KR100782529B1 - Apparatus for depositing - Google Patents

Abstract

Disclosed is a deposition apparatus having several independent reactors. The present invention relates to a chamber surrounded by a chamber cover, a chamber wall forming an outer wall, and a bottom plate defining the inside of the chamber together with the chamber cover and the chamber wall, the reactor upper body being fixed to the chamber cover, and At least two reactors defining a reactor interior together with a reactor upper body and including a reactor lower body movable up and down and interposed in the reactor lower body and supporting pins supporting the substrate when the reactor lower body moves down; And a substrate entrance / exit at the side of the chamber wall, the substrate entrance / exit providing an entry / exit passage of the substrate. According to the present invention, the substrate can be processed at a much higher speed than the deposition apparatus having one reactor, and the equipment can be configured at a much smaller space and at a lower cost than using several deposition apparatus having one reactor. Almost the same number of substrates can be processed at the same time.

Chamber, reactor, chemical vapor deposition

Description

Deposition Apparatus {Apparatus for depositing}

1A and 1B are a schematic view and a cross-sectional view for explaining a deposition apparatus according to a first embodiment of the present invention.

FIG. 2A is a plan view of a deposition apparatus according to a second embodiment of the present invention, and FIG. 2B is a cross-sectional view taken along the line AA ′ of FIG. 2A.

FIG. 2C is a cross-sectional view of a deposition apparatus according to a third exemplary embodiment of the present invention, taken along a line A-A 'of FIG. 2A.

3A and 3B are plan views illustrating a deposition apparatus according to a fourth embodiment of the present invention.

The present invention relates to a deposition apparatus, and more particularly, to a deposition apparatus capable of treating a large number of semiconductor substrates per unit time by having a plurality of independent reactors.

Due to the development of semiconductor integrated technology, the thin film forming process is an important part of the semiconductor manufacturing process. Chemical vapor deposition (CVD), which forms a thin film on the surface of a substrate by supplying a gaseous raw material to a reactor on which a substrate is placed, is frequently used in a semiconductor manufacturing process.

Equipment applying the chemical vapor deposition method is a batch type (Batch Type) for depositing a thin film on a plurality of substrates simultaneously (Single Wafer Type) for depositing a thin film sequentially for each substrate. In a conventional batch chemical vapor deposition apparatus in which a plurality of layered substrates are simultaneously placed in one reactor and a film is formed on the substrate, the amount and flow of source gas may vary depending on the position of the substrate. Accordingly, in order to form a film having a constant composition and thickness on a large area substrate, a single sheet type which can control the quantity and flow of the raw material gas supplied to the substrate is advantageous. However, the single sheet type apparatus capable of processing only one substrate at a time has a limit on the number of substrates that can be processed per unit time.

SUMMARY OF THE INVENTION The present invention has been made in an effort to provide a deposition apparatus capable of processing a plurality of substrates at once while controlling the amount and flow of raw material gases supplied to a substrate.

In order to achieve the above technical problem, the present invention, in the chamber surrounded by a chamber cover, a chamber wall forming an outer wall, and a bottom plate defining the inside of the chamber together with the chamber cover and the chamber wall, fixed to the chamber cover A reactor upper body defining the inside of the reactor together with the reactor upper body, the reactor lower body movable up and down and interpolated with the reactor lower body and supporting the substrate when the reactor lower body moves downward. At least two reactors including fins are provided, and a chamber entrance and exit is provided on a side surface of the chamber wall to provide an entrance and exit passage of the substrate.

The reactor lower body is fixed to the bottom plate, the bottom plate may be connected to the drive means for enabling rotation.

The present invention also provides a deposition apparatus further comprising a rake-shaped arm capable of rotating and vertical movement to mount or detach a substrate to the reactor.

In addition, the present invention provides a deposition apparatus further comprising a rake-shaped arm rotatable to mount or detach a substrate into the reactor.

In addition, the present invention provides a deposition apparatus further comprising two rod-shaped arms for mounting or detaching a substrate into the reactor.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is described in the following embodiments. It is not limited. Like numbers refer to like elements in the figures.

