JPS51136478A - Defect inspection device - Google Patents

Defect inspection device

Info

Publication number
JPS51136478A
JPS51136478A JP5965475A JP5965475A JPS51136478A JP S51136478 A JPS51136478 A JP S51136478A JP 5965475 A JP5965475 A JP 5965475A JP 5965475 A JP5965475 A JP 5965475A JP S51136478 A JPS51136478 A JP S51136478A
Authority
JP
Japan
Prior art keywords
inspection device
defect inspection
defets
oeprated
judge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5965475A
Other languages
Japanese (ja)
Other versions
JPS5524575B2 (en
Inventor
Seikichi Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5965475A priority Critical patent/JPS51136478A/en
Publication of JPS51136478A publication Critical patent/JPS51136478A/en
Publication of JPS5524575B2 publication Critical patent/JPS5524575B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To enable to judge defets taking their shape into consideration by finding out defects in each small section dividing a inspecting object. The defect inspection device is oeprated by electric signal obtained from scanning surface of the object in widthwise direction.
JP5965475A 1975-05-21 1975-05-21 Defect inspection device Granted JPS51136478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5965475A JPS51136478A (en) 1975-05-21 1975-05-21 Defect inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5965475A JPS51136478A (en) 1975-05-21 1975-05-21 Defect inspection device

Publications (2)

Publication Number Publication Date
JPS51136478A true JPS51136478A (en) 1976-11-25
JPS5524575B2 JPS5524575B2 (en) 1980-06-30

Family

ID=13119392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5965475A Granted JPS51136478A (en) 1975-05-21 1975-05-21 Defect inspection device

Country Status (1)

Country Link
JP (1) JPS51136478A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754844A (en) * 1980-09-19 1982-04-01 Nippon Steel Corp Flaw signal processing apparatus
JPH02248845A (en) * 1989-03-22 1990-10-04 Kyodo Printing Co Ltd Card surface defect inspecting device
TWI449999B (en) * 2007-06-22 2014-08-21 Samsung Display Co Ltd Backlight assembly

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58109703A (en) * 1981-12-22 1983-06-30 Nachi Fujikoshi Corp Pressure and flow control valve
JPS599355A (en) * 1982-07-07 1984-01-18 Daikin Ind Ltd Hydraulic circuit
JPH0425521Y2 (en) * 1985-03-27 1992-06-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754844A (en) * 1980-09-19 1982-04-01 Nippon Steel Corp Flaw signal processing apparatus
JPH02248845A (en) * 1989-03-22 1990-10-04 Kyodo Printing Co Ltd Card surface defect inspecting device
TWI449999B (en) * 2007-06-22 2014-08-21 Samsung Display Co Ltd Backlight assembly

Also Published As

Publication number Publication date
JPS5524575B2 (en) 1980-06-30

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