JPS59112213A - Optical measuring device - Google Patents
Optical measuring deviceInfo
- Publication number
- JPS59112213A JPS59112213A JP22357982A JP22357982A JPS59112213A JP S59112213 A JPS59112213 A JP S59112213A JP 22357982 A JP22357982 A JP 22357982A JP 22357982 A JP22357982 A JP 22357982A JP S59112213 A JPS59112213 A JP S59112213A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- light beam
- measuring device
- scanning
- parallel scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/10—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
- G01B11/105—Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、光学式測定装置に係シー特に、難可視性のレ
ーザ光線を利用して被測定物の寸法を測定する高速度走
査型レーザ測長機に用いるのに好適な、平行走査光線ビ
ーム発生装置と受光素子との間に配置（７た被測定物に
より一平行走査光線ビームが辿ぎられて生じる暗部又は
明部の長さから被測定物の寸法を測定するようにした光
学式測定装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical measuring device, and is particularly suitable for use in a high-speed scanning laser length measuring machine that measures the dimensions of an object using a barely visible laser beam. The dimension of the object to be measured is measured from the length of the dark or bright area generated when the parallel scanning beam is traced by the object (7), which is preferably placed between the parallel scanning light beam generator and the light receiving element. The present invention relates to an improvement of an optical measuring device.
従来から１回転走査光線ビーム（レーザビーム）を−コ
リメータレンズによシーこのコリメータレンズと集光レ
ンズ間を通る平行走査光線ビームに変換し、該コリメー
タレンズと集光レンズの間に被測定物を置き、この被測
定物によって前Ｓピ平行走査光線ビームが遮ぎられて生
じる暗部又は明部の時間の長さから被測定物の寸法を測
定する高速度走査型レーザ測長機が知られている。Conventionally, a single rotation scanning light beam (laser beam) is converted into a parallel scanning light beam that passes through a collimator lens and a condenser lens, and an object to be measured is placed between the collimator lens and the condenser lens. A high-speed scanning laser length measuring machine is known that measures the dimensions of an object to be measured based on the length of time of a dark or bright area that occurs when the front S-pi parallel scanning light beam is blocked by the object. There is.
これは、例えば第１図に示す如く、レーザ光源１０から
レーザビーム１２を固定ミラー１４に向けて発振し、こ
の固定ミラー１４により反射されたレーザビーム１２を
回転ミラー１６によって走査ビーム１７に変換し、この
走査ビーム１７に一コリメータレンズ１８によって平行
走査光線ビーム２０に変換し、この平行走査光線ビーム
２０によシコリメータレンズ１８と集光レンズ２２の間
に配置した被測定物２４を置速走査し、その時被測定物
２４によって生じる暗部又は明部の時間の長さから、被
測定物２４の走査方向寸法を測定するものである。For example, as shown in FIG. 1, a laser beam 12 is oscillated from a laser light source 10 toward a fixed mirror 14, and the laser beam 12 reflected by the fixed mirror 14 is converted into a scanning beam 17 by a rotating mirror 16. The scanning beam 17 is converted into a parallel scanning light beam 20 by a collimator lens 18, and the object to be measured 24 placed between the collimator lens 18 and the condensing lens 22 is scanned by the parallel scanning light beam 20. Then, the dimension of the object to be measured 24 in the scanning direction is measured from the length of time of the dark or bright portion generated by the object to be measured 24.
