JPS6116007A - Production of vertical magnetic recording head - Google Patents
Production of vertical magnetic recording headInfo
- Publication number
- JPS6116007A JPS6116007A JP13638884A JP13638884A JPS6116007A JP S6116007 A JPS6116007 A JP S6116007A JP 13638884 A JP13638884 A JP 13638884A JP 13638884 A JP13638884 A JP 13638884A JP S6116007 A JPS6116007 A JP S6116007A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic
- face
- film
- magnetic pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
(al 産業上の利用分野
本発明は垂直磁気記録装置に装備され、情報の記録/再
生を司る垂直磁気記録ヘッドの製造方法に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a perpendicular magnetic recording head that is installed in a perpendicular magnetic recording device and controls information recording/reproduction.
最近の磁気記録装置は、益々高速化されつつあり、この
ため装置性能のキーポイントとなる9I気ヘツドの高性
能化と低コスト化技術の開発が強(要望されている。Recent magnetic recording devices are becoming faster and faster, and there is a strong demand for the development of technology to improve the performance and reduce costs of the 9I magnetic head, which is a key point in device performance.
(b) 従来の技術
第2図は垂直磁気記録ヘッドの従来例構成を説明する為
の側断面図であって、fa)は基本構成を示す図、(b
lは実施構造例を示す図である。(b) Prior Art FIG. 2 is a side sectional view for explaining the conventional configuration of a perpendicular magnetic recording head, fa) is a diagram showing the basic configuration, and (b)
1 is a diagram showing an example of an implementation structure.
第2図(a)に示す如〈従来の垂直磁気記録へ・7ドは
、磁性体部4上に直立して設けられた主磁極1と、該主
磁極1を取り巻くように配設されたコイル2とで構成さ
れている。As shown in FIG. 2(a), in conventional perpendicular magnetic recording, a main magnetic pole 1 is provided upright on a magnetic body portion 4, and a main magnetic pole 1 is arranged so as to surround the main magnetic pole 1. It is composed of a coil 2.
そしてコイル2に励磁され記録媒体3の記録面3”に対
して垂直方向から作用する主磁極1の情報信号によって
、媒体3への記録/再生が行なわれるようになっている
。Recording/reproduction on the medium 3 is performed by an information signal from the main pole 1 which is excited by the coil 2 and acts perpendicularly to the recording surface 3'' of the recording medium 3.
ところが前述した従来の構成を実現する場合、実施面に
おいて下記の問題点があった。However, when implementing the conventional configuration described above, there are the following problems in terms of implementation.
■主磁極1は、厚さが18m以下5幅が100〜200
μmというように非常に薄い帯状の磁性薄膜で構成され
る。薄膜形成方法としては第2図(blに示す如く一対
の非磁性体5の一方の端面に磁性体の薄膜を形成させ、
もう一方の端面でこれを保護する方法が一般に知られて
いるが、その製造方法が特に難しい。■The main magnetic pole 1 has a thickness of 18 m or less 5 a width of 100 to 200
It is composed of a very thin band-shaped magnetic thin film of μm thickness. The thin film forming method is as shown in FIG.
A method of protecting the other end face is generally known, but the manufacturing method thereof is particularly difficult.
■上記方法で形成された主磁極1と、それを支え且つ該
主磁極1と磁気的に接続される磁性体4との接続方法が
難しく現在未だその技術が確立されていない。(2) The method of connecting the main magnetic pole 1 formed by the above method to the magnetic body 4 that supports it and is magnetically connected to the main magnetic pole 1 is difficult and the technology for this has not yet been established.
fc) 発明が解決しようとする問題点本発明は上記
の各問題点を解決するために為されたもので、主磁極及
び主磁極と磁性体部とを接続する磁性膜を一工程で同時
に形成し得る垂直磁気記録ヘソi−の製造方法を提供す
ることを目的とするものである。fc) Problems to be Solved by the Invention The present invention has been made to solve each of the above-mentioned problems, and it is possible to simultaneously form the main magnetic pole and the magnetic film connecting the main magnetic pole and the magnetic body part in one process. The object of the present invention is to provide a method for manufacturing a perpendicular magnetic recording device that can perform perpendicular magnetic recording.
