically connected to the second mixing portion 122 by the block portion 110 so that the second mixed fluid (third-class mixed fluid) accommodated or held in the second mixing portion 122 flows into the slit Type injection port. In addition, the discharge portion 130 may include an acceleration passage having an expanding structure in the direction of the injection port, and may include a plurality of injection holes individually connected to the acceleration passage.

In the following description, examples in which the first fluid supply section includes compressed dry air, the second fluid supply section includes steam, and the third fluid supply section includes pure water will be described in detail. Further, the first mixed fluid includes a second-phase mixed fluid and the second mixed fluid includes a third-order mixed fluid. However, this is only one example for convenience of explanation, and it will be apparent to those skilled in the art that the liquid and gas according to the present invention are not limited to pure water and steam.

2, the block 110 is connected to an external supply unit (not shown) and a supply line (not shown) to supply compressed dry air (not shown) from the first fluid supply unit 150 and the second fluid supply unit 160, And steam are supplied to the first mixer 121. Then, the compressed dry air and steam are mixed in the first mixer 121 to produce a second-phase mixed fluid.

At this time, when the fluid supplied from the first fluid supply part 150 and the second fluid supply part 160 reaches the dispersion part 115, the dispersion part 115 is moved in the advancing direction Becomes an existing obstacle, and due to the obstacle, the time at which two different fluids reach the second mixing portion 122 and the route to reach are increased.

The speed at which the two different fluids reach the second mixing portion 122 also decreases.

That is, in the mixed fluid injection device having the slit-type injection nozzle according to the present invention, the mixed fluid injected from the first mixing portion 121 is uniformly supplied to the second mixing portion 122 due to the dispersion portion 113 The effect can be obtained.

At this time, the second-phase mixed fluid is supplied to the second mixing portion, and pure water is supplied to the second mixing portion 122 through the third fluid supply portion 170 and the introduction portion 140 connected to the outside of the block portion 110.

As a result, in the second mixing section, the second-type mixed fluid and the pure water are mixed to produce a third-type mixed fluid.

Then, the tertiary mixed fluid is supplied to the discharge portion and is injected to the outside through the slit-type injection port.

For example, a mixed fluid injector having a plurality of injection holes may be manufactured so that the length of the discharge portion corresponds to about 100 mm to 300 mm in order to increase the flow rate when the tertiary mixed fluid is injected to the outside. As described above, when the length of the discharge portion is long, it is difficult to process the discharge portion or the injection hole. Specifically, the injection hole can be formed by wire discharge machining instead of ordinary machining, and the manufacturing cost required for such machining is never small.

However, the mixed fluid injection device having a slit-type injection nozzle according to the present invention is manufactured in a prefabricated structure suitable for mass production through a mold, and is not a wire discharging process, but a discharge or slit type So that the jetting port can be formed.

A detailed description thereof will be continued through FIG.

FIG. 3 is a perspective view of a mixed fluid ejection apparatus having a slit type ejection opening according to an embodiment of the present invention. Referring to FIG.

Referring to FIG. 3, the individual configurations of the mixed fluid ejecting apparatus having the slit-type ejection orifice according to the present invention described above with reference to FIGS. 1 and 2 can be more specifically confirmed.

3, the first mixing unit 121, the second mixing unit 122, and the discharging unit 130 may be formed by assembling a plurality of components 311, 312, and 313. At this time, the plurality of components may be a block, and may be a component for shielding between blocks.

Specifically, the first block 311 forming both the top and side portions of the block 110 is physically connected to the second block 313 through the shielding structure 312, The first mixing unit 121, the second mixing unit 122, and the discharging unit 130. The first mixing unit 121 may be formed on the second mixing unit 122 and may include a dispersion unit 115 therein. Here, the dispersing unit 315 may be physically connected to and fixed to the inner upper surface of the first block 311.

The first fluid supply part 320 and the second fluid supply part 330 are physically connected to the upper surface part of the first block 311 through the other shielding structures 321 and 331 so that the compressed dry air CDA And steam can be supplied to the first mixing portion 111. [

The second mixing portion 122 may be formed at the upper end of the discharge portion 130 by assembling the plurality of components 311, 312, and 313 described above. The second mixing unit 122 can be supplied with the second-phase mixed fluid generated in the first mixing unit 121 as described above with reference to FIGS. 1 and 2. FIG.

