KR101486279B1 - Evaporation Deposition Apparatus - Google Patents

Abstract

The present invention provides a vapor deposition apparatus. The evaporation apparatus includes an evaporation section for providing an evaporation material through a connection passage, a distribution section for containing a plurality of holes and discharging evaporation material to the inside of the vacuum container through a hole, And an alternating current power supply for supplying alternating current to the induction coil, and an induction coil for inducing and heating the evaporator and the distributor, the induction coil surrounding the evaporator and the distributor.

Description

[0001] Evaporation Deposition Apparatus [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition apparatus, and more particularly, to a vapor deposition apparatus.

In the vacuum evaporation deposition, a target substance to be deposited is placed in a chamber of a high vacuum, the deposition target material is heated to evaporate the particles, and the vapor is moved to form a thin film on the substrate.

The evaporation deposition apparatus has a crucible made of a ceramic material and a heating section for heating the crucible. Typically, an evaporation deposition apparatus deposits a thin film on a substrate disposed on an upper surface of a vapor which evaporates upward under gravity against vapor.

However, as the substrate size increases, the bottom-up deposition apparatus has a problem that the substrate is bent. Therefore, a top-down deposition apparatus or a lateral-type deposition apparatus is required.

An organic light emitting diode (OLED) constituting an organic light emitting diode display device typically has a positive electrode formed on an upper portion of a transparent substrate, a hole injection layer (HIL) A hole transport layer (HTL), an emissive layer (EML), an electron transport layer (ETL), and an electron injection layer (EIL) are deposited on the electron transport layer. ) Is formed.

A problem to be solved by the present invention is to provide a top-down large area evaporation deposition apparatus.

According to an embodiment of the present invention, there is provided an evaporation deposition apparatus including: an evaporator for providing an evaporation material through a connection passage; A dispensing part including a plurality of holes and discharging the evaporation material into the interior of the vacuum container through the holes; A dielectric portion mounted around the opening portion of the vacuum container and arranged to protrude from the vacuum container and surround the evaporator portion and the distributor portion; An induction coil for enclosing the evaporator and the distributor and induction heating the evaporator and the distributor; And an AC power source for providing an alternating current to the induction coil.

In an embodiment of the present invention, the evaporator includes a cylindrical body portion; The connection passage extending from the lower portion of the body portion toward the upper portion; A storage space connected to the connection passage and storing the evaporation material; A pipe-shaped protrusion including the connection passage therein; A baffle spanning an upper surface of the projection; An upper cover plate disposed on the baffle and sealing the evaporation material in the storage space; And a fixing part disposed on the upper cover plate and engaging with the body part.

In one embodiment of the present invention, the baffle is inserted into the outer circumferential surface of the projection and has a cylindrical baffle support portion; A baffle support plate disposed on an upper surface of the baffle support, the baffle support plate having an outer diameter smaller than an inner diameter of the body portion and including a through hole having a diameter equal to or less than an inner diameter of the baffle support; And a baffle protrusion that forms a passage to be connected to the through hole disposed on the upper surface of the baffle support plate.

In an embodiment of the present invention, the baffle includes a baffle pillar inserted into an upper surface of the connection passage; And a baffle support plate mounted on the top surface of the column and including a trench extending radially on the bottom surface.

In one embodiment of the present invention, the diameter of the hole of the dispensing portion may decrease as the latitude of the hemisphere increases.

In one embodiment of the present invention, the holes may be arranged at constant hardness intervals.

In an embodiment of the present invention, the evaporator includes a cavity connected to a lower portion of the connection passage; A reflector disposed around the cavity entrance where the coupling passageway and the cavity meet with each other and reflects the evaporated material; And a keelite outlet disposed in an opposite direction to the keelite inlet, wherein the vaporizing material is provided to the keelite through the connecting passage and the keelite inlet, and may be discharged through the keelite outlet .

In one embodiment of the present invention, the apparatus further comprises a reflection nozzle arranged to be connected to the cavity exit, wherein the reflection nozzle is formed of a conductive material and can be induction-heated.

In an embodiment of the present invention, the distributor may have an equator plane mounted on a lower surface of the evaporator, a hollow hemispherical shape, and the hole may be formed in the hemispherical surface.

In one embodiment of the present invention, the distributor is in the form of a disk, and the diameter of the circular hole can increase as the radius increases from the center of the disk.

In one embodiment of the present invention, the distributor is in the shape of a disc, the hole is a washer-like shape cut in the radial direction, and the area of the hole may increase as the radius increases from the center of the disc.

In one embodiment of the present invention, the distributor is in the shape of a disc, the hole is a shape including two straight lines and a circular arc, and an intersection point of the two straight lines is a constant Can be located at a distance radius.