<Example 1>

1A is a schematic diagram of a deposition apparatus according to a first embodiment of the present invention having three independent reactors.                     

Referring to FIG. 1A, three reactors are provided in a chamber C for forming a film on a substrate. Each reactor is inserted into the reactor upper body (110a, 110b, 110c) and the reactor lower body (120a, 120b, 120c), and the reactor lower body (120a, 120b, 120c) support pins (160a, 160b, 160c) installed The reactor upper body (110a, 110b, 110c) and the reactor lower body (120a, 120b, 120c) defines the inside of the reactor. The reactor upper bodies 110a, 110b, and 110c having the inlet and outlet 104, which are the inlet and outlet passages of the raw material gas, are fixed to the chamber cover 100. In FIG. 1A, the reactor upper bodies 110a, 110b, and 110c are provided with an inlet 102 and an outlet 104 of the source gas, and the inlet 102 and the outlet 104 of the source gas through the chamber cover 100. Although illustrated as being connected to a separate raw material supply device and an exhaust device, respectively, one raw material supply device is provided in the chamber cover 100 and a raw material supply pipe which is symmetrically branched to each of the reactors in the raw material supply device. It may be connected to the raw material inlet of each reactor upper body (110a, 110b, 110c). In addition, the exhaust pipes connected to the outlet of each reactor may be symmetrically joined to one exhaust pipe and connected to the exhaust pump. Reactor lower body (120a, 120b, 120c) on which the substrate is horizontally mounted has a heating device (not shown) for heating the substrate. The reactor lower bodies 120a, 120b and 120c can be moved up and down to allow the substrate to be seated in the lower position and then lifted up to closely adhere to the reactor upper bodies 110a, 110b and 110c so as to be chemical vapor deposition or atomic layer. A reactor capable of performing atomic layer deposition is constructed. On the other hand, the support pins 160a, 160b, 160c, which can support the substrate when the reactor lower bodies 120a, 120b, 120c are lowered, form holes in the reactor lower bodies 120a, 120b, 120c, and the holes. Inserted into and installed.

The three reactor lower bodies 120a, 120b, and 120c are fixed to the bottom plate 130, and the bottom plate 130 is provided to be rotatable in order to put and remove substrates from each of the three reactors. That is, a driving means, for example, a motor is connected to the bottom plate 130 to which the reactor lower bodies 120a, 120b, and 120c are fixed, and the driving means enables the bottom plate 130 to rotate. One side of the chamber wall forming the outer wall of the chamber C is provided with a substrate entrance and exit 140 that provides an entrance and exit passage of the substrate. Through the substrate entrance and exit 140, the substrate may be mounted or removed from each reactor.

More specifically, the method of mounting the substrate in the three reactors, first, the reactor lower body (120a, 120b, 120c) is moved down to separate from the reactor upper body (110a, 110b, 110c), wherein the support pin ( 160a, 160b, 160c are left in place so that they are in a higher position than reactor lower bodies 120a, 120b, 120c. Subsequently, the bottom plate 130 is rotated so that the first support pin 160a comes in front of the substrate entrance / exit 140. Subsequently, when a substrate transfer device (not shown) places one substrate on the first support pin 160a through the substrate entrance / exit 140, the bottom plate 130 fixing the reactor lower bodies 120a, 120b, and 120c. Rotate the 120 ° so that the second support pin 160b comes in front of the substrate entrance / exit 140. Next, another substrate is placed on the second support pin 160b and the bottom plate 130 is rotated 120 ° so that the third support pin 160c comes in front of the substrate entrance / exit 140. Subsequently, another substrate is placed on the third support pin 160c through the substrate entrance / exit 140. Next, the reactor lower body (120a, 120b, 120c) is raised up and in close contact with the reactor upper body (110a, 110b, 110c) to configure three independent reactors, and then chemical vapor deposition or atomic layer deposition is performed. The substrate is removed from each reactor in the reverse order of loading.

