JPS6150749B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a polishing apparatus for performing parallel plane processing on a plate-shaped workpiece.

[Technical background of the invention and its problems]

Generally, parallel plane machining of a plate-shaped workpiece is carried out by holding the workpiece in a carrier and clamping it between an upper grindstone and a lower grindstone that are rotationally driven. Therefore, the workpieces are normally attached to and removed from the carrier one by one by hand. The intervention of such manual labor is an impediment to improving production efficiency. Therefore, there is a demand for automation of the work of attaching and detaching workpieces to and from carriers.

[Purpose of the invention]

The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a polishing apparatus that can automatically insert and eject a workpiece into a carrier.

[Summary of the invention]

In a polishing device that processes a workpiece held by a carrier in parallel planes using an upper whetstone and a lower whetstone,
A workpiece attachment/detachment mechanism that automatically attaches and detaches the workpiece to and from the carrier, and a fluid that prevents the workpiece from detaching from the carrier due to adhesion to the upper whetstone when the lower whetstone and upper whetstone are separated after machining. It is equipped with a jetting mechanism.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows the polishing apparatus of this embodiment. Disk-shaped workpieces 1 are rotatably held in four circular holes 2a, which are equally spaced in two carriers 2, 2. One locking hole 2b is bored inside each circular hole 2a, corresponding to each circular hole 2a. These carriers 2,2
is on the upper end surface which is the polishing surface of the cylindrical lower whetstone 3.
It is provided so that the lower surfaces of the workpieces 1 held are in close contact with each other. Furthermore, teeth 4 are formed on the outer periphery of the carriers 2, 2, and serve as external gears. These carriers 2, 2 are meshed with a cylindrical internal gear 5 coaxially fixed so as to surround the upper end of the lower grindstone 3 by means of a support (not shown). The upper surface of this internal gear 5 is provided so as to be lower than the upper surfaces of the carriers 2, 2, that is, so that a step is formed. Further, a base shaft 6 is inserted into the hollow part of the lower whetstone 3. A first spur gear 7 is coaxially provided at the upper end of the base shaft 6, and this spur gear 7 is meshed with the carriers 2, 2. The upper surface of this spur gear 7 is set at a higher position than the upper surfaces of the workpieces 1 held by the carriers 2, 2. Further, a second spur gear 8 is coaxially provided at the lower end of the base shaft 6. This second spur gear 8 is configured to be rotationally driven by a first rotational drive mechanism (not shown) via a gear train 9. A rotational position detector (not shown) such as a rotary encoder is attached to the base shaft 6 and outputs a detection signal indicating the rotational position of the base shaft 6. Further, a cylindrical holder 10 is coaxially connected to the lower end surface side of the lower whetstone 3. A third spur gear 11 is coaxially provided at the lower end of this holder 10. The third spur gear 11 is rotationally driven by a second rotational drive mechanism (not shown) via a gear train 12. On the other hand, above the lower grindstone 3, an elevating and lowering drive mechanism such as an air cylinder (not shown) is provided. A sphere 14 is formed at the tip of the piston rod 13 of this elevating drive mechanism. One end of a support shaft 15 coaxial with the lower grindstone 3 is rotatably fitted into the sphere 14 in the form of a ball joint. A disk-shaped support 16 is coaxially connected to the other end of the support shaft 15. A disc-shaped upper grindstone 17 having the same axis and the same diameter as the support 16 is supported on the lower surface of the support 16 . At the center of this upper whetstone 17, as shown in FIG.
An internal gear 18 that fits into the first spur gear 7 is provided. Further, a rotary joint 19 is attached to a midway portion of the support shaft 15. This rotary joint 19 includes a pair of movable parts 20, 20 that rotate integrally with the support shaft 15, and a fixed part 2 that is fluid-tightly inserted between these movable parts 20, 20.
