JPS6150101A - Production of condensing filter - Google Patents
Production of condensing filterInfo
- Publication number
- JPS6150101A JPS6150101A JP59171887A JP17188784A JPS6150101A JP S6150101 A JPS6150101 A JP S6150101A JP 59171887 A JP59171887 A JP 59171887A JP 17188784 A JP17188784 A JP 17188784A JP S6150101 A JPS6150101 A JP S6150101A
- Authority
- JP
- Japan
- Prior art keywords
- light
- resin
- glass substrate
- film
- apertures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000011347 resin Substances 0.000 claims abstract description 16
- 229920005989 resin Polymers 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 15
- 238000005530 etching Methods 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims abstract description 7
- 239000000126 substance Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 15
- 230000035945 sensitivity Effects 0.000 abstract description 4
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 abstract description 3
- 229910000423 chromium oxide Inorganic materials 0.000 abstract description 3
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 125000003396 thiol group Chemical class [H]S* 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は固体カメラ樽皐奔に用いることができる集光性
フィルターの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a light-collecting filter that can be used in solid-state camera barrels.
従来例の構成とその問題点
近年、固体カメラの感度４．解像度等の改善を区るため
固体撮像素子の前面に集光性フィルタを取り付け、それ
らを改善している。Conventional configuration and its problems In recent years, the sensitivity of solid-state cameras 4. In order to improve resolution, etc., a light-condensing filter is attached to the front of the solid-state image sensor to improve these features.
以下、図面を参照しながら、上述したような従来の集光
性フィルターの製造方法について説り］する。Hereinafter, with reference to the drawings, a conventional method for manufacturing the above-mentioned light-condensing filter will be explained.
第１図は従来の集光性フィルターの断面構造図を示すも
のである。同図において、１は透光性ガラス基板、２は
遮光物質、３は入射光β集光するだめの凸状の透光性物
質、４は保護膜、６は入射光である。FIG. 1 shows a cross-sectional structural diagram of a conventional light collecting filter. In the figure, 1 is a light-transmitting glass substrate, 2 is a light-shielding material, 3 is a convex light-transmitting material for condensing incident light β, 4 is a protective film, and 6 is incident light.
なお、集光性フィルターは、第１図に示すように各集光
構造体の集光場所を、固体撮像素子の各党感知部の中心
に対応するように設計されている。Note that the light condensing filter is designed so that the light condensing location of each light condensing structure corresponds to the center of each party sensing part of the solid-state image sensor, as shown in FIG.
以上のように構成された集光性フィルターの製造方法に
ついて、以下に説明する。A method for manufacturing the light collecting filter configured as above will be described below.
まず、透光性ガラス基板１上に、遮光物質である酸化ク
ロム２を蒸着し、それに多数の開口部を設けるためにエ
ツチングを行う。その父、透光性物質３をその上に全体
塗布し、マス４２を使い、開口部の形状に合せてパター
ン焼付けする。それを現像すると、その断面は長方形に
ならず、なだらかな面をもつ凸形状となる。さらにその
上に保護１漢４をコートすると凸レンズ状の集光構造体
になる。第２図は、従来の製造方法による集光性フィル
タのと入射光の関係を示した図である。第１図と同一物
には同一番号を付し説明を省略する。First, chromium oxide 2, which is a light-shielding substance, is deposited on a transparent glass substrate 1, and etched to form a large number of openings therein. First, a transparent material 3 is applied on the entire surface, and a pattern is printed using a mass 42 to match the shape of the opening. When it is developed, its cross section will not be rectangular, but will have a convex shape with a gentle surface. Further, by coating the protective layer 1 and 4 on top of it, it becomes a convex lens-shaped light condensing structure. FIG. 2 is a diagram showing the relationship between incident light and a light-condensing filter produced by a conventional manufacturing method. Components that are the same as those in FIG. 1 are given the same numbers and their explanations will be omitted.
しかしながら、上記のような製造方法では、マスク合せ
によシ、集光構造体を作るため、マスク合せのアライメ
ント精度が悪いと、第２図に示すように集光性が低下す
る上、更にマスク合せ時に、回転ずれが起き、場所によ
り合せ状態が異なることになり、集光構造体の集光性が
場所により、異なるという問題点を有していた。However, in the above-mentioned manufacturing method, since the light-concentrating structure is created by mask alignment, if the alignment accuracy of mask alignment is poor, the light-condensing performance will decrease as shown in Figure 2, and the mask will further deteriorate. At the time of alignment, a rotational shift occurs, and the alignment state differs depending on the location, resulting in a problem in that the light-gathering ability of the light-concentrating structure differs depending on the location.
発明の目的
本発明は上記欠点に鑑み、マスクを使わず、集光構造体
を均一に作製することのできる集光性フィルターの製造
方法を提供するものである。OBJECTS OF THE INVENTION In view of the above drawbacks, the present invention provides a method for manufacturing a light-concentrating filter that can uniformly produce a light-concentrating structure without using a mask.
