JPS59108026A - Epoxy resin composition for sealing - Google Patents

Epoxy resin composition for sealing

Info

Publication number
JPS59108026A
JPS59108026A JP21549482A JP21549482A JPS59108026A JP S59108026 A JPS59108026 A JP S59108026A JP 21549482 A JP21549482 A JP 21549482A JP 21549482 A JP21549482 A JP 21549482A JP S59108026 A JPS59108026 A JP S59108026A
Authority
JP
Japan
Prior art keywords
epoxy resin
sealing
resin composition
amorphous silica
filler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21549482A
Other languages
Japanese (ja)
Inventor
Tadayuki Ozawa
小沢 忠行
Takeshi Ono
猛 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Chemical Products Co Ltd
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Products Co Ltd
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Products Co Ltd, Toshiba Chemical Corp filed Critical Toshiba Chemical Products Co Ltd
Priority to JP21549482A priority Critical patent/JPS59108026A/en
Publication of JPS59108026A publication Critical patent/JPS59108026A/en
Pending legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)

Abstract

PURPOSE:To prepare the titled composition having balanced viscosity and fluidity, moldable without flashing, and useful for the sealing of electronic circuit parts, by compounding an epoxy resin with a curing agent, a filler, and ultra-fine amorphous silica powder having specific diameter. CONSTITUTION:The objective epoxy resin composition for sealing can be prepared by mixing (A) an epoxy resin (e.g. phenol novolak-type epoxy resin), (B) a curing agent (e.g. a phenol novolak resin), (C) a filler (e.g. a fused silica having an average particle diameter of 20-40mum), (D) 2-20wt%, based on (A)+(B), of ultra-fine powder of amorphous silica having an average particle diameter of <=20mum, and if necessary (E) an internal releasing agent (e.g. stearic acid), a cure accelerator (e.g. imidazole), a flame-retardant, a surface-treating agent, etc., heating and kneading the mixture, cooling, crushing, tabletting, and carrying out the tablet molding.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明は半導体素子などの電子回路部品の封止に使用す
る封止用エポキシ樹脂組成物に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an epoxy resin composition for sealing used for sealing electronic circuit components such as semiconductor elements.

[発明の技術的背景とその問題点] 封止用エポキシ樹脂組成物は、その優れた流動性、低圧
成形性、耐湿性などのために信頼性の高い材料として、
他の熱硬化性樹脂を大きく引き離して半導体分野に浸透
してきている。
[Technical background of the invention and its problems] Epoxy resin compositions for sealing are highly reliable materials due to their excellent fluidity, low-pressure moldability, moisture resistance, etc.
It has penetrated the semiconductor field far ahead of other thermosetting resins.