即ち、平行走査光線ビーム２０の明暗は、集光レンズ２
２の焦点位置にある受光素子２６の出力電圧の変化とな
って検出され、該受光素子２６からの信号は−プリアン
プ２８に入力され、ここで増幅された後、セグメント選
択回路３０に送られる。このセグメント選択回路３０は
、被測定物２４によシ、前記平行走食光線ビーム２０が
迩られて生じる暗部又は明部のうちから、測定対象とな
る暗部又は明部（以下測定セグメントと称する）を°選
択するために、受光素子２６の出力を時分割して、被測
定物２４の測定セグメントが走査されている時間ｔの間
だけゲート回路３２を開くための電圧ｖ’１発生して、
ゲート回路３２に出力するようにされている。このゲー
ト回路３２には、クロックパルス’Ｍｋ器３４からクロ
ックパルスＣＰが入力されているので、ゲート回路３２
は、被測定物２４の測定セグメントの走査方向寸法に対
応した時間ｔに対応するクロックパルスＰを計数回路３
６に入力する。計数回路３６は、このクロックパルスＰ
を計数して、デジタル表示器３８に計数信号を出力し、
デジタル表示器３８は被測定物２４の測定セグメントの
走査方向寸法をデジタル表示することになる。That is, the brightness and darkness of the parallel scanning light beam 20 is determined by the condenser lens 2.
The signal from the light receiving element 26 is inputted to the -preamplifier 28, where it is amplified and then sent to the segment selection circuit 30. This segment selection circuit 30 selects a dark area or a bright area to be measured (hereinafter referred to as a measurement segment) from among the dark areas or bright areas generated when the parallel eclipsing light beam 20 passes through the object to be measured 24. To select °, the output of the light receiving element 26 is time-divided to generate a voltage v'1 for opening the gate circuit 32 only during the time t during which the measurement segment of the object 24 is being scanned.
The signal is output to a gate circuit 32. Since the clock pulse CP is inputted to this gate circuit 32 from the clock pulse 'Mk device 34, the gate circuit 32
is the clock pulse P corresponding to the time t corresponding to the dimension in the scanning direction of the measurement segment of the object to be measured 24 by the counting circuit 3.
Enter 6. The counting circuit 36 receives this clock pulse P
count and output a count signal to the digital display 38,
The digital display 38 will digitally display the dimension of the measurement segment of the object 24 in the scanning direction.
一方、前記回転ミラー１６は、前記クロックパルス発振
器３４出力と同期して正弦波を発生する同期正弦波発振
器４０及びパワーアンプ４２の出力により同期駆動され
ている同期モータ４４によシ、前記クロックパルス発振
器３４出力のクロックパルスＣＰと同期して回転され、
測定精度を維持するようにされている。On the other hand, the rotating mirror 16 is driven by a synchronous motor 44 which is synchronously driven by the output of a power amplifier 42 and a synchronous sine wave oscillator 40 that generates a sine wave in synchronization with the output of the clock pulse oscillator 34. Rotated in synchronization with the clock pulse CP of the oscillator 34 output,
Measurement accuracy is maintained.
このような高速度走査型レーザ測長機は、移動する物体
、高温物体の長さ、厚み等全非接触で高精度に測定でき
るので広く利用されつつある。Such high-speed scanning laser length measuring machines are becoming widely used because they can measure the length, thickness, etc. of moving objects and high-temperature objects with high precision in a completely non-contact manner.
このような高速度走査型レーザ測長様においては、測定
の都度、被測定物２４を走査領域の同一箇所に配設する
ことが精度上好ましく、又、長大物においては、被測定
物２４が走査領域から飛び出さないように配置する必要
がある。In such high-speed scanning laser length measurement, it is preferable for accuracy to place the object 24 at the same location in the scanning area each time the measurement is performed. It is necessary to arrange it so that it does not protrude from the scanning area.
しかしながら、通常は、前記レーザ光源１０として、ヘ
リウム−ネオンレーザが用いられているので、平行走査
光線ビーム２０が難可視性光線となり、平行走査光線ビ
ーム２０の走査範囲内の所定位置に被測定物２４を配置
したシ１．或いは、配置された被測定物２４が走査範囲
内の最適位置にあるかどうかを確認するのが、極めて困
離であった。従って従来は、前出第１図に破線で示す如
く。However, since a helium-neon laser is normally used as the laser light source 10, the parallel scanning light beam 20 becomes a barely visible light beam, and the object to be measured is placed at a predetermined position within the scanning range of the parallel scanning light beam 20. 24 placed 1. Alternatively, it is extremely difficult to confirm whether the placed object 24 to be measured is at the optimal position within the scanning range. Therefore, the conventional method is as shown by the broken line in FIG. 1 mentioned above.