In an embodiment of the present invention, the auxiliary evaporator may include an auxiliary evaporator disposed on the evaporator and including an auxiliary connecting passage, and a connecting pipe connecting the auxiliary connecting passage of the auxiliary evaporator to the connecting passage of the evaporator And the auxiliary evaporator may provide an auxiliary evaporator through the auxiliary connection passage exposed on the lower surface.

In an embodiment of the present invention, the auxiliary evaporator includes a cylindrical auxiliary body portion; The auxiliary connecting passage extending from a lower portion to an upper portion of the auxiliary body portion; An auxiliary storage space for storing the auxiliary evaporation material connected to the auxiliary connection passage; Like auxiliary protrusion including the auxiliary connection passage therein; An auxiliary baffle spanning an upper surface of the auxiliary projection; An auxiliary upper cover plate disposed on the auxiliary baffle and sealing the auxiliary evaporation material in the containing space; And an auxiliary fixing part disposed on the auxiliary upper cover plate and engaging with the auxiliary body part.

In one embodiment of the present invention, the auxiliary induction coil surrounds the dielectric portion and induction-heats the auxiliary evaporation portion. And a supplementary alternating current power supply for providing alternating current to the auxiliary induction coil.

In one embodiment of the present invention, a gas pipe for enclosing the auxiliary evaporator may be further included.

The evaporation deposition apparatus according to an embodiment of the present invention can provide a top-down large area evaporation deposition apparatus.

1 is a view for explaining an evaporation deposition apparatus according to an embodiment of the present invention.
FIG. 2A is a perspective view illustrating a baffle of the evaporation apparatus of FIG. 1, FIG. 2B is a sectional view taken along line II 'of FIG. 2A, and FIG. 2C is a sectional view taken along line II-II' of FIG. 2A.
FIG. 3 is a perspective view illustrating a dispensing section of the evaporation apparatus of FIG. 1;
4 is a view for explaining an evaporation deposition apparatus according to another embodiment of the present invention.
5 is a view for explaining a vapor deposition apparatus according to another embodiment of the present invention.
FIG. 6A is a plan view showing the distribution unit of FIG. 5, and FIG. 6B is a sectional view taken along line III-III 'of FIG. 6A.
7 is a plan view showing a distribution unit according to another embodiment of the present invention.
8 is a plan view showing a distributor according to another embodiment of the present invention.
9 is a view showing a vapor deposition apparatus according to another embodiment of the present invention.
10 is a perspective view illustrating the baffle of Fig. 9. Fig.
11 is a view showing an evaporation deposition apparatus according to another embodiment of the present invention.
12 is a view showing a vapor deposition apparatus according to another embodiment of the present invention.
13 is a view for explaining an evaporation deposition apparatus according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are being provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the components have been exaggerated for clarity. Like numbers refer to like elements throughout the specification.

1 is a view for explaining an evaporation deposition apparatus according to an embodiment of the present invention.

FIG. 2A is a perspective view illustrating a baffle of the evaporation apparatus of FIG. 1, FIG. 2B is a sectional view taken along line I-I 'of FIG. 2A, and FIG. 2C is a sectional view taken along line II-II' of FIG. 2A.

FIG. 3 is a perspective view illustrating a dispensing section of the evaporation apparatus of FIG. 1;

Referring to FIGS. 1, 2A to 2C and 3, the evaporation deposition apparatus 100 includes an evaporation portion 120 for providing a vaporization material 10 through a connection passage 128, a plurality of holes 132a- A distribution unit 130 including a plurality of holes 132a to 132d for discharging the evaporation material 10 to the inside of the vacuum container 160 through the holes 132a to 132d, A dielectric part 110 mounted on the evaporator part 120 and protruding from the vacuum container 160 and surrounding the evaporator part 120 and the distribution part 130; An induction coil 140 for induction heating the evaporator 120 and the distributor 130 and an AC power source 150 for providing alternating current to the induction coil 140.

The evaporator 120 includes a cylindrical body 120a, a connection passage 128 extending from the lower surface of the body 120a toward the upper surface thereof, a connection passage 128 connected to the evaporation portion 120, A baffle 126 extending over the upper surface of the protrusion 129 and a baffle 126 extending from the upper surface of the baffle 129. The baffle 126 is disposed in the housing space 127, An upper cover plate 124 disposed on the top cover plate 126 and sealing the evaporation material 10 in the accommodating space 127 and an upper cover plate 124 disposed on the upper cover plate 124 to be engaged with the body portion 120a And may include a fixing portion 122.

The body portion 120a may have a cylindrical shape. The lower surface of the body portion 120a is closed, and the upper surface of the body portion 120a can be opened and closed. The inside of the body part 120a may form the receiving space 127. [ The evaporation material 10 may be stored in the storage space 127. The body portion 120a may be formed of a conductor and may be induction-heated. Accordingly, the evaporation material 10 can be heated and evaporated.