1B is a cross-sectional view illustrating the deposition apparatus according to the first embodiment of the present invention.

Referring to FIG. 1B, the chamber lid 100 is provided with an inlet 102 and an outlet 104 of the source gas. The reactor upper body 110 is fixed to the chamber cover 100 by fixing means (see 106 in FIG. 1A). The reactor upper body 110 is provided with an inlet 102 and an outlet 104 of the source gas, which are connected in correspondence with the inlet 102 and the outlet 104 provided in the chamber cover 100 and have an inlet and outlet passage of the source gas. To provide.

The bottom of the reactor upper body 110 may be equipped with a gas flow control plate 114 suitable for atomic layer deposition or a showerhead (not shown) suitable for chemical vapor deposition as shown in FIG. Examples of a reactor that forms a reactor together with a reactor lower body and an inlet and an outlet of raw gas are mounted on the reactor upper body include Korean Patent Application No. 1999-0023078, Korean Patent Application No. 2000-0044823, and Korean Patent Application No. 2001- It may be found in 0046802. The substrate W on which the film is to be formed is mounted on the reactor lower body 120, and the reactor lower body 120 is provided with a heating device (not shown) for controlling the substrate W temperature. The reactor lower body 120 is fixed to the rotatable bottom plate 130. The motor 170 is connected to the bottom plate 130 to enable rotation. On the other hand, the reactor lower body 120 can move up and down to seat the substrate (W) in the lower position, and then up to form a reactor in close contact with the reactor upper body 110. Thus, the driving unit for driving the reactor lower body 120 up and down and the fixed shaft 150 is fixed to the bottom plate 130, the movable plate 152 that can be moved up and down with the fixed shaft 150 as the axis and And a fixed plate 180 fixed below the fixed shaft 150, a drive shaft 182 for driving the moving plate 152, drive means 184 for driving the drive shaft up and down, and a moving plate 152. It is composed of a connecting plate 156 fixed to the shaft 154, and a fixing pin 158 connecting them so that the connecting plate 156 and the reactor lower body 120 is interlocked. At this time, the upper portion of the fixed shaft 150 is preferably installed to be fixed to the bottom plate 130. When the moving plate 152 moves up and down, the connecting shaft 154, the connecting plate 156 and the reactor lower body 120 moves up and down.

On the other hand, the support pin drive unit is installed to easily remove the substrate (W) from the reactor lower body 120. The support pin driver includes a support pin 160, a central shaft 162 having an upper portion connected to the support pin 160, and a central shaft driver 164 for driving the central shaft 162. The support pin 160 forms a hole in the reactor lower body 120 and is inserted into and installed in the hole.

The operation of the reactor lower body driving unit and the support pin driving unit, the reactor lower body 120 is raised in close contact with the reactor upper body 110 during the process of depositing a thin film on the substrate (W). When the deposition of the thin film is completed, the reactor lower body 120 is lowered, the substrate (W) is supported by the support pin 160, so that the substrate (W) is separated from the reactor lower body (120). After the support pin 160 is sufficiently separated from the reactor lower body 120, the height of the support pin 160 may be adjusted to match the height of the substrate W and the substrate transfer device installed separately from the outside.

<Example 2>

2A is a plan view illustrating a deposition apparatus according to a second embodiment of the present invention, and FIG. 2B is a cross-sectional view taken along the line AA ′ of FIG. 2A. Figure 2a shows after the chamber cover and the reactor upper body is boiled out.

Referring to FIG. 2A, the chamber cover (not shown) and the reactor upper body (not shown) are the same as in the first embodiment, and thus description thereof is omitted herein. The reactor lower body 220a, 220b, 220c on which the substrate is horizontally mounted has a heating device (not shown) capable of heating the substrate. Reactor lower body (220a, 220b, 220c) is able to move up and down to seat the substrate in the lower position, and then up to form a reactor that can be carried out in close contact with the reactor upper body to perform chemical vapor deposition or atomic layer deposition. The reactor lower bodies 220a, 220b, 220c are driven up and down by pneumatic cylinders. This will be described later. In addition, support pins 272 capable of supporting a substrate are interpolated and installed in the reactor lower bodies 220a, 220b, and 220c.

