JPS6039160A - Magnetron sputter coating source for both magnetic and non-magnetic target substances - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention is in the field of vacuum coating equipment, and specifically relates to coating with both magnetic and non-magnetic materials using magnetron sputter coating sources.

BACKGROUND OF THE INVENTION Vacuum deposition of coatings using cathodic suction induced by a glow discharge is commonly used. backfilled with argon (at subatmospheric pressure)
Operated within an exhaust chamber. Positive ions formed in the space between the anode and cathode collide with the tarded material placed on the cathode surface, and eject (by sputtering) atoms of the tarded material from the surface of the tarded material and near the atomic layer below the surface. . These starved atoms are deposited on the workpiece or substrate generally located in the tarded line of sight. A magnetron suction four-way coating source uses a magnetic field that intersects with an electric field near the tarde. The use of such a magnetic field increases the glow discharge intensity and concomitant sputtering rate, extends operation to low dust gas pressures, confines the glow discharge to the vicinity of the electrodes, and reduces electron bombardment of the substrate. I can do it.

One type of commercially available magnetron gutter coating source uses an upside-down conically shaped non-magnetic annular mother gutter (23) surrounding an axially symmetrical central anode. An example of such an ivy coating source is U.S. Pat. No. 4,100,055, assigned July 11, 1978, by Robert .

This is explained in ``Outline of the tart for the motherboard ringing device'' published by John Raney). The tight magnetron P-vine coating source described has been widely and effectively used in critical semiconductor wafer coating applications. In most cases, the material to be deposited is non-magnetic, such as aluminum and its alloys. However, in some cases, sputter coating sources are
It has been desirable to use the same source of soot and vine coatings for dispensing magnetic materials such as iron and nickel alloys and the like. More recently, it has become necessary to coat magnetic disk substrates with multiple layers, at least one of which is made of a magnetic material. Magnetic disks are currently extremely important in computer memory applications.

(24) Easily replacing the non-magnetic suction or tattered gut with the same nearly inverted conically shaped magnetic suction in the magnetron sputter coating source described above is the fact that most of the magnetic field is The water is diverted through the water. This results in a magnetic field strength above 4 tered which is too low to allow the desired magnetic enhancement of the glow discharge to occur.

In order to avoid excessive reduction in magnetic field strength above the tarde, an annular magnetic sputter tart with an L-shaped profile has been developed for use in the sputter coating sources described above. One such L-shaped magnetic sputter target is described in U.S. Pat. No. 4,060,470 (1977).
Beater G. Clark (Pet) on November 29, 2017
Sputtering Apparatus and Method) (see FIG. 9), published by J. C. er J, C1arke. An essential feature of the L-shaped design is that the radial thickness of the outer annular band section must be thin enough for that section to be magnetically saturated, and that the magnetic field strength above the tarde is sufficient for the desired glow discharge. can be made large enough to cause a magnetic increase of . As the permeability and saturation magnetization of the material increases, the annular band portion must become thinner.

A magnetic sputter target with an L-shaped profile contains much smaller material than a #1 inverted cone-shaped non-magnetic sputter target. Furthermore, the magnetic field above the L-shaped magnetic tart leads to erosion of the target concentrated in the corner regions.

Relatedly, the availability of magnetic target materials useful in suction ringing is therefore very limited.

It is also well known that magnetic materials heated to their Curie temperatures or above lose their ferromagnetism during heating. Therefore, another way to avoid excessive reduction in magnetic field strength above the base temperature is to heat the target and maintain it at or above its Curie temperature. A disadvantage of this method is that it requires means for monitoring the temperature of the target in conjunction with a feedback device to achieve and maintain the required Curie temperature. Furthermore, the Curie temperature of some magnetic materials can be harmful to the adjacent substrate to be coated, causing eye and/or irritation.
or be so high as to be detrimental to the vacuum tightness of the equipment chamber,
This is high enough to cause damage to the base or tarded coating as a result of warping or excessive thermal expansion.

Most modern magnetron sputter coating sources use permanent magnets to provide the magnetic field necessary for glow discharge enhancement. When the firewood or ivy target corrodes,
The magnetic field strength above the grass target is generally stronger, leading to a lower electrical impedance of the glow discharge. This results in a sustainable voltage intersecting with a decreasing glow discharge and with it a reduction in sparkling products. Maintaining a fixed sputtering speed, and therefore a fixed coating rate, requires both higher current and higher power at the desired sputtering gas pressure. Therefore, the glow discharge power supply must be able to provide a wide range of voltages, currents and powers, which in turn affects the power supply and power consumption expenditure.

Additional factors affect the electrical impedance of the glow discharge. The suction pressure is 1. Other factors include thermal effects (expansion, contraction, and associated Curie temperatures) on the suction target and magnetic circuit. The permanent magnet means used in most modern magnetronic mater coating sources do not provide compensation for changes in glow discharge impedance resulting from such factors.

It is a well-known characteristic of glow discharges that the conditions for ignition (starting of the discharge) and steady barking operation are different. Since in some cases it is desired to operate at very low soot or ivy gas pressures, ignition is dependent on the magnetic field at the suction or ivy source (as provided by a normal permanent magnet) and the open circuit voltage of the power supply of the glow discharge. cannot occur together. One technique that may be used is to increase the suction gas pressure sufficiently to allow ignition to occur, and then reduce the suction gas pressure to the desired operating level. Disadvantages of this method include the relatively long time constants associated with the required pressure changes, in addition to controlling the suction gas pressure sufficiently quickly (i.e. in a short time compared to the coating cycle). (switcher gas pressure is usually controlled by flow rate and pumping rate) and associated costs and complexities.

An ever-present problem with magnetron matrix coating sources is cooling of the matrix. In normal operation, much of the glow discharge's power is wasted at the target. In the coating source described in the aforementioned US Pat. No. 4,100,055, a cooling jacket surrounds the outer periphery of the tarpit.

Under normal operating conditions, the target expands into intimate contact with the cooling jacket, so that heat is transferred from the stator to the cooling jacket.

This device works well for target materials with suitable thermal conductivity, such as various aluminum alloys and mixtures. For target materials with relatively low thermal conductivity, such as many magnetic materials, cooling by this method may be insufficient.

Another problem with magnetron coatings is the problem of determining the end of their useful life. Indirectly cooled Su・Ya Tsutatar'T'' is 1
If the target support member is smudged through, the smudge ring of the target support member is likely to unacceptably contaminate the substrate to be coated. directly cooled
If a target (i.e., a target whose non-spilled side is in contact with the cooling water) is spiked through the vacuum chamber, the vacuum chamber attached to the whole works "close to the water" (17). situations that should always be avoided).

One way to deal with the useful end-of-life problem is to experimentally measure the amount of time (e.g., kilowatt-hours of operation) that a particular shape and material is suitable for use, and calculate the precise amount of time it accumulates to nine kilowatt-hours. It is a way to maintain experimental records and then easily replace turbits according to a strict plan. Although this method is perfectly suited for routine production with careful processing, a modified method may still be desired at an early stage of processing development. In particular, an independent means of determining the condition, corrosion, or shelf life of a matrix during processing development would be highly desirable. In addition, such means would provide a useful diagnostic device also for routine production.

However, another problem with the use of most magnetron coating sources is that the distribution of the source material reaching the substrate to be coated is not normal. It changes when it corrodes inside. As the target erodes, the glow discharge moves to areas of higher magnetic field strength. This causes the discharge to become more and more concentrated, resulting in increasingly narrower grooves as corrosion progresses. This leads to a change in the distribution type of sputtered material (the "beaming" effect) and, with a concomitant reduction in the effective time of the target, reduces the inventory of sputter target material suitable for use (the "beaming" effect).
).

Therefore, it is an object of the present invention to provide a magnetron that can effectively utilize a large inventory of magnetic matrix materials.
It also provides a source of ivy coating.