A protruding portion 129 protruding in the top surface direction may be disposed on the lower surface of the storage space 127. The protrusion 129 may be in the form of a cylindrical pipe. The inside of the protrusion 129 may provide the connection passage 128.

One end of the connection passage 128 may be exposed on the upper surface of the protrusion 129 and the other end of the connection passage 128 may be exposed on the lower surface of the body portion 120a. The connection passage 128 may be a passage for evaporating the evaporated substance.

The evaporation material (10) may be stored in the storage space (127). The evaporation material 10 may be an organic material used in an organic light emitting diode. Specifically, the organic material may include Tris (8-hydroxyquinolinato) aluminum (Al (C9H6NO) 3).

The baffle 126 is inserted into the outer circumferential surface of the protrusion 129 and is disposed on the upper surface of the cylindrical baffle support portion 126d and the baffle support portion 126d and has an outer diameter larger than the inner diameter of the body portion 120a A baffle support plate 126e including a small through hole 126b having a diameter smaller than the inner diameter of the baffle support portion 12 and a through hole 126b disposed on the upper surface of the baffle support plate 126e And may include a baffle projection 126a that forms a passage.

The baffle support 126d may have a cylindrical shape and the inner diameter of the baffle support 126d may be substantially the same as the outer diameter of the protrusion 129. [ The baffle support portion 126d may be inserted into the upper end of the protrusion 129.

The baffle support plate 126e may have a disc shape and the baffle support 126e may be connected to the lower surface of the baffle support plate 126e. The baffle support plate 126e may include a through hole 126b at the center thereof. The diameter of the through hole 126b may be smaller than the outer diameter of the baffle support 126d. The diameter of the through hole 126b may be smaller than the outer diameter of the protrusion 129 and may be larger than the diameter of the connection passage 128.

The baffle projection 126a may be in the form of a washer cut into a radius eccentricity. The evaporation material 10 may be provided on an upper portion of the baffle support plate 126e through an outer periphery of the baffle support plate 126e. The evaporation material may be supplied to the through hole 126b and the connection passage 128 through the empty space 126c between the discharge protrusions 126a.

The upper cover plate 124 is in the form of a disc and the edge can be inclined at a constant angle. The inclined surface may engage with an inclined portion formed on the body portion 120a. Accordingly, the upper cover plate 124 may seal the body 120a.

The fixing portion 122 is in the shape of a disk, and the fixing portion 122 may include a coupling member such as a screw thread formed on a side surface thereof. The engaging member can engage with a thread groove formed in the body portion 120a. Accordingly, the fixing portion 120 can press the upper cover plate 124.

The distributor 130 may be a means for spatially uniformly distributing the evaporation material provided through the connection passage 128. The distributor 130 may be formed of a conductive material and may be induction-heated.

 The distributor 130 includes a plurality of holes 132a to 132d and may discharge the evaporation material into the vacuum container 160 through the holes 132a to 132d. The distributor 130 may be hollow hemispherical. An equator plane of the distributor 130 may be mounted on the lower surface of the evaporator 120. The hole may be formed in the hemispherical surface. The distributor 130 may have a hat shape with a band around the periphery.

The hole may include a first hole 132a formed at the pole point of the hemispherical surface, and a second hole 132b formed along an evenly spaced hardness at a predetermined latitude. A lower latitude than the latitude of the second hole 132b may include a third hole 132c formed along the equidistant hardness. And a fourth hole 132d formed along the equidistant hardness at a lower latitude than the latitude of the third hole. The diameter of the holes 132a to 132d may increase as the latitude decreases. The minimum latitude at which the hole is disposed may be 45 degrees.

The vapor discharged through the holes of the distributor 130 may form a thin film on the substrate 174. [ Further, the vapor reflected around the hole of the distributor 130 may be provided again to the connection passage 128 due to the characteristics of the hemisphere. Thereby, a stable and uniform form of vapor distribution can be provided.

The dielectric 110 may be disposed to surround the distributor 130 and the evaporator 120. The dielectric part 110 is disposed on the opening part 162 of the vacuum container 160 and the inside of the dielectric part 110 can be maintained in a vacuum state. For this, an O-ring groove may be formed around the opening 162 of the vacuum container 160. The O-ring inserted in the O-ring groove may provide vacuum sealing between the vacuum container 160 and the dielectric portion 110.

The dielectric portion 110 may be a dielectric material such as quartz, alumina, sapphire, or ceramics. The dielectric portion 110 may be in the form of a bell-jar. The dielectric portion 110 may include a cylindrical portion, and the inner diameter of the cylindrical portion may be larger than the outer diameter of the body portion.

