KR101209000B1 - Ionic device and DNA analyzing apparatus using graphene nanopore structure - Google Patents

Abstract

Provided are an ion device and a device for DNA analysis using graphene nanopore structures. An ion device using a graphene nanopore structure according to an embodiment of the present invention includes a chamber including a first region and a second region; A first electrode positioned in the first region; A second electrode positioned in the second region opposite the first electrode; And a nano pore membrane positioned between the first electrode and the second electrode, the graphene layer comprising nanopores penetrating the graphene layer, and applied to the nanopore membrane, the first electrode, and the second electrode. The ion current passing through the nanopores is generated by the electrical signal.

Description

Ionic device and DNA analyzing apparatus using graphene nanopore structure

The present invention relates to an ion device and a DNA analysis device using a graphene nano-pore structure, and more particularly, DNA using a nano-pore that can analyze the ion device and the DNA using the ionic field effect without labeling (labeling) It relates to a device for analysis.

With the recent miniaturization of electronic information devices, there is a need for finding materials to replace silicon in terms of density and processing speed. Graphene has a higher mobility of charge carriers than silicon and can carry a lot of current, enabling processing of large amounts of information at low power, improving switching speed, and miniaturization. Known suitable materials. Accordingly, researches on electronic devices such as ultra-fast nano memory devices, transparent displays, and next-generation solar cells using graphene have been actively conducted.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide an ion device exhibiting an ionic field effect by allowing a graphene nanopore structure to have ion selectivity inside a nanopore.

In addition, another technical problem to be achieved by the present invention is to provide an apparatus for DNA analysis that can easily analyze DNA by detecting an electrical signal using a graphene nano-pore structure.

An ion device using a graphene nano-pore structure according to an embodiment of the present invention is provided. An ion device using the graphene nanopore structure may include a chamber including a first region and a second region; A first electrode positioned in the first region; A second electrode positioned in the second region opposite the first electrode; And a nano pore membrane positioned between the first electrode and the second electrode, the graphene layer comprising nanopores penetrating the graphene layer, wherein the nanopore membrane, the first electrode, and The ion current passing through the nanopores is generated by an electrical signal applied to the second electrode.

In some embodiments of the present disclosure, the ion device may operate as an ion field transistor by a voltage applied to the nanopore film, the first electrode, and the second electrode.

In some embodiments of the present invention, the interior of the nanopores may operate as an ion channel.

In some embodiments of the present invention, the graphene layer may be a single layer of graphene sheet or multilayer graphene sheets.

In some embodiments of the present invention, the nano-pores may have a cylindrical shape having the same upper and lower diameters or a truncated conical shape having different upper and lower diameters.

An apparatus for DNA analysis using a graphene nano-pore structure according to an embodiment of the present invention is provided. The device for analyzing DNA using the graphene nano-pore structure may include a chamber containing a solution and including a first region and a second region; A first electrode positioned in the first region; A second electrode positioned in the second region opposite the first electrode; And a nano pore film disposed between the first electrode and the second electrode and including a graphene layer and a nano pore penetrating the graphene layer. And an electrical signal unit electrically connected to the graphene layer, the first electrode, and the second electrode to apply a first electrical signal and receive a second electrical signal therefrom. It is characterized by detecting the DNA in the solution.

In some embodiments of the present invention, the second electrical signal that changes when the DNA passes through the nanopores may be used to detect one or more bases constituting the DNA.

In some embodiments of the present invention, the DNA may be sequentially sequenced by detecting the second electrical signal having a different value depending on the base constituting the DNA.

In some embodiments of the present invention, the movement speed of DNA may be controlled according to the first electrical signal applied to the graphene layer.

In some embodiments of the present invention, the nano-pore membrane may be composed of a single layer of graphene sheet so that only one of the nucleotides constituting the DNA may be included in the nano-pores.

According to the ion device using the graphene nano-pore structure of the present invention, by applying a gate voltage to the graphene having a conductivity, an ion channel may be formed inside the nano-pores to implement a nano-sized ion field transistor.

In addition, according to the DNA analysis apparatus using the graphene nano-pore structure of the present invention, by using a nano-pore having a size of less than 10nm and can easily control the charge on the surface of the nano-pores, it is possible to efficiently control the movement speed of DNA Can be. As a result, time for DNA analysis can be secured and the magnitude of the electrical signal can be adjusted.