It is another object of the present invention to provide a magnetronic magnetic coating source that is independent of the permeability and saturation magnetization of the target material and can effectively utilize a large inventory of magnetic target materials. .

Another object of the present invention is to provide a magnetron vine coating source in which the shape of the vine target can be determined independently of the permeability and saturation magnetization of the target material.

Another object of the present invention is to provide a magnetron sputter coating source in which a magnetic sputter target can be effectively operated at temperatures below the Curie temperature of the magnetic target material.

Another object of the invention is to provide a magnetron solar panel with means for controlling the electrical impedance of the glow discharge despite changes caused by corrosion of the magnetron. To provide a source of ivy coating.

(33) It is another object of the present invention to provide a Madanetron beam coating source that is provided with means for controlling the electrical impedance of the glow discharge regardless of temperature changes in the beam target. be.

Another object of the invention is to provide a magnetron coating source in which means are provided for controlling the electrical impedance of the glow discharge despite variations in the magnetic circuit.

Another object of the present invention is to provide a magnetron ivy coating source that is provided with means for controlling the electrical impedance of the glow discharge despite changes in suction gas pressure.

It would be another object of the present invention to provide a magnetron and master ivy coating source that is provided with means for achieving glow discharge ignition at a desired steady state master gas operating pressure. Another object of the present invention is to provide a Madanetron ST A1/IP ivy coating source which is provided with an improved vent cooling means.

It is another object of the present invention to provide a magnetron or ivy coating source that is provided with an independent means for determining corrosion of the ivy target.

Another object of the invention is that the speed of reaching the substrate to be coated is high! It is an object of the present invention to provide a magnetronic mother vine coating source having a means for controlling the distribution type of the material being vineed. Such control is provided through the effective lifetime of the Su-Gutsuta target.

Another object of the invention is to provide a magnetron ceratacing source in which means are provided for increasing the useful life of the magnet.

Still other objects and features will become apparent from the detailed description of the invention.

SUMMARY OF THE INVENTION The magnetron-coated ink source of the present invention differs from most prior art coating sources in which the magnetic field is provided by an electric current flowing through an electromagnetic coil rather than by a permanent magnet.

Therefore, the magnetic field in the vicinity of the sputter target can advantageously vary greatly and rapidly over a wide range of values, including zero. In the embodiment described, the electromagnetic coil surrounds the inner cylinder. (-Sugerate connects the inner cylinder with the outer cylinder,
Form a magnetic yoke.

Inner and outer pole pieces extend radially toward each other from the inner and outer cylinders. A radial gap is provided between the pole pieces, and the vine target is positioned at the top of this gap. The yoke and pole pieces are made from a ferromagnetic material with high magnetic permeability and high saturation magnetization, such as soft iron or magnetic stainless steel. The paceplate and cylinder have a sufficiently large cross-sectional area transverse to the direction of the internal magnetic flux lines to provide a very low reluctance (rel) to the pole pieces.
uctance) path is provided with the maximum electromagnetic coil current required (resulting in maximum magnetomotive force) during operation.

When a magnetic spool or ivy target is positioned on top of the pole piece gap, the pole piece acts as a magnetic shunt at sufficiently low coil currents such that the magnetic field strength adjacent to the target is negligible. small. If the coil current is increased enough, the onset of magnetic saturation of a portion of the market will occur.

For a ring-shaped magnetic target of uniform thickness, this initial saturation occurs at a radius slightly larger than the radius of the inner pole piece, and peripheral magnetic field lines are established above and below the target around this radius. Probably.

As the coil current increases further, the magnetically saturated region increases in radial extent, forming a magnetic gap of high reluctance across which peripheral magnetic field lines of increased strength are provided. The unsaturated portion of the target extends axially above the pole piece and also extends radially inwardly and outwardly of the aforementioned magnetic gap, thereby increasing the axial and radial extension of the pole piece. form a section. At a particular required value of coil current, the shape and strength of the magnetic field above the target will enable the desired increase in glow discharge to be achieved. This required value will increase with the permeability and saturation magnetization of the target material, and will also increase with the target thickness t37).

In the disclosed embodiments of the invention, magnetic field strengths large enough to allow the desired increase in glow discharge are achieved with a valuable small amount of electromagnetic coil power required.

For example, less than 50 watts of electromagnetic coil power is required to operate a magnetron steering source with glow discharge power in the range of 1 to 10 kilowatts. This is also the case for relatively thick magnetic strut tarpits containing the desired large inventory of materials suitable for use.

When a non-magnetic tart is used, the fringe magnetic fields above and below the target will be determined by the pole piece shape and the electromagnetic coil current.

Generally less than 1 coil current will be required for non-magnetic tarded than for magnetic targets.

Pole piece shapes and spacings that are optimal for high magnetic permeability and high saturation magnetization starch materials will work well for non-magnetic targets. (38) However, better performance based on the corrosion type and material utilization of S.G.T.T. may be obtained using somewhat different pole piece shapes and distances. One feature of the present invention is that it provides an easily replaceable and replaceable pole piece, making the magnetron or ivy coating source of a particular basic design ideal for use with a suction material having a wide range of magnetic properties. Or, it can be used in a near-optimal manner.

Another consequence of having easily replaceable pole pieces is that the radial position of the corroded type of pole piece can be shifted over a significant range with a particular magnetron sputter coating source; This is important in achieving the desired distribution and type of complementarity in the thickness of the coating on the substrate.

Many features and characteristics of glow discharges
Depends on the shape and strength of the magnetic field above the base plane, including the discharge impedance, the range of gas pressure for operation and ignition, the shape and location of the glow discharge, and the location and shape of the corrosion mold. Electromagnetic coil means providing magnetic fields adjacent to the armpits allow these fields to be controlled and varied at will. Such control is particularly easily achieved due to the relatively low electromagnetic coil power required in the disclosed embodiments of the invention.

Darrow discharge impedance control is particularly important because it allows operation at a constant discharge voltage over a wide range of discharge currents, for example. Su/mother in normal operation
With respect to corrosion of the sputter, the glow discharge generally moves to areas where the magnetic field strength is higher, lowering the discharge impedance and voltage for a fixed sputter gas pressure. Lower discharge voltages lead to reduced star yields from targat. To maintain a fixed coating deposition rate,
It is necessary to increase both the current and the power at the discharge. Reducing the electromagnetic coil current allows the magnetic field strength to be reduced, resulting in a return to the original discharge impedance and voltage. Electrical control of the magnetic field can be used, e.g.
A constant discharge voltage and current can be maintained throughout the life of the tattered gas. This has important implications for the design and construction of glow discharge power supplies, since the power supply no longer needs to provide a wide range of output voltages.

As the spark plug corrodes and the glow discharge moves to an area of higher magnetic field strength, the discharge tends to become more and more concentrated, thereby creating a relatively narrow groove as the corrosion progresses. This indicates changes in the distribution type of the substance to be used and the suitable use of the substance.
leading to a reduction in the inventory (and thus a reduction in shelf life) of hot substances. This effect is alleviated by reducing the strength of the magnetic field through control of the electromagnetic coil current.

vinegar,? The radial position and width of the erosion pattern of the sputter tart, and hence the distribution pattern of the sputtered material, is influenced by the magnetic field strength above the sputtering surface.

Electrical control of these magnetic field strengths therefore allows control measurements to be performed over this distribution.

It is well known that the magnetic field above the sputter target determines the range of gas pressure for both ignition and operation. Generally, for a particular magnetic field distribution,
A glow discharge will operate stably at pressures somewhat below the lowest pressure at which a discharge can be initiated. In some applications, operation at relatively low sputter gas pressures may be desired to reduce sputter dispersion of sputtered material en route from the target to the substrate. One way to obtain ignition in such cases is to temporarily increase the main ivy gas pressure and then decrease the gas pressure after the discharge has begun. With electrical control of available magnetic fields,
A simpler and more convenient way to achieve ignition is to momentarily increase the electromagnetic coil current while maintaining the main ivy gas pressure at the desired operating level.

