JPS635684B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a measuring device having a measuring head for measuring an object placed on a base, such as a two-dimensional measuring machine, a three-dimensional measuring machine, a shape measuring machine, a strain measuring machine, etc. The present invention relates to a measuring machine in which a child support member is movable, and particularly to improvements in its guide rail portion.

In such a measuring machine, the upper surface of the base is used as a reference plane and is configured to measure the displacement of the measuring head. It is necessary to move the support member parallel to the top surface of the base.

For this reason, in the past, precisely machined guide rails were directly fixed in parallel to the top surface of the base using special metal fittings and bolts. Therefore, not only does it take a lot of effort to install the guide rail, but the effective area of the top surface of the base that is used for placing the object to be measured is small, and it is difficult to install the guide rails. There was a drawback that it was not possible to place the table by moving it in parallel from the side of the base.

It is also possible to provide the guide rail directly on the side of the base, but in this case it would be extremely difficult to precisely machine the perpendicularity to the side surface with the top of the base and the flatness of each surface, so it is not practical. It didn't make sense.

On the other hand, independent of the base, for example, guide rails may be suspended from the ceiling of the building or installed from the ground via a pedestal, but in this case, the top surface of the base and these guide rails are parallel to each other. Not only does it take a lot of effort to obtain a degree;
It is necessary to take anti-vibration measures for the guide rail, which imposes a heavy economic burden and is not desirable in terms of accuracy.

An object of the present invention is to provide a measuring machine equipped with a guide rail that can easily obtain parallelism between the top surface of the base and the guide rail with little effort.

The present invention uses a guide rail to which the distal end of a support member is detachably attached, and the proximal end of the support member attached to the guide rail is inserted into a recess provided on the side surface of the base through an adhesive. This object is achieved by fitting and fixing the base and the support member so that the axis of the guide rail is parallel to the upper surface of the base.

An embodiment in which the present invention is applied to a coordinate measuring machine will be described below with reference to the drawings.

In the overall structural diagram of FIG. 1, a base 21 consisting of a stone surface plate formed into a substantially rectangular parallelepiped has a plurality of screw holes 22 for attaching the object to be measured on its upper surface, and front and rear end surfaces perpendicular to the longitudinal direction. Each has a handle 23 having an L-shaped cross section. This base 21
Two guide rails 31 and 32, which constitute a guide section in the Y-axis direction, are attached to both left and right side surfaces. These guide rails 31 and 32 are connected to the base 21
It is formed to be longer than the length in the longitudinal direction (Y-axis direction), and is provided below the upper surface of the base 21, parallel to this upper surface, and protruding from the side surface of the base 21. In this case, the fact that the guide rails 31 and 32 are below the top surface of the base 21 means that the top surfaces of the guide rails 31 and 32 are at the same or lower position than the top surface of the base 21. In addition, both guide rails 31 and 32 have both sides of the cylinder cut down in parallel so that the cross-sectional shape perpendicular to the longitudinal direction has a substantially oval shape consisting of an arc portion and a straight portion (see Fig. 2). On the other hand, on the outer surface of the guide rail 31 at the front in FIG. 1, a long scale 33 is attached as will be described in detail later.

