JPH11193426A - Electric resistance alloy, its production and sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lower the temp. coefficient of electric resistance from room temp. to a high temp. by working an alloy consisting essentially of chromium and gold into wire or sheet and heating the wire or sheet in a reducing or non- oxidizing atmosphere at a specified temp. SOLUTION: An alloy consisting of 0.1 to 30 atom % chromium and the balance gold with a small amt. of impurities is forged, cast, hot-worked or cold-worked into the wire, sheet, etc., of desired shape. The material is heated for 2 sec to 100 hr in a reducing or non-oxidizing atmosphere or vacuum at 200-1050 deg.C. As a result, a sensor alloy having <=500×10<-6> deg.C<-1> average resistance temp. coefficient at 0-800 deg.C is obtained. The average resistance temp. coefficient at 0-800 deg.C can be furthermore lowered by incorporating iron, nickel, platinum, palladium, molybdenum, tungsten, aluminum or rare-earth element as the auxiliary components of the alloy.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to gold (Au), chromium (C
r) and iron (Fe), nickel (N
i), cobalt (Co), manganese (Mn), silver (A
g), platinum (Pt), palladium (Pd), rhodium (Rh), iridium (Ir), osmium (Os),
Ruthenium (Ru), vanadium (V), titanium (T
i), zirconium (Zr), hafnium (Hf), molybdenum (Mo), niobium (Nb), tungsten (W), tantalum (Ta), gallium (Ga), germanium (Ge), indium (In), beryllium ( B
e), tin (Sn), antimony (Sb), copper (Cu),
The present invention relates to an electric resistance alloy comprising aluminum (Al), silicon (Si), carbon (C), boron (B) and a rare earth element and a small amount of impurities, a method for producing the same, and various sensor devices using the alloy.

More specifically, the present invention relates to a method of heating a wire or plate of the above-mentioned electric resistance alloy in a non-oxidizing atmosphere at 200 to 1050 ° C. or in a vacuum for 2 seconds to 100 hours to produce a wire or plate at 0 to 800 ° C. 800 ° C
It is an object of the present invention to provide a method for producing an electric resistance alloy having a resistance temperature coefficient of not more than 500 × 10 ⁻⁶ ° C. ⁻¹ and an eddy current displacement sensor or a resistor using the alloy.

[0003]

2. Description of the Related Art In recent years, components in electronics-related equipment, such as electric resistance or eddy current type displacement sensors, have been used for these components in order to reduce their size, improve their performance, and improve their environmental resistance. There is a strong demand for the development of an electric resistance alloy material having excellent thermal stability. In addition, in order to operate these devices stably in a special environment, particularly at a high temperature, development of an electric resistance alloy material having excellent thermal stability at a high temperature is strongly demanded.

It is important that the electric resistance alloy has an appropriate specific electric resistance, that the specific electric resistance has a small temperature coefficient, and that the electric resistance has little change with time. It is also important that the brazing property is excellent, that it is easy to process, that it is chemically stable, that it has good compatibility with the insulator, that the cost is low, and the like.

Conventionally, materials having a low electric resistance include silver,
Pure metals such as copper and gold are conceivable, but all have a large temperature coefficient of electrical resistance of 4000 × 10 ⁻⁶ · ° C. ⁻¹ or more, so that it is difficult to apply the present invention to the target sensor device. . The temperature coefficient of electric resistance is generally the temperature coefficient of resistance α (unit: ppm / ° C. or 10 ⁻⁶ ° C. ⁻¹ )
In shown, the value between the temperature _{T a} and _T b _(and T a _{<T b)} is expressed by the following equation.