In some applications, it may be desirable to temporarily or long-term convert current magneto/swift tacoting sources to non-magnetic diode sputtering systems or solar etch cleaning systems. Such modification is readily accomplished using the disclosed embodiments of the present invention by simply reducing the electromagnetic coil current to zero (42) (if necessary, after reversal to achieve demagnetization). ).

Another feature of the invention is the inclusion and use of a magnetic field sensor in the vicinity of the base. In the disclosed embodiment of the present invention, the magnetic field sensor is a Hallzorope installed adjacent to the water-cooled side of the four-way tart near the radial location of maximum corrosion. Regarding the magnetic tarpit, Hall! The magnetic field sensed by the rope changes rapidly as the tarpit erodes. The end of useful life for the motherboard can be set experimentally, for example, based on kilowatt-hours. An independent inspection of the state of corrosion of the magnetic snow tarter can be usefully and conveniently carried out using the magnetic field sensor described above, according to a method corresponding to the end of its useful life. In summary, Hallzolobe magnetic field sensors are valuable diagnostic devices.

When non-magnetic spark tarpits are used, it is useful, as mentioned above, to electrically adjust the magnetic field, for example to allow constant voltage operation of the discharge. Hollows can advantageously be used to monitor the local magnetic field and can be independently correlated with the corrosion of the scanner and the approach of the end of its useful life.

In one embodiment of the present invention, a novel suction tarpit cooling means is disclosed. The bottom side of the tarpit is a water chamber.
I'm in close contact with you. A partition divides the chamber into an inlet section and an outlet section. With flow from inlet to outlet, water is forced to flow through the narrow gap between the top of the bulkhead and the bottom of the tarpit. The bulkhead is installed directly under the area of maximum corrosion of the tarpit. In this manner, the snow tart may be effectively and uniformly cooled adjacent to areas of greatest power dissipation.

Particularly in the case of magnetic tarpits, the holes provide valuable independent information regarding the approach to the end of useful life, thereby helping to avoid catastrophic leakage from the water chamber through the mother tarpit. Is possible.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The S.9 ivy coating source of FIG. 1 includes a central anode assembly 10. It includes an outer anode 11 and a snout tart pit 13, and the snout tart pit 13 can also be used as a cathode. Apart from Snow Mother Tsutata Gatsuto 13, the magnetic circuit is
Consists of an electromagnetic coil 20 with electrical feedthroughs and connectors 21, a hollow central cylinder 22, a pace grating 23, a hollow outer cylinder 24, an outer pole piece 25 (shown integral with cylinder 24), and an inner pole piece 27. . All parts 22 to 27 are made of soft iron and magnetic stainless steel.
Consisting of highly permeable, highly saturated ferromagnetic material, it provides a relatively bulky, low resistance magnetic path, with the greatest reluctance provided by the magnet 13 across the gap between the pole pieces 25 and 270. .

Pace grate 23 is attached to cylinders 22 and 24 by a plurality of screws (not shown) to form a magnetic yoke. Pole piece 27 has a plurality of screws 30 (two shown)
and vacuum sealing is provided between parts 27 and 220 by O-rings 31 and 32. An internal flange 34 is welded or brazed to the pole piece 27 to support the center anode assembly 10.

External flange 36 is welded or brazed to cylinder 24 in a manner similar to that shown for the embodiment of FIG.
Provides an adiabatic contact with the outer anode 11.

The vine tart pit 13 is fixed to the magnetic pole piece 25 by an outer clamp 38, and fixed to the magnetic pole piece 27 by an inner clamp f39. A plurality of screws 40 (four shown) attach flanges 38 and 39 to pole pieces 25 and 27, and O-rings 41 and 42 attach to snog tarpit 1.
3 and the pole pieces 25 and 27.

Water cooling of the trunk 13 is accomplished with the aid of a manifold 45. Manifold 045 is held in firm contact with pole pieces 25 and 27 by pace plate 23, and manifold 45 and pole pieces 25 and 27
A vacuum seal between the two is provided with the aid of O-rings 46 and 47. A water inlet conduit 49 passes through an interstitial hole 50 through the cylinder 24 and is hermetically sealed into the first horizontal hole 51 at the manifold I-'' 45.The first vertical hole 52, the second horizontal hole 5
3 and a second vertical hole 54 provide a water flow path through the manifold 45. Hole rings 55 and 56 are sealed as shown to establish a water flow path.

A cylindrical bulkhead 60 is attached to the top surface of the manifold 45 to form an inlet 3!1j61 and an outlet @62.

In a manner similar to that shown for the inlet section, one or more outlet conduits (not shown) are connected to the outlet ring 62 through a series of horizontal and vertical holes. The spacing 64 between the top edge of the bulkhead 60 and the bottom surface of the base tart 13 is made uniformly small to ensure a suitable but high impedance flow of water below the bottom surface around the target 13. to ensure uniform cooling.

A hole globe 67 for measuring the strength of the magnetic field is installed between the inlet fi 61 and the outlet ring 6 under the snow ivy target 13.
It will be installed between 2. Four electrical leads 68 (2
) is inserted into the Hall probe 6 through the conduit 69.
Connected to 7. A conduit 69 passes through a horizontal gap hole 70 through the cylinder 24 and is hermetically sealed within the first horizontal hole 71 at the manifold 45 .

A first vertical hole 72 , a second horizontal hole 73 and a second vertical hole 74 provide a path for electrical leads 68 from hole globe 67 through conduit 69 .

Hole rings 75 and 76 serve to seal the passageway.

A capped tube 80 surrounds the hole nozzle and is brazed or welded to the second vertical hole 74. As illustrated in FIG. 1, the radial position of the hole glow f67 is essentially the same as the radial position of the septum 600. The presence of the surrounding cap tube 80 thus introduces an obstruction of the cylindrical partition 60 between the inlet ring 61 and the outlet ring 62. The gap 84 between the top surface of the cap tube 80 and the bottom surface of the stem 13 is selected to provide substantially the same high impedance to water flow as provided by the sump gap 64 of the septum 60. be done.

The center anode assembly 10 is adiabatically mounted to the interior seven orifices 34. An insulating ring 86 is secured to the flange 34 by a plurality of screws 87 (one shown), and a vacuum seal between the ring 86 and the seven runs 34 is provided by an O-ring 88.

A pace member 90 is secured to the insulation ring 86 using a plurality of screws 91 (one shown) and vacuum tightness is provided with the aid of an O-cylinder 92.

The pace member 90 includes a hollow cylindrical piece 94 to which a top character 7'' 95 is attached, thereby forming a water cooling chamber 9.
6 is formed. A water inlet 97 and a water outlet 98 may connect to the chamber 96 to achieve water cooling of the central anode assembly 10. The center disk 100 has a center screw 10
1 to the top cap 95. Right angle member 10 consisting of a cylindrical portion 104 and a flat ring portion 105
3 is attached to the central disk 100.

The support member for the outer anode 11 is not shown in FIG. However, the outer anode 11 may be supported in one manner as shown below for the anode in the embodiment of FIG.

The Madanetron flat ivy coating source of FIG. 2 includes an anode 111 and a cathode 113. Away from the target 113, the magnetic circuit includes an electromagnetic coil 120, a mating body and connections 121, a central cylinder 122
, a base root 123, a hollow outer cylinder 124, an outer pole piece 125, a torano plate 127, and an integral inner pole piece 128. At the same time, parts 122.123.12
4 and 127 form a magnetic yoke between pole pieces 125 and 128. Components 122-128 are comprised of high permeability, saturated ferromagnetic material with a relatively large cross-sectional area, providing a low impedance magnetic path through pole pieces 125 and 128. The non-magnetic ring 129 is attached to the magnetic pole piece 12
5 and 128 are brazed or welded to form a vacuum tight connection to the pole pieces. Screw 130 is the best! Route 1
27 to the central cylinder 122, and an O-ring 131 provides a vacuum seal between the plate 127 and the cylinder 122.