On the guide rails 31 and 32 on both sides, prismatic supports 41 and 42 are attached to the guide rails 31 and 32, respectively.
It is supported so as to be movable along the longitudinal direction (Y-axis direction). A horizontal member 43 made of one round bar is installed between the columns 41 and 42 on both sides in order to set the distance between the columns 41 and 42 in the X-axis direction to a predetermined dimension. 41, 42
A slider guide rail 46 consisting of two round bars is connected between the upper ends via connecting parts 44 and 45, respectively.
47 and a slider fine movement rail 48 consisting of one round bar is spanned in a direction perpendicular to the guide rails 31 and 32 and parallel to the upper surface of the base 21, that is, in the X-axis direction. A box-shaped slider 49 is supported by these slider guide rails 46 and 47 so as to be movable in the X-axis direction along the slider guide rails 46 and 47, and a box-shaped spindle is attached to the slider 49 via an angle measuring means 50. The support body 51 is Y
It is supported so as to be tiltable about the axis. This spindle support 51 has a spindle 5
2 is supported slidably in the direction of its central axis, and a measuring element 53 is attached to the lower end of this spindle 52.
is installed. At this time, when the inclination of the spindle support 51 is zero, the spindle 52 is at exactly Z
It is set to be movable in the axial direction (vertical direction), and as a result, the measuring head 53 moves along the base 21 and this base in conjunction with the movement of the slider 49 in the X-axis direction and the movement of the columns 41 and 42 in the Y-axis direction. The object to be measured 54 placed on the table 21 can be moved arbitrarily in X, Y, and Z axis directions that are perpendicular to each other. Further, a probe support member 40 is constituted by these pillars 41, 42, horizontal members 43, connecting parts 44, 45, slider guide rails 46, 47, slider 49, angle measuring means 50, spindle support 51, and spindle 52. ing.

The slider fine movement rail 48 and the slider 49, which are spanned between the upper parts of both the connecting parts 44 and 45, are normally slidable, and the tightening screw 144
The slider 49 is fixed so as not to be slidable by tightening it, and in this fixed state, by turning the adjustment nut 141 screwed onto the fine movement rail 48, the slider 49 is finely moved in the axial direction of the guide rails 46, 47 via the fine movement rail 48. It is made possible.

Note that the reference numeral 84 in FIG. 1 indicates the probe support member 40.
The fine movement feed knob, reference numeral 87, is a knob for operating and releasing the fine movement feed, and the reference numeral 9
0 is a shock absorber provided at both ends of the guide rail 31, and reference numeral 95 is a stopper provided at both ends of the guide rail 32.

In FIG. 2, an enlarged cross-sectional view of the main part of this embodiment, a plurality of holes 24 as recesses are formed in series in the Y-axis direction on both the left and right side surfaces of the base 21, and inside these holes 24. The small diameter portions 25A of the base end of the support shaft 25 constituting the rail support portion are fixed with an adhesive 26, respectively. At this time, the outer periphery of the small diameter portion 25A is processed with unevenness such as twill knurling to increase adhesive strength. Also,
A small-diameter convex portion 25C is integrally formed at the tip of the support shaft 25 via a stepped portion 25B, and this convex portion 25C
A V-groove 25D is formed in the middle over the entire circumference.

At positions corresponding to each of the plurality of support shafts 25 protruding from both side surfaces of the base 21, recesses 31A are provided on the inner surfaces of both guide rails 31 and 32 to be engaged with the convex portions 25C of the support shafts 25. , 32A are formed, respectively, and screw holes 31B, 32B penetrating into these recesses 31A, 32A are formed from the arcuate surfaces of the guide rails 31, 32 having an oval cross section to the recesses 31A, 32A of each guide rail 31, 32. Two fixing screws 34 are formed at respective positions corresponding to the screw holes 31B and 32B, and fixing screws 34 each having a tapered tip are screwed into these screw holes 31B and 32B. On this occasion,
The center line of the V-groove 25D and the center axis of the fixing screw 34 are formed to be misaligned, and the direction of this misalignment is such that the center line of the fixing screw 34 is closer to the tip of the protrusion 25C than the center line of the V-groove 25D. As a result, when the tapered end surface of the fixing screw 34 comes into contact with the wall surface of the V-groove 25D, the end surface of the stepped portion 25B of the support shaft 25 is aligned with the inner straight portion of each guide rail 31, 32. The rails 31 and 32 are crimped so that the attachment positions of the rails 31 and 32 relative to the support shaft 25 can be regulated. Furthermore, when the guide rails 31 and 32 are adhesively fixed to the base 21 via the support shaft 25, they are adhered using a positioning jig (not shown).
As a result, each guide rail 31, 32 is fixed parallel to the upper surface of the base 21 with high precision,
In particular, the guide rail 31 is designed to have sufficient accuracy to serve as a positional reference for the measuring machine.