封止用エポキシ樹脂組成物は、被封止体が微細なAUや
AIのワイヤおよびAIパターン等で構成されているた
め、それらが封止成形時に変形や断線されないような極
めて低い溶融粘度と流動性のよいことが要求される。 
しかしこの流動性があまり良すぎると微小な隙間から樹
脂分が流れ出しパリ(樹脂のブリード)発生原因となり
易く、成形金型の保守上或いはパリ取り工数の増加から
も好ましくない。 更に最近のIC,LSI等の高集積
化、小形化、薄形化の同時進行により、特に小形のフラ
ットパッケージと呼ばれる外囲器のものは、リードフレ
ー、ムーの肉厚も薄い上にビン間隙も狭くパリ取り工程
での自動化は困難を伴なうことが多い。 又流動性が良
すぎると封止成形物中に空気の巻き込みによるボイドが
生じて、作業性や成形品の耐湿劣化による信頼性の面で
好ましくない。 従って封止用エポキシ樹脂組成物とし
て、ハリやボイドの発生がなく、流動性と信頼性を兼ね
備えたものが要求されている。 前記のような問題点を
解決するために、 (1)原籾樹脂として粘度の比較的高いものを使用する (2)硬化剤または硬化促進剤量の調整(3)充填剤量
の増加 (4)充填剤粒子径の選定 等が検討されてきた。  (1)はALIやA1のワイ
ヤの変形をまねき易く、(2)は成形サイクルや耐湿特
性に限界があり、(3)は粘度が高くなり(1)と同様
変形しやすく、(4)はある程度まで改善可能であるが
全ての外囲器に対し十分満足するものではない。 この
ように粘度と流動性のバランスのとれた封止用組成物が
要望されている。
The epoxy resin composition for sealing has extremely low melt viscosity and fluidity so that the objects to be sealed are composed of fine AU and AI wires and AI patterns, etc., so that they will not be deformed or disconnected during sealing molding. Good sexuality is required.
However, if this fluidity is too good, the resin will easily flow out from minute gaps and cause flashing (resin bleed), which is undesirable from the viewpoint of maintenance of the molding die and an increase in the number of man-hours for removing flashing. Furthermore, with the simultaneous progress of high integration, miniaturization, and thinning of ICs, LSIs, etc., in particular, small flat packages with envelopes have thin lead-flakes and mu-walls, and the gap between bottles has increased. automation of the deburring process is often difficult. On the other hand, if the fluidity is too good, voids will occur in the sealed molded product due to the entrainment of air, which is unfavorable in terms of workability and reliability due to deterioration of the moisture resistance of the molded product. Therefore, there is a demand for an epoxy resin composition for sealing that does not generate any firmness or voids and has both fluidity and reliability. In order to solve the above problems, (1) Use a relatively high viscosity raw rice resin (2) Adjust the amount of curing agent or curing accelerator (3) Increase the amount of filler (4) ) Selection of filler particle size, etc. have been studied. (1) tends to cause deformation of ALI and A1 wires, (2) has limits on molding cycles and moisture resistance, (3) has a high viscosity and is easily deformed like (1), and (4) Although it can be improved to some extent, it is not fully satisfactory for all envelopes. Thus, there is a demand for a sealing composition that has a well-balanced viscosity and fluidity.

C発明の目的] 本発明は前記の欠点に鑑みてなされたもので、パリ発生
のない、かつワイヤー等の変形を起こさせない優れた封
止用エポキシ樹脂組成、物を提供することを目的として
いる。
C. Purpose of the Invention The present invention has been made in view of the above-mentioned drawbacks, and an object of the present invention is to provide an excellent sealing epoxy resin composition and product that does not cause generation of paris and does not cause deformation of wires, etc. .

[発明の概要] 本発明は前記目的を達成すべく鋭意研究を重ねた結果、
従来粒子の主充填剤のほかに超微粒子無定形シリカを配
合することによりパリ発生のないかつワイヤ等の変形を
起こさない封止用エポキシ樹脂組成物を得ることを見い
だしたものである。
[Summary of the Invention] The present invention has been made as a result of intensive research to achieve the above object.
It has been discovered that by blending ultrafine amorphous silica particles in addition to the main filler of conventional particles, it is possible to obtain an epoxy resin composition for sealing that does not generate flakes and does not cause deformation of wires, etc.

即ち、エポキシ樹脂と硬化剤と充填剤とを主成分とする
封止用樹脂組成物において、エポキシ樹脂成分(エポキ
シ樹脂と硬化剤)に対し平均粒子径20 mμ以下(最
大粒子径50 mμ以下)の超微粒子無定形シリカ粉末
を2〜10重量%含有することを特徴とする封止用エポ
キシ樹脂組成物である。
That is, in a sealing resin composition containing an epoxy resin, a curing agent, and a filler as main components, the average particle size of the epoxy resin component (epoxy resin and curing agent) is 20 mμ or less (maximum particle size of 50 mμ or less). This is an epoxy resin composition for sealing characterized by containing 2 to 10% by weight of ultrafine amorphous silica powder.

本発−明において用いられるエポキシ樹脂は特に制限さ
れるものでなく、ノボラック型エポキシ樹脂、ビスフェ
ノール型エポキシ樹脂が挙げられる。
The epoxy resin used in the present invention is not particularly limited, and examples include novolac type epoxy resins and bisphenol type epoxy resins.