発明の構成
この目的を達成するため本発明の集光性フィルターの製
造方法は、透光性ガラス基板の一生面に遮光性物質を蒸
着する工程と、前記遮光性物質が多数の開口部を有する
ようにエツチングする工程と、前記開口部及び前記遮光
性物質上に光反応性の透光性樹脂を形成する工程と、前
記透光性樹脂を前記透光性ガラス基板の他主面側から光
を照射し露光する工程と、前記遮光性物質および前記透
光性樹脂上に保護膜を形成する工程とよりなり、マスク
を使う工程が省けるとともに、集光構造体を均一に作製
することが可能となる。Structure of the Invention In order to achieve this object, the method for manufacturing a light-condensing filter of the present invention includes the steps of: depositing a light-blocking substance on the entire surface of a translucent glass substrate; and the light-blocking substance has a large number of openings. a step of etching a photoreactive resin on the opening and the light-shielding material; and a step of etching the light-transmitting resin on the other main surface of the light-transmitting glass substrate. The method consists of a step of irradiating and exposing the light, and a step of forming a protective film on the light-shielding material and the light-transmitting resin, which eliminates the step of using a mask and makes it possible to uniformly manufacture the light-collecting structure. becomes.
実施例の説明
以下、本発明の一実施例について、図面を参照しながら
説明する。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
第３図は本発明の実施例における集光性フィルターの製
造工程図を示すものである。FIG. 3 shows a manufacturing process diagram of a light collecting filter in an example of the present invention.
第１図、第２図と同一物には同一番号を利し、説明を省
略する。Components that are the same as those in FIGS. 1 and 2 are designated by the same reference numerals, and their explanations will be omitted.
まず、透光性ガラス基板１の一主面上に遮光物質である
酸化クロム２を蒸着する（同図ａ）。First, chromium oxide 2, which is a light-shielding material, is deposited on one main surface of the transparent glass substrate 1 (FIG. 1A).
次に、エツチングを行ない開口部６を形成する（同図ｂ
）。次に、酸化クロム２および開口部６に透光性の紫外
線硬化樹脂７（成分：オリ塩／チオール＝ １７０．８
６ ）を１０μｍ厚で塗布する（同図Ｃン。そして透光
性ガラス基板１の他主面側から３ ｍ ｗ ／ （ｙｊ
の照度の紫外光を１０秒間照射し、トリクロルエチレン
で洗浄すると、開口部６にのみ紫外線硬化樹脂７は形成
される（同図ｄ）。Next, etching is performed to form the opening 6 (see figure b).
). Next, a translucent ultraviolet curing resin 7 (components: olisalt/thiol = 170.8
6) to a thickness of 10 μm (see C in the same figure) and 3 mw/(yj
When ultraviolet light having an illuminance of 10 seconds is applied for 10 seconds and cleaning is performed with trichlorethylene, the ultraviolet curing resin 7 is formed only in the opening 6 (see d in the figure).
最後に全面を保護膜で被覆する（同図ｅ）。Finally, the entire surface is coated with a protective film (e).
以上のような方法で作製された集光性フィルターについ
て、以下その集光性を説明する。The light-gathering properties of the light-gathering filter produced by the method described above will be explained below.
ガラス基板側から、垂直に平行光線を入射させると、集
光構造体から５μｍ離れた所に焦点を結ぶことが出来た
。次に各集光構造体の焦点位置に固体撮像素子の各画素
中心が来るように、固体撮像素子を固定させ、感度を調
べた結果、従来の集光性フィルタを用いた場合と同程度
で、場所による感度むら等は無かった。When a parallel beam of light was perpendicularly incident on the glass substrate side, it was possible to focus the beam at a distance of 5 μm from the light collection structure. Next, the solid-state image sensor was fixed so that the center of each pixel of the solid-state image sensor was located at the focal position of each light-collecting structure, and the sensitivity was examined. There was no unevenness in sensitivity due to location.
以上のように本実施例によれば、透光性ガラス基板の一
生面に、２次元的に配列された多数の開口部をもつ遮光
物質が形成し、更に開口部および遮光物質上に紫外線硬
化樹脂を塗布し、他方の面よシ紫外光で露光し、現像す
ることにより、集光構造体を作製するだめのマスク露光
工程を省ける上、拘Ｎ従来に比べて均一に集光構造体を
作製できる。As described above, according to this embodiment, a light-shielding material having a large number of two-dimensionally arranged openings is formed on the entire surface of a transparent glass substrate, and furthermore, the light-shielding material is cured by ultraviolet rays on the openings and the light-shielding material. By applying the resin, exposing the other side to ultraviolet light, and developing it, it is possible to omit the mask exposure step needed to create the light-collecting structure, and to form the light-collecting structure more uniformly than in the past. It can be made.
