JPS5541702A - Glass film coating method for semiconductor - Google Patents

Glass film coating method for semiconductor

Info

Publication number
JPS5541702A
JPS5541702A JP11357878A JP11357878A JPS5541702A JP S5541702 A JPS5541702 A JP S5541702A JP 11357878 A JP11357878 A JP 11357878A JP 11357878 A JP11357878 A JP 11357878A JP S5541702 A JPS5541702 A JP S5541702A
Authority
JP
Japan
Prior art keywords
electrode
base
glass film
semiconductor
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11357878A
Other languages
Japanese (ja)
Inventor
Yasumichi Yasuda
Yutaka Misawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11357878A priority Critical patent/JPS5541702A/en
Publication of JPS5541702A publication Critical patent/JPS5541702A/en
Pending legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To improve the reliability of semiconductor element by coating a uniform glass film on the surface of base with charging D.C. current between the electrode and the base which is held with a constant distance against the electrode.
CONSTITUTION: The semiconductor base 3 and the electrode 4 are set with a distance, and they are immersed into a glass powder dispersed solution which has a constant conductivity. In this case, the mesh type electrode 4 is set in the middle of tube type insulation supporter and the distance between the base 3 and the electrode 4 is held constantly by fixing the base on the edge of tube. Then, the glass film having a uniform thickness is obtained with charging D.C. current from the source 6. By so doing, the reliability on characteristics of semiconductor element is improved.
COPYRIGHT: (C)1980,JPO&Japio
JP11357878A 1978-09-18 1978-09-18 Glass film coating method for semiconductor Pending JPS5541702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11357878A JPS5541702A (en) 1978-09-18 1978-09-18 Glass film coating method for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11357878A JPS5541702A (en) 1978-09-18 1978-09-18 Glass film coating method for semiconductor

Publications (1)

Publication Number Publication Date
JPS5541702A true JPS5541702A (en) 1980-03-24

Family

ID=14615777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11357878A Pending JPS5541702A (en) 1978-09-18 1978-09-18 Glass film coating method for semiconductor

Country Status (1)

Country Link
JP (1) JPS5541702A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62135561A (en) * 1985-12-10 1987-06-18 Toray Silicone Co Ltd Curable organopolysiloxane composition
US10066138B2 (en) 2013-12-27 2018-09-04 Dow Corning Toray Co., Ltd. Room-temperature-curable silicone rubber composition, the use thereof, and method for repairing electronic device
US10072151B2 (en) 2013-12-27 2018-09-11 Dow Corning Toray Co., Ltd. Room-temperature-curable silicone rubber composition, and the use thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62135561A (en) * 1985-12-10 1987-06-18 Toray Silicone Co Ltd Curable organopolysiloxane composition
JPH0423663B2 (en) * 1985-12-10 1992-04-22 Dow Corning Toray Silicone
US10066138B2 (en) 2013-12-27 2018-09-04 Dow Corning Toray Co., Ltd. Room-temperature-curable silicone rubber composition, the use thereof, and method for repairing electronic device
US10072151B2 (en) 2013-12-27 2018-09-11 Dow Corning Toray Co., Ltd. Room-temperature-curable silicone rubber composition, and the use thereof

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