例えばノボラック型エポキシ樹脂としてフェノールノボ
ラック型エポキシ樹脂、クレゾールノボラック型エポキ
シ樹脂、ハロゲン化フェノールノボラック型エポキシ樹
脂などである。 これらのエポキシ樹脂は1種もしくは
2種以上の混合系で用いてもよい。 又ビスフェノール
型エポキシ樹脂としては、グリシジルエーテル型エポキ
シ樹脂、グリシジルエステル型エポキシ樹脂などを前記
ノボラック型エポキシ樹脂に併用して使用することがで
きる。これらの樹脂としてはJIS環球法で70〜85
℃の軟化点のものが望ましい。
Examples of the novolac type epoxy resin include phenol novolac type epoxy resin, cresol novolac type epoxy resin, and halogenated phenol novolac type epoxy resin. These epoxy resins may be used alone or in a mixed system of two or more. Further, as the bisphenol type epoxy resin, a glycidyl ether type epoxy resin, a glycidyl ester type epoxy resin, etc. can be used in combination with the novolak type epoxy resin. These resins have a rating of 70 to 85 according to the JIS ring and ball method.
A material with a softening point of ℃ is preferable.

本発明に用いるエポキシ樹脂の硬化剤としては、フェノ
ール樹脂、M無水物およびポリアミン等が挙げられる。
Examples of curing agents for epoxy resins used in the present invention include phenolic resins, M anhydrides, and polyamines.

 そのうちフェノール樹脂硬化剤としては、例えばフェ
ノールノボラック樹脂、タレゾールノボラック樹脂、t
ert−ブチルフェノールノボラック樹脂、ノニルフェ
ノールノボラック樹脂等が挙げられる。
Among them, examples of phenolic resin curing agents include phenol novolac resin, Talesol novolac resin, t
Examples include ert-butylphenol novolak resin, nonylphenol novolak resin, and the like.

酸無水物としては、無水フタル酸、無水テトラヒドロフ
タル酸、無水へキサヒドロフタル酸、無水ナジック酸、
無水ルチルナジック酸、無ホコハク酸、無水トリメリッ
ト酸、無水ピロメリット酸等が挙げられる。 又ポリア
ミンとしては、メタフェニレンジアミン、パラフ〕°ニ
レンジアミン、ジアニシジン、1,4−ナフチレンジア
ミン、4゜4′−ジアミノジフェニルメタン、ジアミノ
ジフェニルスルホン、4,4−−ジアミノジフェニルケ
トン等が挙げられる。
Examples of acid anhydrides include phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, nadic anhydride,
Examples include rutile nadic anhydride, phosuccinic anhydride, trimellitic anhydride, pyromellitic anhydride, and the like. Examples of the polyamine include meta-phenylene diamine, paraphenyl diamine, dianisidine, 1,4-naphthylene diamine, 4°4'-diaminodiphenylmethane, diaminodiphenylsulfone, and 4,4-diaminodiphenyl ketone.

本発明に用いる主充填剤としては、平均粒子径20〜4
0μmの溶融性シリカ(A)又は結晶性シリカ(八−)
が挙げられ、それらの単独又は(A)とくA′)の混用
或いはそれらに平均粒子径1〜15μm  <B)の溶
融性シリカを併用したものとすることができる。
The main filler used in the present invention has an average particle size of 20 to 4
0 μm fusible silica (A) or crystalline silica (8-)
They can be used alone, in combination with (A) and A'), or in combination with fusible silica having an average particle diameter of 1 to 15 μm <B).

本発明に用いる超微粒子無定形シリカ粉末としては平均
粒子径が20 mμ以下(最大粒子径50 mμ以下)
で比表面積が50111’ /(1以上であることが望
ましい。 この超微粒子無定形シリカの平均粒子径が2
0 mμ以下で、これより大きいとパリ止め効果がなく
、また粘度を上昇させるのに多量に配合しなければなら
ないことになる。 従って20mμ以下であることが望
ましい。 又比表面積が50 m2/(]未満であると
配合量を多くしないとパリ止め効果が減少したり、粘度
が増大しワイヤ流れや成形性に問題が発生する。
The ultrafine amorphous silica powder used in the present invention has an average particle size of 20 mμ or less (maximum particle size of 50 mμ or less).
It is desirable that the specific surface area is 50111'/(1 or more. The average particle diameter of this ultrafine amorphous silica is 2
If it is less than 0 mμ, if it is larger than this, there will be no anti-fog effect, and a large amount must be added to increase the viscosity. Therefore, it is desirable that the thickness be 20 mμ or less. If the specific surface area is less than 50 m2/(), the anti-padding effect will be reduced or the viscosity will increase, causing problems with wire flow and formability unless the amount is increased.