In addition, the chemical vapor deposition apparatus according to the present embodiment is provided with arms 290a, 290b, and 290c for mounting and detaching the substrate. The arm shaft 292, to which the arms 290a, 290b, and 290c are attached, is connected with driving means (see 286 in FIG. 2B) for enabling vertical movement and rotational movement. Arms 290a, 290b, and 290c have a rake shape, and the empty space inside the rake is larger than the diameter of the support pin 272. Arms 290a, 290b, and 290c receive three substrates that enter the substrate entrance and exit 240 in turn, and serve to seat the substrate on the support pins 272. After all three substrates have been seated, the arms 290a, 290b, 290c are placed in a position that does not interfere with the operation of the reactor lower bodies 220a, 220b, 220c (position shown in FIG. 2A).

Referring to FIG. 2B, the reactor lower body driving unit for driving the reactor lower bodies 220a, 220b, and 220c is a pneumatic cylinder 284 fixed to the bottom outside of the bottom plate 230, a pneumatic cylinder 284, and a reactor. It consists of a drive shaft 280 for connecting the lower body (220a, 220b, 220c), and a moving plate 278 for adjusting the balance between the drive shaft 280. When mounting and detaching the substrate W, the reactor lower bodies 220a, 220b and 220c connected to the pneumatic cylinder 284 are moved downward to separate the reactor upper body and the reactor lower bodies 220a, 220b and 220c. , The reactor is opened. At this time, the support pin 272 installed in the center of the reactor lower body (220a, 220b, 220c) is connected to the central axis 274, and stops further descending at a specific height. The reactor lower bodies 220a, 220b, 220c continue to descend, but the substrate W is supported by the support pins 272 so that the substrate W is separated from the reactor lower body 220. The height at which the substrate W stops is pre-aligned to allow the substrate W to be transported by an external substrate transport apparatus. For this purpose, the length of the central shaft 274 and the support pin 272 can be adjusted.

Referring to FIG. 2A, a method of mounting the substrate W to the reactor lower bodies 220a, 220b and 220c will be described in more detail. Referring to FIG. 2A, the substrate W is formed on the three reactor lower bodies 220a, 220b and 220c. In the absence of the three reactor lower body (220a, 220b, 220c) is lowered, and raise the arm (290a, 290b, 290c) higher than the three support pins (272). After rotating the arm shaft 292 in the position shown in FIG. 2A, which is displaced from the reactor lower bodies 220a, 220b, 220c by 60 °, the first arm 290a is in a position to receive the substrate W, and then the substrate The first substrate W is placed on the first arm 290a through the entrance and exit 240. Subsequently, the arm axis 292 is rotated 120 ° so that the empty second arm 290b comes in front of the substrate entrance and exit 240, and then the second substrate W is moved through the substrate entrance and exit 240. 290b). Next, the arm axis 292 is rotated by 120 ° to bring the empty third arm 290c in front of the substrate entrance and exit 240, and then the third substrate W is placed through the substrate entrance and exit 240. Put on (290c). The arms 290a, 290b, and 290c are lowered than the three support pins 272 so that the support pins 272 support the substrate W. FIG. At this time, since the support pins 272 are placed between the rake-shaped empty spaces of the arms 290a, 290b, and 290c, the arms 290a, 290b, and 290c do not collide with each other. The arm shaft 292 is then rotated 60 ° to a position that does not interfere with each reactor. Next, the three reactor lower bodies 220a, 220b, 220c are raised to contact the reactor upper body to close the reactor, and then a film is formed in the reactor by chemical vapor deposition or atomic layer deposition. After the film formation is finished, the substrate is taken in the reverse order to the loading.