In addition, the second mixing portion 122 can receive another fluid through the third fluid supply portion 317 and the introduction portion 316. 3, the introduction part 316 is connected to the side surface of the second block 313 through the shielding structure 314 to supply another fluid to the second mixing part 122.

That is, according to the present invention, the second mixing portion 122 can accommodate a tertiary mixed fluid (CDA + steam + DIW) mixed with compressed dry air (CDA), steam, and DIW.

The discharging unit 130 may also be formed at the lower end of the second mixing unit 122 by assembling the plurality of components 311, 312, and 313 described above. The discharging unit 130 allows the third-type mixed fluid contained in the second mixing unit 122 to be ejected to the outside.

3, the discharge unit 130 may include one acceleration passage having a wide planar shape inside the assembly of the plurality of components 311, 312, and 313. Here, one accelerating passage having a wide planar shape can make the second mixing portion 122 and the slit-type injection orifice communicate with each other. As a result, the three-way mixed fluid can flow to the outside through the slit- Can be sprayed.

As a result, the discharge portion 130 of the mixed fluid injection device having the slit-type injection hole according to the present invention injects the tertiary mixed fluid out through the slit-type injection hole, The fluid can be uniformly injected.

 Further, as described above, it is not easy to process an acceleration flow path having an expanded structure in the mixed fluid injection device having a plurality of injection holes. Specifically, in the case of an enlarged structure having a diameter increasing from 1 mm to 3 mm, about 160 injection holes are required when applied to a front face having a length of 1500 mm (5 G glass). Here, about 160 injection holes and corresponding 160 acceleration paths are formed by wire discharge, which is expensive.

In contrast, the mixed fluid ejecting apparatus having the slit type ejection orifice according to the present invention has a plurality of components 311, 312, 313, 314, 315, 316, 317, 320, 321, 330, As shown in Fig. In particular, the acceleration flow path included in the discharge portion 130 can be formed by assembling the two components 311 and 313.

The plurality of components 311, 312, 313, 314, 315, 316, 317, 320, 321, 330, 331 for the assembly can be manufactured by mass production through a mold, Type injection nozzle allows a reduction in the manufacturing cost compared to the conventional mixed fluid injection device having a plurality of injection holes. This prefabricated structure has a great influence on the increase of production.

In addition, when the mixed fluid ejection apparatus having a plurality of ejection holes is applied to a washing face having a large area, the injection holes must be continuously arranged. To this end, several mixed fluid ejection apparatuses are applied to the washing face having a large area And additional components such as a bracket for connection of a plurality of mixed fluid ejection devices are required.

On the other hand, since the mixed fluid injection device having the slit-type injection hole according to the present invention is fabricated or processed in the assembling process, even when applied to a front surface having a length of about 3500 mm when applying a large area, .

As a result, the mixed fluid injector having the slit-type injection hole according to the present invention is advantageous in that it is possible to simplify additional components such as a bracket for connection of a plurality of mixed fluid injectors as compared with a mixed fluid injector having a plurality of conventional injection holes And it is possible to reduce the weight accordingly.

In addition, since the mixed fluid injection device having the slit-type injection hole according to the present invention is manufactured or processed in the assembling process, it is possible to minimize the contamination caused by welding or to reduce the occurrence of contamination. Even in the case of contamination, it is possible to disassemble in the reverse order of assembly, so that internal cleaning is facilitated.

4 is a view showing an example in which a mixed fluid is injected in a perspective view of a mixed fluid injector having a slit-type injection hole according to an embodiment of the present invention.

4, the mixed fluid injection device having a slit-type injection port includes a first mixing part 121, a second mixing part 122, a discharge part 130, an introduction part 140, a first fluid supply part 150 ), A second fluid supply unit 160, and a third fluid supply unit 170. These configurations are the same as those described above with reference to FIG. 1 to FIG. 3, so duplicate descriptions are omitted.

Referring to FIG. 4, it can be seen that the mixed fluid 131 is injected to the lower end of the discharging unit 130. As described above, since the shape of the ejection orifice provided on the lower surface of the ejection portion 130 is slit-shaped, the mixed fluid ejection apparatus having the slit type ejection opening according to the present invention is capable of ejecting compressed air (CDA) (CDA + steam + DIW) mixed with DIW can be jetted out in a wide plane shape.

5 is a view showing an example in which a mixed fluid is formed in a cross section of a mixed fluid ejecting apparatus having a slit type ejection opening according to an embodiment of the present invention.