At the bottom, a screw 133 likewise secures the paste route (50) to the cylinder 122, and an O-ring 134 provides a vacuum connection between the paste 123 and the cylinder 122. A plurality of screws (not shown) secure the paste hole 123 to the outer cylinder 124, and an O-ring 135 provides a vacuum seal between the root 123 and the cylinder 124. External flange 13
6 is welded or brazed to the outside of the outer cylinder 124 to allow adiabatic attachment to the vacuum chamber 9 or processing equipment, as well as adiabatic contact to the anode 111.

A plurality of screws 138 (two shown) secure the pole piece 125 to the outer cylinder 124, and an O-ring 139 secures the pole piece 125 to the outer cylinder 124.
5 and the cylinder 124;1. The snag tart 113 is fixed to the pole pieces 125 and 128 by an outer clamp 141 and an inner clamp f142. These clamps 141 and 142 also include a plurality of screws 143 (two shown for clamp 142;
(not shown for clamp 141).

Coil 120 partially surrounds central cylinder 122 .

A coil jacket 145 partially surrounds the coil 120. Jacket 145 includes a cylindrical portion 146 and a flat ring portion 147. An O-ring 148 provides a water-tight connection between the pace 123 and the cylindrical portion 146, and the O-ring 148
49 provides a watertight connection between the inner cylinder 122 and the flat ring portion 147. Step 151 in the inner cylinder 122
engages the top surface of flat ring portion 147. A water-cooled chamber 153 is formed on the inner surface of the cylinder 124, the space 12
3, the outer surface of the coil jacket 145, Stella f
151 , portions of pole pieces 125 and 128 , and the bottom surface of non-magnetic ring 129 . Water enters the chamber 1 through a plurality of spout pipes 154 (two shown).
53 and penetrates into the pace plate 123. These jetting pipes direct a plurality of jetted water toward the bottom surface of the non-magnetic ring 129, so that they can be
Provides cooling of 13. An outlet for the return water flow sump is provided by means not shown.

The location of the hole globe 67 adjacent to the i+ ivy cathode 13 has been described above in connection with FIG. A holder 156 inside a capped tube 157 is schematically illustrated inside a chamber 153 positioned in close proximity to a non-magnetic ring 129 . Although not explicitly shown in FIG. 2, the ejection pipe 154 may be, for example, a hole! rope 156
can be easily modified to provide a direct means of introducing and positioning.

Anode 111 is formed from outer disk portion 1601 cylindrical portion 161 and inner disk portion 162.

A plurality of screws 164 (two shown) secure the anode 111 to the mounting plate 165. The insulation ring 167 is attached to the plate 165 by a plurality of screws 168 (one shown).
An O-ring 169 provides a vacuum seal between the insulating grate 167 and the mounting plate 165. An external clamp 136 is engaged and held in contact with insulation ring 167 by means not shown. An O-ring 171 provides a vacuum seal between the 7-run 136 and the ring 167. Attachment plate 165 is engaged with flange 180 by means not shown. For example, flange 180
may be connected to a vacuum or processing device. Attachment is provided by an O-ring 181, with a vacuum bond between plate 165 and flange 180.

FIG. 3 shows a fragment of the stage 113 of FIG. In FIG.
Inner diameter 1.75 inches (approx. 4.45cW1), outer diameter 3.5
6 inches (approximately 9.Q46R) and has a thickness or vertical height of approximately 0.375 inches (approximately 0.953 crn).

In FIG. 3, representative magnetic field lines 201 are illustrated above the property-heated dead. In particular, the shape of the magnetic field lines 201 strongly depends on the level of magnetic saturation of the magnetic material of the target 113. The base/base tart 113 has a surface profile 203 that does not corrode when new. After operating the base ivy target 113 made of 410 stainless steel for 52.6 kilowatt hours with a constant current to the electromagnetic coil 120, profile 204 was obtained. About 57.5 girowatt hours - S.P. consisting of Gumaloi 1
After operating 13 with a current to the electromagnetic coil 120 adjusted to maintain a constant magnetic field as measured by the Hall probe 156, the contour 205 was obtained. A useful end-of-life contour 207 is estimated for the above-mentioned ``Malloy Tag''. It is estimated that Tarded's useful life is more than 100 gigawatt hours.

Figure 4 is: ・P-Maro Isunoya Tsutatardead 113
A curve 210 of the output '4f pressure of the Hall probe 156 as a function of the operating period (measured in kilowatt-hours) is shown. This is the same tarde that gave rise to profile 205 in FIG. As previously discussed, profile 205 was obtained after operating at 57.5 GWh with the current to coil 120 adjusted to maintain a constant magnetic field as measured by Hall probe 156.

Curve 210 was generated by periodically returning the current in coil 120 to a fixed value (40 amps, with all sputter source operation suspended) and measuring the output voltage of Hall probe 1.56. This voltage is proportional to the magnetic field at the Hall probe location. It can be seen from curve 210 that this field was generated over 50 degrees during the first 40 hours of operation.

To operate the magnetron gutter coating source of FIG. 1, for example, the coating source is first attached to mating flanges of an evacuable chamber. The center anode assembly 10 and the outer anode 11 may be electrically coupled together and connected to a positive voltage terminal of a glow discharge power source.

The positive terminal of this power source may optionally be connected to earth. Alternatively, the central anode assemblies 10 may be individually connected to allow biasing with respect to the outer anodes 11. The magnetic circuit consists of a magnetic yoke (consisting of a pace plate 23, cylinders 22 and 24) equipped with magnetic pole pieces 25 and 27.
Also includes Su Mother Tsutatar 13. These parts are electrically bonded together and electrically isolated from the anodes 10 and 11. Because of the position relative to the anodes 10 and 11 and the position relative to the pole pieces 25 and 27, the
The mother ivy tert 13 acts as a cathode for the sui gtuta source. During operation, the magnetic circuit and cathode emit a glow! Connected to the negative terminal of the power source. Electromagnetic coil 20 is energized through electrical connector 21 by a variable voltage magnet power source. The magnetic field above the swivel surface of the tarded 13 is caused by the current in the electromagnetic coil 20 and
depends on both the magnetic permeability and saturation magnetization properties of the material from which it is made.

The current required to sensitize Hall probe 67 is the amount of current required to make Hall probe 67 sensitive.
brought about by the control unit.

The resulting Hall voltage is Hall Zorro! 67 and is measured by the Hall probe control unit. Cooling water is dead 1
3 to the water inlet conduit 49 and to the water inlet conduit 97 for the center anode assembly 10 .

After evacuation, the chamber to which the magnetron coating source is attached is returned to semi-weather pressure consisting of carbon dioxide (usually argon). If the voltage and magnetic field strength above the sputter dead 13 are within suitable ranges, operation of the magnetron coating source begins by applying the required voltage from the glow discharge power source. It is possible to
9. Contacting with material from the starting point 13 can begin.

The operation of the magnetron sputter coating source of FIG. 2 is essentially the same as that of the coating source of FIG. Unlike the coating source of FIG. 1, the coating source of FIG. 2 does not have a central anode. Anode 111 is connected to the positive terminal of the glow discharge power source. The magnetic circuit consists of a base plate 123, cylinders 122 and 124, a top plate 127 and a snog tattered dead 113.