<Example 3>

Instead of allowing the arm axis 292 to perform both the up and down rotational motion as in the second embodiment, the arm axis simply rotates and the support pin can actively move up and down to insert and remove the substrate. For this purpose, the arm shaft of the present embodiment is connected with means (286 in FIG. 2C), for example, a motor, which enable rotational movement. A plan view of the deposition apparatus according to the third embodiment is as in FIG. 2A. The support pins can actively move up and down instead of passively moving as shown in FIG. 2B. For this purpose, a support pin 288, for example a pneumatic cylinder, is connected to the support pins. FIG. 2C is a cross-sectional view of a deposition apparatus according to a third exemplary embodiment of the present invention, taken along a line A-A 'of FIG. 2A. Figure 2c shows that the support pin 272 is connected to the means 288 to enable the vertical movement.

In Example 3, the substrate is mounted on the reactor lower bodies 220a, 220b, and 220c in the following order. The three reactor lower bodies 220a, 220b, 220c are lowered and the three support pins 272 are arm 290a, 290b without the substrate W in the three reactor lower bodies 220a, 220b, 220c. 290c). After rotating the arm shaft 292 in the position shown in FIG. 2A, which is displaced from the reactor lower bodies 220a, 220b, 220c by 60 °, the first arm 290a is in a position to receive the substrate W, and then the substrate The first substrate W is placed on the first arm 290a through the entrance and exit 240. Rotate the arm shaft 292 by 120 ° so that the empty second arm 290b is in front of the substrate entrance and exit 240, and then the second substrate W is moved through the substrate entrance and exit 240 to the second arm 290b. Put it on. Next, the arm axis 292 is rotated by 120 ° to bring the empty third arm 290c in front of the substrate entrance and exit 240, and then the third substrate W is placed through the substrate entrance and exit 240. Put on (290c). Then, the three support pins 272 are raised higher than the arms 290a, 290b, and 290c so that the support pins 272 support the substrate W. At this time, since the support pins 272 are placed between the rake-shaped empty spaces of the arms 290a, 290b, and 290c, the arms 290a, 290b, and 290c do not collide with each other. The arm shaft 292 is then rotated 60 ° to a position that does not interfere with each reactor. Next, the three reactor lower bodies 220a, 220b, 220c are raised to contact the reactor upper body to close the reactor, and then a film is formed in the reactor by chemical vapor deposition or atomic layer deposition. After the film formation is finished, the substrate is taken in the reverse order to the loading.

 <Example 4>

In order to reduce the size of the deposition apparatus, it is desirable to place several reactors close together. In the case of using the rake arms 290a, 290b, and 290c on which the substrate is placed at the end as in the second embodiment described above, the reactors cannot be approached closer than the size of the rake. This is especially true when using large substrates such as 300mm wafers. Thus, instead of using a rake arm to reduce the size of the deposition apparatus, two rod-shaped arms can be used to transport the substrate. 3A and 3B are plan views showing a deposition apparatus using two arms formed in a rod shape. Each arm can be rotated independently or can be rotated in conjunction with a constant angle between the two arms.

3A and 3B, the chamber cover (not shown) and the reactor upper body (not shown) are the same as in the first embodiment, and thus description thereof is omitted here. The two arms 390a and 390b in the shape of rods are fixed to the arm axis 392. Arms 390a and 390b are positioned between the reactors as shown in FIG. 3A while closing the reactor and depositing the film. The arm shaft 392 is provided to be rotatable by connecting a drive means (not shown), for example, a motor. The support pins 372a, 372b and 373c are connected with means for enabling vertical movement, for example pneumatic cylinders. To transfer the substrate after the film deposition is completed, lower the reactor lower bodies 320a, 320b and 320c and the support pins 372a, 372b and 372c together and lower the first support pins 372a to the arms 390a and 390b. By raising it high, the first substrate is separated from the first reactor lower body 320a and supported by the first support pin 372a. At this time, the arms 390a and 390b are placed in a position as shown in FIG. 3A. Second, the third substrate is left on the second and third reactor lower bodies 320b, 320c. As shown in FIG. 3B, the two arms 390a and 390b are positioned at positions capable of supporting the substrate by rotating the arm axis 392. Next, the first support pin 372a is lowered to support the substrate with the two arms 390a and 390b. The two ends of the first arm 390a and the ends of the second arm 390b, indicated by white circles, are convex upwards and always in contact with the substrate. When the support pin is positioned inside the three contacts in contact with the substrate, the substrate is stably supported by the two arms 390a and 390b. Then, the first substrate is taken out through the substrate entrance and exit 340 using the substrate transfer device.

