JPS61202324A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS61202324A JPS61202324A JP60042832A JP4283285A JPS61202324A JP S61202324 A JPS61202324 A JP S61202324A JP 60042832 A JP60042832 A JP 60042832A JP 4283285 A JP4283285 A JP 4283285A JP S61202324 A JPS61202324 A JP S61202324A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- film
- magnetic film
- dry type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えば乾式メッキ型磁気ディスクといった磁
気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic recording medium such as a dry plating type magnetic disk.
例えば、コンピュータ周辺機器の記憶媒体として用いら
れている磁気ディスクには、塗布型のものと乾式又は湿
式メッキ手段によるメッキ型のものとがある。For example, magnetic disks used as storage media for computer peripherals include coated disks and plated disks using dry or wet plating means.
これらのうちメッキ型のものは、磁性膜形成にバインダ
ー樹脂が用いられていないので、すなわち例えばCo系
磁性合金材料を非磁性基体上にスパッタリングといった
メッキ手段で設けたものであるから、磁性材料の充填密
度が高く、高密度化に適しているものの、これで充分満
足できるものでもなく、さらなる研究が続けられている
。Among these, the plated type does not use a binder resin to form the magnetic film, in other words, it is a Co-based magnetic alloy material provided on a non-magnetic substrate by a plating method such as sputtering. Although it has a high packing density and is suitable for increasing density, this is not completely satisfactory, and further research is continuing.
つまり、従来の乾式メッキ型磁気ディスクは、メッキ磁
性膜の膜面内での磁化容易軸が等方向なものとなってい
ることより、あるいはスパッタ装置のマグネットの影響
を受けて半径方向に磁化容易軸が向いていたりするので
、その再生出力、分解能等において問題が残されていた
のである。In other words, conventional dry-plated magnetic disks are easily magnetized in the radial direction because the axes of easy magnetization within the film plane of the plated magnetic film are equidirectional, or due to the influence of the magnet of the sputtering device. Because the axes were oriented in different directions, problems remained in terms of playback output, resolution, etc.
本発明者は、例えばスパッタリング等のペーパーデポジ
ション手段で磁性膜を構成した磁気ディスクの乾式メッ
キ磁性膜は、その成膜過程における下地膜の表面状態に
よって大きく影響を受けるのではないかと考え、このよ
うな発想に基いて研究を続けた所、乾式メッキ磁性膜の
磁化容易軸方向は下地膜の表面状態によって影響を受け
ることを見い出し、このような点より本発明をなしとげ
たのである。The inventors of the present invention believe that the dry-plated magnetic film of a magnetic disk formed by a paper deposition method such as sputtering may be greatly affected by the surface condition of the underlying film during the film-forming process. As a result of continued research based on this idea, it was discovered that the direction of the axis of easy magnetization of a dry-plated magnetic film is influenced by the surface condition of the underlying film, and from this point of view, the present invention was achieved.
すなわち、例えば磁気ディスクの場合にあっては、その
非磁性基体上に略同心円状のあるいは略渦巻竺のといっ
たように、再生ヘッドの走行方向にほぼ沿った方向に傷
を付けておき、このように表面処理された非磁性基体の
表面処理面に乾式メッキ処理で磁性膜を構成すると、こ
の乾式メッキ磁性膜は乾式メッキ磁性膜の下地面の影響
を受けて、再生ヘッドの走行方向に沿った方向に磁化容
易軸をもつ磁気異方性のあるものとなることを見い出し
たのである。For example, in the case of a magnetic disk, scratches are made on the non-magnetic substrate in a substantially concentric or spiral pattern in a direction substantially along the running direction of the read head. When a magnetic film is formed by dry plating on the surface-treated surface of a non-magnetic substrate, this dry-plated magnetic film is influenced by the underlying surface of the dry-plated magnetic film and is They discovered that it has magnetic anisotropy with an axis of easy magnetization in the direction.