127 top plates, 12 magnetic yokes and pole pieces
5 and 128. Non-magnetic ring 129 forms a vacuum seal with pole pieces 125 and 128. The components of the magnetic circuit are electrically bonded together and insulated from the anode 111. Anode 111 and pole pieces 125 and 12
The target 113 at the position relative to 8 serves as the cathode of the sputtering source. In operation, the magnetic circuit and cathode are connected to the negative voltage terminal of the glow discharge power source. Electromagnetic coil 120 is energized through electrical connector 121 by a variable voltage magnet power source. The magnetic field strength above the base surface of the base 113 of the base 113 is determined by the current in the electromagnetic coil 120 and the base of the base 113 of the base 113.
13 depends on both the magnetic permeability and saturation magnetization properties of the material from which it is made.

The current required to sensitize the hole globe 156 is the hole glow! The Hall voltage provided by the control unit and generated by the Hall globe 156 is the Hall glow! Measured by the control unit. The water for cooling the suction tank 113 is fed through a plurality of spout pipes 154 directed toward the bottom of the non-magnetic ring 129.
Injected into Cheno-4153 by. The chamber, with the evacuated magnetron coating source turned off, is returned to semi-weather pressure consisting of gas (usually argon). When the Sumi 4 Tsuta gas pressure and the magnetic field strength above the Suno and Tsuta Targut 113 are within appropriate ranges, the magnetron Suno? Operation of the ivy coating source can be initiated by applying the required voltage from the glow discharge power source, and coating of the substrate with material from the source tart 113 can begin.

As an example, as shown in FIG.
45 m), outer diameter 3.56 inches (approximately 9.04 cW1
), vertical height 0.375 inches (approximately 0.9537?l)
l + ) ) is an electromagnetic coil 120 with a voltage of 6 amperes (less than 5 delt for electromagnetic power of less than 30 watts).
113 to bring about a magnetic field strength above the non-corroded surface 203 of the slat 113,
Enough to allow normal magnetic increase of glow discharge.

The representative magnetic field lines 201 above the non-corroded surface 203 are
Its nature is shown in FIG. A corresponding "magnetic tunnel" serves to limit the glow discharge. The resulting magnetically enhanced glow discharge is 4 X 10-” Tor
It operates at 600 gels and 1.7 am (at a glow discharge power of 1,0 kilowatts) at a gas pressure of 2.5 inches (approximately 6.35 tM). +7) from targut to substrate +7) per minute i at distance M
t #! Provides a substrate coating rate of 1400 angstroms.

When the operation of the magnetron snow or vine coating source continues, the base vine surface of the targut 113 is gradually destroyed. 410 stainless steel component, electromagnetic coil 120
In one experiment using Tergut 113 operated at a fixed current of 7 am (A), the corroded surface outline 2
04 was obtained after 52.6 kilowatt hours of operation. As corrosion progresses, the magnetic field strength above the suction surface increases, leading to a more tightly confined, lower voltage glow discharge. By the time the contour 204 is obtained, the contour 204
The magnetic field strength immediately above varies large enough to destabilize the glow discharge. Because of this unstable operation, an end of life with a coil current of 77 mm was reached for this target.

In the second experiment, a snow mother tree consisting of Noyamalloy
The electromagnetic coil 120 whose cut 113 is constantly being reduced
to maintain a constant output Hall voltage from the Hall globe 156. In this way, the magnetic field strength at the position of the hole globe 156 was held constant as the grooves and ivy surfaces of the targut 113 were gradually destroyed. Correspondingly, the magnetic field strength above the surface of the targut 113 changes relatively little as the targut erodes, further leading to a nearly constant glow discharge impedance and stable operation. Outline of corroded surface 205
was obtained after 57.5 kilowatt hours of operation.

When the corrosion of the base/'P ivy target 113 progressed toward the outer shape 205, the operation was periodically interrupted and the Hall voltage from the Hall globe 156 to the electromagnetic coil 120 returned to the reference value of 4A4A. Measured using electric current. The results of these measurements are illustrated by curve 210 in FIG. It can be seen from curve 210 that the magnetic field sensed by Hall nolobe 156 increased by more than 50% during the first 40 kilowatt hours of operation.

A comparison of profiles 204 and 205 reveals that operation at constant electromagnetic coil current (profile 204) focuses the corrosion profile deeper and more sharply than operation at constant Hall voltage (profile 205). It is clear from this that the inventory of turbid material suitable for use before the end of the shelf life is reached is significantly greater under the operating conditions of profile 205 than for profile 204.

Another comparison of profiles 204 and 205 shows that the maximum corrosion radius is smaller for profile 204 than for profile 205. This is probably due to an increase during operation in the magnetic field strength above the surface of the target 113. Changes in the distribution type of the secluded material reaching the substrate are associated with changes in the maximum corrosion radius. In addition, the difference in maximum corrosion radius for contours 204 and 205 is utilized to provide a controlled measurement over the maximum corrosion radius where changes in magnetic field strength (caused by changes in current to electromagnetic coil 120) occur. We show that this can be done and thus yields corresponding control over the distribution type.

An end-of-life profile 207 has been estimated for the S.G.T.T.T.G.T.T.T. It is further estimated that over 100 kilowatt-hours of operation are required to reach profile 207. The significance of this is that the inventory of magnetic material suitable for use contained within the rotor 113 is large enough to be of practical use in coating equipment for manufacturing magnetic disks. In fact, the amount of magnetic material suitable for use is
This can be compared to the amount of non-magnetic material suitable for use contained within the target of the target coating source.

One of the keys to the success of the present invention is the use of electromagnets rather than permanent magnets. In prior art magnetron sputter coating sources using permanent magnets and non-magnetic starch targuts, erosion of the targut usually leads to operation at progressively greater magnetic field strengths, resulting in changes in discharge impedance. Accommodating these changes through power source design is feasible. Magnetism 9
As the foregoing experiments using a tartar dart and leading to profile 204 show, the magnetic field strength near the target changes very rapidly as the targut erodes.

As mentioned at the outset, by the time the corroded profile 204 was reached after 52.6 kilowatt hours of operation, the glow discharge had become unstable. In effect, the end of the validity period has then been reached. Stable operation can only be achieved by reducing the magnetomotive force, which in this case can be easily achieved by reducing the current to the electromagnetic coil 120. The fact that the substrates 13 and 113 made of non-magnetic material can be used effectively and efficiently with the magnetron coating source shown in FIGS. will be obvious to those skilled in the art of source design. Pole pieces 25 and 27 in FIG.
It is also possible that the optimal shape of the pole pieces 125 and 128 of FIG. 2 is somewhat different for use with non-magnetic materials than for use with strong ferromagnetic materials. The inner pole piece 27 in FIG. 1 is shown separated from the cylinder 22 to facilitate replacing the pole piece 27 with one of a different shape in a few seconds, as may be necessary or desirable.

In FIG.
27, is shown to be easily removable, as is the pole piece 125.

Accordingly, the magnetron sputter coating source of FIGS. 1 and 2 is well suited for use with snags 13 and 113 having properties ranging from non-magnetic to strongly ferromagnetic.

Corrosion of the snow and ivy leads to an increase in the magnetic field strength above the top surface of the snow and ivy, further leading to a lower electrical impedance of the glow discharge and reducing the voltage that can be sustained over a discharge at a particular power level. This has been mentioned above. Alternatively, operation at constant voltage leads to increased current, higher power and higher stuttering speed, but these may not be necessary. In order to maintain a fixed gas flow rate at the desired gas pressure, it is necessary to operate at higher currents and higher currents. Therefore, the glow discharge power source must be capable of delivering a wide range of frost pressure, current and power, which in turn affects both the power source and the power consumption. .

The use of electromagnets rather than permanent magnets in the magnetron tacking source of the present invention lends itself to direct electrical control of the magnetic field strength, such as Constant values of glow discharge voltage, current and power throughout the lifetime of the kit provide a magnetic field strength suitable for operation. This is true for both magnetic and non-magnetic targates. Significant savings in both glow discharge power sources and power consumption should therefore be achievable.