前)ホした平均粒子径を有するものであれば1種もしく
は2種以上混合してもよい。 又この粒子径であれば十
分効果を発揮することができるが超微粒子無定形シリカ
粉末は疎水性であると更に有効である。 これは粒子を
覆っている親水性の水酸基をトリメデルシロキシル基で
置換することによって疎水性とすることができ、粒子の
表面を疎水性にしたことによって耐水性が向上するもの
と考えられる。
One type or two or more types may be mixed as long as they have the average particle diameter as described in (a) above. Further, although sufficient effects can be exhibited with this particle size, it is even more effective if the ultrafine particle amorphous silica powder is hydrophobic. It is thought that this can be made hydrophobic by substituting the hydrophilic hydroxyl groups covering the particles with trimedelsiloxyl groups, and that water resistance is improved by making the surface of the particles hydrophobic.

次に超微粒子無定形シリカ粉末の配合量はエポキシ樹脂
成分(樹脂と硬化剤)に対して2〜10重邑%配合する
ことが望ましい。 2重量%未溝の場合はパリ発生の改
善効果が少なく、又10重量%を超えると溶融粘度が増
大し△UやALのワイヤの変形の原因となり好ましくな
い。 従ってその範囲は前記のように限定される。本発
明の知見である超微粒子無定形シリカ粉末を配合するこ
とによってパリの発生が改善される。 この理由につい
ては必ずしも明らかではないが比較的吸油量の小さいシ
リカ粒子間に存在する樹脂成分が、溶融時に加圧力によ
って流動を開始し、微小な隙間を通過する際、樹脂と無
定形シリカ粉末とが共存するために、フィルム状に流動
するパリ部分の熱伝導率が大となって硬化剤等との反応
がより効果的に進行するためにパリ発生が少なくなるも
のと考えられる。
Next, it is desirable that the amount of ultrafine amorphous silica powder is 2 to 10% by weight based on the epoxy resin component (resin and curing agent). If the amount is 2% by weight without grooves, the effect of improving the occurrence of paris is small, and if it exceeds 10% by weight, the melt viscosity increases and causes deformation of the ΔU and AL wires, which is not preferable. Therefore, its range is limited as described above. By incorporating ultrafine amorphous silica powder, which is a finding of the present invention, the occurrence of paris is improved. The reason for this is not necessarily clear, but the resin component that exists between the silica particles, which has a relatively low oil absorption, starts to flow due to the pressure applied during melting, and when it passes through a small gap, the resin and amorphous silica powder are mixed together. It is thought that due to the coexistence of , the thermal conductivity of the part of the part that flows like a film increases, and the reaction with the curing agent and the like proceeds more effectively, thereby reducing the occurrence of part of the part.

本発明において充填剤として少なくとも上述した超微粒
子無定形シリカ粉末を使用することを不可欠とするがこ
れらの充填剤に更に他の充填剤を含有させてもよい。 
例えばアルミナ、タルク、クレーなどが挙げられシ。こ
れらの充填剤の平均粒子径は前記範囲を超えない程度に
適用することができる。 本発明のエポキシ樹脂組成物
は、前述のように、エポキシ樹脂、硬化剤および充填剤
を含むものであるが、これに更に通常、内部離形剤およ
び硬化促進剤を配合させることができる。
In the present invention, it is essential to use at least the above-mentioned ultrafine amorphous silica powder as a filler, but these fillers may further contain other fillers.
Examples include alumina, talc, and clay. The average particle diameter of these fillers can be applied to an extent that does not exceed the above range. As mentioned above, the epoxy resin composition of the present invention contains an epoxy resin, a curing agent, and a filler, but it can also usually contain an internal mold release agent and a curing accelerator.