A cylindrical evaporation support portion 180 may be disposed in the dielectric portion 110. The evaporation support part 180 may be disposed between the outer periphery of the opening part 162 of the vacuum container 160 and the evaporator part 120. The evaporation support 180 may be formed of a dielectric material.

The induction coil 140 may be disposed to surround the evaporator and the distributor. The induction coil 140 may be disposed outside the dielectric container 110. The induction coil 140 may be disposed to surround the dielectric portion 110. The induction coil 140 may induction-heat the evaporator 120 and the distributor 130 disposed in the dielectric portion 110. The induction coil 140 may be a solenoid type coil. The induction coil 140 may be in the form of a pipe, and the refrigerant may flow into the induction coil 140. The number of turns per unit length of the induction coil 140 may vary depending on the position. Thereby, a temperature gradient of the heated part can be provided. For example, the temperature of the distributor 130 may be higher than the temperature of the evaporator 120.

The AC power supply 150 provides current to both ends of the induction coil 140. The frequency of the AC power source 150 may be several hundred Hz to several MHz. remind

The vacuum container 160 may include a substrate holder 172 therein and a substrate 174 mounted on the substrate holder 172. The substrate 174 may be a glass substrate or a plastic substrate including an organic light emitting diode.

The vacuum container 160 may be formed of a conductive material. The vacuum container 160 and the induction coil 140 may be spaced apart from each other by a predetermined distance or more in order to suppress the loss due to induction heating. The evaporator 120 may deposit a thin film on the substrate 174 in a top-down manner.

4 is a view for explaining an evaporation deposition apparatus according to another embodiment of the present invention.

Referring to Figure 4, the evaporation deposition apparatus 200 includes an evaporation portion 220 that provides a vaporization material 20 through a connection passage 228, a plurality of openings through which the evaporation material 20, An evaporator 220 disposed in the vicinity of the opening 162 of the vacuum container 160 and protruding from the vacuum container 160; A dielectric part 110 surrounding the distribution part 130 and an induction coil 130 surrounding the evaporation part 220 and the distribution part 130 and induction heating the evaporation part 220 and the distribution part 130 140), and an AC power source (150) for providing an alternating current to the induction coil (140).

The evaporator 220 includes a cylindrical body 220a, a connection passage 228 extending upwardly from a lower portion of the body 220a, and an evaporator 220 connected to the connection passage 228, A baffle 226 extending over the upper surface of the protrusion 229, a baffle 226 extending from the baffle 226 to the upper surface of the protrusion 229, And an upper cover plate 224 disposed on the upper cover plate 224 and sealing the evaporation material 20 in the accommodating space 227. The upper cover plate 224 and the upper cover plate 224, (Not shown).

The evaporator 220 includes a cavity 221 connected to a lower portion of the connection passage 228 and a cavity 220 disposed around the cavity entrance where the connection passage 228 and the cavity 221 meet with each other, And a cavity exit 221a disposed in a direction opposite to the cavity entrance. The evaporation material may be provided to the cavity 221 through the connection passage 228 and the cavity inlet, and may be discharged through the cavity outlet 221a.

The cavity 221 may be in the form of an integral sphere. The cavity 221 may be integrally formed with the body 220a. The cavity 221 may include an empty space. The vapor provided through the cavity inlet may be discharged through the cavity outlet 221a in the form of a point light source through a plurality of reflections. The cavity inlet may be connected to the connection passage 228. The reflector 223 may be disposed at the cavity entrance. The reflection plate 223 can prevent the vapor supplied through the connection passage 228 from being directly discharged to the cavity outlet 221a. The reflection plate 223 is formed of a conductor, and the induction electric field transmitted through the body 220a can induction-heat the reflection plate 223.

The distributor 130 may spatially distribute the vapor discharged through the cavity outlet 221a. The distribution unit 130 may be induction-heated by the induction coil 140.

5 is a view for explaining a vapor deposition apparatus according to another embodiment of the present invention.

FIG. 6A is a plan view showing the distribution unit of FIG. 5, and FIG. 6B is a sectional view taken along line III-III 'of FIG. 6A.

Referring to FIGS. 5, 6A and 6B, the evaporation deposition apparatus 300 includes an evaporation portion 220 for providing the evaporation material 20 through the connection passage 228, A distribution part 330 for discharging the evaporation material 20 to the inside of the vacuum container 160 through the opening part 162 of the vacuum container 160, And a dielectric part 110 surrounding the evaporator 220 and the distributor 330. The evaporator 220 surrounds the evaporator 220 and the distributor 330 and the evaporator 220 and the distributor 330 An induction coil 140 for induction heating the induction coil 140, and an alternating-current power supply 150 for providing alternating current to the induction coil 140.