A groove 31C is formed over the entire length on the outer surface of one of the guide rails 31 and 32, and the groove 31C is parallel to the center axis of the rail 31, and its bottom surface is parallel to the center axis of the rail 31. It is finished with high precision by simultaneous polishing so that it is parallel to the outer surface. The scale 33 is pasted inside this groove 31C, and the scale 33 is, for example, a reflective scale having vertical graduations on the μm order formed on the surface of a stainless steel plate.

An engagement block 6 is provided at the lower part of the one pillar 41.
1 is fixed, and the longitudinal direction (Y
There are three rollers 6 at each end of the axial direction).
One set each of roller groups consisting of rollers 2, 63, and 64 are provided. These rollers 62, 63, 64
are arranged so that the normal direction of their circumferential surfaces is 120 degrees, and the support shaft 62 of the roller 62 is
A bushing 62B and a roller 63,
The rollers 63 on the support shafts 63A and 64A of 64,
The fitting portions 64 are each eccentrically eccentric by a predetermined amount with respect to the center line, so that the normal position of each roller 62, 63, 64 can be adjusted, and contact with the guide rail 31 is ensured. . Moreover, the roller 62,
Of the rollers 63 and 64, the roller 62 is formed relatively wide because it comes into contact with a straight section of the rail 31, and the other rolls 63 and 64 are formed narrowly because they come into contact with an arcuate part of the rail 31. has been done. Furthermore, a guide rail 31 and three rollers 6
2, 63, and 64 are in contact with each other at three points in the 120 degree direction, so that the block 61, that is, the support column 41, cannot be moved in the X-axis and Z-axis directions.

As shown in the schematic diagram of FIG. 3, the engagement block 61 includes a detector that together with the scale 33 constitutes Y-direction measuring means for measuring the amount of movement of the probe support member 40 in the Y-axis direction. A measurement unit 70 is provided. This measurement unit 70 includes an index scale 71 in which a scale similar to that of the scale 33 is formed on a transparent plate such as glass, and a light emitting source that emits light onto the surface of the scale 33 through the index scale 71. It is composed of an element 72 and a light receiving element 73 as a light receiver that receives the light emitted from the light emitting element 72 and reflected by the scale 33, and the amount of received light is determined by the brightness of both scales based on the relative movement of both scales 33 and 71. The amount of movement of the support member 40 in the Y direction can be measured using a sinusoidal current generated in the light receiving element 73 due to a change in the amount of the support member 40 . On this occasion,
The optical axes of the light emitting element 72 and the light receiving element 73 are arranged in a V-shape so that the light from the light emitting element 72 is reflected by the scale 33 and reaches the light receiving element 73 reliably.

An engagement block 6 is provided at the bottom of the other support 42.
5 is fixed, and the longitudinal direction (Y
There are two rollers 6 at each end of the axial direction).
One set of roller groups each consisting of 6 and 67 rollers are provided. These rollers 66, 67 are arranged so that the normal direction of their peripheral surfaces is 180 degrees, and the fitting portions of the rollers 66, 67 on the support shafts 66A, 67A of each roller 66, 67 are aligned with the support center line. The rollers 66, 6 are each eccentrically eccentric by a predetermined amount relative to
The normal position of the guide rail 7 can be adjusted to ensure contact with the guide rail 32. At this time, since both rollers 66 and 67 are in contact with the rail 32 at 180 degrees, both rollers 66 and 67
That is, the support column 42 is movable in the axial direction of the support shaft 25 (X-axis direction).

Next, a method for assembling the guide rail and rollers in this embodiment will be explained with reference to FIG. 4 as well.