The magnetic circuit design used in the disclosed embodiments of the invention leads to very low resistance magnetic paths and low magnetic losses.

As a result, the required electromagnetic force is low and the electromagnetic coil 2
Controlling the current to 0 or 120 is relatively straightforward. The cost savings achieved with glow discharge power sources as a result of constant voltage operation will very well compensate for the cost of magnetic power sources.

Above 1. As such, it is sometimes desirable to operate the glow discharge at a gas pressure below the minimum pressure at which the discharge will self-ignite with normal application of voltage from the glow discharge power source. One approach to this problem is to increase the suction gas pressure enough to allow ignition to occur, and then reduce the suction gas pressure to the desired operating level. The disadvantage of this method is that
These include cost, adhesion, and, as mentioned at the outset, a relatively long time constant (a significant function of suction coating time). With regard to readily available electrical control of the magnetic field strength adjacent to the snokkuta faces of targuts 13 and 113,
Glow discharge ignition may be facilitated using a short increase in current to the electromagnetic coils 20 and 120.

In magnetron sputter coating sources, cooling of the sputter gas typically poses one of the more laborious and pervasive problems.

For example, the approach to targout cooling described in the aforementioned U.S. Pat. No. 4,100,055 uses a cooling jacket that wraps around the outer circumference of the targut. As mentioned at the outset, this method of cooling the gas, which has a relatively low thermal conductivity, will prove inadequate, as do many magnetic materials. In the embodiment shown in FIG. A tipter cut 113 is held in contact with pole pieces 125 and 128 as well as non-magnetic ring 129 and flanges 141 and 142. As shown, a plurality of ejection tubes 154 connect outer pole piece 125 and ring 12.
9 to direct the cooling water jet. The main impedance to the heat transfer from the
The bottom of the turret 113 and the magnetic pole pieces 125 and 12
8 and the contact surface between ring 129. The cooling of the Step 9 Tatar 113 is done in this way.
aptly referred to as "indirect". This indirect cooling configuration is probably suitable for magnetic spark plugs 113 of most of the dimensions shown in FIG. 3 up to glow discharge power levels of 1 to 2 kilowatts, but may become unsuitable at higher powers. Probably. Targt distortion, cracking, and even localized melting may occur as a result of inadequate cooling.

The means for cooling the reservoir 13 disclosed in FIG.
(Regarding Mother Tsutatar 113). In "direct" cooling, the cooling water (or other coolant) is in direct physical contact with the bottom surface of the base rotor 13, such as the non-magnetic ring 129 of FIG. without intervening thermal impedance imposed by Ejection pipe 15 in Fig. 2
Multiple ejection pipes similar to 4
can be used to direct a jet of cooling water onto the bottom surface of the

Since the cooling is direct rather than indirect, operation at substantially increased glow discharge power levels may be suitable. The cooling means shown in FIG. 1 uses a cylindrical bulkhead 60 at the top of the manifold 45 to divide the cooling water chamber into an inlet ring 61 and an outlet ring 62. The top of the bulkhead 60 and S! The distance between it and the bottom of the vine tart 13 is 64 digits,
It is chosen to force an essentially uniform radial flow of water around the perimeter of the partition wall 60 from the inlet ring 61 to the outlet ring 62. In this way, ambient variations in cooling that can result from a set of separate jet tubes are avoided. Furthermore, a simplification of the water distribution system is achieved. By appropriately selecting the spacing 64 and the water flow rate, Snow! Turbulent flow on the bottom surface of the ivy tart 13 is ensured, thereby avoiding the formation of stagnant fluid layers that inhibit heat transfer.

The above-described direct cooling system using septum 60 with respect to spacing 64 thus provides a direct cooling system with respect to spacing 64. Brings a new approach to the problem of cooling vines.

Direct cooling of the Sumi9 target 13 is of particular importance to avoid distortion, cracking or melting of the Sumi9 target 13. If cracks or the like occur, the vacuum device will be ``soaked'' by the horn. This should always be avoided. The uniform circumferential cooling provided with the aid of septum 60 and spacing 64 greatly reduces leakage problems due to distortion, cracking, or melting. When the end of the validity period is near,
The risk of leakage present at the S.G.T.T. target 13 is increased. One way to determine when the end of the useful life is imminent is to track the useful life amount (t
It is a method to keep the rack simple and stop operating when it reaches the end point of its empirically established lifetime.

The absence or loss of such data makes it desirable to have an alternative method of determining when the end of the validity period is near. A second method is to increase the current and current to the electromagnetic coil 20 required to maintain a constant glow discharge operating voltage at a fixed glow discharge gas pressure and a fixed discharge power level.
This is a method of correlating the corrosion state of the ivy target 13 with each other. This coil current decreases as target corrosion progresses, and the magnitude of the coil current required will be higher for a magnetic target than for a non-magnetic target. A third method monitors the change in the Hall voltage from the Hall probe 67, for example with a fixed associated value of the current to the electromagnetic coil 20 (as in FIG. 4);
This is a method of correlating this Hall voltage with the corrosion of the snout starter 13. Although this third method is not suitable for use with non-magnetic sputter targets (Hall voltage is not relevant to corrosion of non-magnetic sputter targets), the Hall voltage is not suitable for use with strong ferromagnetic sputter targets. When used, it provides a particularly sensitive measurement of corrosion in the matrices.

The present invention provides a glow discharge power source, discharge ignition, tarpit cooling, and tarpit material having magnetic properties ranging from non-magnetic to highly ferromagnetic, with additional useful features for tarpit cooling and target lifetime monitoring. It will be appreciated from the foregoing that the present invention provides a novel magnetronic mother vine coating source that can be applied to relatively large inventories (73). It is understood that many modifications of the disclosed embodiments may be made by those skilled in the art, but the invention is limited only by the scope of the claims.

[Brief explanation of the drawing]

FIG. 1 is a side cross-sectional view of a preferred embodiment of the circular magnetron gutter coating source of the present invention. FIG. 2 is a side sectional view of a modified embodiment of the invention. 3 is a partial cross-sectional view of a portion of the sputter target of FIG. 2 at various stages of corrosion; FIG. FIG. 4 shows a curve of hole glow chisel pressure as a function of operating period for the Malois Gutta target used in the magnetron sputter coating source of FIG. [Main code] 10... Center anode assembly 11.111... Anode 1
3.113... Sputter target 20,120.
... Electromagnetic coil 22.122 ... Center cylinder 23.1
23...Paste route 24.124...Hollow outer cylinder 25.125...Outer magnetic pole piece 27.128...
Inner magnetic pole piece 36.136... External Franz (yA) 45... Manifold 49... Inlet conduit 50...
Gap hole 52...first vertical hole 53...second horizontal hole
54... Second vertical hole 60... Cylindrical partition wall 61...
Inlet ring 62...Outlet 3J 67.156...Hall rope 90...Base member 96.153...Water cooling chamber 97...Water inlet 98...Water outlet 1
00... Center disk 103... Right angle member 127
... Totsu 7Of rate 129 ... Non-magnetic ring 1
45...Coil jacket 154...Ejection pipe 16
7... Heat insulation ring 201... Magnetic field line patent applicant
Parian Associates Inc. I Rated (75)

Claims (1)