1 is a cross-sectional view showing an ion device using a graphene nano-pore structure according to an embodiment of the present invention.
2A and 2B are schematic views for explaining graphene constituting the nanopore membrane of the ion device according to the present invention.
3 is a flowchart illustrating the operation principle of the ion device using the graphene nano-pore structure according to the present invention.
Figure 4 is a perspective view showing a device for DNA analysis using the graphene nano-pore structure according to an embodiment of the present invention.
5A to 5E are cross-sectional views according to a process sequence to explain an exemplary method for manufacturing the graphene nanopore film according to the present invention.
6A and 6B are schematic diagrams showing DNA passing through nanopores in accordance with the present invention.
Figure 7 is a graph showing the flow of current to explain the method of sequencing DNA.
8 is a flowchart illustrating a DNA analysis process using a device for DNA analysis using the nanopore structure according to the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following description, when a layer is described as being on top of another layer, it may be directly on top of the other layer, with a third layer intervening therebetween. In the drawings, the thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals refer to the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. Also, as used herein, "comprise" and / or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and / or groups of these. It is not intended to exclude the presence or the addition of one or more other shapes, numbers, acts, members, elements and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, embodiments of the present invention should not be construed as limited to any particular shape of the regions illustrated herein, including, for example, variations in shape resulting from manufacturing.

1 is a cross-sectional view showing an embodiment of an ion device 100 using a graphene nano-pore structure according to the spirit of the present invention.

Referring to FIG. 1, the ion device 100 includes a membrane 10 (hereinafter, referred to as a “nanopore membrane”) 20 in which a chamber 10 and nanopores 25 are formed. The first region 12 and the second region 14 of the chamber 10 are disposed on both sides of the nanopore film 20. The first electrode 30 and the second electrode 40 are disposed in the first region 12 and the second region 14, respectively. The nano pore membrane 20 includes a nano pore 25, which may be located at the center of the nano pore membrane 20, for example. The first electrode 30, the second electrode 40, and the nano pore film 20 may receive and output an electrical signal from the outside.

The chamber 10 may be separated into the first region 12 and the second region 14 by the nano-pore membrane 20, and may be configured as separate chambers, respectively. The chamber 10 is for accommodating an electrolyte solution, and the first electrode 30 and the second electrode 40 are disposed in each of the first region 12 and the second region 14 of the chamber 10. The chamber 10 may be made of one or more materials of glass, polydimethylsiloxane (PDMS), and plastic. Chamber 10 may contain a solution comprising an electrolyte, which solution may be prepared in a fluid state and any conductive solvent may be used. The apparatus may further include an injection unit (not shown) and a discharge unit (not shown) capable of injecting and discharging the solution into the chamber 10 outside the chamber 10. The chamber 10 may have a small capacity, and the length in either direction may have dimensions of several micrometers.

The first electrode 30 may be disposed in the first region 12 of the chamber 10, and the second electrode 40 may be disposed in the second region 14 of the chamber 10. The first electrode 30 and the second electrode 40 may apply a voltage to the solution in the chamber 10 to flow ions in the solution, resulting in the flow of current. The first electrode 30 and the second electrode 40 are aluminum (Al), gold (Au), beryllium (Be), bismuth (Bi), cobalt (Co), hafnium (Hf), indium (In), and manganese. (Mn), molybdenum (Mo), nickel (Ni), lead (Pb), palladium (Pd), platinum (Pt), rhodium (Rh), rhenium (Re), ruthenium (Ru), tantalum (Ta), tellium (Te), titanium (Ti), tungsten (W), zinc (Zn), zirconium (Zr), nitrides thereof, and silicides thereof. The first electrode 30 and the second electrode 40 may each be a single layer or a composite layer. For example, the first electrode 30 and the second electrode 40 may be a composite layer of silver (Ag) or silver chloride (AgCl). The first electrode 30 and the second electrode 40 may be configured to include the same material or different materials. In addition, the first electrode 30 and the second electrode 40 may be disposed to be close to the nano-pore film 20.