The convex portion 25C of the support shaft 25 as a rail support portion is inserted into the plurality of hole-shaped recesses 31A, 32A provided in the guide rails 31, 32, respectively, and the screw holes 31B, 3 of the guide rails 31, 32 are inserted.
2B, and the tip of each screw 34 is engaged with the V groove 25D of each support shaft 25. As a result, due to the misalignment between the center axis of the fixing screw 34 and the center of the V-groove 25D, the end face of the stepped portion 25B of each support shaft 25 is moved so as to come into contact with the straight part of the guide rails 31 and 32, and this contact causes the guide rail 31,3
2 and each support shaft 25 is positioned.

Then, with the adhesive 26 interposed,
Insert the small diameter portion 25A of the base end of each support shaft 25 into each hole 24 of the base 21, and use the jig 400 shown in FIG.
Using the guide rails 31 and 32, position them so that their axes are parallel to the upper surface of the base 21, and wait for the adhesive 26 to harden. That is, the jig 400 is
The first and second surfaces 40 are precisely parallel to each other and have a step of a predetermined size.
1A and 401B, and a base 401 that is fixed with bolts 402 at the step portion of the base 401 and has a comb-teeth shape so as to escape from each support shaft 25, and a side surface of the base 21 and a guide rail 31. a spacer 403 for determining the dimensions with respect to the inner straight portion; and a second surface 401 of the base 401.
An L bracket 405 is attached to B with bolts 404 so that its position can be adjusted in the left and right direction and abuts against the outer linear portion of the guide rail 31 to press the guide rail 31 against the spacer 403, and this L bracket 40
The jig 400 is constructed of a plurality of press screws 406 that are screwed into the screws 5 so as to be freely advanced and retracted, and whose inner ends press the guide rail 406 against the second surface 401B to measure the dimensions. Attached to the base 21, the base 4
The upper surface of the guide rail 31, that is, the axis thereof, is made parallel to the upper surface of the base 21 by the action of the first and second surfaces 401A and 401B of the guide rail 31. Further, the other guide rail 32 is also fixed with a similar jig, but in this case, the parallelism between the guide rail 31 and the other guide rail 32 is not so important.

After the adhesive 26 hardens, both guide rails 31 and 32
The measuring head support member 40 is assembled to the guide rail 31 side, so first, each roller 62, 63, 64 on the support column 41 side with respect to the guide rail 31 is assembled. each roller 62, 63, 6 so that the contact condition is appropriate.
4 eccentric bush 62B, eccentric shafts 63A, 64A
Adjust using. As a result, the probe support member 40 has been assembled with the guide rail 31 as a reference, and then the other guide rail 32 is assembled.
The contact between the support column 42 and each roller 66, 67 is adjusted in the same manner, and the entire assembly is completed. At this time, since the rollers 66 and 67 of the support column 42 are brought into contact with the guide rail 32 from above and below, they are movable in the axial direction of the rail support shaft 25, and therefore the dimensions are determined in advance by the horizontal member 43. The supporting columns 41 and 42 are supported by both guide rails 31 and 32 while maintaining the sized spacing.

According to this embodiment as described above, there are the following effects.

That is, the engagement block 61 and the guide rail 31
Because it can be installed without shifting using the three rollers 62, 63, and 64, the guide rail 3
By attaching the scale 33 to the index scale 1 and the measuring unit 70 to the engagement block 61, the scale 33 and the index scale 71 of the measuring unit 70 can always maintain a clearance without using complicated mounting hardware, rotation prevention means, etc. Can be held constant.
Moreover, once each support shaft 25 is fixed to the base 21, the screws 34 are loosened and the guide scale 31,
Even if the scale 32 is replaced, the guide rails 31 and 32 can always be set at the same position with respect to the base 21. Therefore, if the scale 33 or the like is damaged, it can be easily replaced, and subsequent adjustment is not necessary. . moreover,
Since the engagement surface of the roller 62 to the guide rail 31 and the mounting groove 31C of the scale 33 are precisely machined by precision machining, the roller 62 can be engaged simply by pasting the scale 33 into the groove 31C. In addition, the index scale 71 and scale 33
In addition, the scale 33 does not bend or twist with respect to the moving direction of the engaging block 61, and adjustment thereof is not necessary, so that the number of assembly steps can be significantly reduced. Furthermore, since the guide rail 31 also serves as a fixing block for the scale 33, it does not require special metal fittings and can be manufactured at low cost.