The evaporator 220 includes a cylindrical body 220a, a connection passage 228 extending upwardly from a lower portion of the body 220a, and an evaporator 220 connected to the connection passage 228, A baffle 226 extending over the upper surface of the protrusion 229, a baffle 226 extending from the baffle 226 to the upper surface of the protrusion 229, And an upper cover plate 224 disposed on the upper cover plate 224 and sealing the evaporation material 20 in the accommodating space 227. The upper cover plate 224 and the upper cover plate 224, (Not shown).

The evaporator 220a includes a cavity 221 connected to a lower portion of the connection passage 228 and a cavity 220 disposed around the cavity entrance where the connection passage 228 and the cavity 221 meet with each other, And a cavity exit 221a disposed in a direction opposite to the cavity entrance. The evaporation material 20 may be provided to the cavity 221 through the connection passage 228 and the cavity inlet and may be discharged through the cavity outlet 221a.

The cavity 221 may be in the form of an integral sphere. The reflection nozzle 390 may be arranged to be connected to the cavity outlet 221a. The reflection nozzle 390 is formed of a conductive material and can be induction-heated by the induction coil 140. The inlet of the reflective nozzle 390 may be connected to the cavity outlet 221a and the outlet of the reflective nozzle 390 may be disposed to face the substrate 174. The reflection nozzle 390 may have a predetermined inclination angle so as to have a predetermined solid angle with respect to the vapor discharged from the cavity outlet 221a. The inclination angle of the reflective nozzle 390 may be 30 degrees to 60 degrees.

The distributor 330 can distribute the vapor discharged through the reflection nozzle 390 spatially. The distribution unit 330 may be induction-heated by the induction coil 140.

The distributor 330 may be disposed at the outlet of the reflective nozzle 390. The distributor 330 may have a disk shape including a plurality of holes 332a to 332d. As the radius increases from the center of the disk, the diameter of the circular holes 332a through 332d may increase. The hole may be circular. The holes may be arranged in a matrix form. The hole may be tapered.

The first hole 332a may be disposed at the center of the distribution portion 330. And the second hole 332b may be disposed around the first hole 332a. The third hole 332c may be disposed outside the circumference where the second hole 332b is disposed. The fourth hole 332d may be disposed outside the circumference where the third hole 332c is disposed. The diameter b2 of the second hole 332b may be larger than the diameter b1 of the first hole 332a. The diameter b3 of the third hole 332c may be larger than the diameter b2 of the second hole 332b. The diameter b4 of the fourth hole 332d may be larger than the diameter b3 of the third hole 332c.

7 is a plan view showing a distribution unit according to another embodiment of the present invention.

Referring to FIG. 7, the distributor 430 may spatially distribute the vapor discharged through the connection passage, the cavity outlet, or the reflection nozzle. The distributor 430 may be induction-heated by an induction coil.

The distribution portion 430 is in the form of a disk, the holes 432a to 432c are in the shape of a washer cut in the radial direction, and the area of the hole may increase as the radius increases from the center of the disk.

The distributor 430 may have a disk shape including a plurality of holes. The first holes 432a may be arranged at regular intervals in the rotational direction from the center. And the second hole 432b may be disposed around the first hole 432a. The third hole 432c may be disposed outside the circumference where the second hole 432b is disposed. The first through third holes 432a through 432c may be aligned in the radial direction.

8 is a plan view showing a distributor according to another embodiment of the present invention.

Referring to FIG. 8, the distributor 530 can spatially distribute the vapor discharged through the connecting passage, the cavity outlet, or the reflection nozzle. The distribution unit 530 may be induction-heated by the induction coil.

The distribution portion 530 may be in the shape of a disk, and the hole 532 may be a shape including two straight lines and a circular arc. The intersection of the two straight lines may be located at a certain distance radius to the center of the disc. The holes may be arranged at regular intervals in a rotating direction with respect to the center.

9 is a view showing a vapor deposition apparatus according to another embodiment of the present invention.

10 is a perspective view illustrating the baffle of Fig. 9. Fig.

9 and 10, the evaporation deposition apparatus 600 includes an evaporation portion 220 for providing the evaporation material 20 through the connection passage 228, and a plurality of holes, A distributor 130 disposed around the opening 162 of the vacuum container 160 and protruding from the vacuum container 162 to discharge the evaporator 20 into the vacuum container 160, A dielectric part 110 surrounding the evaporator part 220 and the distributor part 130 and a dielectric part 110 surrounding the evaporator part 220 and the distributor part 130 and induction heating the evaporator part 110 and the distributor part 130 An induction coil 140, and an AC power source 150 for providing alternating current to the induction coil 140.