Referring to FIG. 5, the cross-section of the mixed fluid injector having the slit-type injection port shown in FIG.

5, the first mixing portion 121 and the second mixing portion 122, the discharging portion 130, the introducing portion 140, the first fluid supplying portion 150, the second fluid supplying portion 160 ), The third fluid supply unit 170, and the dispersion unit 115 are the same as those described with reference to FIGS. 1 to 4, and thus a duplicate description will be omitted.

5, a region A including the slit interval 180 formed at the lower ends of the second mixing portion 122 and the second mixing portion 122 may be more specifically a first mixing portion 121, The mixed fluid 151 and 161 may be mixed with another fluid supplied through the third fluid supply part 170 and the introduction part 140. [

As a concrete example, it is assumed that the second-type mixed fluid is a binary mixed fluid (CDA + steam) in which compressed dry air (CDA) and steam are mixed, and another fluid supplied through the third fluid supplying portion 170 and the introducing portion 140 In the case of pure water (DIW), a tertiary mixed fluid (CDA + steam + DIW) in which they are all mixed can contain compressed dry air (CDA), steam and pure water (DIW).

The mixed fluid of the third-class mixed fluid is controlled in flow rate and flow rate through the slit interval 180 formed at the lower end of the second mixing section 122, and flows through a slit-type injection port provided at the lower end of the discharge section 130 And sprayed to the front face.

On the other hand, the slit interval 180 for controlling the flow rate and the flow rate of the mixed fluid may be predetermined or may be changed as required. A detailed description thereof will be continued through FIGS.

FIG. 6 is a view showing an example of controlling at least one of a flow velocity and a flow rate of a mixed fluid in a mixed fluid injection device having a slit-type injection hole according to an embodiment of the present invention.

First, referring to FIG. 6, it can be seen that at least one of the flow velocity and the flow velocity of the mixed fluid sprayed on the clean surface is variable. To this end, the mixed fluid ejection apparatus having the slit-type ejection orifice according to the present invention may include a control unit 410 for controlling the slit interval 180.

6, the controller 410 may be implemented by a mechanical structure. FIG. 6 illustrates an example for convenience of explanation. The controller 410 included in the present invention is shown in FIG. 6 The present invention is not limited thereto.

The control unit 410 may be formed through the first block 311 and the second block 313 forming the discharge unit 130 among the plurality of components described above with reference to FIG. The controller 410 may rotate clockwise or counterclockwise 420 and the slit interval 180 may increase 430 or decrease 440 according to the rotation 420 of the controller 410. [ ).

As a result, the mixed fluid injector having the slit-type injection nozzle according to the present invention controls the slit interval 180, which is the start region of the acceleration flow passage having the enlarged structure, so that the flow velocity or the flow velocity of the mixed fluid sprayed onto the slit- As shown in FIG. It is obvious that such a control unit and its effect can not be obtained by a conventional mixed fluid injection apparatus having a plurality of injection holes.

7 is a view showing an example in which at least one of a flow rate and a flow rate of a mixed fluid is kept constant in a mixed fluid injection device having a slit type injection hole according to an embodiment of the present invention.

As described above, the mixed fluid ejecting apparatus having the slit-type ejection orifice according to the present invention can be applied to a washing surface having a large area. When the size of a substrate or the like to be cleaned is increased, . Specifically, when applied to a clean surface having a length of about 3500 mm, the slit interval 180, which determines the flow rate and flow rate through which the mixed fluid is injected, needs to be kept constant in the longitudinal direction.

First, referring to FIG. 7, it can be seen that the flow velocity and the flow velocity of the mixed fluid sprayed on the clean surface are kept constant. To this end, the mixed fluid ejection apparatus having the slit-type ejection orifice according to the present invention includes at least one of a first retaining portion 510 and a second retaining portion 520 that maintains the slit interval 180 constant .

7, the first holding part 510 and the second holding part 520 may be realized by a mechanical structure. FIG. 7 shows an example for convenience of explanation. The first holding portion 510 and the second holding portion 520 included in the invention are not limited to the configuration of FIG.

The first holding part 510 may be formed through the first block 311 and the second block 313 forming the discharging part 130 among the plurality of constituent elements described above with reference to FIG. Specifically, the first holding part 510 may be fixed to the first block 311 and the second block 313 forming the discharge part 130, and may correspond to the lateral length of the first holding part 510 So that the slit interval 180 can be kept constant.