[0006]

(Equation 1)

[0007] Here, a _{p a} and _{p b,} as well as the specific resistance value and the resistance value at temperatures of _{R a} and _{R b} are each _{T a} and _{T b.}

[0008]

By the way, these silver,
It is known that the electrical properties can be considerably improved by adding a small amount of nickel (Ni), manganese (Mn), cobalt (Co), chromium (Cr) or the like to copper and gold. Other examples include a palladium-silver (Pd-Ag) alloy and a copper-nickel-gold (Cu-Ni-Au) alloy. All of these materials have a negative temperature coefficient of electric resistance or a very small value of 100 × 10 ⁻⁶ ° C.- ¹ or less. Can demonstrate. But,
These materials have many disadvantages. For example, the material was hard and inferior in flexibility, was subjected to chemical stability, or the electrical resistance changed with time due to thermal aging. In addition, they have poor characteristics at high temperatures, and cannot be applied to sensors and the like used at high temperatures. As a high-temperature electric resistance material, a platinum-rhodium (Pt-Rh) alloy or the like is used. However, the temperature coefficient of electric resistance is as large as 1000 ppm / ° C. or more, and there is a problem that it cannot be put to practical use.

[0009]

SUMMARY OF THE INVENTION Accordingly, the present invention relates to an electric resistance alloy having an unprecedented excellent characteristic of having a small temperature coefficient of electric resistance from room temperature to a high temperature. It has been intensively studied to respond. As a result, they discovered a new electric resistance alloy having excellent electric properties at a temperature of 0 to 800 ° C., developed an original manufacturing technique of the alloy, and further used a wire or a plate made of the alloy. We have successfully developed various high-performance sensor devices.

That is, according to the present invention, the specific electric resistance is small,
Attention was paid to gold (Au), which has a low melting point and is chemically stable, and research was conducted on an alloy in which a small amount of chromium (Cr) was added thereto. Conventionally used Au-Cr alloys are
100 × 10 ⁻⁶ · ° C. ⁻¹ in a temperature range of 120 ° C.
Although the following extremely small temperature coefficient values can be shown, the temperature coefficient at high temperatures is large, and at high temperatures, the electrical resistance changes with time due to thermal aging. In order to reduce the temperature coefficient, it is necessary to order the alloy, and thus heat treatment is performed at a temperature of 200 ° C. or less. Therefore, when used at a temperature of 200 ° C. or higher, transformation from an ordered phase to an irregular phase is caused, and it is considered that a temporal change occurs.

In order to solve this problem, a means for performing heat treatment at a high temperature has been studied.
By performing the heat treatment at a temperature of 50 ° C., it was possible to obtain a stable material that did not change with time from room temperature to a high temperature. Further, the temperature coefficient of electric resistance is as small as 100 × 10 ⁻⁶ ° C.- ¹ or less over 0 to 800 ° C., the temperature coefficient is zero within any 100 ° C., and the fluctuation of resistance value is 0.
It was found to have excellent properties of 05%. It was also clarified that the region of 100 ° C. where the electric resistance did not change with temperature could be determined by the chromium content.

That is, according to the present invention, gold (Au) and chromium (Cr) having a temperature coefficient of resistance of 500 × 10 ⁻⁶ ° C.- ¹ or less at ⁰ to 800 ° C. by heat treatment at a temperature of 200 to 1050 ° C. Iron (F) as a main component, and as a subcomponent having a remarkable effect of improving electrical characteristics and the like.
e), nickel (Ni), cobalt (Co), manganese (Mn), silver (Ag), platinum (Pt), palladium (P
d), rhodium (Rh), iridium (Ir), osmium (Os), ruthenium (Ru), vanadium (V), titanium (Ti), zirconium (Zr), hafnium (Hf), molybdenum (Mo), niobium ( N
b), tungsten (W), tantalum (Ta), gallium (Ga), germanium (Ge), indium (I
n), including elements such as beryllium (Be), tin (Sn), antimony (Sb), copper (Cu), aluminum (Al), silicon (Si), carbon (C), boron (B) and rare earth elements It is an object of the present invention to provide a novel electric resistance alloy, a technique for manufacturing the electric resistance alloy of the present invention, and an eddy current displacement sensor or resistor using the alloy.