The second arms 390a and 390b are returned to the position shown in FIG. 3a to remove the second substrate and then rotated 120 ° so that the second reactor lower body 320b is placed between the two arms 390a and 390b. Lifting the second support pin 372b higher than the arms 390a and 390b separates the second substrate from the reactor lower body 320b and supports it with the second support pin 372b. The angle between the two arms 390a and 390b is reduced to move the arms 390a and 390b to a position capable of supporting the substrate, and then the second support pin 372b is lowered to support the substrate with the two arms 390a and 390b. . Then, while keeping the angle between the two arms 390a and 390b constant, the two arms 390a and 390b are rotated by 240 ° so that the second substrate is brought in front of the substrate entrance and exit 340 and through the substrate entrance and exit 340. Secondly, the substrate is taken out using a substrate transfer device.

The two arms 390a and 390b are returned to the position shown in FIG. 3a to remove the third substrate and then rotated 240 ° so that the third reactor lower body 320c is placed between the two arms 390a and 390b. The third support pin 372c is raised higher than the arms 390a and 390b to separate the third substrate from the reactor lower body 320b and are supported by the third support pin 372c. The angle between the two arms 390a and 390b is reduced to move the arms 390a and 390b to a position capable of supporting the substrate, and then the third support pin 372c is lowered to support the substrate with the two arms 390a and 390b. . Next, the two arms 390a and 390b are rotated by 120 ° while keeping the angle between the two arms 390a and 390b constant so that the third substrate is brought in front of the substrate entrance and exit 340 and through the substrate entrance and exit 340. Secondly, the substrate is taken out using a substrate transfer device.

In this way, the substrate can all be removed from the reactor after film formation. On the other hand, when attaching a board | substrate to a reactor, it performs in a reverse order to the case of detaching a board | substrate.

The processing time of the substrate in the deposition apparatus consists of the time taken to insert and take out the substrate (t _transfer ), the time to wait for temperature and pressure to stabilize before and after deposition (t _wait ) and the actual deposition time (t _process ). The time taken to deposit three substrates in the deposition apparatus with one reactor (t _transfer + t _wait + t _process ) is compared to the time taken to deposit three substrates in the deposition apparatus of the present invention with three reactors. 3 times more. For example, if the time taken to insert and remove a substrate (t _transfer ) is 20 seconds, the time to wait for temperature and pressure to stabilize before and after deposition (t _wait ) is 60 seconds, and the actual deposition time (t _process ) is 180 seconds, It takes 780 seconds (13 minutes) to process three substrates in a deposition apparatus with one reactor, but 300 seconds (5 minutes) to process three substrates in a deposition apparatus with three reactors. Min). Thus, a deposition apparatus with three reactors can process 2.6 times more substrates at the same time. In general, a deposition apparatus having n reactors has the same time as the deposition apparatus having one reactor, n × (t _transfer + t _wait + t _process ) / (n × t _transfer + t _wait + t _process ) = nn (n -1) x t _transfer / (n x t _transfer + t _wait + t _process ) times more substrates.