内部離形剤としては、ステアリン酸、パルミチン酸など
の長鎖カルボン酸、ステアリン酸亜鉛、ステアリン酸カ
ルシウムなどの長鎖カルボン酸の金属塩カルナバワック
ス、モンタンワックス等のワックス類が挙げられる。 
硬化促進剤としてはイミダゾール類、三級アミン類、フ
ェノール類、有機金罵化合物などが広く用いられる。 
又他の添加剤としては、β−(3,4−エポキシシクロ
ヘキシル)エチルトリメトキシシラン、γ−グリシドキ
シプロピルトリメトキシシランなどのシランカップリン
グ剤のような充填剤の表面処理剤、酸化アンチモン、ハ
ロゲン化物、リン化物などの鮪燃化剤、各種顔料などの
従来公知の添加剤を配合してもよい。
Examples of the internal mold release agent include long chain carboxylic acids such as stearic acid and palmitic acid, metal salts of long chain carboxylic acids such as zinc stearate and calcium stearate, and waxes such as carnauba wax and montan wax.
As curing accelerators, imidazoles, tertiary amines, phenols, organic metal compounds, etc. are widely used.
Other additives include surface treatment agents for fillers such as silane coupling agents such as β-(3,4-epoxycyclohexyl)ethyltrimethoxysilane and γ-glycidoxypropyltrimethoxysilane, and antimony oxide. Conventionally known additives such as tuna retardants such as halides and phosphides, and various pigments may also be blended.

本発明のエポキシ樹脂組成物を得るには、エポキシ樹脂
、硬化剤、充填剤および超微粒子無定形シリカ粉末、更
に必要に応じて他の添加剤を加えて混合しミキシングロ
ール又はエクストルーダ等で均一に加熱混練し、冷却後
常法に従って粉砕、整粒タブレフ1−成形して封止用エ
ポキシ樹脂組成物を得る。
To obtain the epoxy resin composition of the present invention, the epoxy resin, curing agent, filler, ultrafine amorphous silica powder, and other additives as necessary are added and mixed uniformly using a mixing roll or an extruder. The mixture is heated and kneaded, cooled, and then pulverized and sized to form Tablef 1 according to a conventional method to obtain an epoxy resin composition for sealing.

[発明の効果] 以上詳述したとおり、この発明の封止用エポキシ樹脂組
成物は主充填剤と超微粒子無定形シリカとを併用し、そ
の使用割合を特定範囲に設定しているから、優れた流動
性、作業性とパリ発生のないバランスのとれた組成物で
その実用価値は極めて大きい。
[Effects of the Invention] As detailed above, the epoxy resin composition for sealing of the present invention uses a main filler and ultrafine particle amorphous silica in combination, and the ratio of their use is set within a specific range, so it has excellent properties. Its practical value is extremely high due to its well-balanced composition with good fluidity, workability, and no flaking.

[発明の実施例] 次に本発明を実施例により更に具体的に説明する。[Embodiments of the invention] Next, the present invention will be explained in more detail with reference to Examples.

実施例および比較例 第1表に示した組成で配合し、60〜ioo ℃に加熱
ミキシングロールで3〜5分間混練した後、冷却粉砕し
この粉末の粘度とスパイラルフロー、パリ長さを測定し
更に16 pin’  DIPのICモデル金型により
テスト用素子を用いてAuワイヤの流れ%を測定した。
Examples and Comparative Examples The compositions shown in Table 1 were blended, kneaded for 3 to 5 minutes with a heated mixing roll at 60 to 100°C, cooled and ground, and the viscosity, spiral flow, and par length of the powder were measured. Furthermore, the flow% of the Au wire was measured using a test element using a 16 pin' DIP IC model mold.

 その結果を第1表に示した。The results are shown in Table 1.

Claims (1)

【特許請求の範囲】 1 エポキシ樹脂と硬化剤と充填剤とを主成分とする封
止用樹脂組成物において、エポキシ樹脂成分(エポキシ
樹脂と硬化剤)に対し平均粒子径20 mμ以下(最大
粒子径50 mμ以下)の超微粒子無定形シリカ粉末を
2〜10重量%含有することを特徴とする封止用エポキ
シ樹脂組成物。 2 超微粒子無定形シリカが疎水性であることを特徴と
する特許請求の範囲第1項記載の封止用エポキシ樹脂組
成物。
[Scope of Claims] 1. In a sealing resin composition containing an epoxy resin, a curing agent, and a filler as main components, the epoxy resin component (epoxy resin and curing agent) has an average particle diameter of 20 mμ or less (maximum particle size). An epoxy resin composition for sealing, comprising 2 to 10% by weight of ultrafine amorphous silica powder having a diameter of 50 mμ or less. 2. The epoxy resin composition for sealing according to claim 1, wherein the ultrafine amorphous silica is hydrophobic.
JP21549482A 1982-12-10 1982-12-10 Epoxy resin composition for sealing Pending JPS59108026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21549482A JPS59108026A (en) 1982-12-10 1982-12-10 Epoxy resin composition for sealing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21549482A JPS59108026A (en) 1982-12-10 1982-12-10 Epoxy resin composition for sealing