The nano pore film 20 is composed of graphene. The nano pore membrane 20 includes a nano pore 25 formed at a central portion, and the nano pore 25 penetrates through the nano pore membrane 20. Graphene refers to a two-dimensional thin film of a honeycomb structure composed of a layer of carbon atoms, and the nano-pore film 20 may include a monolayer or a multilayer of graphene. Graphene constituting the nano-pore film 20 will be described in detail below with reference to FIGS. 2A and 2B.

The nano pore film 20, the first electrode 30, and the second electrode 40 are connected to an external device (not shown) to receive an electrical signal, for example, a voltage, from which an electrical signal, for example, For example, it can output a current. The voltage applied to the nano-pore film 20 is the gate voltage (V _G ), the voltage applied to the first electrode 30 is the source voltage (V _S ), the voltage applied to the second electrode 40 is the drain voltage ( V _D ). The external device (not shown) may be electrically connected to the nano pore film 20, the first electrode 30, and the second electrode 40 through a conductive member, for example, a conductive wire, in particular the nano pore film 20 ) May be connected by a probe (not shown). Alternatively, the conductive member may be a nanowire, and the nanowire may be formed of a conductive pattern and then deposited as a conductive wire by using ion implantation or sputtering.

By the gate voltage V _G , the source voltage V _S , and the drain voltage V _D applied by an external device (not shown), the ion device 100 is an ion field effect transistor (IFET). It can work as Ion field transistors are similar in principle to conventional semiconductor field effect transistors except that the carriers traveling through the channel are electrolyte ions, not electrons or holes. Therefore, the ion current flows due to the movement of the ions, not the movement of the electrons, and the nanopores 25 serve as channels for the movement of the ions. When receiving the electrolyte solution in the chamber 10, the ionized cations and anions can be moved in either direction by the source voltage (V _S ) and the drain voltage (V _D ) applied to the chamber 10, The on state and the off state of the transistor may be controlled by the gate voltage V _G applied to the nano pore film 20.

2A and 2B are schematic diagrams for describing graphene constituting a nano-pore membrane of an ion device according to the technical spirit of the present invention.

Referring to FIG. 2A, the structure of graphite is shown, and graphene is a structure formed by one layer of the graphite structure. Graphite has a hexagonal structure in which carbon atoms (C) are continuous like a cross section of a honeycomb, and this structure is a crystal structure in which layers are stacked. The carbon atoms (C) in the layer are strongly bonded by covalent bonds (A bond), but the bond strength between layers is weak so that the layers can be easily broken (B bond).

Referring to FIG. 2B, graphene refers to a two-dimensional thin film of a honeycomb structure composed of one layer of carbon atoms (C). The carbon atom (C) forms a two-dimensional carbon hexagonal network surface when chemically bonded by an sp ² hybrid orbit. Carbon has four outermost electrons, and when combined, four electrons hybridize to participate. Carbon bonds include sp ³ bonds and sp ² bonds, and only sp ³ bonds are square diamond and sp ² bonds are graphite or graphene, a layer of graphite. . For example, electrons that would originally exist only in the orbital and p orbitals have a hybrid orbital of sp ² and sp ³ that combines the s and p orbits. Since the sp2 hybrid orbital has one electron in the orbit and two electrons in the orbit, the sp2 hybrid orbital has three electrons in total, wherein the energy levels of the respective electrons are the same. It is in a hybrid orbital state because it is more stable to have a hybrid orbital than to have s and p orbitals, respectively. The aggregate of carbon atoms (C) having such a planar structure is graphene, and the thickness of a single layer is about 0.3 nm because it is only one carbon atom (C) in size. Graphene has a metallic property, has conductivity in the layer direction, has excellent thermal conductivity, and has high mobility of charge carriers, thereby enabling high-speed electronic devices. It is known that the electron mobility of the graphene sheet has a value of about 20,000 to 50,000 cm ² / Vs. Graphene has excellent mechanical robustness and chemical stability, has both semiconductor and conductor properties, and is small in diameter and long in length, and thus has great applicability to flat panel display devices, transistors, energy storage devices, and nano-sized electronic devices. The use of graphene facilitates fabrication of devices using conventional semiconductor processing techniques, and particularly has the advantage of easy integration of large areas.

3 is a flowchart illustrating an operating principle of an ion device using a graphene nano-pore structure according to the inventive concept.