平行走査光線ビーム２０の通過光路中の、被測定物２４
と集光レンズ２２の間に、白紙４６を挿入し、該白紙４
６上の平行走査光線ビーム２０の位置から、被測定物２
４の位置が適切であるかどうかを判断するようにしてい
た。しかしながら、このような白紙４６を使用する方法
では一位置確認に一手間がかかる。又、被測定物２４の
位置を確認するために２白紙４６を平行走査光線ビーム
２０の通過光路中に挿入している時には、被測定物２４
の寸法を同時に測定することが不可能である等の問題点
を有していた。The object to be measured 24 in the optical path of the parallel scanning light beam 20
Insert a blank sheet of paper 46 between the condensing lens 22 and the blank sheet 4.
From the position of the parallel scanning light beam 20 on 6, the object to be measured 2
I was trying to judge whether position 4 was appropriate. However, this method of using blank paper 46 takes time and effort to confirm one position. Also, when inserting two blank sheets of paper 46 into the optical path of the parallel scanning light beam 20 to confirm the position of the object to be measured 24, the object to be measured 24
It has had problems such as the impossibility of measuring the dimensions of both at the same time.
一方、平行走査光線ビーム２０の走査範囲内における、
被測定物２４の測定セグメントの中心位置を表示するア
ナログのモニタメータを設けたシ。On the other hand, within the scanning range of the parallel scanning light beam 20,
An analog monitor meter is provided to display the center position of the measurement segment of the object to be measured 24.
或いは、前記平行走査光線ビーム２０の走査範囲に対応
して複数の発光素子を配列し、単一走査時間内の受光素
子２６の出力を、前記発光素子数に応じて時分割し、走
査範囲に対する被測定物２４の位置に応じて前記発光素
子を発光させるようにしたシすることも考えられるが、
いずれにしても、回路構成が複雑と彦り、生産コストが
上昇してしまうという問題点を有していた。Alternatively, a plurality of light emitting elements are arranged corresponding to the scanning range of the parallel scanning light beam 20, and the output of the light receiving element 26 within a single scanning time is time-divided according to the number of light emitting elements, and It is also conceivable that the light emitting element emits light depending on the position of the object to be measured 24;
In any case, the problem is that the circuit configuration is complicated and the production cost increases.
本発明は、前ａｔ従来の欠点を解消するべくなされたも
ので、回路構成１に複雑化したり、生産コストヲ上昇し
たりすることなく、平行走査光線ビームの走査範囲に対
する被測定物の位置合−容易に且つ正確に知ることがで
き、従って、測定を迅速に行うことができる光学式測定
装置ｔＴｈ提供することを目的とする。The present invention has been made in order to eliminate the drawbacks of the prior art, and allows for alignment of the object to be measured with respect to the scanning range of the parallel scanning light beam without complicating the circuit configuration 1 or increasing production costs. It is an object of the present invention to provide an optical measuring device tTh that can be easily and accurately determined, and therefore capable of performing measurements quickly.
本発明は、平行走査光線ビーム発生装置と受光素子との
間に配置した被測定物により一平行走査光線ビームが遮
ぎられて生じる暗部又は明部の長さから被測定物の寸法
を測定するようにし次光学式測定装電において、前記受
光素子が収納された受光部ボディに、前６Ｃ平行走査光
線ビームの少くとも一部を受光して、その走査範囲に対
する被測定物の位置を表示する受光板金配設することに
よυ、前目ピ目的′ｆ：達成したものである。The present invention measures the dimensions of a workpiece from the length of a dark or bright part that is generated when a parallel scanning light beam is blocked by a workpiece placed between a parallel scanning light beam generator and a light receiving element. In the optical measuring device, at least a part of the front 6C parallel scanning light beam is received by the light receiving body in which the light receiving element is housed, and the position of the object to be measured with respect to the scanning range is displayed. By arranging the light-receiving plate, the previous objective 'f was achieved.
