KR101649424B1 - Position control system and method - Google Patents

Abstract

A position control system according to an embodiment includes a driving unit to which a target object is fixed to one side and can control a position of the target object; An inspection unit disposed below the object and providing a position control reference of the object; And a vision unit disposed at a lower portion of the examination unit and capable of acquiring positional information of the object and the examination unit, wherein the object and the examination unit are provided at positions where at least two markers correspond to each other, The markers provided on the object and the markers provided on the inspection unit can be matched with each other.

Description

[0001] POSITION CONTROL SYSTEM AND METHOD [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position control system and method, and more particularly, to a position control system and method capable of efficiently correcting a position of an object using at least two markers.

Currently, machine vision systems are widely used for object recognition and automatic assembly and inspection of robots.

Especially, in the case of automatic assembly and inspection equipments, the machine vision system is widely applied to determine the precise position of the object to move to the desired coordinates, and to determine the assembled state of the product or the welding defect.

A conventional method for locating an object is to measure only the coordinates of the object using a marker of a specific part of the object.

However, even if the assemblies or objects are getting smaller and smaller, there is a problem that the object is misaligned when the object is slightly rotated.

Therefore, in order to assemble and inspect precision parts, it is necessary to measure the rotation amount through multipoint measurement as well as position measurement through one point.

For example, KR 2003-0094380, filed on December 22, 2003, discloses "Vision-based mobile robot position control system ".

An object of the present invention is to provide a position control system and method capable of simultaneously performing position correction and rotational angle correction of an object using at least two markers.

An object according to an exemplary embodiment is to provide a position control system and method that can include at least two markers to improve the precision and accuracy of position control and reduce the size of a marker.

An object of the present invention is to provide an apparatus and a method for controlling at least two markers provided on a target by moving a target so that a line segment connecting at least two markers provided in a target object and a line segment connecting at least two markers provided in the target are parallel, And a position control system and method capable of promptly matching at least two markers provided in an inspection unit.

An object of an embodiment is to provide a position control system and method that can be used variously in the case where position control of an object is required as well as inspection of semiconductor components.

According to an aspect of the present invention, there is provided a position control system including: a driving unit to which a target object is fixed and which can control a position of a target object; An inspection unit disposed below the object and providing a position control reference of the object; And a vision unit disposed at a lower portion of the examination unit and capable of acquiring positional information of the object and the examination unit, wherein the object and the examination unit are provided at positions where at least two markers correspond to each other, The markers provided on the object and the markers provided on the inspection unit can be matched with each other.

According to one aspect of the present invention, the driving unit rotates the object so that a line segment connecting at least two markers provided in the object and a line segment connecting at least two markers provided in the inspection unit are parallel, The line segment connecting the at least two markers provided on the object and the line segment connecting the at least two markers provided in the inspection unit may be aligned.

According to one aspect of the present invention, the driving unit linearly moves the object, and after one of the at least two markers provided on the object matches one of the at least two markers provided on the inspection unit, Wherein a line segment connecting at least two markers provided on the object is parallel to a line segment connecting at least two markers provided in the inspection unit and the at least two markers provided in the object are connected A line segment connecting one line segment and at least two markers provided in the inspection unit can be matched.

According to another aspect of the present invention, there is provided a position control method including: a position control system including a driver having a target object fixed to one side thereof, an inspection unit disposed below the target object, and a vision unit disposed below the inspection unit ; Measuring coordinate values of at least two markers provided on the object and coordinate values of at least two markers provided on the inspection unit, respectively, by the vision unit; Moving the object by the driving unit such that a line segment connecting at least two markers provided in the object and a line segment connecting at least two markers provided in the inspection unit are parallel; And moving the object by the driving unit such that at least two markers provided on the object coincide with at least two markers provided on the inspection unit.

According to one aspect of the present invention, the step of moving the object by the driving unit such that a line segment connecting at least two markers provided on the object and a line segment connecting at least two markers provided in the inspection unit are parallel, The object is linearly moved by the driving unit so that one of at least two markers provided and one of at least two markers provided on the inspection unit coincide with each other; The coordinate value of at least one of the at least two markers provided in the object is newly measured by the vision unit; And rotating the object by the driving unit such that a line segment connecting at least two markers provided on the object and a line segment connecting at least two markers provided in the inspection unit are parallel to each other.

According to the position control system and method according to an embodiment, at least two markers can be used to simultaneously perform position correction and rotational angle correction of an object.

According to the position control system and method according to one embodiment, at least two markers can be provided, thereby improving the precision and accuracy of position control and reducing the size of the marker.