It consists of 1. A conduit 22 is connected to this fixed part 21 . This conduit 22 branches into a conduit 22a and a conduit 22b from the middle. The conduit 22a is connected to a grinding fluid supply mechanism (not shown) via a first switching valve 23. On the other hand, the conduit 22b is connected to a compressed air source (not shown) via a second switching valve 24. Furthermore, as shown in FIG. 2, through holes 25 are formed in the upper grindstone 17 and the support body 16 at equal intervals in the diametrical direction. At the openings on the support body 16 side of these through holes 25, conduits 19a, 19a branched in the middle, respectively.
One end of is connected. These conduits 19a,
The other end of 19a is connected to rotary joint 19. Thus, rotary joint 1
9. Conduit 19a, 19a, 22, 22a, 22
b, first and second switching valves 23, 24, through hole 25
... constitutes a fluid ejection mechanism 26. A workpiece attachment/detachment mechanism 27 is installed adjacent to the lower grindstone 3. This workpiece attachment/detachment mechanism 27 is
A rotating shaft 2 whose axial center is parallel to the axial center of the base shaft 6
8, a third rotary drive mechanism (not shown) attached to the lower end of the rotary shaft 28 and configured to rotate the rotary shaft by a predetermined amount, and a third rotary drive mechanism (not shown) that is attached to the upper end of the rotary shaft 28 and protrudes in a direction perpendicular to the axis. An arm body 30 having a disc-shaped support part 29 formed at its tip, a rotating body 31 that is pivotally supported on the lower surface side of this arm body 30 and has approximately the same diameter as the carriers 2, 2, and a support part 2.
9 a stepping motor 32 provided on the upper surface side to rotationally drive the rotary body 31; Suction tubes 33 are arranged at equal intervals and are connected to a vacuum source via a control valve (not shown) to vacuum suck the workpiece 1.
(see FIGS. 4 and 5), and a vertical movement mechanism (not shown), such as an air cylinder, which is provided inside the rotating shaft 28 and moves the arm body 30 up and down along the axis of the rotating shaft 28. ing. Of the workpiece attachment/detachment mechanism 27, the rotating shaft 28, the support part 2
9. The arm body 30, the vertical movement mechanism, and the third rotational drive mechanism constitute a movement mechanism. Above arm body 3
The length of 0 corresponds to the carrier 2 when the arm body 30 rotates and the rotating body 31 is in the closest position to the rotating shaft 28.
The length is set so that it overlaps and is coaxial with one of the two. Further, a rotational position detector such as a rotary encoder (not shown) is connected to the staping motor 32 so that the rotational position of the rotating body 31 can be detected. Furthermore, a positioning rod 34 is vertically provided below at the intersection of the side surface of the support section 29 and a circumference that is centered on the rotating shaft 28 and passes through the center of the support section 29 . This positioning rod 34
A first position detector 35, such as a limit switch, for detecting contact with the carriers 2, 2 is embedded in the lower end of the carrier. Further, a second position detector 36 is attached to the lower surface of the rotating body 31 on a circumference corresponding to the circumference in which the locking holes 2b of the carriers 2, 2 are arranged. That is, the second position detector 36 includes an elastic body 38 housed in a housing recess 37 provided inside the rotary body 31, and an elastic body 38 that is urged downward by the elastic body 38 and a flange 39 that closes the opening of the housing recess 37. It consists of a rod-shaped position detector 40 that is locked at the end, and a switch body 41 that is provided at the open end of the storage recess 37 where the collar 39 locks and contacts and closes the circuit by pressing. . and,
The height of the lower end surface of the position detector 40 pushed down by the elastic body 38 is set so that the lower end surface of the positioning rod 34 does not interfere with the carriers 2, 2 during position detection by the first position detector 35. is set higher than the height of the Therefore, on the rotation locus of the rotating body 31, the workpiece 1... is carried by the carriers 2, 2.
A workpiece mounting table 42 is installed, which is placed in the same arrangement relationship as the workpiece mounting table 42 . Thus, the first, second, and third rotation drive mechanisms, the elevation drive mechanism, the vertical movement mechanism, the first and second switching valves 23,
24, the stepping motor 32, the rotational position detector, the control valve of the suction tube 33, and the first;
The second position detectors 35 and 36 are electrically connected to an arithmetic control unit such as a microcomputer in which a predetermined polishing program is written,
They exchange signals with each other and perform predetermined operations based on control signals from the arithmetic control section.