Hereinafter, a method for producing the alloy of the present invention will be specifically described. A raw material having the above composition is placed in a suitable melting furnace (high-frequency induction melting furnace, electric furnace) in the atmosphere, preferably in an atmosphere such as a non-oxidizing gas (argon, nitrogen, etc.) or a reducing gas (hydrogen, helium, etc.) or in a vacuum. Furnace,
After melting with a Tamman furnace, arc melting furnace, etc.)
The molten alloy is cast in a mold (mold, heat-resistant crucible, etc.) of an appropriate material, shape and size, or is continuously solidified (zone melt method, Tamman-Bridgeman method, high-temperature mold method, pulling method, (Suction method, floating zone dissolution method, etc.) to obtain a material having a desired shape, for example, an ingot, a slab or a round bar. Then, if necessary, the material is heated at a temperature of 600 to 1050 ° C. for a suitable time in the atmosphere, preferably in an atmosphere such as a non-oxidizing gas or a reducing gas, or in a vacuum, and then cooled to a room temperature at a suitable rate.
Thereafter, the raw material is subjected to hot working such as forging or hot rolling if necessary, and further by a swaging machine, a rolling mill or a cold drawing machine, and if necessary, at a temperature of 600 to 1050 ° C. in the middle of the working. While softening and annealing at a temperature, cold working, preferably at a working rate of 25% or more, is performed to form a foil, a wire, for example, a wire having a wire diameter of 10 to 100 μm or a ribbon. Finally, the wire is placed in the atmosphere, preferably in an atmosphere such as a non-oxidizing gas or a reducing gas, by an electric furnace composed of a heating zone and a cooling zone of an appropriate length having, for example, a heat-resistant thin pipe. Alternatively, heat annealing is performed in a vacuum at a temperature of 200 to 1050 ° C. for 2 seconds to 100 hours, or a moderate rate,
By performing a continuous heat treatment at a speed of 10 to 10 m / min, 0
The average temperature coefficient of resistance at ~ 800 ° C is 500 × 10
Alloy having a ^-6 · ° C. ^-1 or less can be obtained.

The features of the present invention are as follows. In the first invention, chromium is 0.1 to 30% by atomic weight ratio.
And the balance of gold and a small amount of impurities, and the average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 10 ⁻⁶ · ° C. ⁻¹
The present invention relates to an electric resistance alloy having the following.

The second invention is characterized in that chromium 0.1
~ 30%, with the balance gold and small amounts of impurities,
The average temperature coefficient of resistance at ~ 800 ° C is 500 × 10
^The present invention relates to an electric resistance alloy having a temperature of ⁻⁶ · ° C. ^-1 or less.

According to a third aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1
Up to 30% and iron as an auxiliary component not more than 20%, nickel 2
0% or less, cobalt 20% or less, manganese 20% or less,
Silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, Hafnium 5% or less, molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3%
Below, beryllium 3% or less, tin 5% or less, antimony 3
% Or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less.
40% and the balance of gold and a small amount of impurities,
The average temperature coefficient of resistance at 0 ° C. is 500 × 10 ^−6.
The present invention relates to an electric resistance alloy having a temperature of ^-1 or less.

According to a fourth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1
Up to 30% and iron as an auxiliary component not more than 20%, nickel 2
0% or less, cobalt 20% or less, manganese 20% or less,
Silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, Hafnium 5% or less, molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3%
Below, beryllium 3% or less, tin 5% or less, antimony 3
% Or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less.
40% and a balance of gold and a small amount of impurities,
Average temperature coefficient of resistance at 800 ° C. is 500 × 10
^The present invention relates to an electric resistance alloy having a temperature of ⁻⁶ · ° C. ^-1 or less.

According to a fifth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1
An alloy consisting of ~ 30% and a balance of gold and a small amount of impurities,
After forming into a desired shape such as a wire or a plate by forging, casting, and hot working or cold working, 200 to 105
A step of heating in a non-oxidizing atmosphere at 0 ° C. or in a vacuum for 2 seconds to 100 hours, wherein the average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 10 ⁻⁶ · ° C. ⁻¹
The present invention relates to a method for producing an electric resistance alloy, characterized by obtaining an alloy having the following.