尚、この非磁性基体上に形成する傷の程度は微細なもの
であって、例えば傷の深さの基準としては、中心線平均
粗さRaの表現手段で約0.002〜0.1μm程度で
あり、又、ピッチは約50μm以下、より好ましくは約
0.1〜10μm程度であることが望ましい。Note that the degree of scratches formed on this non-magnetic substrate is minute, and for example, as a standard for the depth of scratches, it is approximately 0.002 to 0.1 μm expressed as center line average roughness Ra. The pitch is preferably about 50 μm or less, more preferably about 0.1 to 10 μm.
つまり、中心線平均粗さRaが0.002μmより大巾
に小さな傷付は程度であると、配向効果が小さくなり、
又、逆に中心線平均粗さRaが0.1μmより大巾に大
きな傷付は程度であると、再生ヘッドの浮上安定性が確
保されにくく、例えばヘッドクラッシュが起きやすくな
ったりするからであり、又、傷のピッチが50μmを越
えて大きくなりすぎると、配向効果が小さくなるからで
ある。In other words, if the center line average roughness Ra is smaller than 0.002 μm, the alignment effect will be small.
On the other hand, if the center line average roughness Ra is larger than 0.1 μm, it is difficult to ensure the flying stability of the reproducing head, and for example, head crashes are more likely to occur. Moreover, if the pitch of the scratches becomes too large, exceeding 50 μm, the alignment effect will be reduced.
そして、このような傷付は、例えば非磁性基体面上に研
磨砥粒等を配し、非磁性基体を回転させることで簡単に
形成でき、このような傷の付けられた非磁性基体を例え
ばスパッタ装置内に配し、所定のスパッタ条件でもって
非磁性基体面上に磁性粒子をスパッタさせて成膜するこ
とにより、本発明になる磁気記録媒体は得られる。Such scratches can be easily created by, for example, placing abrasive grains on the surface of the non-magnetic substrate and rotating the non-magnetic substrate. The magnetic recording medium of the present invention can be obtained by placing it in a sputtering device and sputtering magnetic particles to form a film on the surface of a nonmagnetic substrate under predetermined sputtering conditions.
〔実施例1〜4〕
第1図a、bは、本発明に係る磁気記録媒体の実施例の
製造工程説明図である。[Examples 1 to 4] FIGS. 1a and 1b are explanatory diagrams of the manufacturing process of an example of a magnetic recording medium according to the present invention.
まず、第1図aに示す如く、約1.9朋厚のNi −P
メッキ膜付のAt製基板1を用意し、この基板1面上に
前記のような研磨手段で略円周方向に沿った方向に傷方
向を有する傷2を形成する。First, as shown in Figure 1a, Ni-P with a thickness of about 1.9
An At substrate 1 with a plating film is prepared, and a scratch 2 having a scratch direction substantially along the circumferential direction is formed on the surface of the substrate 1 using the polishing means described above.
尚、この傷2の深さは中心線平均粗さRa がクリステ
ツブによれば約0.0029〜0.0435M’あり、
かつ傷2のピッチは約1μmである。Furthermore, the depth of this scratch 2 has a center line average roughness Ra of approximately 0.0029 to 0.0435 M' according to Kristetsub.
Moreover, the pitch of the scratches 2 is approximately 1 μm.
その後、傷2の付けられた基板1をスパッタ装置内に配
し、所゛定のスパッタ条件(アルゴンガス圧2X10−
3Torr)でCr膜3を約400OA厚形成し、続い
てCo−Ni磁性膜4を約600A厚形成して磁気ディ
スクを構成する。Thereafter, the substrate 1 with the scratches 2 is placed in a sputtering device, and the predetermined sputtering conditions (argon gas pressure 2 x 10 -
A Cr film 3 is formed to a thickness of about 400 OA (3 Torr), and then a Co--Ni magnetic film 4 is formed to a thickness of about 600 Å to form a magnetic disk.