Next, the operation of the polishing apparatus of this embodiment will be described in detail.

First, the third rotation drive mechanism is activated to rotate the rotation shaft 28, and the support portion 29 is moved to the workpiece mounting table 4.
Stop directly above 2. Next, the vertical movement mechanism is activated to lower the support section 29, and the workpieces 1 are vacuum-adsorbed by the suction tubes 33. At this time, the rotating body 1 is set at a predetermined position based on the detection signal output from the rotational position detector. However,
The support portion 29 is raised to a height at which the tip of the positioning rod 34 collides with the upper end portions of the carriers 2, 2. Then, the support portion 29 is rotated in the direction of arrow 43. At this time, the carrier 2 is set at a predetermined position closest to the rotating shaft 28 (setting of the carrier 2 to the predetermined position is based on a detection signal output from the rotational position detector attached to the base shaft 6). ) Then, when the rotating body 31 comes to a position where they overlap directly above the carrier 2, that is, a position where the carrier 2 and the support part 29 are coaxial, a position detection signal is sent from the first position detector 35 under the calculation control. The rotation of the support part 29 is stopped based on this detection signal. As shown in FIG. 4, the workpiece 1 supported by the suction tubes 33...
a... When it is not in the directly above position, the workpiece 1... cannot be inserted into the carrier 2. Therefore, first, the support part 29
is slightly lowered, and the position detector 40 is brought into contact with the upper surface of the carrier 2 against the biasing force of the elastic body 38. At the same time, the flange 39 is separated from the switch body 41 and the detection circuit is opened. Next, the stepping motor 32 is operated to rotate the rotating body 1. Then, the position detector 40 slides on the upper surface of the rotating body 1, and then fits into the locking hole 2b of the carrier 2, and the collar 39 presses the switch body 41 again, and the detection circuit is closed (fifth (see figure). However,
At this time, the arithmetic control section detects the second position detector 3.
Based on the position detection signal output from the stepper 6, the rotation of the stepping motor 32 is stopped, the support part 29 is lowered, and each workpiece 1 is inserted into the corresponding circular hole 2a. When the insertion is completed, the vacuum suction by the suction tube 33 is stopped, and the support part 2
9 is positioned directly above the workpiece mounting table 29 again. Then, the other carrier 2 that does not hold the workpiece 1 is positioned closest to the rotating shaft 28, and then the same operation is repeated. Then, parallel plane polishing is performed on the workpieces 1 held by the carriers 2, 2. That is,
First, the workpiece 1 is held by the carriers 2, 2, and its lower surface is brought into contact with the lower grindstone 3. Then, the elevating drive mechanism is activated, and the upper grinding wheel 17 is moved to the direction indicated by the arrow 27a.
The internal gear 18 is brought into mesh with the first spur gear 7, and the upper grindstone 17 is lowered in the direction of the workpiece 1...
Press with constant pressure. Next, the first switching valve 23 is opened (at this time, the second switching valve 24 is opened).
keep it closed. ), grinding fluid is supplied from the grinding fluid supply mechanism to conduit 22, rotary joint 19, conduit 1
Through hole 25 of upper whetstone 17 via 9a, 19a
erupt from. Then, the first rotational drive mechanism is activated, and the base shaft 6 is rotationally driven in the direction of arrow 28 via the gear train 9 and the second spur gear 8, and the carrier 2, which is meshed with the first spur gear 7, 2 to internal gear 5
rotational movement along the inner circumference of the Accordingly, the upper grindstone 7 meshed with the first spur gear 7 is also driven in the direction of the arrow 28. Furthermore, at the same time,
The second rotational drive mechanism is activated to rotate the lower grindstone 3 in the direction of arrow 29 via the gear train 12 and the third spur gear 11. Thus, the workpiece 1 is subjected to parallel plane grinding by the upper grindstone 17 and the lower grindstone 3. Thus, the workpiece 1 reaches the desired thickness.
... is machined, the first switching valve 23 is closed, the second switching valve 24 is opened, the conduit 22 is connected to a compressed air source, and the grinding fluid is supplied from the through hole 25 instead of the While injecting compressed air, operate the lifting drive mechanism to gradually lower the upper grindstone 1 in the direction of arrow 27b.
Raise 7. Then, compressed air is blown between the upper grindstone 17 and the workpiece 1...
is pressed against the lower grindstone 3. As a result, the upper grindstone 17 can rise to its original position without attaching the workpieces 1 . In this way, when the parallel plane machining of the workpiece 1 is completed, the workpiece 1 is then discharged by the workpiece attachment/detachment mechanism. That is, the rotating body 31 is detected by the first position detector 35.
While positioning with respect to the carrier 2,
The second position detector 36 positions the suction tubes 33 directly above the workpiece 1. After the workpiece 1 is vacuum-adsorbed by the adsorption tube 33,
The workpiece 1 is transferred to a pedestal (not shown).