Furthermore, since the guide rails 31 and 32 are adhesively fixed to the base 21 via the support shaft 25, accurate parallelism of the guide rails 31 and 32 to the upper surface of the base 21 can be easily obtained. , and to prevent deflection of the guide rails 31 and 32,
Even if the number of support points, that is, the support shafts 25 is increased, any errors in mounting each support shaft 25 to the guide rails 31, 32 are absorbed by the adhesive 26, so stress is generated on the guide rails 31, 32. There's nothing to do. Further, in the guide rail 31, the rollers 63 and 64 arranged on the base 21 side are
1, the space required between the guide rail 31 and the base 21 can be reduced due to the interposition of the rollers 63 and 64, and the support shaft 25 can be installed at an angle. The amount of protrusion from the side surface of the base 21 can be reduced, which is advantageous in terms of the cantilever-like support form. Furthermore, since the position of the gauge head support member 40 can be regulated by one guide rail 31, the engagement structure between the other guide rail 32 and the gauge head support member 40 can be made simple, and the precision can be reduced. Since there is no need to do this, product costs can be reduced from this point of view as well.

Moreover, since both guide rails 31 and 32 are provided on the sides of the base 21, the entire surface of the base 21 can be effectively used, and the object to be measured 54 can be carried in from the side. Furthermore, since both guide rails 31 and 32 are set to be longer than the base 21, by moving the probe support member 40 to this extension, the object to be measured 54, which is longer than the base 21, can be placed and measured. Can be done.

Further, while regulating the position of the engagement block 61 in the X and Z axis directions by one guide rail 31,
The guide rail 31 can be guided in the axial direction, and the position of the guide rail 31 in the rotational direction can also be controlled.

FIG. 5 shows another embodiment of the present invention, in which a convex portion 531 is provided on the guide rail 531 side.
F is provided, and V is provided on this convex portion 531F.
A groove 531G is provided, and on the other hand, a recess 525F is formed on the support shaft 525 side to be engaged with the projection 531F, and screw holes 525G penetrating into the recess 525F are formed above and below, and these screws The central axis of the hole 525G and the center of the V-groove 531G are offset from each other when the convex portion 531F and the concave portion 525F are engaged, so that the end surface of the support shaft 525 and the straight portion of the guide rail 531 are in contact with each other. It is being done.

Even with this configuration, the same effects as in the above embodiment can be obtained.

FIG. 6 shows still another embodiment of the present invention, in which a rail-shaped support member 625 is used instead of a shaft-shaped member as the rail support member. A narrow width portion 625A is formed at the base end, and this narrow width portion 625A is inserted and fixed into a groove 621A formed on the side surface of 621 via an adhesive 626. Further, a rectangular convex portion 625C is integrally formed on the distal end side of the support member 625 via a step portion 625B, and V-grooves 625D are formed on the upper and lower surfaces of the convex portion 625C, respectively. The guide rail 631 can be attached to and detached from the convex portion 625C as in each of the above embodiments, and
It is positioned and attached by the action of the V-groove 625D and a fixing screw (not shown).

This embodiment can also provide the same functions and effects as those of the embodiments described above.

FIG. 7 shows still another embodiment of the present invention, in which the guide rail 731 has a trapezoidal cross section and no arcuate portion, and the other structure is similar to that of the embodiment of FIG. 1. It is the same, and its action and effect are also the same.