又、前記受光板を一前記受光部ボディ正面の、前記平行
走査光線ビームの通過光路に挿入可能な位置に配設して
、本発明が極めて安価に実現できるようにしたものであ
る。Further, the light receiving plate is disposed in front of the light receiving unit body at a position where it can be inserted into the optical path through which the parallel scanning light beam passes, thereby making it possible to realize the present invention at an extremely low cost.
或いは、前記受光板を、前記平行走査光線ビームの通過
光路に挿入されたハーフミラ−による反射光を受光する
ものとして、被測定物の寸法を同時に測定することがで
きるようにしたものである。Alternatively, the light receiving plate is configured to receive reflected light from a half mirror inserted in the optical path of the parallel scanning light beam, so that dimensions of the object to be measured can be measured simultaneously.
更に、削口じ受光板を、受光部ボディ側面の、前記平行
走査光線ビームの走査範囲と直接対応する位置に配設し
て、走査範囲に対する被測定物の位置を極めて簡単に知
ることができるようにしたものである。Furthermore, by arranging the cutter-shaped light receiving plate on the side surface of the light receiving body at a position directly corresponding to the scanning range of the parallel scanning light beam, the position of the object to be measured with respect to the scanning range can be known very easily. This is how it was done.
又、前ｄじ受光板に、前記平行走査光線ビームの走査範
囲に対応する目盛を付して、走査範囲に対する被測定物
の位置を、簡単に、且つ、定量的に知ることができるよ
うにしたものである。Furthermore, a scale corresponding to the scanning range of the parallel scanning light beam is attached to the front d light receiving plate so that the position of the object to be measured with respect to the scanning range can be easily and quantitatively determined. This is what I did.
以下図面を参照して１本発明の実施例を詳細に説明する
。Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.
本発明の第１実施例は、第２図及び第３図に示す如く１
例えば、前記従来例と同様の１回転ミラー１６．コリメ
ータレンズ１８等が収納された発光部ボディ５２と、集
光レンズ２２．受光素子２６等が収納された受光部ボデ
ィ５４と全含み一前記発光部ボディ５２と受光部ボディ
５４との間に配置した被測定物２４により平行走査光線
ビーム２０が遮ぎられて生じる暗部の時間の長さから被
測定物２４の上下方向寸法全測定するようにした光学式
測定装置５０において一前記受光部ボディ５４正面の受
光窓５４ａ下部に、前記平行走置光線ビーム２０の通過
光路に挿入可能な、平行走査光線ビーム２０を直接受光
して、その走査範囲に対する被測定物２４の位置を表示
するための。The first embodiment of the present invention is as shown in FIGS. 2 and 3.
For example, a one-rotation mirror 16 similar to the conventional example. A light emitting unit body 52 in which a collimator lens 18 and the like are housed, a condenser lens 22. A dark area generated when the parallel scanning light beam 20 is blocked by the object to be measured 24 placed between the light emitting body 52 and the light receiving body 54 is In the optical measuring device 50, which measures all vertical dimensions of the object to be measured 24 due to the length of time, a light receiving window 54a on the front side of the light receiving body 54 is placed at the lower part of the light receiving window 54a on the optical path of the parallel traveling light beam 20. For directly receiving the insertable parallel scanning light beam 20 and for indicating the position of the object 24 relative to its scanning range.
走査範囲に対応する目盛が付された受光板５６全。A light receiving plate 56 is provided with a scale corresponding to the scanning range.
その下端部に設けられたビン５８七中心として回動自在
に配設したものである。他の点については。A bin 58 provided at its lower end is rotatably disposed about the center. Regarding other points.
前記従来例と同様であるので説明は省略する。Since this is the same as the conventional example, the explanation will be omitted.
