JPS566491A - Oscillating method of carbon dioxide gas laser in multi-line - Google Patents

Oscillating method of carbon dioxide gas laser in multi-line

Info

Publication number
JPS566491A
JPS566491A JP8068779A JP8068779A JPS566491A JP S566491 A JPS566491 A JP S566491A JP 8068779 A JP8068779 A JP 8068779A JP 8068779 A JP8068779 A JP 8068779A JP S566491 A JPS566491 A JP S566491A
Authority
JP
Japan
Prior art keywords
carbon dioxide
dioxide gas
gas laser
line
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8068779A
Other languages
Japanese (ja)
Other versions
JPS5741831B2 (en
Inventor
Takuzo Sato
Hiroshi Kashiwagi
Akira Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8068779A priority Critical patent/JPS566491A/en
Publication of JPS566491A publication Critical patent/JPS566491A/en
Publication of JPS5741831B2 publication Critical patent/JPS5741831B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1062—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a controlled passive interferometer, e.g. a Fabry-Perot etalon

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To generate a multi-line oscillation in a carbon dioxide gas laser and selectively control the oscillation line thereof by altering the temperature of an etalon plate inserted into the light resonator of the carbon dioxide gas laser. CONSTITUTION:An etalon plate 4 is inserted into a laser light resonator having a fully reflecting mirror 1 and a half reflecting mirror 2 on the respective end optical axis directions of a carbon dioxide gas laser tube 3, is set in the oven 5, and is set at the temperature to desired value by an external temperature controller 6. The etalon plate 4 is controlled at the temperature, thereby increasing the reflectivity of the etalon plate 4 with respect to the oscillation line of the highest gain.
JP8068779A 1979-06-28 1979-06-28 Oscillating method of carbon dioxide gas laser in multi-line Granted JPS566491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8068779A JPS566491A (en) 1979-06-28 1979-06-28 Oscillating method of carbon dioxide gas laser in multi-line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8068779A JPS566491A (en) 1979-06-28 1979-06-28 Oscillating method of carbon dioxide gas laser in multi-line

Publications (2)

Publication Number Publication Date
JPS566491A true JPS566491A (en) 1981-01-23
JPS5741831B2 JPS5741831B2 (en) 1982-09-04

Family

ID=13725242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8068779A Granted JPS566491A (en) 1979-06-28 1979-06-28 Oscillating method of carbon dioxide gas laser in multi-line

Country Status (1)

Country Link
JP (1) JPS566491A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62500626A (en) * 1984-10-25 1987-03-12 キャンデラ・レ−ザ−・コ−ポレ−ション Method and apparatus for amplifying light to generate a pulsed output beam of light
JPS63208287A (en) * 1987-02-20 1988-08-29 ユルトラーツェントリフューゲ、ネーデルランド、ナームローゼ、ヴェノートチャップ Laser device
JPH06338652A (en) * 1993-05-31 1994-12-06 Nec Corp Stabilization of wavelength of laser and semiconductor laser module for wavelength stabilization
JP2006135298A (en) * 2004-10-07 2006-05-25 Komatsu Ltd Driver laser for extreme ultraviolet light source apparatus and lpp-type extreme ultraviolet light source apparatus
JP2012049564A (en) * 2004-10-07 2012-03-08 Komatsu Ltd Driver laser for extreme ultraviolet light source device and lpp type extreme ultraviolet light source device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6087118A (en) * 1983-10-14 1985-05-16 Canon Inc Vibration type transfer machine
JPS60107027U (en) * 1983-12-26 1985-07-20 積水化成品工業株式会社 Vibratory feeding device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628173A (en) * 1969-04-28 1971-12-14 Bell Telephone Labor Inc Laser mode selection and stabilization apparatus employing a birefringement etalon
JPS4819570U (en) * 1971-07-16 1973-03-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3628173A (en) * 1969-04-28 1971-12-14 Bell Telephone Labor Inc Laser mode selection and stabilization apparatus employing a birefringement etalon
JPS4819570U (en) * 1971-07-16 1973-03-06

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62500626A (en) * 1984-10-25 1987-03-12 キャンデラ・レ−ザ−・コ−ポレ−ション Method and apparatus for amplifying light to generate a pulsed output beam of light
JPH0451076B2 (en) * 1984-10-25 1992-08-18 Kyandera Reezaa Corp
JPS63208287A (en) * 1987-02-20 1988-08-29 ユルトラーツェントリフューゲ、ネーデルランド、ナームローゼ、ヴェノートチャップ Laser device
JP2713949B2 (en) * 1987-02-20 1998-02-16 ユルトラーツェントリフューゲ、ネーデルランド、ナームローゼ、ヴェノートチャップ Laser equipment
JPH06338652A (en) * 1993-05-31 1994-12-06 Nec Corp Stabilization of wavelength of laser and semiconductor laser module for wavelength stabilization
JP2006135298A (en) * 2004-10-07 2006-05-25 Komatsu Ltd Driver laser for extreme ultraviolet light source apparatus and lpp-type extreme ultraviolet light source apparatus
JP2012049564A (en) * 2004-10-07 2012-03-08 Komatsu Ltd Driver laser for extreme ultraviolet light source device and lpp type extreme ultraviolet light source device
JP2012227167A (en) * 2004-10-07 2012-11-15 Gigaphoton Inc Driver laser for extreme ultraviolet light source device, and lpp-type extreme ultraviolet light source device

Also Published As

Publication number Publication date
JPS5741831B2 (en) 1982-09-04

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