Referring to FIG. 3 together with FIG. 1, first, applying a predetermined voltage to the nano-pore film 20 of the first electrode 30, the second electrode 40 and / or graphene in an external device (not shown) S110 is performed. For example, a positive gate voltage V _G and a drain voltage V _D and a negative source voltage V _S may be applied. In operation S110, only the source voltage V _S and the drain voltage V _D may be applied without applying a separate voltage to the gate voltage V _G.

When a voltage is applied, step S120 of forming an electrical double layer in the nanopores 25 may be performed. When the gate voltage V _G is applied, the surface of the graphene forming the nano-pore film 20 on the side of the nano-pores 25 has a specific charge, and an electrical double layer composed of ions having opposite charges is formed. This phenomenon of masking the surface charge can be interpreted by Debye leghth, which is inversely proportional to the square root of the concentration of the electrolyte in the solution.

When the electrical double layer is formed, the interior of the nano-pores 25 will have ion selectivity (S130). When the size of the nano-pores 25 is small, the electrical double layer overlaps inside the nano-pores 25 so that the interior of the nano-pores 25 are filled with counter ions, and the nano-pores 25 have ion selectivity. I can have it. In this case, the type and amount of ions present in the nano-pores 25 do not change according to the concentration of the solution, so that a concentration section occurs to cause saturation of the ion conductance. Such ion selectivity is the basis for operating as an ion transistor. do.

When the nano-pores 25 have ion selectivity as described above, it is possible to control the flow of the ion current in the nano-pores 25 (S140). According to the magnitude of the applied gate voltage (V _G ), source voltage (V _S ) and drain voltage (V _D ) it is possible to flow ions of a specific charge, it is also possible to control the amount of ion current. For example, when applying a positive voltage to the gate voltage (V _G), may be of the anion channel in the nano-pores 25 formed in the case of applying a negative voltage to the gate voltage (V _G), Channels of cations can be formed.

Figure 4 is a perspective view showing an embodiment of a device 200 for analyzing DNA using the graphene nano-pore structure according to the spirit of the present invention.

In Fig. 4, the same reference numerals as those in Fig. 1 denote the same members, and thus detailed description thereof will be omitted here. Referring to FIG. 4, the device 200 for DNA analysis includes a nanopore membrane 20 in which a chamber 10 and nanopores 25 are formed. The first region 12 and the second region 14 of the chamber 10 are disposed on both sides of the nanopore film 20. The first electrode 30 and the second electrode 40 are disposed in the first region 12 and the second region 14, respectively. The nano pore membrane 20 includes a nano pore 25, which may be located at the center of the nano pore membrane 20, for example. The electrical signal unit 50 that can transmit and receive electrical signals is disposed outside the chamber 10.

The chamber 10 contains a solution containing a biomolecule such as DNA. The DNA analysis device 200 may be used for the analysis of biomolecules, and the subject of analysis is not limited to DNA, and may be DNA, RNA, peptides, or proteins. The solution may be an electrolyte solvent such as hydrochloric acid (HCl), sodium chloride (NaCl) or potassium chloride (KCl). Potassium chloride (KCl) is characterized by almost no difference in the ion mobility (mobility) of the cation and anion.

DNA analysis device 200 of the present embodiment can analyze the DNA using the ion field effect described above with reference to Figure 1, the gate voltage (V _G ), the source voltage applied by the electrical signal unit 50 The movement of DNA can be controlled by (V _S ) and the drain voltage (V _D ). The principle of analyzing DNA using the apparatus 200 for DNA analysis will be described in detail below with reference to FIGS. 6A to 7.

5A through 5E are cross-sectional views illustrating a method for manufacturing the graphene nanopore film according to the spirit of the present invention in order of process.

Various methods for forming the graphene sheet are known. It can be formed by mechanical peeling from graphite crystals or by pyrolysis of silicon carbide (SiC) crystals. For example, the Scotch tape method, which is a kind of mechanical peeling method, is a micro mechanical peeling method, in which a scotch tape is attached to a graphite sample, and then the scotch tape is peeled off and the graphene sheet separated from the graphite on the scotch tape surface. Is the way to get. The silicon carbide (SiC) crystal pyrolysis method uses the principle that when SiC single crystal is heated, SiC on the surface is decomposed to remove silicon (Si), and a graphene sheet is formed by the remaining carbon. In addition, graphene may be formed using a deposition process. For example, graphene epitaxy is grown on a sapphire substrate using molecular beam epitaxy (MBE) or chemical vapor deposition (CVD), and graphene and sapphire Growth of epitaxy can be readily achieved due to crystallographic compatibility between substrates. In addition, high ordered pyrolytic graphite (HOPG) flakes, chemical reduction of graphite oxide flakes, thermal exfoliation, electrostatic deposition, and liquid phase exfoliation of graphite of graphite, arc-discharging, and solvothermal methods can be used. In this embodiment, a manufacturing process will be exemplarily described using a process using a CVD method.