本実施例においては、まず、平行走査光線ビーム２００
所定位置に被測定物２４が配置されたか否かを確認する
際には、第４図に示す如く、受光板５６′ｆ：立てて一
該受光板５６が受光窓５４ａ’ｉふさぐような状態とす
る。すると、被測定物２４を通過した平行走査光線ビー
ム２０が１例えば１００回／秒の走査速度で受光板５６
に当って。In this embodiment, first, the parallel scanning light beam 200
When checking whether the object to be measured 24 is placed at a predetermined position, as shown in FIG. shall be. Then, the parallel scanning light beam 20 that has passed through the object to be measured 24 is scanned at the light receiving plate 56 at a scanning speed of, for example, 100 times/second.
Hit me.
該受光板５６上に平行走査光線ビーム２０の静止軌跡２
０ａが表われる。従って、この静止軌跡２０ａを参考に
位置を確認することかできる。A stationary trajectory 2 of the parallel scanning light beam 20 is formed on the light receiving plate 56.
0a appears. Therefore, the position can be confirmed with reference to this stationary locus 20a.
一方、測定に際しては、第５図に示す如く、前らＣピン
５８全中心として受光板５２を下方に回動し、受光窓５
４ａが開かれた状態とする。すると−受光窓５４ａ’ｚ
通過した平行走査光線ビーム２０が受光素子２６に入射
して、従来例と同様にして測定が行われる。On the other hand, during measurement, as shown in FIG.
4a is in an open state. Then - light receiving window 54a'z
The parallel scanning light beam 20 that has passed is incident on the light receiving element 26, and measurement is performed in the same manner as in the conventional example.
本実施例においては、受光板５６を受光部ボディ５４の
正面に配設するだけでよく、極めて構成が簡単である。In this embodiment, the light receiving plate 56 only needs to be disposed in front of the light receiving body 54, and the configuration is extremely simple.
次に２本発明の第２実施例を詳細に説明する。Next, a second embodiment of the present invention will be described in detail.
本実施例は、第６図及び第７図に示す如く一前把第１実
施例と同様の、発光部ボディ５２及び受先部ボディ５４
を含む光学式測定装置５０において、前記受光部ボディ
５４内部の平行走査光線ビーム２０の通過光路に挿入さ
れた。平行走査光線ビーム２０の一部を受光部ボディ５
４の正面に向けて反射するための、保護ガラスを兼ねた
ハーフミラ−６０と、前ｄＣ受光部ボディ５４正面の受
光窓５４ａの横に、該受光窓５４ａに沿って配置された
。前記ハーフミラ−６０により反射された平行走査光線
ビーム２０の一部ケ受光して、その走査範囲に対する一
ＩＩ１８測定物２４の位１Ｎを表示するための、走査範
囲に対応する目盛が付された受光用スフガラス６２と′
（ｌｌ−設けたものである。As shown in FIGS. 6 and 7, this embodiment has a light emitting part body 52 and a receiving part body 54 which are similar to those of the first embodiment.
In the optical measuring device 50 including the light receiving unit body 54 , the parallel scanning light beam 20 is inserted into the optical path of the parallel scanning light beam 20 . A part of the parallel scanning light beam 20 is transferred to the light receiving body 5.
A half mirror 60, which also serves as a protective glass, is placed next to the light receiving window 54a on the front of the front dC light receiving body 54 and along the light receiving window 54a. A light-receiving device having a scale corresponding to the scanning range for receiving a part of the parallel scanning light beam 20 reflected by the half mirror 60 and displaying the digit 1N of the measuring object 24 for the scanning range. 62 and '
(ll-provided.