[Claims] 1. An anode, a cathode means including a magnetic strip or a tattered gut;
and a magnetic field means comprising an electromagnetic coil, a yoke, and a pair of pole pieces joined to said yoke separated by a spatial gap, said yoke and pole pieces having a high magnetic permeability. made of a material of high magnetic flux and high saturation magnetization, the magnetic strip or stutter is located at the top of the pole piece and is shaped and positioned to completely fill the spatial gap, thereby causing the pole piece to a continuous magnetic path between is provided through the targate;
A current flowing in the electromagnetic coil causes magnetic field lines to be set up in the yoke, the pole piece and the magnetic base plate, the current having a critical value, and substantially all of the magnetic field lines being within the current. is limited to the inside of the yoke, the magnetic pole piece, and the magnetic stub tart when the current is less than the critical value; a magnetic gap is created, whereby a magnetic gap is established in said magnetic strip, said magnetic gap having peripheral magnetic field lines above and below said magnetic strip at the periphery of said magnetic gap. the required value is the magnetic strip of the required strength.
The magnetic field lines at the periphery above the mother tart are sufficiently larger than the set critical value, so that a magnetically restricted and magnetically enhanced glow discharge occurs in the region adjacent to the magnetic gap. A source of magnetron-coated ink which allows the magnetron to be set above the magnetic matrix. 2. The magnetron matrix coating source of claim 1, wherein the yoke and the pole piece are shaped to form a low reluctance magnetic path through the yoke and the pole piece. and the yoke and the pole piece are arranged so that the magnetron is not magnetically saturated for all the required values of the current.
Mother ivy coach ink source. 3. A magnetron sputter coating source according to claim 1, wherein a magnetically unsaturated portion of the magnetic pole piece adjacent to the magnetically saturated portion of the magnetic pole piece A magnetron or ivy coating source that can be used as an extension of the magnetron. 4. A magnetron matrix coating source as claimed in claim 1, wherein the relatively thick configuration of the magnetic sputter turbine is such that a desirably large inventory of materials suitable for use is present in the magnetic sputter coating source. Where magnetron snow or ivy coach ink sources are used to enable inclusion within ivy targets. 5. A magnetron sputter coating source according to claim 1, wherein during operation, the magnetic sputter dead is maintained at a temperature below the Curie temperature of the material of the magnetic sputter tart. Source of magnetron snow and ivy coating. 64. The magnetron spray coating source of claim 1, wherein the required value of the current is maintained at a desired rate throughout the lifetime of the magnetic coating source. A magnetron sputter coating source which is adjusted to provide the desired predetermined operating voltage and current to the glow discharge at ivy gas pressure. 7. A magnetron sputter coating source as claimed in claim 1, wherein the required value of the current is applied to the glow at a desired star gas pressure throughout the life of the magnetic sputter turbine. A magnetron sputter coating source that is adjusted to provide the desired constant operating voltage and current to the discharge. 8. A magnetron sputter coating source according to claim 1, further comprising a hole 10-b, the magnetic field strength being measured at the position of the hole 10-b, the hole 10-b The magnetic strip near the area of maximum tartar corrosion caused by glow discharge
located closely below the hole 10-
A magnetron sputter coating source in which the output Hall probe voltage from the hole probe is proportional to the magnetic field strength at the location of the hole probe. 9. A magnetic sputter coating source as set forth in claim 8, wherein the required value of the current increases the Hall probe voltage throughout the lifetime of the magnetic sputter bit. 10. A magnetron sputter coating source as claimed in claim 8, wherein the required value of the current is adjusted to provide a desired constant value. is adjusted to provide a desired predetermined operating voltage and current to the glow discharge at a desired sputter gas pressure throughout the life of the magnetic sputter turbine;
The current is periodically returned to a selected relevant value to allow the Hall probe voltage to be measured simultaneously at the selected relevant value, such that a curve is formed of the Hall probe voltage versus the magnetic strip. Generated from the accumulated operation of the magnetic sputter bit, said curve is stretched to the end of the useful life of the first sample of said magnetic sputter bit, said curve is generated from said magnetic sputter bit! The magnetron mother ivy coating source is helpful in determining the method for the end of the shelf life of subsequent specimens of the ivy turbine. 11. A magnetron vine coating source according to claim 1, wherein the pole piece is easily removable from the yoke and replaced on the yoke by a differently shaped pole piece. , thereby allowing a change in the shape of the pole piece to be used to cause a change in the position of the spatial gap with respect to the unchanged yoke and the electromagnetic coil; a magnetron whose change causes a corresponding change in the position of the magnetic gap and the glow discharge, thereby achieving a corresponding change in the distribution type of the material being irradiated from the magnetic material;
and ivy coating source. 12. A magnetron sputter coating source as claimed in claim 1, wherein the required change in value of the current is used to cause a change in the width and position of the magnetic gap; a magnetron, wherein said change in the magnetic gap causes a corresponding change in the position of said glow discharge, thereby achieving a corresponding change in the distribution type of the material to be sewn from said magnetic strut; Sputter coating source. 13. A magnetron sputter coating source consisting of a cathode means comprising an anode, a stutter gut, and a magnetic field means comprising a net electromagnetic coil, a yoke and a pair of pole pieces joined to said yoke separated by a spatial gap. wherein the yoke and the pole piece are made of a material with high magnetic permeability and high saturation magnetization, and the struts are located at the top of the pole piece to completely fill the spatial gap; said spatial gap allows magnetic field lines to be set up to magnetically limit and magnetically increase the glow discharge above said stuttering point, and said magnetic field lines have a shape and strength that are different from said electromagnetic Depending on the current flowing in the coil and the material from which the suction plate is made, the current is required for setting the desired glow discharge when the material of the suction plate is non-magnetic. the current has a second value required for setting a desired glow discharge when the substance of the suction starter is magnetic; A second value, which is greater than the required first value, results in magnetic saturation of a portion of the magnetic strip, thereby imparting a magnetic field above the magnet to the magnetic strip. A magnetronic matrix coating source that creates a magnetic gap in the magnetic matrix in which a limiting and increasing glow discharge can be set. 14. The magnetron sputter coating source of claim 13, wherein the yoke and the pole piece are shaped to form a low reluctance magnetic path through the yoke and the pole piece; A magnetron, where the yoke and the pole piece are not magnetically saturated for all the required values of the current? Ivy coach ink source. 15.% The magnet (9) described in claim 13
) A magnetron sputter coating source, wherein the magnetron sputter coating source has a shape that is independent of the magnetic permeability and saturation magnetization properties of the material of the magnetron sputter. 16. The magnetron sputter coating source of claim 813, wherein the relatively thick shape of the sputter tart material improves the magnetic permeability and saturation magnetization properties of the sputter tart material. Irrespective of the source of the magnetron-coat ink used to enable a desirably large inventory of materials suitable for use to be contained within the matrix. 17. A magnetron sputter coating source according to claim 13, wherein the pole piece is replaced on the yoke by a differently shaped pole piece that is easily removable from the yoke; A magnetron sputter coating source whereby the sputter target made of materials with a wide range of magnetic properties, including non-magnetic materials, is most preferably used (10). 18. The magnetron sputter coating source of claim 13, wherein the first required value of the current is maintained at a desired value throughout the life of the non-magnetic sputter. A magnetron coating source where the gas pressure is adjusted to provide the desired predetermined operating voltage and current to the glow discharge. 19.% The magnetron snow or ivy coating source of claim 13, wherein the second required value of the current maintains the desired sputtering rate throughout the lifetime of the magnetic sputter tarpit. A magnetron snow or ivy coating source which is adjusted to provide the desired predetermined operating voltage and current to the glow discharge at nine ivy gas pressures. 2. A magnetron sputter coating source according to claim 13, wherein the first