In a deposition apparatus capable of processing several sheets at the same time, the supply of raw gas through the inlet and the exhaust through the outlet are generally different from the inlet, outlet, and exhaust of an apparatus that can process one substrate. Processes developed in equipment cannot be applied to other equipment as they are. In contrast, the deposition apparatus of the present invention can be applied to a deposition apparatus including a plurality of reactors without changing the process developed by the deposition apparatus having one reactor. Since the inlet and outlet of each reactor are independent, the deposition that occurs in all reactors is the same as in a single deposition apparatus, provided that the flow of feed gas supplied through the inlet and the exhaust through the outlet are the same. By attaching a separate raw material supply device to several reactors, the amount and flow of the raw material gas supplied to each reactor may be the same as in the case of the deposition apparatus having one reactor. Alternatively, in the case of a deposition apparatus having one reactor, the amount and flow of the source gas supplied to each reactor is dispersed by dispersing the source gas into the n reactors through a symmetrical supply pipe in one raw material supply device supplying n times the raw material gas. You can do the same as In the latter case, one raw material feeder can be used instead of the n raw material feeders, so that the deposition apparatus can be configured more cheaply. Exhaust can likewise be used with one vacuum pump having an exhaust capacity of n times larger so that the exhaust velocity at the outlet of each of the n reactors is the same as in a deposition apparatus with one reactor.

In addition, if the device of the same function, it is advantageous in terms of semiconductor manufacturing cost to reduce the area of the clean room occupied. Therefore, when the device is configured by combining three process modules to perform three processes in a transfer module (platform) having a robot that can move a semiconductor substrate in a vacuum state, several devices at once When the device is configured together with the transfer module by using the process module of the present invention that can process long semiconductor substrates, semiconductor manufacturing is compared with configuring a device with a process module and a transfer module that can process only one semiconductor substrate at a time. You can save money.

In addition, integrating several independent reactors into an integrated system also provides the following advantages: Conventionally, only one reactor is provided in one chamber, and accordingly, a robot arm must also be provided in each chamber. However, in the case of the present invention, one robot arm may be shared. In addition, when the gas supply uses a sequential timing cycle, such as chemical vapor deposition or atomic layer deposition, in which the process itself is specified, the timing between the reactors is well adjusted to improve productivity. You can also increase it. Of course, there is also an advantage that can reduce the area occupied by the equipment as described above.

As described above, the deposition apparatus of the present invention having multiple independent reactors enables substrate processing at much higher speeds than deposition apparatuses having one reactor. In addition, it is possible to process almost the same number of substrates at the same time, even if the equipment is configured at a smaller cost in a much smaller footprint than using several deposition apparatuses having the same reactor. In addition, since the same reactor can be applied to the deposition apparatus of the present invention with a plurality of reactors without changing the process conditions developed in one deposition apparatus equipped with the same, the results of research and development can be easily applied to mass production.

As mentioned above, although the preferred embodiment of this invention was described in detail, this invention is not limited to the said embodiment, A various deformation | transformation by a person of ordinary skill in the art within the scope of the technical idea of this invention is carried out. This is possible.

Claims (20)

