JPS54875A - Gettering process system for semiconductor substrate - Google Patents

Gettering process system for semiconductor substrate

Info

Publication number
JPS54875A
JPS54875A JP6595677A JP6595677A JPS54875A JP S54875 A JPS54875 A JP S54875A JP 6595677 A JP6595677 A JP 6595677A JP 6595677 A JP6595677 A JP 6595677A JP S54875 A JPS54875 A JP S54875A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
process system
gettering process
gettering
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6595677A
Other languages
Japanese (ja)
Inventor
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6595677A priority Critical patent/JPS54875A/en
Publication of JPS54875A publication Critical patent/JPS54875A/en
Pending legal-status Critical Current

Links

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To secure a simple and low-cost gettering process by giving a high-temperature treatment to the rear surface of the substrate after a spatter etching.
COPYRIGHT: (C)1979,JPO&Japio
JP6595677A 1977-06-03 1977-06-03 Gettering process system for semiconductor substrate Pending JPS54875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6595677A JPS54875A (en) 1977-06-03 1977-06-03 Gettering process system for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6595677A JPS54875A (en) 1977-06-03 1977-06-03 Gettering process system for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS54875A true JPS54875A (en) 1979-01-06

Family

ID=13301934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6595677A Pending JPS54875A (en) 1977-06-03 1977-06-03 Gettering process system for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS54875A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403774A (en) * 1988-11-01 1995-04-04 Siemens Corporate Research, Inc. Method for fabricating index-guided semiconductor laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403774A (en) * 1988-11-01 1995-04-04 Siemens Corporate Research, Inc. Method for fabricating index-guided semiconductor laser

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