In each of the above embodiments, the measuring element 53 has a contact type structure, but the measuring element in the present invention is not limited to this, and may be one using capacitance or a laser length measuring device. It also includes a so-called non-contact structure. In addition, no guide rail is provided on the guide rail 32 side that is not used as a reference, and the base 2
1 may be used as a direct guide. In short, it is sufficient that a guide rail serving as a reference is provided on one side of the base 21. However, when provided on both sides, the object to be measured can be taken in and out of the upper surface of the base 21 from all directions, and the effective measurement area can be dramatically expanded. Furthermore, the present invention is not limited to three-dimensional measuring machines, but can also be applied to two-dimensional measuring machines, shape measuring machines, and other measuring machines. Further, the scale 33 is not limited to an optical reflection type scale, but may be a light transmission type scale, an electromagnetic scale, a magnetic scale, a capacitance type scale, or a contact type scale. Further, in the above embodiment, one guide rail 31 and one guide rail 32 were each provided, but two or more guide rails are provided on one side, one of which is used as a positional reference, and the remaining guide rails 31 and 32 are used as the measuring element support member 40. It may be possible to receive a load of . In this way, accuracy can be maintained over a long period of time. Furthermore, the guide rails 31, 53
The shape of No. 1,631,731 is not limited to having straight portions (flat portions) on both the left and right sides, and the straight portions on the right side may be omitted as shown by the two-dot chain line on the right side of Fig. 4. It is enough if there is a straight line part. However, it is convenient to provide two straight portions because they can be used as roller guides, scale attachment standards, etc.

As described above, the present invention has the effect of providing a measuring machine that can easily obtain the parallelism between the top surface of the base and the guide rail.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing an embodiment in which the present invention is applied to a coordinate measuring machine, Fig. 2 is an enlarged front view of the main part with a part thereof cut away, and Fig. 3 is an engagement block of this embodiment. 4 is a partially sectional front view showing an example of a jig used in this embodiment, and FIG. 5 is a sectional view of main parts showing another embodiment of the present invention. FIG. 6 is a perspective view of the main parts showing still another embodiment of the present invention, and FIG. 7 is a front view of the main parts showing still another embodiment of the invention. 21... Base, 24,624... Hole and groove,
25,525,625...Support shaft and support member constituting the rail support part, 25A,625...Small diameter part and narrow width part constituting the base end part, 25C,531
F, 625C...Protrusion, 25D, 531G, 62
5D...V groove, 26,626...Adhesive, 31,
32,531,631,731...Guide rail,
31A, 32A, 525F... recess, 33, 53
3...Scale, 34...Fixing screw, 40...Measure head support member, 53...Measure head, 54...Measurement object, 61, 65...Engagement block, 62, 63,
64, 66, 67...Roller, 62A, 63A,
64A, 66A, 67A... Support shaft, 62B... Bush, 70... Measurement unit, 71... Index scale, 72... Light emitting element as a light source, 73... Light receiving element as a light receiver.

Claims (1)

[Scope of Claims] 1. In a measuring machine that measures the shape, etc. of an object to be measured based on the displacement of a measuring stylus that is displaceable with respect to the object placed on a base, the tip of the support member The support member is removably attached, and the proximal end of the support member is fitted into a recess provided on the side surface of the base via adhesive, and its axis is parallel to the top surface of the base. A measuring instrument characterized in that a guide rail is provided which is fixed to a base via a support member, and the measuring element support member having the measuring element is movably supported by the guide rail. 2. The measuring instrument according to claim 1, wherein an irregularity is formed on the outer circumferential surface of the proximal end of the support member. 3. The measuring instrument according to claim 1 or 2, wherein the cross-sectional shape of the guide rail perpendicular to the axis has a circular arc portion and a straight line portion parallel to each other. 4. The measuring instrument according to any one of claims 1 to 3, wherein the base is comprised of a rectangular parallelepiped stone surface plate.