JPS52130277A - Transparent type scanning electronic microscope - Google Patents

Transparent type scanning electronic microscope

Info

Publication number
JPS52130277A
JPS52130277A JP4657976A JP4657976A JPS52130277A JP S52130277 A JPS52130277 A JP S52130277A JP 4657976 A JP4657976 A JP 4657976A JP 4657976 A JP4657976 A JP 4657976A JP S52130277 A JPS52130277 A JP S52130277A
Authority
JP
Japan
Prior art keywords
electronic microscope
type scanning
scanning electronic
transparent type
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4657976A
Other languages
Japanese (ja)
Other versions
JPS5931174B2 (en
Inventor
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4657976A priority Critical patent/JPS5931174B2/en
Publication of JPS52130277A publication Critical patent/JPS52130277A/en
Publication of JPS5931174B2 publication Critical patent/JPS5931174B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To enable the transparent type scanning electronic microscope, by providing the light shield substance which is constituted so that the light emitting output is partially selected and transparent at the input end surface of the detection means.
COPYRIGHT: (C)1977,JPO&Japio
JP4657976A 1976-04-26 1976-04-26 Transmission scanning electron microscope Expired JPS5931174B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4657976A JPS5931174B2 (en) 1976-04-26 1976-04-26 Transmission scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4657976A JPS5931174B2 (en) 1976-04-26 1976-04-26 Transmission scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS52130277A true JPS52130277A (en) 1977-11-01
JPS5931174B2 JPS5931174B2 (en) 1984-07-31

Family

ID=12751202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4657976A Expired JPS5931174B2 (en) 1976-04-26 1976-04-26 Transmission scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5931174B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025242U (en) * 1983-07-27 1985-02-20 横河電機株式会社 Current/current isolator
JPS60230346A (en) * 1984-04-27 1985-11-15 Hitachi Ltd Scanning-type reflected-electron-diffracting microscope
JP2008311214A (en) * 2007-05-11 2008-12-25 Hamamatsu Univ School Of Medicine Sample holder for electron microscope, and electron microscope
JP2009193968A (en) * 2003-01-31 2009-08-27 Hitachi High-Technologies Corp Charged particle beam device
US7964845B2 (en) 2003-01-31 2011-06-21 Hitachi High-Technologies Corporation Charged particle beam device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025242U (en) * 1983-07-27 1985-02-20 横河電機株式会社 Current/current isolator
JPH048670Y2 (en) * 1983-07-27 1992-03-04
JPS60230346A (en) * 1984-04-27 1985-11-15 Hitachi Ltd Scanning-type reflected-electron-diffracting microscope
JP2009193968A (en) * 2003-01-31 2009-08-27 Hitachi High-Technologies Corp Charged particle beam device
US7964845B2 (en) 2003-01-31 2011-06-21 Hitachi High-Technologies Corporation Charged particle beam device
JP2008311214A (en) * 2007-05-11 2008-12-25 Hamamatsu Univ School Of Medicine Sample holder for electron microscope, and electron microscope

Also Published As

Publication number Publication date
JPS5931174B2 (en) 1984-07-31

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