The required value of the magnetron, which is adjusted to provide the desired constant operating voltage and current to the glow discharge at the desired stutter gas pressure throughout the life of the non-magnetic stutter or tarpit. Ivy coating source. 2. The magnetron matrix coating source as claimed in claim 13, wherein the second required value of the current is constant throughout the lifetime of the magnetic matrix. A magnetron master vine coating source which is adjusted to provide a desired constant operating voltage and current to the glow discharge at a desired sputter gas pressure. 2. The magnetron sputter coating source as claimed in claim 13, further comprising a hole globe, the magnetic field strength being measured at the position of the hole globe, the hole globe measuring the maximum magnetic field strength caused by the glow discharge. a magnetron dust coating positioned closely below said snow tart near the area of target corrosion of said hole globe, wherein the output hole globe voltage from said hole globe is proportional to the magnetic field strength at the location of said hole globe; source. 2. The magnetron coating source as claimed in claim 22, wherein the second required value of the current is constant throughout the lifetime of the magnetic matrix. a magnetron which is adjusted to provide a desired constant value of the hole globe voltage;
Mother ivy coating source. 2. A magnetron sputter coating source according to claim 22, wherein the second
The required value of is adjusted to provide the desired scheduled operating voltage and current to the glow discharge at the desired starch gas pressure throughout the life of the magnetic starch tarpit, said current being adjusted to a selected relationship. value to allow the Hall-globe voltage to be measured simultaneously at the selected associated value, whereby a curve is generated from the Hall-globe voltage versus the accumulated movement of the magnetic strip or vine tarpit. , the curve is the magnetic snow e
A magnetron sputter coating source where the curve is extended to the end of the useful life of the first sample of the magnetic sputter tar pit, and the curve serves to determine the method for the end of the useful life of the subsequent sample of the magnetic sputter tar pit. 25, 4? 21. The magnetron master coating source of claim 20, wherein the change in the first required value of the current using cumulative operation magnetron sputter coating source used to determine the end of shelf life of a magnet. 2. A magnetron sputter coating source according to claim 22, wherein the first
The required value of is adjusted to provide a desired constant value of operating voltage and current to the glow discharge at a given sputtering gas pressure throughout the lifetime of the non-magnetic snow tart, and Said hole using! A magnetron sputter coating source wherein a change in rope voltage is used to determine the end of the useful life of the non-magnetic sputter gut. 2. The magnetron gutter coating source as claimed in claim 13, wherein the pole piece is easily removable from the yoke and replaced on the yoke by a differently shaped pole piece. , thereby enabling a change in the shape of the pole piece to be used to cause a change in the position of the spatial gap with respect to the yoke and the electromagnetic coil on the verge of change; A magnetron sputter coating source, wherein said change in causes a matched change in the position of said glow discharge, thereby achieving a matched change in the distribution type of the sludged material from said sludge or tattered gut. 2. A magnetron sputter coating source as claimed in claim 13, wherein the current increases instantaneously above the required value, thereby increasing the magnetic field above the source. The operation of the glow discharge is such that the glow discharge can be ignited at a desired sputtering gas operating pressure below the sputtering pressure, where the glow discharge can normally be easily ignited. Magnetron/l ivy coating source. 2. A magnetron sputter coating source as claimed in claim 13, wherein the conversion of the magnetron sputter coating source to an essentially non-magnetic diode device reduces the current to zero. Magnetron sputter coating source where achieved. 30. The magnetron/substrate coating source as set forth in claim 29, wherein a more complete conversion of the magnetron/substrate coating source to a non-magnetic diode device is achieved by a suitable addition to the electromagnetic coil. is achieved by applying a current of opposite value, and then said opposite current is reduced to zero, thereby achieving essentially complete demagnetization of said yoke, said pole piece and said magnetic sputter target. Source of magnetron snow mother ivy coach ink. 31, an anode, a cathode means comprising a suction starter, means for cooling said suction starter, and a magnetic field means comprising a yoke and a pair of magnetic pole pieces joined to said yoke, separated by a gap; a magnetron sputter coating source comprising: the gap being shaped to form a closed circumferential path in a substantially horizontal plane; the yoke and the pole piece being of magnetic material; positioned at the top of the pole piece to fill the gap, a vacuum tightness is provided between the bottom surface of the pole piece and the top surface of the pole piece, and the gap is such that the magnetic field lines are connected to the pole piece (17). ) allowing the uppermost glow discharge to be configured to magnetically limit and magnetically increase, so that the uppermost surface of the spark plug is subject to intense bombardment by the positive ions generated in the glow discharge; The intense impact causes intense heating of the sputter targut, and the intense impact is concentrated in the area above the gap, thereby causing the intense heating of the sputter targut to forming a passageway, the cooling means including a water chamber, a part of the bottom surface of the stator targut between the gaps is an inner surface part of the water chamber, and the water chamber is connected to an inlet part and an outlet part by a partition wall; The partition wall is divided into 1 part below the bottom surface of the main ivy tart.
(18) a narrow gap is positioned directly below said area of severe impact, said bulkhead being shaped to form a closed circumferential path corresponding to the path around said gap; The narrow gap provides a high impedance to the flow of water, and the narrow gap provides cooling water flowing from the inlet to the outlet of the water chamber 9. bringing the water into intimate thermal contact with the bottom surface of the suction tart, said thermal contact being substantially uniform over a path around said gap, whereby substantially all of said suction tart; - A magnetron A' ivy coating source where variable cooling is achieved along the circumferential path of intense heating of the source. 32. The magnetron snow ivy coating source as set forth in claim 31, further comprising a pole globe, the magnetic field strength being measured at the position of the pole globe, the pole globe measuring the magnetic field strength at the location of the pole globe, and the pole globe measuring the magnetic field strength at the location of the pole globe. and a precision fit is established between the side wall of the pole globe and the adjacent end of the bulkhead, the precision fit being between the top surface of the bulkhead and the bottom surface of the stem. A second narrow gap is set between the top surface of the pole globe and the bottom surface of the base plate to avoid significant disruption in the flow of cooling water through the narrow gap between the , the second narrow gap is selected to provide a high impedance to water flow that is substantially the same as the high impedance provided by the narrow gap between the top surface of the bulkhead and the bottom surface of the sputter gutt. is,
A magnetron sputter coating source whereby the effectiveness of the cooling means is preserved despite including the pole globe. 33. A magnetically enhanced suction coating source comprising anode means, cathode means, magnetic means for forming a magnetic field proximate said cathode means, and magnetic field strength measuring means, said measuring means said A sputter coating source mounted in a position that provides for measurement of the magnetic field during operation of the coating source. 34. A magnetically enhanced star or ivy coating source as claimed in claim 33, wherein said magnetic means is adjustable to control said magnetic field as measured by said measuring means. The source of Suzetta's coating. 35. A magnetically enhanced sputter coating source as claimed in claim 33, wherein the magnetic means comprises spaced apart pole pieces of opposite magnetic polarity, and a magnetic field is formed between the pole pieces. and wherein the measuring means is positioned in a magnetic field between the pole pieces. 36. A magnetically enhanced suction coating source as set forth in claim 35, wherein the cathode is adapted to mount a suction tart having a suction surface and an opposite surface; a sputter coating source, wherein said measuring means is positioned adjacent said opposite surface when said sputter target is attached to said cathode means. 37. A magnetically enhanced suction and ivy coating source comprising anode means, cathode means and a central pole piece forming a central axis of the coating source, an electromagnetic coil coaxially surrounding said central pole piece; and a magnetic field means consisting of an annular pole piece having nine turns coaxially surrounding said coil, said pole piece being shaped to form coplanar end faces with spaced apart annular pole faces, and said annular pole face having a planar annular non-contact face. Sputter coating source where magnetic gaps are formed. 38. The magnetically enhanced star ivy coating source as set forth in claim 37, wherein a non-magnetic material is hermetically sealed to the pole faces to close the space between the pole faces. Tokoronosu's mother ivy coating source. 39. A magnetically enhanced four-way ferromagnetic coating source comprising: magnetic means comprising inner and outer annular ferromagnetic members radially spaced to form pole pieces separated by an annular space; comprising electromagnetic coil means positioned in a space between magnetic members and anode means supported in a space within said inner rod-like member, said pole piece being electrically insulated from said positive rod means; Sputter coating source where the cathode means is formed. 40. A magnetically enhanced sputter coating source as set forth in claim 39, comprising means for supporting an annular strut across one end of said annular member. Sumi 4' ivy coating source.