The second holding part 520 may be formed to be inserted between the first block 311 and the second block 313 forming the discharging part 130 among the plurality of constituent elements described above with reference to FIG. have. The slit interval 180 maintained constant is made to correspond to the transverse length of the second holding portion 520, similarly to the first holding portion 510 described above.

As a result, the mixed fluid injector having the slit-type injection hole according to the present invention maintains the slick spacing 780, which is the starting region of the acceleration flow passage having an enlarged structure, so that the flow velocity and the flow velocity Can be kept constant. It is obvious that the first holding portion 510 and the second holding portion 520 and the effect thereof applied to the cleaning face having a large area can not be obtained in the mixed fluid ejection apparatus having a plurality of conventional ejection holes.

Fig. 8 is a view showing a stream of mixed fluid in the example of Fig. 7; Fig.

Referring to FIG. 8, the first holding part 510 and the second holding part 520 formed in one region of the acceleration passage and the flow (B) of the tertiary mixed fluid according to the first holding part 510 and the second holding part 520 can be confirmed. Specifically, the first holding part 510 and the second holding part 520 may be obstacles in the presence of the tertiary mixed fluid, but the outer shape of the first holding part 510 and the second holding part 520 may be The first holding portion 510 and the second holding portion 520 do not greatly affect the flow B of the tertiary mixed fluid in the case of an arc having a gentle circular shape or an accurate circular shape.

It is apparent that this principle can be similarly applied to the example of FIG.

9 is a cross-sectional view of a mixed fluid ejection apparatus having a slit type ejection orifice including a liquid curtain portion and a suction portion according to another embodiment of the present invention.

9, a mixed fluid injection device 100 having a slit-type injection hole according to the present invention includes at least one liquid curtain forming part 600 provided outside the injection hole 131, (700).

The at least one liquid curtain portion 600 and the at least one suction portion 700 may be located at least one of the front end and the rear end of the injection port 131 in the traveling direction of the injection port 131. [

At least one liquid curtain forming part 600 forms a liquid curtain around the jetting port 131 to prevent scattering of at least one of the contaminants generated by the jetting of the third-type mixed fluid and the third- can do. This is because when the mixed fluid of the third flow is ejected to the outside during the cleaning process, it is sprayed to the substrate for cleaning at a high pressure to prevent the contaminants from scattering due to the pressure.

At least one suction part 700 may form a suction area for sucking at least one of the pollutants generated by spraying the third-type mixed fluid and the third-type mixed fluid to the outside and exhausting the pollutants to the outside.

At this time, the distance between the suction area and the ejection opening may be larger than the distance between the liquid curtain and the ejection opening.

Referring to FIG. 9, at least one suction unit 700 may further include a suction hood 710 and an exhaust pipe 720. The suction section 700 may have a suction area inside the suction hood 710 and the suction hood 710 may include an exhaust pipe 720 communicated with the outside so that the suction hood 610 can be continuously And at least one of the third-type mixed fluid and the contaminants separated from the object to be cleaned can be sucked and exhausted.

As a result, the mixed fluid ejecting apparatus having the sliver-type ejection orifice according to the present invention ejects the mixed fluid uniformly onto the washing surface when the mixed fluid including pure water (DIW) and steam is ejected onto the washing surface .

In addition, since it can be manufactured or processed by an assembling process other than a general welding process, contamination due to welding can be reduced, and a slit-shaped injection hole can be easily included for easy internal cleaning.

In addition, it has a small assembled structure so as to be suitable for mass production and stiffness maintenance through a mold, thereby reducing the manufacturing cost, and can be cleaned by at least one injection hole of at least about 25 mm to 3500 mm have.

It will be apparent to those skilled in the art that various modifications and equivalent arrangements may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims

Accordingly, the foregoing detailed description should not be construed in any way as limiting and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

Claims (23)