Referring to FIG. 5A, the sacrificial layer 70 and the catalyst layer 80 are stacked on the substrate 60. The substrate 60 may be, for example, a silicon (Si) substrate. The sacrificial layer 70 may include, for example, silicon oxide (SiO ₂ ), and may be deposited using a deposition method such as chemical vapor deposition (CVD) or reactive sputtering. . The catalyst layer 80 is a catalyst for graphite, and may include nickel (Ni), transition-metal carbide, or nanoparticles thereof, and in the case of a thin film, sputtering Alternatively, the deposition may be performed using a physical vapor deposition (PVD) method such as an electron beam evaporator. The sacrificial layer 70 and the catalyst layer 80 may be deposited to a thickness of 200nm to 400nm. Next, the mask layer 90 is laminated on the lower surface of the substrate 60. The mask layer 140 may include silicon nitride (Si ₃ N ₄ ), for example.

Referring to FIG. 5B, a graphene layer 20a is formed on the catalyst layer 80. The graphene layer 20a may be formed by CVD of hydrocarbon, for example, by injecting a mixed gas of methane (CH ₄ ), hydrogen (H ₂ ) and argon (Ar) at about 1000 degrees. 20a) may be deposited.

Referring to FIG. 5C, a pattern is formed on the mask layer 90 on the lower surface of the substrate 60. A pattern may be formed using a separate mask layer (not shown), and the pattern may be formed by etching the mask layer 90 using the mask layer 90. The etching may use reactive ion etching (RIE). Next, the substrate 60 is etched using the patterned mask layer 90 on the bottom surface. The substrate 60 may be etched using anisotropic wet etching using potassium hydroxide (KOH). By etching the central portion of the substrate 60 in this step, the formation of the nanopores 25 (see FIG. 5D) in a later process may be facilitated.

Referring to FIG. 5D, after a photoresist layer (not shown) is laminated on the lamination structure of the sacrificial layer 70, the catalyst layer 80, and the graphene layer 20a, an electron beam lithography is used. A pattern for forming the nano pores 25 is formed. By using the pattern, the nanopore 25 is formed by etching the stack structure of the sacrificial layer 70, the catalyst layer 80 and the graphene layer 20a. In this case, the nano-sized nanopores 25 may be formed using an electron beam directly without applying a separate photoresist layer (not shown). The nanopores 25 may also be directly formed using a focused beam of ion-beam milling or a transmission electron microscope (TEM), such as a focused ion beam (FIB). In addition, it is also possible to etch using a nanostructure, such as nanowires as a mask.

Referring to FIG. 5E, through the etching process, the sacrificial layer 70 and the catalyst layer 80 on the upper surface of the substrate 60 are sequentially etched. As a result, as shown in FIG. 5E, the graphene layer 20a may be used to manufacture the device in a state including remaining portions of the lower layers. Alternatively, both the sacrificial layer 70 and the catalyst layer 80 may be removed by wet etching through an additional process, for example, may be etched using hydrofluoric acid (HF). In this case, when all of the catalyst layer 80 is removed, the graphene layer 20a remains, and then the graphene layer 20a is moved to a substrate (not shown) for device fabrication, thereby obtaining the ion device or DNA analysis device of the present invention. It can manufacture. The graphene layer 20a corresponds to the nano pore film 20 of FIGS. 1 and 4.

6A and 6B are schematic diagrams illustrating DNA passing through the nanopores 25 according to the inventive concept.