According to a sixth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1
An alloy consisting of ~ 30% and a balance of gold and a small amount of impurities,
After forming into a desired shape such as a wire or a plate by forging, casting and hot working or cold working, 200 to 1050
2 seconds or more in a non-oxidizing atmosphere or vacuum
200-800 ° C.
Average temperature coefficient of resistance at 500 × 10 ⁻⁶ ℃
^The present invention relates to a method for producing an electric resistance alloy, wherein an alloy having ^-1 or less is obtained.

According to a seventh aspect of the present invention, the atomic weight ratio of chromium is 0.1
Up to 30% and iron as an auxiliary component not more than 20%, nickel 2
0% or less, cobalt 20% or less, manganese 20% or less,
Silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, Hafnium 5% or less, molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3%
Below, beryllium 3% or less, tin 5% or less, antimony 3
% Or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less.
After forming an alloy having an alloy composition of 40% and a balance of gold and a small amount of impurities into a desired shape such as a wire or a plate by forging, casting and hot working or cold working,
Heating in a non-oxidizing atmosphere at 200 to 1050 ° C. or in a vacuum for 2 seconds to 100 hours,
The average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 1
The present invention relates to a method for producing an electric resistance alloy, which comprises obtaining an alloy having 0 ⁻⁶ ° C. ⁻¹ or less.

According to an eighth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1
Up to 30% and iron as an auxiliary component not more than 20%, nickel 2
0% or less, cobalt 20% or less, manganese 20% or less,
Silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, Hafnium 5% or less, molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3%
Below, beryllium 3% or less, tin 5% or less, antimony 3
% Or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less.
After forming an alloy having an alloy composition of 40% and a balance of gold and a small amount of impurities into a desired shape such as a wire or a plate by forging, casting and hot working or cold working,
Heating in a non-oxidizing atmosphere at 200 to 1050 ° C. or in a vacuum for 2 seconds to 100 hours,
The average temperature coefficient of resistance at 200 to 800 ° C. is 500
The present invention relates to a method for producing an electric resistance alloy, characterized by obtaining an alloy having a temperature of × 10 ⁻⁶ · ° C. ⁻¹ or less.

According to a ninth invention, chromium is contained in an atomic weight ratio of 0.1
~ 30% and the balance of gold and small amounts of impurities, 0-8
Average temperature coefficient of resistance at 00 ° C. is 500 × 10 ⁻⁶
An eddy current displacement sensor comprising an electric resistance alloy having a temperature of ^-1 or less.

According to a tenth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1.
Consisting of 1-30% and the balance gold and small amounts of impurities,
The average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 1
The present invention relates to an eddy current type displacement sensor characterized by being made of an electric resistance alloy having a temperature of 0 ⁻⁶ ° C. ⁻¹ or less.

According to an eleventh aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1.
1 to 30% and iron as an accessory, iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40%
Hereinafter, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less,
Hafnium 5% or less, Molybdenum 8% or less, Niobium 5%
Hereinafter, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3
%, Beryllium 3% or less, tin 5% or less, antimony 3% or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less Species or a total of two or more species 0.001
-40% and the balance of gold and small amounts of impurities, 0-8
Average temperature coefficient of resistance at 00 ° C. is 500 × 10 ⁻⁶
An eddy current displacement sensor comprising an electric resistance alloy having a temperature of ^-1 or less.

According to a twelfth invention, chromium is contained in an atomic weight ratio of 0.1.
1 to 30% and iron as an accessory, iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40%
Hereinafter, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less,
Hafnium 5% or less, Molybdenum 8% or less, Niobium 5%
Hereinafter, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3
%, Beryllium 3% or less, tin 5% or less, antimony 3% or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less Species or a total of two or more species 0.001
~ 40%, with the balance gold and small amounts of impurities,
The average temperature coefficient of resistance at ~ 800 ° C is 500 × 10
^{The present} invention relates to an eddy current type displacement sensor comprising an electric resistance alloy having a temperature of ^-6.degree .