A block having a region where a sectional area of the fluid is narrowed in accordance with a moving direction of the fluid;
At least two different fluids are mixed to produce a first mixed fluid, and a first mixing part provided inside the block part;
A second mixer which mixes the first mixed fluid and at least one fluid to generate a second mixed fluid and is provided inside the block;
And a discharging portion provided in the block portion, the discharging portion having a slit-shaped jetting port for jetting the second mixed fluid out in a virtual plane form,
Wherein the first mixing portion disperses the at least two or more different fluids to increase the time or reach of the fluid to reach the second mixing portion or to decrease the arrival velocity of the instant at which the fluid reaches the second mixing portion, Or more,
Further comprising at least one holding part for holding at least one of a flow rate and a flow rate of the second mixed fluid constantly in contact with the second mixed fluid sprayed to the outside in correspondence with the interval of the slits,
The holding unit includes:
A first holding portion having a circular shape having a predetermined radius and a second holding portion having a radius larger than a diameter of the first holding portion and having a predetermined length, And a jetting port. The method according to claim 1,
The block unit includes:
A mixer having a slit-type injection port including at least two blocks and including a mixing space having a first inner surface and a second inner surface opposed to each other with respect to a moving direction of the fluid and having an asymmetric cross- Fluid ejection device. 3. The method of claim 2,
Wherein the first inner surface
And a slit-type injection port including a plate shape according to a moving direction of the fluid. 3. The method of claim 2,
The second inner surface
And a slit-type injection port including an inclined shape approaching the first inner surface in accordance with a moving direction of the fluid. delete The method according to claim 1,
Wherein the block portion is formed of a first inner surface and a second inner surface facing each other with respect to a moving direction of the fluid,
Wherein the dispersing unit comprises:
And a slit-type injection hole formed in at least one of a shape separated from the second inner surface or a shape formed integrally with the second inner surface. The method according to claim 1,
Wherein the first mixing portion comprises:
And a slit-type injection port including at least two or more fluid supply units for supplying the at least two or more different fluids. The method according to claim 1,
Wherein the at least two or more different fluids comprise:
Compressed dry air (CDA) and steam,
Wherein the first mixed fluid comprises a first mixed fluid,
And a slit-type injection port including a second-type mixed fluid in which the compressed dry air (CDA) and the steam are mixed. The method according to claim 1,
The second mixing portion
And a slit-type injection port including at least one or more other fluid supply units for supplying the at least one fluid. The method according to claim 1,
Wherein the at least one or more different fluids comprise:
It contains deionizewater (DIW)
The second mixed fluid may be a mixed fluid,
And a slit-type injection port including a tertiary mixed fluid in which compressed dry air (CDA), steam, and DIW are mixed. The method according to claim 1,
The discharge unit
And a slit-type injection port including an acceleration passage having an enlarged structure in the injection port direction. The method according to claim 1,
The first mixing portion, the second mixing portion, and the discharging portion,
And a slit-type injection hole formed at the same time through an assembling process for at least two blocks. 13. The method of claim 12,
Wherein the at least two blocks comprise:
A mixed fluid injector having a slit-type injection hole manufactured by mass production through a mold. The method according to claim 1,
The block unit includes:
And a slit-type injection hole including at least one shielding structure for preventing at least one of at least two or more different fluids, the first mixed fluid, and the at least one fluid from leaking to the outside. The method according to claim 1,
The width of the slit
And a slit-type injection hole included in the range of 25 mm to 3500 mm corresponding to the area of the object to be injected. The method according to claim 1,
And a control unit for controlling at least one of a flow rate and a flow rate of the second mixed fluid injected to the outside in correspondence to the interval of the slits. 17. The method of claim 16,
Wherein,
Clockwise or counterclockwise,
The gap of the slit
And a slit-type injection port that is increased or decreased corresponding to rotation of the control unit. delete The method according to claim 1,
Wherein the at least one holding portion comprises:
A discharge port formed in the discharge port,
The gap of the slit
And a slit-type injection port which is maintained constant in correspondence with a lateral length of the at least one holding portion.
The method according to claim 1,
And a block provided outside the block portion and supplying the at least one fluid to the second mixing portion. The method according to claim 1,
Further comprising at least one of at least one liquid curtain forming portion and at least one suction portion provided outside the jetting port,
Wherein the at least one liquid curtain-
A liquid curtain is formed around the injection port to prevent at least one of the second mixed fluid and the second mixed fluid from being scattered,
Wherein the at least one suction portion comprises:
Wherein the second mixed fluid and the second mixed fluid form a suction region for sucking at least one of the pollutants generated by spraying the second mixed fluid to the outside and exhausting the pollutant to the outside. 22. The method of claim 21,
Wherein the at least one liquid curtain forming portion and the at least one suction portion comprise:
Wherein the injection port is located at least one of a front end and a rear end of the injection port. 23. The method of claim 22,
Wherein the distance between the suction area and the jetting port
Wherein the distance between the liquid curtain and the jetting port is larger than the distance between the liquid curtain and the jetting port.

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