The evaporator 220 is connected to the connection passage 228 and extends from the lower portion of the body 220a to the upper portion of the connection passage 228. The evaporator 220 has a cylindrical body 220a, A baffle 626 that extends over the upper surface of the protrusion 229, a baffle 626 that extends from the baffle 626 to the upper surface of the protrusion 229, And an upper cover plate 224 disposed on the upper cover plate 224 and sealing the evaporation material 20 in the accommodating space 227. The upper cover plate 224 and the upper cover plate 224, (Not shown).

The evaporator 220 includes a cavity 221 connected to a lower portion of the connection passage 228 and a cavity 220 disposed around the cavity entrance where the connection passage 228 and the cavity 221 meet with each other, A reflection plate 223 for reflecting the incident light 20, and a cavity exit 221a disposed in a direction opposite to the cavity entrance. The evaporation material 20 may be provided to the cavity 221 through the connection passage 228 and the cavity inlet and may be discharged through the cavity outlet 221a.

The baffle 626 includes a baffle column 626a inserted into the upper surface of the connection passage 228 and a trench 626c mounted on the upper surface of the baffle column 626a and extending radially in the lower surface And may include a baffle support plate 626b. The vaporized evaporated material may be supplied to the connection passage 229 through the trench 623c.

The distributor 130 may spatially distribute the vapor discharged through the connection passage, the cavity outlet, or the reflection nozzle. The distribution unit 130 may be induction-heated by the induction coil 140.

 The distributor 130 may include a plurality of holes and may discharge the evaporation material into the interior of the vacuum container 160 through the holes. The distributor 130 may be hollow hemispherical. An equator plane of the distributor 130 may be mounted on the lower surface of the evaporator. The hole may be formed in the hemispherical surface.

11 is a view showing an evaporation deposition apparatus according to another embodiment of the present invention.

Referring to Figure 11, an evaporation deposition apparatus 700 includes an evaporation portion 220 that provides a vaporization material 20 through a connection passage 228, a plurality of holes through which the evaporation material 20, An evaporator 220 disposed in the vicinity of the opening 162 of the vacuum container 160 and protruding from the vacuum container 160; A dielectric part 110 surrounding the distribution part 130 and an induction coil 130 surrounding the evaporation part 220 and the distribution part 130 and induction heating the evaporation part 220 and the distribution part 130 250), and an AC power supply (250) providing AC to the induction coil (250).

The evaporation apparatus 700 includes an auxiliary evaporator 720 disposed above the evaporator 220 and including an auxiliary connection passage 728 exposed on a lower surface thereof, And a connection pipe 12 connecting the auxiliary connection passage 728 with the connection passage 228 of the evaporator 220. The auxiliary evaporator 720 may provide the auxiliary evaporator 70 through the auxiliary connection passage 728 exposed on the lower surface.

The evaporator 220 is connected to the connection passage 228 and extends from the lower portion of the body 220a to the upper portion of the connection passage 228. The evaporator 220 has a cylindrical body 220a, A baffle 226 extending over the upper surface of the protrusion 229, a baffle 226 extending from the baffle 226 to the upper surface of the protrusion 229, And an upper cover plate 224 disposed on the upper cover plate 224 and sealing the evaporation material 20 in the accommodating space 227. The upper cover plate 224 and the upper cover plate 224, (Not shown).

The evaporator 220 includes a cavity 221 connected to a lower portion of the connection passage 228 and a cavity 220 disposed around the cavity entrance where the connection passage 228 and the cavity 221 meet with each other, A reflection plate 223 for reflecting the incident light 20, and a cavity exit 221a disposed in a direction opposite to the cavity entrance. The evaporation material 20 may be provided to the cavity 221 through the connection passage 228 and the cavity inlet and may be discharged through the cavity outlet 221a.

The auxiliary evaporator 720 includes a cylindrical auxiliary body 720a and the auxiliary connecting passage 728 extending from the lower surface of the auxiliary body 720a toward the upper surface of the auxiliary body 720a, Shaped subsidiary protrusion 729 including the auxiliary connection channel 728 therein and an auxiliary storage space 729 for storing the auxiliary evaporation material 70 connected to the auxiliary protrusion 729 An auxiliary top cover plate 724 disposed on the auxiliary baffle 726 and sealing the auxiliary evaporation material 70 in the accommodation space 727 and a second auxiliary cover plate 724 disposed on the auxiliary top cover plate 724, And an auxiliary fixing part 722 disposed on the auxiliary body part 720a and engaging with the auxiliary body part 720a.

A connection pipe 12 connecting the auxiliary connection passage 728 of the auxiliary evaporator 720 and the connection passage 228 of the evaporator 220 may extend to the vicinity of the cavity inlet. Accordingly, the evaporation material 20 and the auxiliary evaporation material 70 may be provided to the cavity 221 through the reflective portion 223. [ The connection pipe 12 may pass through the upper cover plate 224 and the fixing portion 222.