According to a thirteenth aspect of the present invention, the electrical resistance alloy obtained by the method of claim 5 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is as an inorganic or organic electrical insulator. The eddy current displacement sensor according to claim 9, wherein the sensor is formed by being fixed or embedded in the insulator.

According to a fourteenth aspect of the present invention, the electric resistance alloy obtained by the method of claim 6 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is to form an inorganic or organic electric insulator. The eddy current displacement sensor according to claim 9, wherein the sensor is formed by being fixed or embedded in the insulator.

According to a fifteenth aspect, the electric resistance alloy obtained by the production method of claim 7 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is to form an inorganic or organic electric insulator. 12. The fixing device according to claim 11, wherein the fixing member is fixed or embedded in the insulator.
The present invention relates to an eddy current displacement sensor described in (1).

According to a sixteenth aspect of the present invention, the electric resistance alloy obtained by the method of claim 8 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is to form an inorganic or organic electric insulator. 12. The fixing device according to claim 11, wherein the fixing member is fixed or embedded in the insulator.
The present invention relates to an eddy current displacement sensor described in (1).

The seventeenth invention is characterized in that the chromium content is 0.1% by atomic weight ratio.
Consisting of 1-30% and the balance of gold and a small amount of impurities,
Average temperature coefficient of resistance at 800 ° C. is 500 × 10
^The present invention relates to a resistor comprising an electric resistance alloy having a temperature of ^-6.degree .

According to an eighteenth aspect of the present invention, chromium is contained in an atomic weight ratio of 0.1.
Consisting of 1-30% and the balance gold and small amounts of impurities,
The average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 1
The present invention relates to a resistor made of an electric resistance alloy having 0 ⁻⁶ ° C. ⁻¹ or less.

The nineteenth invention is directed to a chromium 0.1 atomic weight ratio.
1 to 30% and iron as an accessory, iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40%
Hereinafter, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less,
Hafnium 5% or less, Molybdenum 8% or less, Niobium 5%
Hereinafter, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3
%, Beryllium 3% or less, tin 5% or less, antimony 3% or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less Species or a total of two or more species 0.001
-40% and the balance of gold and small amounts of impurities, 0-8
Average temperature coefficient of resistance at 00 ° C. is 500 × 10 ⁻⁶
The present invention relates to a resistor comprising an electric resistance alloy having a temperature of ^-1 or less.

The twentieth invention is characterized in that chromium is contained in an atomic weight ratio of 0.1.
1 to 30% and iron as an accessory, iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40%
Hereinafter, rhodium 10% or less, iridium 10% or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less,
Hafnium 5% or less, Molybdenum 8% or less, Niobium 5%
Hereinafter, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3
%, Beryllium 3% or less, tin 5% or less, antimony 3% or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2% or less, and rare earth element 5% or less Species or a total of two or more species 0.001
~ 40%, with the balance gold and small amounts of impurities,
The average temperature coefficient of resistance at ~ 800 ° C is 500 × 10
^The present invention relates to a resistor comprising an electric resistance alloy having a temperature of ^-6.degree .

According to a twenty-first aspect of the present invention, the electric resistance alloy obtained by the production method of claim 5 is formed into a desired shape such as a spiral shape or a toroidal shape, and is converted into an inorganic or organic electric insulator as it is. 18. The semiconductor device according to claim 17, wherein the support is fixed or embedded in the insulator.
And a resistor described in (1).

According to a twenty-second aspect of the present invention, the electric resistance alloy obtained by the method of claim 6 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is to form an inorganic or organic electric insulator. 19. The method according to claim 18, wherein the fixing member is fixed or embedded in the insulator.
And a resistor described in (1).

According to a twenty-third aspect of the present invention, the electrical resistance alloy obtained by the manufacturing method of claim 7 is formed into a desired shape such as a spiral shape or a toroidal shape, and is used as it is to form an inorganic or organic electrical insulator. 20. The fixing device according to claim 19, wherein the fixing member is fixed or embedded in the insulator.
And a resistor described in (1).

