JPS6426831U - - Google Patents
Info
- Publication number
- JPS6426831U JPS6426831U JP12275387U JP12275387U JPS6426831U JP S6426831 U JPS6426831 U JP S6426831U JP 12275387 U JP12275387 U JP 12275387U JP 12275387 U JP12275387 U JP 12275387U JP S6426831 U JPS6426831 U JP S6426831U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- small hole
- manufacturing
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
Description
第１図および第２図は、それぞれ本考案の第１
および第２の実施例の平面図、第３図は、従来の
半導体基板の平面図である。
図において、１……半導体ウエハー、２……小
孔、３……オリエンテーシヨン・フラツト。
Figures 1 and 2 respectively show the first part of the present invention.
FIG. 3 is a plan view of a conventional semiconductor substrate. In the figure, 1...semiconductor wafer, 2...small hole, 3...orientation flat.
Claims (1)
いて、前記半導体基板の所定の部位に円形の小孔
を備えることを特徴とする半導体基板。 1. A semiconductor substrate used for manufacturing a semiconductor device, characterized in that a circular small hole is provided at a predetermined portion of the semiconductor substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275387U JPS6426831U (en) | 1987-08-10 | 1987-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275387U JPS6426831U (en) | 1987-08-10 | 1987-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426831U true JPS6426831U (en) | 1989-02-15 |
Family
ID=31370977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12275387U Pending JPS6426831U (en) | 1987-08-10 | 1987-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426831U (en) |
-
1987
- 1987-08-10 JP JP12275387U patent/JPS6426831U/ja active Pending