According to the position control system and method of the embodiment, the driving unit moves the object so that the line segment connecting the at least two markers provided on the object and the line segment connecting the at least two markers provided in the inspection unit are parallel to each other, The at least two markers provided on the inspection unit can be quickly matched with the at least two markers provided.

According to the position control system and method according to the embodiment, not only the inspection of the semiconductor parts but also the position control of the object can be variously used.

Figure 1 shows a position control system according to one embodiment.
Fig. 2 shows a state in which at least two marks are arranged on the object.
Fig. 3 shows a state where the object is seated on the inspection unit.
FIG. 4 shows a measured coordinate value of a mark provided on the object and the inspection unit by the non-conversion unit.
5 shows a position control method according to an embodiment.
6A to 6E illustrate how the position of an object is controlled by a position control method according to an embodiment.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to or limited by the embodiments. Like reference symbols in the drawings denote like elements.

Fig. 1 shows a position control system according to an embodiment, Fig. 2 shows a state in which at least two marks are arranged on a target object, Fig. 3 shows a state where a target object is placed on a test part, And the coordinate values of the marks provided on the object and the inspection unit by the vision unit are measured.

Referring to FIG. 1, a position control system 10 according to an embodiment may include a driving unit 100, an inspection unit 200, and a vision unit 300.

The driving unit 100 may include a plate 110 and a driving element 120 so as to correct or control the position of the object T. [

On one side of the plate 110, the object T can be fixed, for example, by vacuum adsorption. The manner in which the object T is fixed to the plate 110 is not limited to this and can be achieved in various ways.

The plate 110 may be provided to correspond to the size and shape of the object T so that the object T can be efficiently fixed to the plate 110. [

The driving member 120 may be connected to the plate 110. For example, the driving member 120 may be connected to the other side of the plate 110.

The driving member 120 may include, for example, a shaft 122 and a driving element 124 that linearly or rotationally moves the shaft 122.

Specifically, the shaft 122 is rotated by the driving element 124, whereby the object 110 fixed to the plate 110 and the plate 110 can be rotationally moved.

Alternatively, the shaft 122 is linearly moved by the driving element 124, whereby the plate 110 and the object T fixed to the plate 110 can be linearly moved.

The position control system 10 may further include a control unit (not shown) for controlling the operation of the driving unit 100. The position control system 10 may control the moving speed of the driving unit 100, Can be adjusted.

The object T to be fixed by the driving unit 100 configured as described above may be provided with a COF, for example, and the COF (Chip On Film) is a semiconductor chip mounted on a thin film printed circuit board.

However, the object T is not limited to the COF, and any object can be used as long as position control is required. For example, the object T may be provided by a semiconductor wafer.

In the following description, it is assumed that the object T is a COF.

2, when the object T is provided with a COF, the object T may be provided with a chip disposed at the center, a pattern extending to both sides from the chip, and a plurality of pads provided at the end of the pattern have.

In addition, the object T may be provided with at least two markers M1 and M2.

The markers M1 and M2 are for controlling the position of the object T and can be matched with the markers M3 and M4 provided in the inspection unit 200 to be described later.

For example, the markers M1 and M2 may be arranged diagonally, one marker M1 is disposed at the lower left of the target T, and the other marker M2 is positioned at the lower left of the target T May be disposed at the upper right corner.

Although two markers M1 and M2 are shown in the figure, the number of markers is not limited to three, and three or more markers may be provided.

Hereinafter, it is assumed that the target object T is provided with two markers M1 and M2.

Since the target body T is provided with the plurality of markers M1 and M2 as described above, the accuracy of the position control can be enhanced while keeping the size of the marker M small. The markers M1 and M2 can be used to determine the defects of the target object T and the like, thereby avoiding unnecessary waste of packaging.

Referring again to FIG. 1, the inspection unit 200 may be disposed below the driving unit 100.

The inspection unit 200 may include an inspection element 210 and a seating member 220.

The inspection element 210 can provide a position control reference of the object T and can check the position control of the object T. [

When the position control system 10 according to one embodiment is used for checking whether a COF is bad, the inspection element 210 may be provided with, for example, a probe card.

The probe card is a test device for inspecting the operation of the semiconductor chip. The probe mounted on the probe card contacts the semiconductor chip and sends an electrical signal. The defective semiconductor chip can be selected according to a return signal.

As described above, the inspection element 210 can be provided with a needle (not shown), and it is possible to check whether or not the object T is defective by a signal sent while the needle contacts the pad of the object T .