The distributor 130 may spatially distribute the vapor discharged through the connection passage, the cavity outlet, or the reflection nozzle. The distribution unit 130 may be induction-heated by the induction coil 140.

The auxiliary induction coil 740 may audit the dielectric 110 and the auxiliary evaporator 720 and induction-heat the auxiliary evaporator 720. The auxiliary induction coil may be in a solute form. The auxiliary AC power source 750 may provide AC to the auxiliary induction coil 740. The frequency of the auxiliary AC power source 750 and the frequency of the AC power source 250 may be different from each other so as not to interfere with each other.

12 is a view showing a vapor deposition apparatus according to another embodiment of the present invention.

12, the evaporation deposition apparatus 800 includes an evaporation portion 220 that provides a vaporization material 20 through a connection passage 228, a plurality of holes through which the evaporation material 20 is introduced, An evaporator 220 disposed in the vicinity of the opening 162 of the vacuum container 160 and protruding from the vacuum container 160; A dielectric 110 surrounding the distributor 130, an induction coil 140 surrounding the evaporator 220 and the distributor 130 for induction heating the evaporator and the distributor 130, And an AC power source 150 for providing AC to the induction coil 140.

The evaporator 220 includes a cylindrical body 220a, a connection passage 228 extending upwardly from a lower portion of the body 220a, and an evaporator 220 connected to the connection passage 228, A baffle 226 extending over the upper surface of the protrusion 229, a baffle 226 extending from the baffle 226 to the upper surface of the protrusion 229, An upper cover plate 224 disposed on the top cover plate 242 and sealing the evaporation material 20 in the accommodating space 227 and a fixing portion 224 disposed on the upper cover plate 242 and engaged with the body portion 220 222).

The evaporator 220 includes a cavity 221 connected to a lower portion of the connection passage 228 and a cavity 220 disposed around the cavity entrance where the connection passage 228 and the cavity 221 meet with each other, A reflection plate 223 for reflecting the incident light 20, and a cavity exit 221a disposed in a direction opposite to the cavity entrance. The evaporation material 20 may be provided to the cavity 221 through the connection passage 228 and the cavity inlet and may be discharged through the cavity outlet 221a.

The auxiliary evaporator 820 is disposed at an upper portion of the evaporator 220 and includes an auxiliary connecting passage 728. The connection pipe 12 connects the auxiliary connection passage 728 of the auxiliary evaporator 820 and the connection passage 228 of the evaporator 220.

The auxiliary evaporator 820 may provide the auxiliary evaporator 80 through the auxiliary connection passage 728. [ A connection pipe 12 connecting the auxiliary connection passage 828 of the auxiliary evaporator 820 and the connection passage 228 of the evaporator 220 may be disposed.

The auxiliary evaporator 820 includes a cylindrical auxiliary body 820a and the auxiliary connecting passage 828 extending from the lower surface of the auxiliary body 820a toward the upper surface of the auxiliary body 820a, Shaped auxiliary protrusion 829 including the auxiliary connection passage 828 and an auxiliary storage space 828 connected to the upper surface of the auxiliary protrusion 829 for storing the evaporation material 80, An auxiliary top cover plate 824 disposed on the auxiliary baffle 826 and sealing the auxiliary evaporation material 80 in the auxiliary containment space 827 and an auxiliary top cover plate 824 disposed on the auxiliary top cover plate 826. [ 824, and an auxiliary securing portion 822 that engages the auxiliary body portion.

The auxiliary evaporator 820 may include a gas pipe 14 that surrounds the auxiliary evaporator 820 so as to contact the outer circumferential surface. The gas pipe 14 can independently control the temperature of the auxiliary evaporator 820 by passing a fluid therethrough. The gas pipe may extend outside the dielectric portion 110.

The distributor 130 may spatially distribute the vapor discharged through the connection passage, the cavity outlet, or the reflection nozzle. The distribution unit 130 may be induction-heated by the induction coil 140.

13 is a view for explaining an evaporation deposition apparatus according to another embodiment of the present invention.

13, the evaporation deposition apparatus 100a includes an evaporation portion 120 for providing the evaporation material 10 through the connection passage 128, a plurality of holes 132a to 132d, A distribution unit 130 for discharging the evaporation material 10 to the inside of the vacuum container 160 through the openings 162a to 132d of the vacuum container 160, A dielectric part 110 which protrudes from the evaporator part 120 and surrounds the evaporator part 120 and the distribution part 130 so as to surround the evaporator part 120 and the distribution part 130, An induction coil 140 for induction heating the distribution part 130 and an alternating current power supply 150 for providing alternating current to the induction coil 140.