本実ｔｉ＆例においては一半行装置光線ビーム２゜の一
部がハーフミラ−６０によって反射され、受光窓５４ａ
の横に配置された受ｔｅ用すりガラス６２に投影される
ので一被測定物２４の位置に’Ｊ−易に知ることができ
る。しかも、被測定物２４の寸法全同時に測定すること
が可能である。In this example, a part of the light beam 2° of the one-half line device is reflected by the half mirror 60, and the light receiving window 54a
The position of the object to be measured 24 can be easily determined because it is projected onto the receiving frosted glass 62 placed next to the object to be measured. Furthermore, all dimensions of the object to be measured 24 can be measured simultaneously.
本実施例においては、ハーフミラ−６０が、保護ガラス
を兼ねるようにしているので、構成が比較的単純である
。勿論、保護ガラスとは別体のハーフミラ−全付加する
ことも可能である。In this embodiment, the half mirror 60 also serves as a protective glass, so the configuration is relatively simple. Of course, it is also possible to add a complete half mirror separate from the protective glass.
次に、本発明の第３実施例を詳細に説明する。Next, a third embodiment of the present invention will be described in detail.
本実施例は、第８図及び第９図に示す如く、前ｇｔ第１
実施例と同様の、発光部ボディ５２及び受光部ボディ５
４？含む光学式測定装置５０において、前記受光部ボデ
ィ５４内部の、平行走査光線ビーム２００通過光路に挿
入された、平行走査光線ビーム２０の一部を受光部ボデ
ィ５４の側面に向けて反射するための、保護ガラスを兼
ねたハーフミラ−６４と、前ｄα受光部ボディ５４側面
の。In this embodiment, as shown in FIGS. 8 and 9, the first GT
Light emitting body 52 and light receiving body 5 similar to the embodiment
4? In the optical measuring device 50 including the light receiving unit body 54, a part of the parallel scanning light beam 20 inserted into the optical path passing through the parallel scanning light beam 200 inside the light receiving unit body 54 is reflected toward the side surface of the light receiving unit body 54. , the half mirror 64 which also serves as a protective glass, and the side surface of the front dα light receiving body 54.
平行走査光線ビーム２０の走査範囲と直接対応する位置
に配置された、前記ハーフミラ−６４により反射された
平行走査光線ビーム２０の一部？受光して、その走査範
囲に対する被測定物２４の位置を表示するための、走査
範囲に対応する目盛が付された受光用すりガラス６６と
を設けたものである。A portion of the parallel scanning light beam 20 reflected by the half mirror 64, which is located at a position directly corresponding to the scanning range of the parallel scanning light beam 20? A light-receiving ground glass 66 having a scale corresponding to the scanning range is provided for receiving light and displaying the position of the object to be measured 24 with respect to the scanning range.
本実施例においては、受光用すＱガラス６６が。In this embodiment, Q glass 66 is used for light reception.
受光部ボディ５４側面の、平行走査光線ビーム２０の走
査範囲と直接対応する位置に配設されているので、被測
定物２４の位置確認作業が、極めて容易である。Since it is disposed on the side surface of the light receiving unit body 54 at a position directly corresponding to the scanning range of the parallel scanning light beam 20, it is extremely easy to confirm the position of the object to be measured 24.
前６Ｇ実施例においては、いずれも、受光板５６−或い
は一受光用すシカラス６２．６６に、目盛が付されてい
たので、平行走査光線ビーム２０の走査範囲内における
被測定物２４の位置上、極めて簡単に、且つ１足量的に
知ることができる。なお。In the previous 6G embodiments, since the light receiving plate 56 or the one light receiving cycarus 62,66 was marked with a scale, the position of the object 24 within the scanning range of the parallel scanning light beam 20 , can be known very easily and in one step. In addition.
受光板５６、或いは、受光用すシカラス６１６６におけ
る目盛を省略して、更に安価に構成ツーることも可能で
ある。It is also possible to omit the scale on the light-receiving plate 56 or the light-receiving cycaras 6166 to achieve a more inexpensive configuration.
