JPS5543487A - Inclination detection coarseness measuring method through light reflection - Google Patents

Inclination detection coarseness measuring method through light reflection

Info

Publication number
JPS5543487A
JPS5543487A JP6429679A JP6429679A JPS5543487A JP S5543487 A JPS5543487 A JP S5543487A JP 6429679 A JP6429679 A JP 6429679A JP 6429679 A JP6429679 A JP 6429679A JP S5543487 A JPS5543487 A JP S5543487A
Authority
JP
Japan
Prior art keywords
determined
light
small portion
reflected light
inclination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6429679A
Other languages
Japanese (ja)
Other versions
JPS5948324B2 (en
Inventor
Ryoji Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP6429679A priority Critical patent/JPS5948324B2/en
Publication of JPS5543487A publication Critical patent/JPS5543487A/en
Publication of JPS5948324B2 publication Critical patent/JPS5948324B2/en
Expired legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To enhance the determination accuracy by photodetecting the reflected light in a small portion in which the coarse wave shape is disposed on the surface to be determined through the pressure apply correspondingly to the deflection angle thereof.
CONSTITUTION: Below the symmetrical light sensors 3a, 3b having a photodetecting surface ranged to a large cubic angle provided just above the surface to be determined 1, the optical wedge 6 having a large amount of absorption of the reflected light and small amount of absorption in the vicinity of the center is disposed as pressing means. Thus, with respect to the small portion in which is the coarse wave shaped on the member to be determined, thin light beams such as laser and the like of thin parallel light beams from the light source 2 are radiated and the reflected light is pressed correspondingly to the deflection angle of the center by the optical wedge 6, and thereafter they are photodetected by the light sensors 3a, 3b. The difference of the both output is taken out by the amplifier 4 and the inclination of the small portion in which the light beams on the surface to be determined 1 collides is detected, the surface to be detected is moved in X direction shown by arrows while detecting the inclination, and the output there of is inputted to the integrating circuit 5, the coarseness curve can be obtained f(x).
COPYRIGHT: (C)1980,JPO&Japio
JP6429679A 1979-05-24 1979-05-24 Inclination detection roughness measurement method using light reflection Expired JPS5948324B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429679A JPS5948324B2 (en) 1979-05-24 1979-05-24 Inclination detection roughness measurement method using light reflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429679A JPS5948324B2 (en) 1979-05-24 1979-05-24 Inclination detection roughness measurement method using light reflection

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5362874A Division JPS5918641B2 (en) 1974-05-14 1974-05-14 Inclination detection roughness measurement method using light reflection

Publications (2)

Publication Number Publication Date
JPS5543487A true JPS5543487A (en) 1980-03-27
JPS5948324B2 JPS5948324B2 (en) 1984-11-26

Family

ID=13254130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429679A Expired JPS5948324B2 (en) 1979-05-24 1979-05-24 Inclination detection roughness measurement method using light reflection

Country Status (1)

Country Link
JP (1) JPS5948324B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPS5815198U (en) * 1981-07-22 1983-01-29 旭可鍛鉄株式会社 heat treatment equipment
JPS61149092U (en) * 1985-03-07 1986-09-13
US20150300897A1 (en) * 2012-11-29 2015-10-22 Beijing Institute Of Technology Sensor device and residual stress detection system employing same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60161923U (en) * 1984-04-02 1985-10-28 カネボウ株式会社 Retractable cosmetic stick container

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791403A (en) * 1980-10-04 1982-06-07 Gasuto Teodooru Optoelectronic measuring method of and apparatus for roughness of surface
JPH0153401B2 (en) * 1980-10-04 1989-11-14 Gasuto Teodooru
JPS5815198U (en) * 1981-07-22 1983-01-29 旭可鍛鉄株式会社 heat treatment equipment
JPS61149092U (en) * 1985-03-07 1986-09-13
US20150300897A1 (en) * 2012-11-29 2015-10-22 Beijing Institute Of Technology Sensor device and residual stress detection system employing same
US9863826B2 (en) * 2012-11-29 2018-01-09 Beijing Institute Of Technology Sensor device and residual stress detection system employing same

Also Published As

Publication number Publication date
JPS5948324B2 (en) 1984-11-26

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