Referring to FIG. 3, the inspection element 210 may be provided with markers M3 and M4 at positions corresponding to the markers M1 and M2 of the target T. The marker M3 may correspond to the marker M1 and the marker M4 may correspond to the marker M2.

The markers M3 and M4 provided in the inspection element 210 may be a position control reference of the object T. [

For example, if the markers M1 and M2 provided on the object T and the markers M3 and M4 provided on the inspection element 210 are exactly the same, the position control of the object T by the driving unit 100 May not be required.

However, if the markers M1 and M2 provided on the object T and the markers M3 and M4 provided on the inspection element 210 do not match, position control of the object T by the driver 100 is required . Therefore, in this case, the object T can be linearly or rotationally moved by the driving unit 100. [

In addition, the inspection element 210 may be secured to the seating member 220.

The mounting member 220 may be disposed on the plate 110 of the driving unit 100 at a predetermined interval and may be fixed to the mounting member 220 such that the inspection element 210 may serve as a reference index for controlling the position of the object T. Position.

The position control of the object T can be efficiently performed by the inspection unit 200 configured as described above.

In addition, the vision unit 300 may be disposed under the inspection unit 200.

The vision unit 300 may include a camera 310 and a support 320.

The camera 310 is provided with a plurality of cameras and can acquire position information of the object T and the inspection unit 200.

For example, it may be provided with two cameras, and each camera can serve to measure different marker pairs (M1-M3, M2-M4).

The support 320 may support the camera 310.

For example, the support 320 may have a size slightly smaller than that of the seating member 220 of the inspection unit 200.

Position information of the target object T and the inspection element 210 can be obtained by the vision unit 300 constructed as described above. For example, when the marker T (M1) included in the target object T and the inspection element 210 , M2, M3, M4) can be measured.

At this time, the reference point of the coordinate values of the markers M1, M2, M3, and M4 may be the center point of the plate. In other words, the coordinate value at the center of the plate can be (0, 0).

As shown in Fig. 4, the coordinate value of the marker M1 is measured as (X'1, Y'1), the coordinate value of the marker M2 is measured as (X'2, Y'2) The coordinate value of the marker M3 may be measured as (X1, Y1), and the coordinate value of the marker M4 may be measured as (X2, Y2).

Therefore, the distance by which the target object T is moved or the rotation angle of the target object T can be calculated using the coordinate values measured by the vision unit 300, and the position control of the target object T can be performed quickly and accurately can do.

The position control system according to one embodiment has been described, and the position control method according to one embodiment will be described below.

FIG. 5 shows a position control method according to an embodiment, and FIGS. 6A to 6E show a state where a position of an object is controlled by a position control method according to an embodiment.

Referring to FIG. 5, a position control method according to an embodiment may be performed as follows.

There is provided a position control system including a driving unit in which a target object is fixed on one side, an inspection unit disposed under the target object, and a vision unit disposed under the inspection unit.

At this time, at least two markers may be provided in the object and the inspection unit, respectively.

It can be confirmed that the two markers M1 and M2 of the object and the two markers M3 and M4 of the inspection unit do not coincide with each other from the center point (0,0) of the plate 210 as shown in FIG. 6A.

Next, the coordinate values of at least two markers provided in the object and the coordinate values of at least two markers provided in the inspection unit are measured by the non-conversion unit, respectively (S20).

6B, the coordinate value of the marker M1 of the object is measured as (X'1, Y'1), the coordinate value of the marker M2 of the object is (X'2, Y'2) The coordinate value of the marker M3 of the inspection element is measured as (X1, Y1), and the coordinate value of the marker M4 of the inspection element can be measured as (X2, Y2).

The length of the line segment connecting the marker M1 and the marker M2 and the length L of the line segment connecting the marker M3 and the marker M3 may be the same. The length of the line segments may be a known value.

Thereafter, the object is linearly moved by the driving unit so that one of the at least two markers provided on the object matches one of the at least two markers provided in the inspection unit (S30).

Referring to FIG. 6C, the plate may be linearly moved in the X-Y axis by the driving unit so that the marker M1 of the object matches the marker M3 of the inspection element.

Then, the coordinates of the other one of the at least two markers provided in the object are newly measured by the vision unit (S40).

With continued reference to Fig. 6C, the coordinate values of the other marker M2 of the target object can be measured as (X3, Y3) while the marker M1 of the object coincides with the marker M3 of the inspection element. Therefore, it can be determined that there are three markers on the plate by the non-potential portion.