以上説明した通り、本発明によれば、平行走査光線ビー
ムが難可視性光線からなる場合においても１回路構成を
複雑化したり一或いは、生埋コストを大幅に上昇したり
することなく一平行走査光線ビームの走査範囲１に対す
る被測定物の位置を、容易に且つ迅速に知ることができ
る。従って、被測定物が走査範囲外に飛び出すことヲ芥
易に阻止できる。又、比較測定に際して、被測定物走査
範囲の略中央位置に設定することが容易である等の優れ
た効果を有する。As explained above, according to the present invention, even when the parallel scanning light beam consists of hardly visible light beams, one parallel scanning can be performed without complicating one circuit configuration or significantly increasing the buried cost. The position of the object to be measured relative to the scanning range 1 of the light beam can be easily and quickly determined. Therefore, it is possible to easily prevent the object to be measured from jumping out of the scanning range. Further, when performing comparative measurements, it has excellent effects such as being able to easily set the position approximately at the center of the scanning range of the object to be measured.
第１図は、従来の光学式測定装置の一例の構成を示す、
一部ブロック線図を含む平面図、第２図は１本発明に係
る光学式測定装置の第１実施例の構成を示す、一部所面
図を含む側面図、第３図は。
同じく、受光部ボディの正面図、第４図は、同じく、位
置確認状態における受光板の位置を示す。
受光部ボディ要部の正面図、第５図は、同じく、測定状
態における受光板の位置を示す、受光部ボディ要部の正
ｔｈ図、第６図は、本発明に係る光学式測定装置の第２
実施例の栴成會示す、一部断面図葡含む平面図、第７図
は、同じく、受光部ボディの正面図、第８図は、本発明
に係る光学式測定装置の第３実施例のｓＭ、を示す側面
図、第９図は。
同じく、受光部ボディを示す平断面図である。
ｌＯ・・・レーザ光源、１４・・・固定ミラー、１６・
・・回転ミラー、１８・・・コリメータレンズ、２０・
・・平行走査光線ビーム、２２・・・集光レンズ、２４
・・・被測定物、２６・・・受光素子、５０・・・光学
式測定装置。
５２・・・発光部ボディ、５４・・・受光部ボディ、５
４ａ・・・受光窓、５６・・・畳光板、５８・・・ビン
。
６０．６４・・・ハーフミラ−，６２−６６・・・受光
用すシガラス。
代理人 高 矢 論
（ほか１名）FIG. 1 shows the configuration of an example of a conventional optical measuring device.
2 is a plan view partially including a block diagram, FIG. 2 is a side view partially including a top view, and FIG. 3 is a side view showing the configuration of the first embodiment of the optical measuring device according to the present invention. Similarly, FIG. 4, a front view of the light receiving unit body, similarly shows the position of the light receiving plate in the position confirmation state. FIG. 5 is a front view of the main part of the light receiving part body, and FIG. Second
FIG. 7 is a plan view including a partial sectional view showing the construction of the embodiment, and FIG. 7 is a front view of the light-receiving unit body. FIG. FIG. 9 is a side view showing the sM. Similarly, it is a plane sectional view showing a light receiving part body. lO...Laser light source, 14...Fixed mirror, 16.
...Rotating mirror, 18...Collimator lens, 20.
... Parallel scanning light beam, 22 ... Condensing lens, 24
. . . Object to be measured, 26 . . . Light receiving element, 50 . . . Optical measuring device. 52... Light emitting part body, 54... Light receiving part body, 5
4a...Light receiving window, 56...Tatami light plate, 58...Bin. 60.64...half mirror, 62-66...glass for light reception. Agent Takaya Ron (and 1 other person)
Claims (5)
間に配置した被測定物により、平行走査光線ビームが遮
ぎられて生じる暗部又は明部の長さから被測定物の寸法
を測定するようにした光学式測定装置において、前記受
光素子が収納された受光部ボディに一前配平行走査光線
ビームの少くとも一部を受光して、その走査範囲に対す
る被測定物の位置を表示する受光板を配設したことを特
徴とする光学式測定装置。(1) Measure the dimensions of the object placed between the parallel scanning light beam generator and the light receiving element from the length of the dark or bright area that occurs when the parallel scanning light beam is blocked by the object placed between the parallel scanning light beam generator and the light receiving element. In the optical measuring device according to the present invention, the light receiving body in which the light receiving element is housed includes a light receiving plate that receives at least a part of the parallel scanning light beam and displays the position of the object to be measured with respect to the scanning range. An optical measuring device characterized by being equipped with.
