JPS6439742A - Probe card - Google Patents

Probe card

Info

Publication number
JPS6439742A
JPS6439742A JP62196957A JP19695787A JPS6439742A JP S6439742 A JPS6439742 A JP S6439742A JP 62196957 A JP62196957 A JP 62196957A JP 19695787 A JP19695787 A JP 19695787A JP S6439742 A JPS6439742 A JP S6439742A
Authority
JP
Japan
Prior art keywords
styluses
holes
cope
fine pitch
insulating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62196957A
Other languages
Japanese (ja)
Inventor
Noboru Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62196957A priority Critical patent/JPS6439742A/en
Publication of JPS6439742A publication Critical patent/JPS6439742A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE:To cope with the measurement of an IC which is highly integrated by mounting probe styluses formed in a coaxial cable in a high density at a fine pitch. CONSTITUTION:Probe styluses are formed of coaxial cables at the section except the ends of the styluses in contact with an element to be measured to avoid the superposition of a noise on the styluses. The cable is formed by covering a tungsten wire 7 with a fluorine resin insulating member 8, a tin plating soft copper knitted member 9 and an insulating member 10. Holding holes 13 of the number corresponding to the number of the styluses 5 are formed at a holding substrate 11 and guide holes 14 for guiding the ends of the styluses 5 are provided at a guide plate 12 disposed at the perpendicularly opposing position of the holes 13 to dispose the styluses 5 approximately linearly. With the configuration, an accurate high frequency measurement can be performed, the styluses can be mounted in high density at a fine pitch to cope with a high integration IC.
JP62196957A 1987-08-06 1987-08-06 Probe card Pending JPS6439742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62196957A JPS6439742A (en) 1987-08-06 1987-08-06 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62196957A JPS6439742A (en) 1987-08-06 1987-08-06 Probe card

Publications (1)

Publication Number Publication Date
JPS6439742A true JPS6439742A (en) 1989-02-10

Family

ID=16366460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62196957A Pending JPS6439742A (en) 1987-08-06 1987-08-06 Probe card

Country Status (1)

Country Link
JP (1) JPS6439742A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009217185A (en) * 2008-03-13 2009-09-24 Ricoh Co Ltd Interface cable holding structure of electronic equipment and image forming device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991582A (en) * 1972-12-26 1974-09-02
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS57162442A (en) * 1981-03-20 1982-10-06 Ibm Electric rpobe assembly
JPS58173841A (en) * 1982-04-03 1983-10-12 Nippon Denshi Zairyo Kk Card for probe
JPS60118765U (en) * 1984-01-20 1985-08-10 日本電子材料株式会社 probe card

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991582A (en) * 1972-12-26 1974-09-02
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS57162442A (en) * 1981-03-20 1982-10-06 Ibm Electric rpobe assembly
JPS58173841A (en) * 1982-04-03 1983-10-12 Nippon Denshi Zairyo Kk Card for probe
JPS60118765U (en) * 1984-01-20 1985-08-10 日本電子材料株式会社 probe card

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009217185A (en) * 2008-03-13 2009-09-24 Ricoh Co Ltd Interface cable holding structure of electronic equipment and image forming device

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