JPS5413765A - Sample slanting equipment of scanning electron microscope or the like - Google Patents

Sample slanting equipment of scanning electron microscope or the like

Info

Publication number
JPS5413765A
JPS5413765A JP7961477A JP7961477A JPS5413765A JP S5413765 A JPS5413765 A JP S5413765A JP 7961477 A JP7961477 A JP 7961477A JP 7961477 A JP7961477 A JP 7961477A JP S5413765 A JPS5413765 A JP S5413765A
Authority
JP
Japan
Prior art keywords
sample
slanting
equipment
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7961477A
Other languages
Japanese (ja)
Other versions
JPS5748828B2 (en
Inventor
Motohisa Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP7961477A priority Critical patent/JPS5413765A/en
Publication of JPS5413765A publication Critical patent/JPS5413765A/en
Publication of JPS5748828B2 publication Critical patent/JPS5748828B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To limit a tilt angle corresponding to the distance between the object lens and sample surface, by causing the tolerance of the rotation angle of a tilting body to vary with the position in the light axis direction of the tilting body.
COPYRIGHT: (C)1979,JPO&Japio
JP7961477A 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like Granted JPS5413765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7961477A JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7961477A JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS5413765A true JPS5413765A (en) 1979-02-01
JPS5748828B2 JPS5748828B2 (en) 1982-10-18

Family

ID=13694915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7961477A Granted JPS5413765A (en) 1977-07-04 1977-07-04 Sample slanting equipment of scanning electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5413765A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967850U (en) * 1982-10-29 1984-05-08 株式会社エービーティ Sample moving device
JPH0364462U (en) * 1989-10-26 1991-06-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967850U (en) * 1982-10-29 1984-05-08 株式会社エービーティ Sample moving device
JPH0227488Y2 (en) * 1982-10-29 1990-07-25
JPH0364462U (en) * 1989-10-26 1991-06-24

Also Published As

Publication number Publication date
JPS5748828B2 (en) 1982-10-18

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