As described above, since the polishing apparatus of this embodiment is provided with the workpiece attachment/detachment mechanism, the workpiece can be automatically inserted into and ejected from the carrier.
In addition, since the fluid ejecting mechanism 26 is provided to inject fluid from the upper grinding wheel 17 side to the workpiece 1..., as the upper grinding wheel 17 rises, the workpiece 1... adheres to the upper grinding wheel and is removed from the carriers 2, 2. Since there is no need to leave the system, automation can be performed more reliably.

Note that a robot hand may be used in place of the rotating shaft 28 and arm body 30 in the above embodiment. Furthermore, the first and second position detectors 3
5 and 36 use a contact type switch,
A non-contact type switch such as a proximity switch or a photoelectric switch may also be used. For example, when using a proximity switch, a magnet is buried in place of the locking hole 2b, and the rotational position is specified by detecting the magnet in a non-contact manner. Furthermore, for example, CCD (Charge Coupled
The rotating body 31 may be positioned using an image sensor such as a device. Further, in the above embodiment, the workpiece 1 is held on the rotating body 31 by vacuum suction, but
It may be adsorbed by an electromagnet. Further, the workpiece 1 may be attached to the upper grindstone 17 using a grinding fluid instead of compressed air.

〔Effect of the invention〕

Since the polishing apparatus of the present invention has a workpiece attachment/detachment mechanism and a fluid ejection mechanism, it is possible to reliably and automatically attach and detach the workpiece to/from the carrier, resulting in remarkable production efficiency in parallel plane machining. improve.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of an embodiment of the present invention, Fig. 2 is a bottom view of the upper grindstone, Fig. 3 is a plan view of the carrier, and Figs. 4 and 5 show the operation of the workpiece attachment/detachment mechanism. FIG. 1: Workpiece, 2: Carrier, 2b: Locking hole (detection hole), 3: Lower grindstone, 17: Upper grindstone, 26: Fluid ejection mechanism, 27: Workpiece attaching/detaching mechanism, 31: Rotating body, 32 : Stepping motor (rotating mechanism),
35: first position detector, 36: second position detector.

Claims (1)

[Claims] 1. A polishing device characterized by having the following configuration. (a) A disc-shaped carrier that detachably holds multiple workpieces. (b) A pair of upper and lower grindstones that grips the workpiece held by the carrier and processes it in parallel planes. (c) A drive mechanism that planetarily moves a carrier holding a workpiece held between the grindstones. (d) A rotating body that attaches and detaches the workpiece held by the carrier at a fixed attachment/detachment position, a moving mechanism that rotatably supports this rotating body and moves it to any position, and a rotating body that is attached to this moving mechanism. a rotating mechanism that rotationally drives the rotating body; a first position detector that detects a position of the rotating body that is attached to the rotating body and is moved by the moving mechanism and is coaxial with the carrier; a second position detector that is attached to the rotary body, positioned coaxially with respect to the carrier and rotated by the rotation mechanism, and detects the workpiece attachment/detachment position; . (e) Fluid is injected from the upper whetstone side onto the workpiece held by the carrier, and the workpiece adheres to the upper whetstone when the upper whetstone and the lower whetstone are relatively separated. A fluid ejection mechanism that prevents separation from the carrier. 2 The carrier has a second mark indicating the attachment/detachment position of the workpiece.
2. The polishing apparatus according to claim 1, further comprising a detection hole which is detected by a position detector.