JPS63129806U - - Google Patents
Info
- Publication number
- JPS63129806U JPS63129806U JP2395787U JP2395787U JPS63129806U JP S63129806 U JPS63129806 U JP S63129806U JP 2395787 U JP2395787 U JP 2395787U JP 2395787 U JP2395787 U JP 2395787U JP S63129806 U JPS63129806 U JP S63129806U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- difference
- photodetector
- reflected beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
図面は本考案の一実施例を示すものであり、第
１図ａは本実施例の概要を説明する正面図、第１
図ｂは側面図、第２図ａは光検知体部分を示す正
面図、第２図ｂは光検知体部分を示す側面図、第
２図ｃは受光面の状態を示す正面図、第２図ｄは
光学体による反射ビームの径の変化を示す斜視図
、第３図ａは基板上の物体への光ビーム照射状態
を示す側面図、第３図ｂは物体への光ビーム照射
状態を示す正面図、第４図は物体により形成され
る影の状態を示す平面図、第５図ａ、第５図ｂは
光ビームの特性の違いを説明するための図である
。
２……光ビーム、６……基板、９……物体、１
０……反射ビーム、１１……光検知体、１２ａ…
…受光面、ａ……走査方向、ｈ……反射ビームの
走査方向の径。
The drawings show one embodiment of the present invention, and FIG.
Figure 2b is a side view, Figure 2a is a front view showing the photodetector part, Figure 2b is a side view showing the photodetector part, Figure 2c is a front view showing the state of the light receiving surface, and Figure 2c is a front view showing the state of the light receiving surface. Figure d is a perspective view showing the change in the diameter of the reflected beam due to the optical body, Figure 3a is a side view showing the state of light beam irradiation to an object on the substrate, and Figure 3b is a view showing the state of light beam irradiation to the object. FIG. 4 is a plan view showing the state of the shadow formed by the object, and FIGS. 5a and 5b are diagrams for explaining the difference in the characteristics of the light beam. 2...Light beam, 6...Substrate, 9...Object, 1
0... Reflected beam, 11... Photodetector, 12a...
...Light receiving surface, a...Scanning direction, h...Diameter of reflected beam in scanning direction.
Claims (1)
査した後の反射ビームを複数個の受光面を有する
光検知体に入射させて、前記基板上に載置された
物体と基板との高さの差により生じる光検知体の
受光量の差を検知し、所定位置に対する物体の存
否を検出する光学的位置検出装置において、前記
光検知体の複数個の受光面を走査方向に対して平
行に並設し、前記受光面の前に反射ビームの走査
方向の径のみを拡大する光学体を配したことを特
徴とする光学的位置検出装置。 A light beam is scanned over a substrate, and the reflected beam after scanning the substrate is made incident on a photodetector having a plurality of light-receiving surfaces to determine the height of the object placed on the substrate and the substrate. In an optical position detection device that detects the presence or absence of an object with respect to a predetermined position by detecting a difference in the amount of light received by a photodetector caused by a difference in An optical position detecting device characterized in that an optical body is arranged in parallel and in front of the light receiving surface to enlarge only the diameter of the reflected beam in the scanning direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395787U JPS63129806U (en) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395787U JPS63129806U (en) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63129806U true JPS63129806U (en) | 1988-08-24 |
Family
ID=30822746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2395787U Pending JPS63129806U (en) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63129806U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143257A (en) * | 1977-03-10 | 1978-12-13 | Centre Rech Metallurgique | Dimension measuring method |
| JPS58148904A (en) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | Size measuring device |
-
1987
- 1987-02-19 JP JP2395787U patent/JPS63129806U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143257A (en) * | 1977-03-10 | 1978-12-13 | Centre Rech Metallurgique | Dimension measuring method |
| JPS58148904A (en) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | Size measuring device |