゛〔実施例5〜8〕
実施例1と同様にして中心線平均粗さRaが約0.00
36〜0.0419μmでかつピッチが約1μmの略円
周方向に沿った方向に傷方向を有する傷の付けられたN
1−Pメッキ膜付At製基板を動量し、この傷の付いた
基板をスパッタ装置内に配して所定のスパッタ条件(ア
ルゴンガス圧5X10−3Torr)でCr膜を約40
0OA厚形成し、続いてCo−Ni磁性膜を約60OA
厚形成して磁気ディスク誉構成する。[Examples 5 to 8] The center line average roughness Ra was approximately 0.00 in the same manner as in Example 1.
N with scratches of 36 to 0.0419 μm and a pitch of approximately 1 μm, with the scratch direction approximately along the circumferential direction.
The At substrate with the 1-P plating film was moved, the scratched substrate was placed in a sputtering device, and a Cr film was applied at a rate of about 40 mm under predetermined sputtering conditions (argon gas pressure of 5 x 10-3 Torr).
0OA thick, followed by Co-Ni magnetic film about 60OA thick.
The magnetic disk is formed thickly to form a magnetic disk.
上記各側で得た磁気ディスクについて、その再生出力、
分解能、Wlo(孤立再生波形の半値巾)、C/N、
Dse (出力か−になった際の周波数)、Hc(保磁
力)及びノイズ(5MHzの信号を記録した時の1’、
5 MHz付近でのピーク値)を調べると、表に示す通
りである。Regarding the magnetic disks obtained from each side above, the playback output,
Resolution, Wlo (half width of isolated reproduced waveform), C/N,
Dse (frequency when the output becomes negative), Hc (coercive force) and noise (1' when recording a 5MHz signal,
The peak value near 5 MHz) is as shown in the table.
表
この表かられかるように、円周方向に沿って傷のある非
磁性基体面上にスパッタ手段で磁性膜を形成した磁気記
録媒体はHcが大きく、又、再生出力は高く、そして分
解能も良く、さらにはW5゜、C/ N 、 D so
も良く、又、ノイズも小さなものである。Table As can be seen from this table, magnetic recording media in which a magnetic film is formed by sputtering on a non-magnetic substrate surface with scratches along the circumference have a large Hc, a high reproduction output, and a low resolution. Good, even W5゜, C/N, D so
The performance is good, and the noise is also small.
つまり、再生ヘッドの走行方向に沿って傷の符いた面上
に乾式メッキ磁性膜を構成したものは、高出力化の図れ
たものとなり、又傷が付いていてもこの傷は再生ヘッド
の走行方向に沿ったものである為漏洩磁界が発生しにく
いことによるのかDC消去ノイズの増加はなく、又、傷
の程度はほぼ一定であることより配向けほぼ一定のもの
となっていて出力変動が小さなものである。In other words, a structure in which a dry plating magnetic film is formed on a surface with scratches along the running direction of the playback head can achieve high output. There is no increase in DC erase noise, probably because leakage magnetic fields are less likely to occur because it is along the same direction, and since the degree of scratches is almost constant, the orientation is almost constant, so there is no output fluctuation. It's small.
再生出力は高く、又、分解能にも優れており、さらには
DC消去ノイズの少ない高密度記録の行なえるものであ
る。It has high reproduction output, excellent resolution, and can perform high-density recording with little DC erase noise.
第1図a、bは、本発明に係る磁気記録媒体の実施例の
製造工程説明図である。
1・・・基板、2・・・傷、3・・・Cr膜、4・・・
Co−Ni磁性膜。
丁1図FIGS. 1a and 1b are explanatory diagrams of the manufacturing process of an embodiment of the magnetic recording medium according to the present invention. 1... Substrate, 2... Scratch, 3... Cr film, 4...