FIG. 6A shows a case where the nano-pore membrane 20 is composed of a nano-pore membrane 20 of a single graphene layer, and FIG. 6B shows that the nano-pore membrane 20 is composed of two graphene layers 20a and 20b. The case of multiple layers is shown. Although the multilayered layer of this figure shows a case where two graphene layers are present, the present invention is not limited thereto, and the nano-pore membrane 20 may be composed of three or more graphene layers. DNA in the solution containing the DNA passes through the nanopores 25 as shown. When the DNA contained in the solution passes through the nanopores 25, there is an energy barrier due to elements such as electrostatic interaction or geometric limitations in the nanopores 25. By the voltage applied to the solvent and the nano-pore membrane 20, DNA can pass in one direction to overcome the barrier. DNA is a polymer of nucleotides, and the nucleotide is composed of pentose sugar, phosphoric acid and base, and the phosphate group has a negative charge due to the difference in electronegativity between phosphorus and oxygen constituting the phosphate group. Therefore, the movement can be adjusted by the ion field effect mentioned above. The charge of the DNA, RNA, peptide or protein to be analyzed can be controlled by using a high charge or a specific charge to have a specific charge. When the DNA passes through the nano-pores (25), the current is blocked by the ions flowing in the nano-pores (25) to generate a blockade signal (blockade signal), whereby the adenine (A), the constituent base of the DNA, Different current values may be displayed depending on the type of thymine (T), guanine (G), and cytokine (C). The current may be measured from the first electrode 30 and the second electrode 40 of the DNA analysis apparatus 200 of FIG. 4, through which the base of the DNA may be analyzed.

In general, when the nano-pores 25 of 10 nm or less are used, it is known that a single stranded and double stranded DNA can be distinguished, and according to the DNA analysis apparatus according to the present invention, 10 nm or less Since the use of nano pores 25 will be possible to distinguish as described above. DNA having a helical structure has a spiral diameter of about 2 nm and a length of one nucleotide constituting the DNA is about 0.3 nm. In the device for DNA analysis (200, see FIG. 4) according to the present invention, when a single layer of graphene is used for the nanopore membrane 20 as shown in FIG. 6A, the thickness of the nanopore membrane 20 is the length of the nucleotide. Will be similar to Thus, when DNA moves, only one nucleotide may be present in the nanopores 25 so that the resolution of base sequence sequencing can be improved. On the other hand, when using multiple layers of graphene as shown in Figure 6b in the nano-pore film 20, it may have an improved mechanical durability than that of a single layer. For the analysis of DNA, the transit time through which the DNA passes through the nanopores 25 should be sufficient. In the device for DNA analysis according to the present invention, by controlling the voltage applied, by controlling the charge in the nano-pores 25 corresponding to the channel of the ion transistor, it is possible to control the movement speed of the DNA. A detailed control process will be described below with reference to FIG. 8.

Figure 7 is a graph showing the flow of current to explain the method of sequencing DNA.

Referring to FIG. 7, an exemplary method of sequencing DNA sequences using electrical current and electrical signals received by the blocking signal is shown. When the electrical signal is referred to as a detection current, each base constituting the DNA (A, T, G, C) may represent a detection current of a different size. Therefore, the sequential detection of each base of the DNA is possible through the magnitude of the detection current, thereby enabling the sequencing of the base sequence of the DNA. In this case, for easy analysis of the electrical signal, it is required that the amount of current to be detected is large and the difference of the current value according to the base sequence is large. In the device for DNA analysis according to the present invention, by controlling the gate voltage (V _G ) applied to the nano-pore membrane 20 of FIGS. 6A and 6B, the amount of current passing through the nano-pores 25 may also be adjustable. Thus, sequencing of DNA can be facilitated.

8 is a flowchart illustrating a DNA analysis process using a device for DNA analysis using a nano-pore structure according to the inventive concept.

Referring to FIG. 8, with reference to FIG. 4, the DNA analysis apparatus 200 of FIG. 4 is prepared, a solution is accommodated in the chamber 10, and the electrical signal unit 50 firstly displays the first chamber 10. In operation S110, an electrical signal, for example, a predetermined voltage is applied to the electrode 30, the second electrode 40, and / or the nanopore film 20. For example, a positive gate voltage V _G and a drain voltage V _D and a negative source voltage V _S may be applied. As a result, the step S115 of moving the DNA in the solution of the chamber 10 proceeds, and the DNA may be moved from the first region 12 of the chamber 10 to the second region 14. In this step S110, a separate voltage may not be applied to the gate voltage V _G.

