JPS5792874A - Manufacture of multi-layer reflection preventing film for solar battery - Google Patents

Manufacture of multi-layer reflection preventing film for solar battery

Info

Publication number
JPS5792874A
JPS5792874A JP55168625A JP16862580A JPS5792874A JP S5792874 A JPS5792874 A JP S5792874A JP 55168625 A JP55168625 A JP 55168625A JP 16862580 A JP16862580 A JP 16862580A JP S5792874 A JPS5792874 A JP S5792874A
Authority
JP
Japan
Prior art keywords
substrate
solution
immersed
film
reflection preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55168625A
Other languages
Japanese (ja)
Inventor
Hirotaka Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55168625A priority Critical patent/JPS5792874A/en
Publication of JPS5792874A publication Critical patent/JPS5792874A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Energy (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

PURPOSE:To obtain a reflection preventing film made of multi-layer of thin films by a method wherein a substrate on which a photo-electromotive force junction plain formed is immersed in two kinds of solution which contains the 1st and the 2nd metal respectively and is lifted up at a required speed and is treated by heat at a temperature not less than 300 deg.C. CONSTITUTION:An Si substrate which has a photo-electromotive force junction plain is immersed in a solution of ethanol and acetic acid which contains 3.4% Ti(OC4H9)4 and is lifted up at a speed of approximately 2.5mm./sec., so that the substrate is covered by a thin film of TiO2. The substrate is then treated by heat in an atmosphere at a temperature not less than 500 deg.C. Then the substrate is immersed in a solution of methanol and ethanol which contains 6% Al(NO3)3 and is covered by a thin film of Al2O3 by the same process. If the heat treatment temperature is less than 300 deg.C the formed film will dissolve into the immersed solution and if it is more than 1,100 deg.C a silver electrode will melt. The thickness of each thin film of the reflection preventing film is determined by the lifting speed and the solute density in the solution. The film thickness d which makes the reflectance minimum when a wavelength lambda0 is nealy 500nm is calculated by a formula nd=lambda0/4, where n is a refractive index, and d is obtained in d=550-800Angstrom . With the above configulation, the TiO2-Al2O3 constituted double- layered reflection preventing film can be formed uniformly, easily and at low cost.
JP55168625A 1980-11-29 1980-11-29 Manufacture of multi-layer reflection preventing film for solar battery Pending JPS5792874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55168625A JPS5792874A (en) 1980-11-29 1980-11-29 Manufacture of multi-layer reflection preventing film for solar battery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55168625A JPS5792874A (en) 1980-11-29 1980-11-29 Manufacture of multi-layer reflection preventing film for solar battery

Publications (1)

Publication Number Publication Date
JPS5792874A true JPS5792874A (en) 1982-06-09

Family

ID=15871519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55168625A Pending JPS5792874A (en) 1980-11-29 1980-11-29 Manufacture of multi-layer reflection preventing film for solar battery

Country Status (1)

Country Link
JP (1) JPS5792874A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013543991A (en) * 2010-10-28 2013-12-09 バニヤン エナジー インコーポレイテッド Turning optics for heat collection and lighting systems

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146995A (en) * 1977-05-27 1978-12-21 Sharp Corp Production of titanium oxide film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146995A (en) * 1977-05-27 1978-12-21 Sharp Corp Production of titanium oxide film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013543991A (en) * 2010-10-28 2013-12-09 バニヤン エナジー インコーポレイテッド Turning optics for heat collection and lighting systems

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