JPS5792874A - Manufacture of multi-layer reflection preventing film for solar battery - Google Patents
Manufacture of multi-layer reflection preventing film for solar batteryInfo
- Publication number
- JPS5792874A JPS5792874A JP55168625A JP16862580A JPS5792874A JP S5792874 A JPS5792874 A JP S5792874A JP 55168625 A JP55168625 A JP 55168625A JP 16862580 A JP16862580 A JP 16862580A JP S5792874 A JPS5792874 A JP S5792874A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solution
- immersed
- film
- reflection preventing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010408 film Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- JLDSOYXADOWAKB-UHFFFAOYSA-N aluminium nitrate Chemical compound [Al+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O JLDSOYXADOWAKB-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 229910003076 TiO2-Al2O3 Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Engineering & Computer Science (AREA)
- Sustainable Energy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To obtain a reflection preventing film made of multi-layer of thin films by a method wherein a substrate on which a photo-electromotive force junction plain formed is immersed in two kinds of solution which contains the 1st and the 2nd metal respectively and is lifted up at a required speed and is treated by heat at a temperature not less than 300 deg.C. CONSTITUTION:An Si substrate which has a photo-electromotive force junction plain is immersed in a solution of ethanol and acetic acid which contains 3.4% Ti(OC4H9)4 and is lifted up at a speed of approximately 2.5mm./sec., so that the substrate is covered by a thin film of TiO2. The substrate is then treated by heat in an atmosphere at a temperature not less than 500 deg.C. Then the substrate is immersed in a solution of methanol and ethanol which contains 6% Al(NO3)3 and is covered by a thin film of Al2O3 by the same process. If the heat treatment temperature is less than 300 deg.C the formed film will dissolve into the immersed solution and if it is more than 1,100 deg.C a silver electrode will melt. The thickness of each thin film of the reflection preventing film is determined by the lifting speed and the solute density in the solution. The film thickness d which makes the reflectance minimum when a wavelength lambda0 is nealy 500nm is calculated by a formula nd=lambda0/4, where n is a refractive index, and d is obtained in d=550-800Angstrom . With the above configulation, the TiO2-Al2O3 constituted double- layered reflection preventing film can be formed uniformly, easily and at low cost.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55168625A JPS5792874A (en) | 1980-11-29 | 1980-11-29 | Manufacture of multi-layer reflection preventing film for solar battery |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55168625A JPS5792874A (en) | 1980-11-29 | 1980-11-29 | Manufacture of multi-layer reflection preventing film for solar battery |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5792874A true JPS5792874A (en) | 1982-06-09 |
Family
ID=15871519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55168625A Pending JPS5792874A (en) | 1980-11-29 | 1980-11-29 | Manufacture of multi-layer reflection preventing film for solar battery |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5792874A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013543991A (en) * | 2010-10-28 | 2013-12-09 | バニヤン エナジー インコーポレイテッド | Turning optics for heat collection and lighting systems |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146995A (en) * | 1977-05-27 | 1978-12-21 | Sharp Corp | Production of titanium oxide film |
-
1980
- 1980-11-29 JP JP55168625A patent/JPS5792874A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146995A (en) * | 1977-05-27 | 1978-12-21 | Sharp Corp | Production of titanium oxide film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013543991A (en) * | 2010-10-28 | 2013-12-09 | バニヤン エナジー インコーポレイテッド | Turning optics for heat collection and lighting systems |
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