Next, an operation (S220) of receiving and analyzing an electrical signal, for example, a current, is performed in the electrical signal unit 50. The electrical signal may be a current generated by the flow of ions. When the DNA passes through the nano-pores 25, the above-described blocking signal is generated, through the reception of the current, it is possible to detect the DNA and sequencing the base sequence. If detection of DNA is recognized, it may be necessary to slow down or stop the movement for analysis of DNA.

In a next step, step S230 of adjusting the gate voltage V _G , which is an electrical signal applied to the nano-pore film 20, is performed. This is to control the movement of DNA for analysis after detecting the DNA through the current received in the reception and analysis step (S220) of the current. In step S230, the step S235 of controlling the movement speed of the DNA in the nanopores 25 is performed. For example, when a positive voltage is applied to the gate voltage V _G , the movement of DNA having a negative charge may be stopped or the movement speed may be reduced according to the magnitude of the voltage. Therefore, it is possible to secure a transit time for analysis of DNA. In addition, even when DNA is not detected in the reception and analysis step (S220), the entry of DNA into the nanopores 25 may be prevented as necessary. For example, when a negative voltage is applied to the gate voltage V _G , the DNA may be blocked from moving into the nanopores 25.

While controlling the movement of DNA, the analysis of DNA is performed again through the reception and analysis of the current (S220), the gate voltage (V _G ) is adjusted (S230), the movement of the DNA is controlled (S235), and the reception of the current is performed. The analysis (S220) may be repeated.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

10 chamber 12 first region of chamber
14: second region of the chamber 20a: graphene layer
20: nano-pore membrane 25: nano-pore
30: first electrode 40: second electrode
50: electrical signal unit 60: substrate
70: sacrificial layer 80: catalyst layer
90 mask layer

Claims (10)

A chamber comprising a first region and a second region;
A first electrode positioned in the first region;
A second electrode positioned in the second region opposite the first electrode; And
And a nano-pore membrane disposed between the first electrode and the second electrode, the graphene layer comprising nanopores penetrating the graphene layer.
An ion current passing through the nanopores is generated by electrical signals applied to the nanopore membrane, the first electrode, and the second electrode, and the ion current is sensed through the first electrode and the second electrode. Ion device using a graphene nano-pore structure, characterized in that. The method according to claim 1,
The ion device is an ion device using a graphene nano-pore structure, characterized in that for operating the ion field transistor by the voltage applied to the nano-pore membrane, the first electrode and the second electrode. The method of claim 2,
An ion device using a graphene nano-pore structure, characterized in that the interior of the nano-pores operate as an ion channel (channel). The method according to claim 1,
The graphene layer is a single layer graphene sheet (sheet) or an ion device using a graphene nano-pore structure, characterized in that the graphene sheets of multiple layers. The method according to claim 1,
The nano-pore is an ion device using a graphene nano-pore structure, characterized in that the cylindrical shape of the same diameter of the upper and lower sides or the truncated conical shape of the diameter of the upper and lower sides. A chamber containing a solution, the chamber comprising a first region and a second region;
A first electrode positioned in the first region;
A second electrode positioned in the second region opposite the first electrode; And
A nano-pore membrane positioned between the first electrode and the second electrode and including a graphene layer and nanopores penetrating the graphene layer;
Electrically connected to the graphene layer, the first electrode, and the second electrode to apply a first electrical signal to the graphene layer, the first electrode, and the second electrode, and to apply the first electrode and the second electrode. An electrical signal unit for receiving a second electrical signal from the;
DNA analysis device using the graphene nano-pore structure, characterized in that for detecting the DNA in the solution using the second electrical signal. The method of claim 6,
The DNA analysis device using the graphene nano-pore structure, characterized in that for detecting one or more bases constituting the DNA using the second electrical signal that changes when the DNA passes through the nano-pores. The method of claim 6,
DNA analysis device using the graphene nano-pore structure, characterized in that for sequentially detecting the second electrical signal showing a different value depending on the base constituting the DNA, the DNA sequencing. The method of claim 6,
DNA analysis device using the graphene nano-pore structure, characterized in that for controlling the movement speed of DNA in accordance with the first electrical signal applied to the graphene layer. The method of claim 6,
The nano-pore membrane is a device for analyzing DNA using a graphene nano-pore structure, characterized in that consisting of a single layer of graphene sheet so that only one of the nucleotides constituting the DNA can be included in the nano-pores.

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