発明の効果
以上のように本発明は、透光性ガラス基板の一主面上に
遮光性物質を蒸着する工程と、前記遮光性物質が多数の
開口部を有するよってエツチングする工程と、前記開口
部および前記遮光性物質上に光反応性の透光性樹脂を形
成する工程と、前記透光性樹脂を前記透光性ガラス基板
の他主面側から光を照射し露光する工程と、前記遮光性
物質および前記透光性樹脂上に保護膜を形成する工程と
を含む集光性フィルターの製造方法であり、マスクを使
う工程が省けるとともに、集光Ｈ・！遺体を均一に作製
することが可能となるという効果を有する。Effects of the Invention As described above, the present invention includes a step of vapor depositing a light-shielding substance on one principal surface of a light-transmitting glass substrate, a step of etching the light-shielding substance having a large number of openings, and a step of etching the light-shielding substance so that it has a large number of openings. a step of forming a photoreactive light-transmitting resin on the part and the light-shielding material; a step of exposing the light-transmitting resin by irradiating it with light from the other main surface side of the light-transmitting glass substrate; This is a method for manufacturing a light-collecting filter, which includes a step of forming a protective film on a light-shielding substance and the light-transmitting resin, which eliminates the step of using a mask, and allows light-collecting H.! This has the effect of making it possible to uniformly produce a corpse.
第１図は従来の製造方法による集光性フィルターの断面
図、第２図は同フィルタとノ′射光との閲係を示す断面
図、第３図は本発明の実施例における集光性フィルタの
製造工程図である。
１・・・・・・透光性ガラス基板、２・・・・・・遮光
物質、３・・・・集ブば、ｉ造をしだ透光性物質、４・
・・ 保護膜、６・・・・・開口部、７・・・・・・紫
外線硬化樹脂。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図
一′（Fig. 1 is a cross-sectional view of a light-collecting filter manufactured by a conventional manufacturing method, Fig. 2 is a cross-sectional view showing the relationship between the filter and emitted light, and Fig. 3 is a light-collecting filter according to an embodiment of the present invention. FIG. 1... Translucent glass substrate, 2... Light-shielding material, 3... Light-transmitting material with i structure, 4...
... Protective film, 6... Opening, 7... Ultraviolet curing resin. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 1' (
Claims (1)
程と、前記遮光性物質が多数の開口部を有するようにエ
ッチングする工程と、前記開口部及び前記遮光性物質上
に光反応性透光性樹脂を形成する工程と、前記透光性樹
脂を前記透光性ガラス基板の他主面側から光を照射し露
光する工程と、前記遮光性物質および前記透光性樹脂上
に保護膜を形成する工程とを含む集光性フィルターの製
造方法。a step of depositing a light-shielding substance on one main surface of a translucent glass substrate; a step of etching the light-shielding substance so that it has a large number of openings; and a step of depositing a light-shielding substance on one main surface of a light-transmitting glass substrate; a step of exposing the light-transmitting resin by irradiating the light-transmitting resin with light from the other main surface side of the light-transmitting glass substrate; A method for producing a light-condensing filter, comprising the step of forming a protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59171887A JPS6150101A (en) | 1984-08-17 | 1984-08-17 | Production of condensing filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59171887A JPS6150101A (en) | 1984-08-17 | 1984-08-17 | Production of condensing filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150101A true JPS6150101A (en) | 1986-03-12 |
Family
ID=15931636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59171887A Pending JPS6150101A (en) | 1984-08-17 | 1984-08-17 | Production of condensing filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150101A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6356603A (en) * | 1986-08-28 | 1988-03-11 | Fujitsu Ltd | Optical device |
| JPH02137802A (en) * | 1988-10-14 | 1990-05-28 | Corning Inc | Integrated optical element and manufacture thereof |
| JPH04303801A (en) * | 1991-04-01 | 1992-10-27 | Matsushita Electron Corp | Solid-state image pickup device and production thereof |
| US6373635B1 (en) | 1999-09-03 | 2002-04-16 | Rohm Co., Ltd. | Lens array, method of making the same, and lens |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57173805A (en) * | 1981-04-20 | 1982-10-26 | Matsushita Electric Ind Co Ltd | Optical filter and its manufacture |
| JPS5986001A (en) * | 1982-11-09 | 1984-05-18 | Showa Denko Kk | Method for coating surface of plastic lens |
-
1984
- 1984-08-17 JP JP59171887A patent/JPS6150101A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57173805A (en) * | 1981-04-20 | 1982-10-26 | Matsushita Electric Ind Co Ltd | Optical filter and its manufacture |
| JPS5986001A (en) * | 1982-11-09 | 1984-05-18 | Showa Denko Kk | Method for coating surface of plastic lens |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6356603A (en) * | 1986-08-28 | 1988-03-11 | Fujitsu Ltd | Optical device |
| JPH02137802A (en) * | 1988-10-14 | 1990-05-28 | Corning Inc | Integrated optical element and manufacture thereof |
| JPH04303801A (en) * | 1991-04-01 | 1992-10-27 | Matsushita Electron Corp | Solid-state image pickup device and production thereof |
| US6373635B1 (en) | 1999-09-03 | 2002-04-16 | Rohm Co., Ltd. | Lens array, method of making the same, and lens |
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