A chamber surrounded by a chamber lid, a chamber wall forming an outer wall, and a bottom plate defining the chamber interior together with the chamber lid and the chamber wall, A reactor upper body fixed to the chamber cover; A reactor lower body defining an inside of the reactor together with the reactor upper body and movable up and down; And At least two reactors inserted into the reactor lower body and including support pins for supporting the substrate when the reactor lower body moves downward, and at the side of the chamber wall, a substrate mouth providing an entry / exit passage of the substrate; Deposition apparatus characterized in that the entrance is provided. The deposition apparatus of claim 1, wherein each of the reactor lower bodies is integrally movable up and down. According to claim 1, wherein the reactor upper body is provided with an inlet and an outlet for the exhaust gas, the inlet and the outlet of the source gas through the chamber cover is connected to a separate raw material supply device and exhaust device, respectively The vapor deposition apparatus characterized by the above-mentioned. According to claim 1, One raw material supply device is provided in the chamber cover, the raw material supply pipe symmetrically branching to each of the reactor in the raw material supply device is connected to the raw material inlet of each of the reactor upper body Deposition apparatus, characterized in that. The deposition apparatus according to claim 1, wherein an exhaust pipe connected to the source gas outlet of each reactor is symmetrically joined to one exhaust pipe and connected to an exhaust pump. The deposition apparatus according to claim 1, wherein the reactor lower body is fixed to the bottom plate, and a driving means connected to the bottom plate is connected to the bottom plate. The deposition apparatus according to claim 1, further comprising rake-shaped arms capable of rotating and up-down movement for mounting or detaching a substrate in the reactor. 8. The deposition apparatus according to claim 7, wherein the arm is connected with drive means for enabling rotational movement and vertical movement, and the rotational center of the arm is a central axis portion of the chamber. 2. The deposition apparatus of claim 1, further comprising rake-like arms rotatable to mount or detach a substrate from the reactor. 10. The deposition apparatus according to claim 9, wherein the arm is connected with driving means for enabling rotation, and the center of rotation of the arm is a central axis portion of the chamber. 10. The deposition apparatus according to claim 9, wherein the support pin is connected with driving means for enabling vertical movement. The deposition apparatus according to any one of claims 7 to 11, wherein an empty space inside the rake of the arm is larger than a diameter of the support pin. The deposition according to any one of claims 7 to 11, wherein the arms are provided in the same number as the number of the reactors, and are located in empty spaces between the reactors during the deposition for forming the film. Device. The deposition apparatus according to claim 1, further comprising two rod-shaped arms for mounting or detaching a substrate into the reactor. 15. The deposition apparatus according to claim 14, wherein the arm is connected with a driving means to enable rotation, and the center of rotation of the arm is a central axis portion of the chamber. 15. The deposition apparatus according to claim 14, wherein the support pin is connected to a driving means for enabling vertical movement, and each of the support pins is provided to enable vertical movement. In the method of using the apparatus of claim 6, Lowering the reactor lower body in contact with the reactor upper body; Rotating the bottom plate so that the support pin is in front of the substrate entrance and exit, and sequentially placing the substrate introduced through the substrate entrance and exit on the support pin for the respective reactors; And And raising the reactor lower body to be in close contact with the reactor upper body. In the method of using the apparatus of claim 7, Lowering the reactor lower body in contact with the reactor upper body and bringing the arm to a position above the support pin; Rotating the arm so that the arm is in a position to receive a substrate in front of the substrate entrance and exit, and sequentially seating the substrate entered through the substrate entrance and exit on the arm for each of the arms; Positioning the arm so that the support pin comes under the rake-shaped hollow space of the arm, and lowering the arm lower than the support pin so that the support pin supports the substrate; Rotating the arm to position the arm in a position that does not interfere with driving of the reactor lower body; And And raising the reactor lower body to be in close contact with the reactor upper body. In the method using the apparatus of claim 9, Lowering the reactor lower body in contact with the reactor upper body and lowering the support pin to a lower position than the arm; Rotating the arm so that the arm is in a position to receive a substrate in front of the substrate entrance and exit, and sequentially seating the substrate entered through the substrate entrance and exit on the arm for each of the arms; Positioning the arm so that the support pin comes under the rake-shaped hollow space of the arm, and then raising the support pin up between the rake-shaped hollow space of the arm so that the support pin supports the substrate; Rotating the arm to position the arm in a position that does not interfere with driving of the reactor lower body; And And raising the reactor lower body to be in close contact with the reactor upper body. In the method of using the apparatus of claim 14, Lowering the reactor lower body in contact with the reactor upper body and lowering the support pin to a lower position than the arm; The two arms are rotated to be in position to receive a substrate in front of the substrate entrance and exit, and the substrate entered through the substrate entrance and exit is seated on the two arms, and then maintains an angle between the two arms. Rotate the two arms to the position where the substrate is to be placed, and then lift the support pins up through the empty space between the two arms to support the substrates and spread the angle between the two arms. Rotating the two arms to a position that does not interfere with the lowering of the support pins supporting the substrate, and then sequentially lowering the support pins supporting the substrate to each of the reactors; Rotating the two arms to position the two arms in a position that does not interfere with the drive of the reactor lower body; And And raising the reactor lower body to be in close contact with the reactor upper body.

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