fdl 問題点を解決するだめの手段そしてこの目的
は、互いに端面が電接する状態で配置された非磁性基板
の何れか一方の基板の端面に凹型の切欠き部を設り、該
切欠き部によって露出する他方の基板の端面とそれに連
続する基板面に磁性薄膜を被管し、側基板を一体化した
前記基板面の磁性薄膜が磁性基板に接する形で上記側基
板を一体的に結合して前記他方の基板端面の磁性9N9
で主磁極を構成するようにしたことを特徴とする垂直磁
気記録ヘッドの製造方法を提供することによって達成さ
れる。fdl A means to solve the problem and the purpose thereof is to provide a recessed notch in the end face of one of the non-magnetic boards arranged with their end faces in electrical contact with each other, and to A magnetic thin film is coated on the exposed end surface of the other substrate and a substrate surface continuous thereto, and the side substrates are integrally combined in such a manner that the magnetic thin film on the substrate surface with which the side substrate is integrated is in contact with the magnetic substrate. Magnetic 9N9 of the other substrate end surface
This is achieved by providing a method for manufacturing a perpendicular magnetic recording head, characterized in that the main magnetic pole is constituted by:
tel 作用
上記手段の実施により、凹型の切欠き部によって露出さ
ゼられた端面には主磁極が、そして双方の基板面には該
主磁極と磁性体部とを接続するための接続部とが同時に
形成される為、前記の問題点■、■は一挙に解決される
。By implementing the above means, a main magnetic pole is provided on the end surface exposed by the concave cutout, and a connecting portion for connecting the main magnetic pole and the magnetic material portion is provided on both substrate surfaces. Since they are formed at the same time, the above-mentioned problems (1) and (2) are solved at once.
(fl 実施例 以下本発明の実施例を図面によって詳述する。(fl Example Embodiments of the present invention will be described in detail below with reference to the drawings.
第1図は本発明による垂直磁気記録ヘッドの形成方法を
加工工程に従って説明するだめの図であって、各工程に
おLJる加工内容を図(al〜(elで示している。FIG. 1 is a diagram for explaining the method for forming a perpendicular magnetic recording head according to the present invention according to the processing steps, and the processing contents in each step are indicated by (al to el).
第1図(alは、一対の非磁性基板20を構成する切欠
き形成側基板6と、主磁極形成側基板7の形状例を示す
斜視図であって、基板6の端面6゛には主磁極形成用の
切欠き部8が設けられており、基板7の端面7゛は主磁
極を形成するために平lnな直線状の平面に仕上げられ
ている。FIG. 1 (Al is a perspective view showing an example of the shape of the notch forming side substrate 6 and the main pole forming side substrate 7 constituting the pair of non-magnetic substrates 20, and the end surface 6' of the substrate 6 has a A notch 8 for forming a magnetic pole is provided, and the end surface 7' of the substrate 7 is finished into a flat linear plane for forming a main magnetic pole.
同図fblは、前図fatに示したα1!1面6゛と7
゛とが接合され、切欠き形成側基板6に設けられたり欠
き部8によって、主磁極形成側基板7の端面7“が露出
サセられた状態を示している。The figure fbl is α1!1 plane 6゛ and 7 shown in the previous figure fat.
The figure shows a state in which the main pole forming side substrate 7 has an end face 7'' exposed through the notch 8 provided in the notch forming side substrate 6.
同図fC1は、切欠き部8の斜め後方から矢印A方向に
磁性材料が蒸着され、主磁極形成側基板7の端面7゛及
び該基板7と切欠き形成側基板6の上面に磁性薄膜9が
形成された状態を示している。In FIG. fC1, a magnetic material is deposited diagonally from the rear of the notch 8 in the direction of arrow A, and a magnetic thin film 9 is deposited on the end surface 7' of the main pole forming side substrate 7 and on the upper surface of the substrate 7 and the notch forming side substrate 6. This shows the state in which a is formed.
尚ごのように切欠き部8の斜め後方から磁性材料が蒸着
されるため、切欠き部8の端面8゛には磁性薄膜9が付
着しない。As shown, since the magnetic material is deposited obliquely from behind the notch 8, the magnetic thin film 9 does not adhere to the end face 8' of the notch 8.
同図(cllは、前図+c+の工程が完了した基板6.
7より成る非磁性基板20を裏返して、コイル2が付設
されている磁性基板4上に接着して一体化した後、磁性
薄膜9を覆うように保護膜12が苺着された状態を示ず
B−B’断面図であり、該保護膜12によって磁性薄膜
9が安全に保護される。In the same figure (cll is the substrate 6.
The protective film 12 is not shown to cover the magnetic thin film 9 after the non-magnetic substrate 20 consisting of the coil 2 is turned over and integrated onto the magnetic substrate 4 to which the coil 2 is attached. This is a BB' cross-sectional view, and the magnetic thin film 9 is safely protected by the protective film 12.
同図telは、不要部分の保護膜12が研磨によって削
除され、磁性al膜9で形成された主磁極1の高さtl
が調整されて、垂直磁気記録ヘッド構造1oが完成した
状芒を示す図である。tel in the figure shows the height tl of the main pole 1 formed of the magnetic Al film 9 after the unnecessary portion of the protective film 12 has been removed by polishing.
FIG. 3 is a diagram showing a completed perpendicular magnetic recording head structure 1o after adjusting the perpendicular magnetic recording head structure 1o.
