JPS5339058A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5339058A
JPS5339058A JP11311876A JP11311876A JPS5339058A JP S5339058 A JPS5339058 A JP S5339058A JP 11311876 A JP11311876 A JP 11311876A JP 11311876 A JP11311876 A JP 11311876A JP S5339058 A JPS5339058 A JP S5339058A
Authority
JP
Japan
Prior art keywords
etching
regions
production
semiconductor device
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11311876A
Other languages
Japanese (ja)
Inventor
Norio Anzai
Satoshi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11311876A priority Critical patent/JPS5339058A/en
Publication of JPS5339058A publication Critical patent/JPS5339058A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: To avert overetching by masking with a photoresist film and etching regions other than one region, checking the end point thereof from the water repellency of the exposed semiconductor region and likewise etching other regions as well in etching the longitudinal and transverse scribing regions provided in a Si wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP11311876A 1976-09-22 1976-09-22 Production of semiconductor device Pending JPS5339058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11311876A JPS5339058A (en) 1976-09-22 1976-09-22 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11311876A JPS5339058A (en) 1976-09-22 1976-09-22 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5339058A true JPS5339058A (en) 1978-04-10

Family

ID=14603960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11311876A Pending JPS5339058A (en) 1976-09-22 1976-09-22 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5339058A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5256339U (en) * 1975-10-21 1977-04-23
JPS57196043A (en) * 1981-05-28 1982-12-01 Takasago Thermal Eng Co Lts Heat accumulation reservoir by making use of solar heat
JPS60147094A (en) * 1984-01-11 1985-08-02 Keiichi Yasukawa Temperature separated and non-mixed heat storage equipment
JPS60256756A (en) * 1984-06-02 1985-12-18 Keiichi Yasukawa Heat accumulating tank classified by temperature
JPS6172955A (en) * 1984-09-14 1986-04-15 Osaka Gas Co Ltd Circulating hot-water supplier

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5256339U (en) * 1975-10-21 1977-04-23
JPS57196043A (en) * 1981-05-28 1982-12-01 Takasago Thermal Eng Co Lts Heat accumulation reservoir by making use of solar heat
JPH0115784B2 (en) * 1981-05-28 1989-03-20 Takasago Thermal Engineering
JPS60147094A (en) * 1984-01-11 1985-08-02 Keiichi Yasukawa Temperature separated and non-mixed heat storage equipment
JPS60256756A (en) * 1984-06-02 1985-12-18 Keiichi Yasukawa Heat accumulating tank classified by temperature
JPS6172955A (en) * 1984-09-14 1986-04-15 Osaka Gas Co Ltd Circulating hot-water supplier
JPH0585820B2 (en) * 1984-09-14 1993-12-08 Osaka Gas Co Ltd

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