JPS5980463U - Vapor deposition equipment - Google Patents

Vapor deposition equipment

Info

Publication number
JPS5980463U
JPS5980463U JP17655282U JP17655282U JPS5980463U JP S5980463 U JPS5980463 U JP S5980463U JP 17655282 U JP17655282 U JP 17655282U JP 17655282 U JP17655282 U JP 17655282U JP S5980463 U JPS5980463 U JP S5980463U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition equipment
vacuum chamber
filter
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17655282U
Other languages
Japanese (ja)
Other versions
JPH0139712Y2 (en
Inventor
亀谷　実
渡辺　源一
Original Assignee
ティーディーケイ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ティーディーケイ株式会社 filed Critical ティーディーケイ株式会社
Priority to JP17655282U priority Critical patent/JPS5980463U/en
Publication of JPS5980463U publication Critical patent/JPS5980463U/en
Application granted granted Critical
Publication of JPH0139712Y2 publication Critical patent/JPH0139712Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案に係る蒸着装置の実施例を示す断面図である
。 １・・・ベルジャ、２・・・るつぼ、３・・・電子銃式
蒸発源、４・・・基板ホルタ、５・・・フィルタ、６Ａ
、　　６Ｂ・・・真空排気系。The figure is a sectional view showing an embodiment of a vapor deposition apparatus according to the present invention. DESCRIPTION OF SYMBOLS 1... Bell jar, 2... Crucible, 3... Electron gun type evaporation source, 4... Substrate holter, 5... Filter, 6A
, 6B... Vacuum exhaust system.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空室内の底部に蒸発源を配置し、上部に基板ホルダを
設けた蒸着装置において、真空室内の側面にフィルタを
立設し、該フィルタ背面より前面方向にガスを送出する
ことを特徴とする蒸着装置。An evaporation apparatus in which an evaporation source is placed at the bottom of a vacuum chamber and a substrate holder is provided at the top, in which a filter is installed upright on the side of the vacuum chamber, and gas is sent from the back of the filter toward the front. Device.
JP17655282U 1982-11-24 1982-11-24 Vapor deposition equipment Granted JPS5980463U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (en) 1982-11-24 1982-11-24 Vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17655282U JPS5980463U (en) 1982-11-24 1982-11-24 Vapor deposition equipment

Publications (2)

Publication Number Publication Date
JPS5980463U true JPS5980463U (en) 1984-05-31
JPH0139712Y2 JPH0139712Y2 (en) 1989-11-29

Family

ID=30383819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17655282U Granted JPS5980463U (en) 1982-11-24 1982-11-24 Vapor deposition equipment

Country Status (1)

Country Link
JP (1) JPS5980463U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742866A (en) * 1980-08-28 1982-03-10 Diesel Kiki Co Ltd Obstacle detector
JPS57176554A (en) * 1981-04-07 1982-10-29 Philips Nv Magnetic tape cassette device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742866A (en) * 1980-08-28 1982-03-10 Diesel Kiki Co Ltd Obstacle detector
JPS57176554A (en) * 1981-04-07 1982-10-29 Philips Nv Magnetic tape cassette device

Also Published As

Publication number Publication date
JPH0139712Y2 (en) 1989-11-29

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