Co-Ni magnetic film. Ding 1 diagram
Claims (1)
上に乾式メッキ磁性膜を構成したことを特徴とする磁気
記録媒体。A magnetic recording medium characterized in that a dry plating magnetic film is formed on a substrate having scratches in a direction substantially along the running direction of a reproducing head.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60042832A JPS61202324A (en) | 1985-03-06 | 1985-03-06 | Magnetic recording medium |
US06/820,494 US4698251A (en) | 1985-01-22 | 1986-01-17 | Magnetic recording medium and method of producing the same |
KR8600291A KR900002994B1 (en) | 1985-01-22 | 1986-01-18 | Magnetic recording carrier |
DE19863601848 DE3601848A1 (en) | 1985-01-22 | 1986-01-22 | MAGNETIC RECORDING MEDIUM AND METHOD FOR THE PRODUCTION THEREOF |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60042832A JPS61202324A (en) | 1985-03-06 | 1985-03-06 | Magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61202324A true JPS61202324A (en) | 1986-09-08 |
JPH0467685B2 JPH0467685B2 (en) | 1992-10-29 |
Family
ID=12646939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60042832A Granted JPS61202324A (en) | 1985-01-22 | 1985-03-06 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61202324A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6361409A (en) * | 1986-09-01 | 1988-03-17 | Hitachi Ltd | Magnetic recording medium |
JPS6379233A (en) * | 1986-09-24 | 1988-04-09 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH0371427A (en) * | 1989-08-09 | 1991-03-27 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH06203371A (en) * | 1992-12-28 | 1994-07-22 | Nec Corp | Magnetic recording medium |
US6395412B1 (en) | 1999-05-24 | 2002-05-28 | Hitachi, Ltd. | Magnetic recording media, manufacturing method for thereof and apparatus for using the media |
JPWO2006135085A1 (en) * | 2005-06-15 | 2009-01-08 | ボッシュ株式会社 | High pressure seal structure, high pressure seal surface processing method, and fuel injection valve |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2699056B2 (en) * | 1994-08-05 | 1998-01-19 | 株式会社丸善製作所 | Immutable information media paper holder |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123906A (en) * | 1977-04-05 | 1978-10-28 | Fujitsu Ltd | Magnetic disc |
JPS55125533A (en) * | 1979-03-14 | 1980-09-27 | Basf Ag | Magnetic recording carrier and method of fabricating same |
-
1985
- 1985-03-06 JP JP60042832A patent/JPS61202324A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53123906A (en) * | 1977-04-05 | 1978-10-28 | Fujitsu Ltd | Magnetic disc |
JPS55125533A (en) * | 1979-03-14 | 1980-09-27 | Basf Ag | Magnetic recording carrier and method of fabricating same |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6361409A (en) * | 1986-09-01 | 1988-03-17 | Hitachi Ltd | Magnetic recording medium |
JPH0833983B2 (en) * | 1986-09-01 | 1996-03-29 | 株式会社日立製作所 | Magnetic recording media |
JPS6379233A (en) * | 1986-09-24 | 1988-04-09 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH0554173B2 (en) * | 1986-09-24 | 1993-08-11 | Fuji Electric Co Ltd | |
JPH0371427A (en) * | 1989-08-09 | 1991-03-27 | Fuji Electric Co Ltd | Production of magnetic recording medium |
JPH06203371A (en) * | 1992-12-28 | 1994-07-22 | Nec Corp | Magnetic recording medium |
US6395412B1 (en) | 1999-05-24 | 2002-05-28 | Hitachi, Ltd. | Magnetic recording media, manufacturing method for thereof and apparatus for using the media |
JPWO2006135085A1 (en) * | 2005-06-15 | 2009-01-08 | ボッシュ株式会社 | High pressure seal structure, high pressure seal surface processing method, and fuel injection valve |
Also Published As
Publication number | Publication date |
---|---|
JPH0467685B2 (en) | 1992-10-29 |
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