第3図は本発明の量産化を目的とした加工方法の一実施
例を説明するだめの斜視図であって、fatは切欠き形
成側基板6を複数枚重ねて一度に研削加工を行う方法を
示した図、lb)は切欠き部8の形状の−・例を〃゛ず
拡大図である。FIG. 3 is a perspective view illustrating an embodiment of the processing method of the present invention aimed at mass production, in which fat is a method of stacking a plurality of notch-forming substrates 6 and grinding them at once. The figure lb) showing an example of the shape of the notch 8 is an enlarged view.
第3図のように切欠き部8の形成を行うことによって、
生産の効率化が達成される。By forming the notch 8 as shown in FIG.
Production efficiency is achieved.
(g) 発明の効果
以上詳細に説明したように、本発明による垂直磁気記録
ヘッドの製造方法は、主磁極形成部に簡単な形状の切欠
き部を設けることによって安全且つ確実に、しかも能率
良く垂直磁気記録ヘッドを生産し得るといった効果大な
るものである。(g) Effects of the Invention As explained in detail above, the method for manufacturing a perpendicular magnetic recording head according to the present invention can be carried out safely, reliably, and efficiently by providing a simply-shaped notch in the main pole forming portion. This has the great effect of making it possible to produce perpendicular magnetic recording heads.
第1図は本発明による垂直磁気記録ヘッドの製造方法を
加工工程に従って説明する為の図、第2図は垂直磁気記
録へ、ノドの従来例構成を説明する為の例断面図、第3
図は本発明の量産化を目的とした加工方法の−・実施例
を説明する為の♀゛l視図Cある。
図中、1は主磁極、1゛は接続部、2はコイル、3は記
録媒体、4は磁性体部、5は非磁性体部、6は切欠き形
成側基板、6゛は切欠き形成側基板の端面、7は主磁極
形成側基板、7°は主磁極形成側基板の端面、8は切欠
き部、8゛は切欠き部の端面9は磁性薄膜、10は1−
及び1゛で形成された垂直磁気記録ヘット措造、12は
保護膜、20は一対の基板6及び7で構成した非磁性基
板。
第1121
第2図
(Q)
1J311!1FIG. 1 is a diagram for explaining the manufacturing method of a perpendicular magnetic recording head according to the present invention according to the processing steps, FIG. 2 is an example cross-sectional view for explaining a conventional configuration of a throat for perpendicular magnetic recording,
The figure is a perspective view C for explaining an embodiment of the processing method for mass production of the present invention. In the figure, 1 is the main magnetic pole, 1' is the connection part, 2 is the coil, 3 is the recording medium, 4 is the magnetic material part, 5 is the non-magnetic material part, 6 is the notch forming side substrate, 6' is the notch forming The end face of the side substrate, 7 is the main magnetic pole forming side substrate, 7° is the end face of the main magnetic pole forming side substrate, 8 is the notch, 8゛ is the end face 9 of the notch is a magnetic thin film, 10 is 1-
and 1, a protective film 12, and a nonmagnetic substrate 20 consisting of a pair of substrates 6 and 7. 1121 Figure 2 (Q) 1J311!1
Claims (1)
れか一方の基板の端面に凹型の切欠き部を設け、該切欠
き部によって露出する他方の基板の端面とそれに連続す
る基板面に磁性薄膜を被着し、両基板を一体化した前記
基板面の磁性薄膜が磁性基板に接する形で上記両基板を
一体的に結合して前記他方の基板端面の磁性薄膜で主磁
極を構成するようにしたことを特徴とする垂直磁気記録
ヘッドの製造方法。A concave notch is provided in the end surface of one of the non-magnetic substrates arranged with their end surfaces in close contact with each other, and the end surface of the other substrate exposed by the notch and the substrate surface continuous therewith are magnetic. A thin film is deposited to integrate both substrates, and the two substrates are integrally bonded in such a manner that the magnetic thin film on the surface of the substrate is in contact with the magnetic substrate, and the magnetic thin film on the end surface of the other substrate constitutes a main magnetic pole. A method of manufacturing a perpendicular magnetic recording head, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13638884A JPS6116007A (en) | 1984-06-29 | 1984-06-29 | Production of vertical magnetic recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13638884A JPS6116007A (en) | 1984-06-29 | 1984-06-29 | Production of vertical magnetic recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6116007A true JPS6116007A (en) | 1986-01-24 |
Family
ID=15173987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13638884A Pending JPS6116007A (en) | 1984-06-29 | 1984-06-29 | Production of vertical magnetic recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6116007A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1087381A2 (en) * | 1999-09-24 | 2001-03-28 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
-
1984
- 1984-06-29 JP JP13638884A patent/JPS6116007A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1087381A2 (en) * | 1999-09-24 | 2001-03-28 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
EP1087381A3 (en) * | 1999-09-24 | 2003-11-05 | Kabushiki Kaisha Toshiba | Magnetic head, fabrication method therefor and perpendicular magnetic storage device |
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