配設されている特許請求の範囲第１項に８１載の光学式
測定装置。(2) The front 6th light receiving plate is on the front side of the light receiving unit body. 81. The optical measuring device according to claim 1, wherein the optical measuring device is disposed at a position where it can be inserted into the optical path through which the parallel scanning light beam passes.
通過光路に挿入されたハーフミラ−による反射光を受光
するようにされている特許請求の範囲第１項に記載の光
学式測定装置。(3) The optical measuring device according to claim 1, wherein the front @C light receiving plate receives reflected light from a half mirror inserted in the optical path through which the parallel scanning light beam passes.
行走査光線ビームの走査範囲と直接対応する位置に配設
されている特許請求の範囲第３項にＢｄ載の光学式測定
装置。(4) The optical measuring device according to claim 3, wherein the light receiving plate is disposed on a side surface of the light receiving unit body at a position directly corresponding to the scanning range of the parallel scanning light beam.
走査範囲に対応する目盛が付されている特許請求の範囲
第１項に６Ｃ載の光学式測定装置。(5) The optical measuring device as set forth in claim 1, wherein the light receiving plate is provided with a scale corresponding to the scanning range of the front B-zillion blue light beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22357982A JPS59112213A (en) | 1982-12-20 | 1982-12-20 | Optical measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22357982A JPS59112213A (en) | 1982-12-20 | 1982-12-20 | Optical measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59112213A true JPS59112213A (en) | 1984-06-28 |
| JPS6341484B2 JPS6341484B2 (en) | 1988-08-17 |
Family
ID=16800372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22357982A Granted JPS59112213A (en) | 1982-12-20 | 1982-12-20 | Optical measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59112213A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8482831B2 (en) | 2008-03-14 | 2013-07-09 | Fuji Xerox Co., Ltd. | Optical scanning device and image forming apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111512231B (en) | 2017-10-10 | 2024-03-15 | 恩熙思德国有限公司 | Relief precursors with low degree of cup-shaped extrusion and grooving |
| DK3721293T3 (en) | 2017-12-08 | 2023-07-10 | Flint Group Germany Gmbh | PROCEDURE FOR MARKING A RELIEF PROCESSOR FOR PRODUCING A RELIEF STRUCTURE |
| NL2020109B1 (en) | 2017-12-18 | 2019-06-25 | Xeikon Prepress Nv | Method for fixing and treating a flexible plate on a drum, and flexible plate for use therein |
| JP7500432B2 (en) | 2018-04-26 | 2024-06-17 | エクシス プリプレス エヌ．ブイ． | Apparatus and method for processing a relief plate master - Patent application |
| NL2027003B1 (en) | 2020-11-27 | 2022-07-04 | Flint Group Germany Gmbh | Photosensitive composition |
| NL2027002B1 (en) | 2020-11-27 | 2022-07-04 | Flint Group Germany Gmbh | Photosensitive composition |
| NL2028207B1 (en) | 2021-05-12 | 2022-11-30 | Flint Group Germany Gmbh | A relief precursor with vegetable oils as plasticizers suitable for printing plates |
| NL2028208B1 (en) | 2021-05-12 | 2022-11-30 | Flint Group Germany Gmbh | Flexographic printing element precursor with high melt flow index |
-
1982
- 1982-12-20 JP JP22357982A patent/JPS59112213A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8482831B2 (en) | 2008-03-14 | 2013-07-09 | Fuji Xerox Co., Ltd. | Optical scanning device and image forming apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341484B2 (en) | 1988-08-17 |
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