The induction coil 140 may be disposed inside the dielectric 110 to surround the evaporator 120 and the distributor 130. The induction coil 140 may be spaced apart from the evaporation unit 120 and the distribution unit 130 so that the induction coil 140 is not in electrical contact with the induction coil 140. The induction coil may include a dielectric coating.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And all of the various forms of embodiments that can be practiced without departing from the technical spirit.

110:
120: evaporator
130:
140: induction coil
150: AC power source
160: Vacuum container
180: evaporation support

Claims (16)

An evaporator for providing the evaporation material through the connection passage;
A dispensing part including a plurality of holes and discharging the evaporation material into the interior of the vacuum container through the holes;
A dielectric portion mounted around the opening portion of the vacuum container and arranged to protrude from the vacuum container and surround the evaporator portion and the distributor portion;
An induction coil for enclosing the evaporator and the distributor and induction heating the evaporator and the distributor; And
And an alternating-current power supply for providing alternating current to the induction coil. The method according to claim 1,
Wherein the evaporator comprises:
A cylindrical body portion;
The connection passage extending from the lower portion of the body portion toward the upper portion;
A storage space connected to the connection passage and storing the evaporation material;
A pipe-shaped protrusion including the connection passage therein;
A baffle spanning an upper surface of the projection;
An upper cover plate disposed on the baffle and sealing the evaporation material in the storage space; And
And a fixing unit disposed on the upper cover plate and engaging with the body part. 3. The method of claim 2,
The baffle comprises:
A cylindrical baffle support portion inserted into the outer peripheral surface of the projection portion;
A baffle support plate disposed on an upper surface of the baffle support, the baffle support plate having an outer diameter smaller than an inner diameter of the body portion and including a through hole having a diameter equal to or less than an inner diameter of the baffle support; And
And a baffle protrusion formed on the upper surface of the baffle support plate to form a passage to be connected to the through hole. 3. The method of claim 2,
The baffle comprises:
A baffle column inserted into an upper surface of the connection passage; And
And a baffle support plate mounted on the upper surface of the column and including a trench extending radially on the lower surface. The method according to claim 1,
Wherein the diameter of the hole of the dispensing portion is reduced as the diameter of the hole increases as the latitude of the hemisphere increases. 6. The method of claim 5,
Wherein the holes are arranged at constant hardness intervals. The method according to claim 1,
Wherein the evaporator comprises:
A cavity connected to a lower portion of the connection passage;
A reflector disposed around the cavity entrance where the coupling passageway and the cavity meet with each other and reflects the evaporated material; And
Further comprising a cavity exit disposed opposite the cavity entrance,
Wherein the evaporation material is provided to the cavity through the connection passage and the cavity inlet, and is discharged through the outlet of the cavity. 8. The method of claim 7,
Further comprising a reflective nozzle arranged to be connected to said cavity exit,
Wherein the reflective nozzle is formed of a conductive material and is induction-heated. The method according to claim 1,
Wherein the distributor has an equator plane mounted on a lower surface of the evaporator, a hollow hemispherical shape,
And the hole is formed on the hemispherical surface. The method according to claim 1,
Wherein the distributor comprises:
Wherein the diameter of the circular hole is increased as the radius increases from the center of the disk. The method according to claim 1,
Wherein the distributor comprises:
Wherein the hole is in the shape of a washer cut in the radial direction and the area of the hole increases as the radius increases from the center of the disk. The method according to claim 1,
Wherein the distributor comprises:
Wherein the hole is in the form of a disk shape comprising two straight lines and one circular arc,
And an intersection point of the two straight lines is located at a certain distance radius from the center of the disk. The method according to claim 1,
An auxiliary evaporator disposed above the evaporator and including an auxiliary connection passage;
And a connection pipe connecting the auxiliary connection passage of the auxiliary evaporator to the connection passage of the evaporator,
Wherein the auxiliary evaporator provides an auxiliary evaporation material through the auxiliary connection passage exposed on the lower surface. 14. The method of claim 13,
Wherein the auxiliary evaporator comprises:
A cylindrical auxiliary body portion;
The auxiliary connecting passage extending from a lower portion to an upper portion of the auxiliary body portion;
A storage space for storing the evaporation material connected to the auxiliary connection passage;
Like auxiliary protrusion including the auxiliary connection passage therein;
An auxiliary baffle spanning an upper surface of the auxiliary projection;
An auxiliary upper cover plate disposed on the auxiliary baffle and sealing the auxiliary evaporation material in the containing space; And
And an auxiliary fixing part disposed on the auxiliary upper cover plate and engaging with the auxiliary body part. 14. The method of claim 13,
An auxiliary induction coil surrounding the dielectric portion and induction heating the auxiliary evaporation portion; And
Further comprising a secondary alternating-current power supply for providing alternating current to the auxiliary induction coil. 14. The method of claim 13,
And a gas pipe for enclosing the auxiliary evaporator so as to contact the evaporator.

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