Publications (1)

Publication Number Publication Date
JPS59108026A true JPS59108026A (en) 1984-06-22

Family

ID=16673311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21549482A Pending JPS59108026A (en) 1982-12-10 1982-12-10 Epoxy resin composition for sealing

Country Status (1)

Country Link
JP (1) JPS59108026A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254619A (en) * 1985-05-07 1986-11-12 Shin Etsu Chem Co Ltd Epoxy resin composition for encapsulation of semiconductor
JPS61268750A (en) * 1985-05-22 1986-11-28 Shin Etsu Chem Co Ltd Epoxy resin composition for semiconductor sealing use
JPS627143A (en) * 1985-07-04 1987-01-14 Sumitomo Bakelite Co Ltd Epoxy resin molding material for sealing semiconductor
JPS63130620A (en) * 1986-11-20 1988-06-02 Matsushita Electric Works Ltd Epoxy resin composition
JPH01161065A (en) * 1987-12-18 1989-06-23 Tokuyama Soda Co Ltd Silica and its production
JPH01204456A (en) * 1988-02-09 1989-08-17 Nitto Denko Corp Semiconductor device
JPH01297453A (en) * 1988-05-24 1989-11-30 Matsushita Electric Works Ltd One-pack epoxy resin composition
JPH05222270A (en) * 1992-02-07 1993-08-31 Shin Etsu Chem Co Ltd Fluid epoxy resin composition and its cured material
CN102030970A (en) * 2010-11-23 2011-04-27 上海旌纬微电子科技有限公司 Epoxy resin composition for packaging electronic element and preparation method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102361A (en) * 1977-02-18 1978-09-06 Toray Silicone Co Ltd Thermosetting resin composition
JPS57195117A (en) * 1981-05-27 1982-11-30 Sumitomo Bakelite Co Ltd Epoxy resin composition and its preparation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102361A (en) * 1977-02-18 1978-09-06 Toray Silicone Co Ltd Thermosetting resin composition
JPS57195117A (en) * 1981-05-27 1982-11-30 Sumitomo Bakelite Co Ltd Epoxy resin composition and its preparation

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254619A (en) * 1985-05-07 1986-11-12 Shin Etsu Chem Co Ltd Epoxy resin composition for encapsulation of semiconductor
JPS6326128B2 (en) * 1985-05-07 1988-05-28 Shinetsu Chem Ind Co
JPS61268750A (en) * 1985-05-22 1986-11-28 Shin Etsu Chem Co Ltd Epoxy resin composition for semiconductor sealing use
JPH0329259B2 (en) * 1985-05-22 1991-04-23 Shinetsu Chem Ind Co
JPS627143A (en) * 1985-07-04 1987-01-14 Sumitomo Bakelite Co Ltd Epoxy resin molding material for sealing semiconductor
JPS63130620A (en) * 1986-11-20 1988-06-02 Matsushita Electric Works Ltd Epoxy resin composition
JP2501804B2 (en) * 1986-11-20 1996-05-29 松下電工株式会社 Epoxy resin composition
JPH01161065A (en) * 1987-12-18 1989-06-23 Tokuyama Soda Co Ltd Silica and its production
JPH01204456A (en) * 1988-02-09 1989-08-17 Nitto Denko Corp Semiconductor device
JPH01297453A (en) * 1988-05-24 1989-11-30 Matsushita Electric Works Ltd One-pack epoxy resin composition
JPH05222270A (en) * 1992-02-07 1993-08-31 Shin Etsu Chem Co Ltd Fluid epoxy resin composition and its cured material
CN102030970A (en) * 2010-11-23 2011-04-27 上海旌纬微电子科技有限公司 Epoxy resin composition for packaging electronic element and preparation method thereof

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