Then, the object is rotated by the driving unit so that the line segment connecting the at least two markers provided on the object and the line segment connecting the at least two markers provided in the inspection unit are parallel to each other (S50).

At this time, the rotation angle at which the plate is rotated by the driving unit can be calculated by measuring the angle formed by the two markers M3 and M4 and the two markers M3 and M2 in FIG. 6C.

Referring to FIG. 6D, (X4, Y4) is a new coordinate value of the marker M1 by rotation, and (X5, Y5) is a new coordinate value of the marker M2 by rotation. As a result, the two markers M3 and M4 and the two markers M1 and M2 form a parallelogram.

Finally, the object is linearly moved by the driving unit so that at least two markers provided on the object match with at least two markers provided in the inspection unit (S60).

6E, when the marker M1 of the object is matched with the marker M3 of the inspection element, the marker M2 of the object can be matched with the marker M3 of the inspection element.

At this time, since the plate is linearly moved by the driving unit, the center point of the plate can be moved.

Through this process, the marker of the object and the marker of the inspection element can be matched, and the position of the object can be controlled.

In the position control method according to an embodiment, after the object is linearly moved to match one of at least two markers provided in the object and at least two markers provided in the inspection element, the object is rotated and moved The line segment connecting the at least two markers provided on the object is parallel to the line segment connecting the at least two markers provided in the inspection element, It is of course possible to match at least two markers provided on the object with at least two markers provided on the inspection element after the markers are parallel to the line segment connecting the at least two markers provided on the inspection element.

As described above, the position control system and method according to the embodiment can simultaneously perform the position correction and the rotation angle correction of the object using at least two markers, and improve the precision and accuracy of the position control. The driving unit moves the object so that the line segment connecting the at least two markers provided on the object and the line segment connecting the at least two markers provided in the inspection unit are parallel to each other, At least two markers can be quickly matched.

Although the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, And various modifications and changes may be made thereto without departing from the scope of the present invention. Accordingly, the spirit of the present invention should not be construed as being limited to the embodiments described, and all of the equivalents or equivalents of the claims, as well as the following claims, belong to the scope of the present invention .

10: Position control system
100:
110: Plate
120:
122: shaft
124: Driving element
200: Inspector
210: Inspection element
220:
300: Vision department
310: camera
320: Support
T: object

Claims (5)

A driving unit to which the object is fixed to one side and can control the position of the object;
An inspection unit disposed at a lower portion of the object and providing a position control reference of the object; And
A vision unit disposed at a lower portion of the examination unit and capable of acquiring position information of the subject and the examination unit;
Lt; / RTI >
Wherein the marker and the markers provided on the target body are aligned with the markers provided on the inspection unit by the driving unit,
Wherein the driving unit linearly moves the object so that one of at least two markers provided on the object matches one of at least two markers provided on the inspection unit, Wherein a line segment connecting at least two markers is parallel to a line segment connecting at least two markers provided in the inspection unit and linearly moves the target object to connect at least two markers provided in the target object, The line segments connecting the at least two markers included in the markers can be matched,
Wherein the object is moved by the driving unit in a non-contact state with respect to the inspection unit, and the position correction and the rotation angle correction of the object are simultaneously performed by the driving unit.
delete delete Providing a position control system including a driver having a target fixed to one side thereof, an inspection unit disposed below the target object, and a vision unit disposed below the inspection unit;
Measuring coordinate values of at least two markers provided on the object and coordinate values of at least two markers provided on the inspection unit, respectively, by the vision unit;
Moving the object by the driving unit such that a line segment connecting at least two markers provided in the object and a line segment connecting at least two markers provided in the inspection unit are parallel; And
Moving the object by the driving unit such that at least two markers provided on the object coincide with at least two markers provided on the inspection unit;
Lt; / RTI >
Wherein the step of moving the object by the driving unit such that a line segment connecting at least two markers provided in the object and a line segment connecting at least two markers provided in the inspection unit are parallel,
The object being linearly moved by the driving unit such that one of at least two markers provided on the object coincides with one of at least two markers provided on the inspection unit;
The coordinate value of at least one of the at least two markers provided in the object is newly measured by the vision unit; And
The object being rotated by the driving unit so that a line segment connecting at least two markers provided on the object and a line segment connecting at least two markers provided in the inspection unit are parallel;
Further comprising:
Wherein the object is moved by the driving unit in a non-contact state with respect to the inspection unit, and the position correction and the rotation angle correction of the object are simultaneously performed by the driving unit. delete

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