According to a twenty-fourth aspect, the electric resistance alloy obtained by the production method of claim 8 is formed into a desired shape such as a spiral shape or a toroidal shape, and is converted into an inorganic or organic electric insulator as it is. 21. The fixing device according to claim 20, wherein the fixing member is formed by being fixed or embedded in the insulator.
And a resistor described in (1).

[0038]

In recent years, an electric resistance material which can be used for an eddy current type displacement sensor or a resistor used in a high temperature environment of 200 ° C. or more, particularly 500 to 800 ° C. has been demanded. The conventional metal conductive material cannot be used because the electric resistance has a large temperature coefficient and the electric resistance changes greatly with a change in temperature.

In general, the properties required for an electric resistance material are as follows. A) The temperature coefficient of electric resistance is small and the resistance temperature curve is linear. B) The resistance value is stable, and there is little aging over a long period of time. C. Copper electromotive force should be small. D. High specific resistance. E. Good corrosion and oxidation resistance. Power, workability and mechanical properties are good. Good brazing properties. Of these, A and B are particularly important, but in order to be usable up to high temperatures, the corrosion resistance and oxidation resistance of O are even more important.

An electric resistance material satisfying these characteristics is
Generally, it consists of an alloy of a transition metal and a noble metal or a transition metal, has a range with a negative temperature coefficient in the resistance temperature curve, and is very different from the resistance temperature curve of ordinary metals and alloys whose resistance increases in proportion to temperature. Is characterized by the fact that This is based on imperfections in the electronic structure of the transition metal, and may involve various other atomic factors.

In the case of a gold-chromium alloy, factors that can contribute to the electrical properties include ordered-irregular transformation and antiferromagnetic-paramagnetic transformation due to chromium atoms. The alloy is heat-treated for a long time in an ordered phase of 200 ° C.
It has a small temperature coefficient and stable characteristics at a temperature of 0 ° C. However, this suggests that this material cannot be used at high temperatures, as mentioned above. That is, when used at a temperature of 200 ° C. or more, the alloy is disordered and the electrical characteristics are changed.
This is because the temperature coefficient increases.

When the heat treatment is performed at a high temperature of 200 ° C. or more, 0
The temperature coefficient at ~ 120 ° C increases,
℃ or an average temperature coefficient in any range of 200 to 800 ° C. is 500 × 10 ⁻⁶ ℃ ^-1 or less or 40.
The temperature coefficient within 100 ° C., which is as small as 0 × 10 ⁻⁶ ° C. ⁻¹ or less and determined by the composition, becomes zero. The resistance temperature curves for different compositions are shown in FIG. The temperature range of 100 ° C., as shown in FIG. 2, shows a different temperature dependence from the order-disorder transformation point, which also varies with the composition,
We need to consider the effects of other factors. Also,
Since it is heat-treated at a high temperature, there is no need to consider transformation when used at the same high temperature, and it shows stable characteristics without change with time. Furthermore, even when used at a low temperature, the ordering speed is low because of the low temperature, so that the characteristics do not change in normal measurement. Moreover, since gold occupies most of the composition and chromium itself has excellent corrosion resistance, there is no problem in corrosion resistance and oxidation resistance. From the above results, the alloy is suitable as a material usable from near room temperature to high temperature. It became clear.

Next, the reasons for limiting numerical values in the present invention will be described below. The reason that the main component and the composition of the alloy were limited to 0.1 to 30% of chromium and the balance of gold by atomic weight ratio is that, outside of these composition ranges, 0 to 30%.
Average temperature coefficient of resistance at 800 ° C. is 500 × 10
^{This is because the} temperature exceeds ^-6.degree. C.- ¹ and deviates from the object of the present invention.

The reason why iron, nickel, platinum, palladium, molybdenum, tungsten, aluminum and rare earth elements are selected as subcomponent elements is that the average temperature coefficient of resistance at 0 to 800 ° C. can be further reduced.

Further, cobalt, manganese, silver, rhodium, iridium, osmium, ruthenium, vanadium, titanium, zirconium, hafnium,
The choice of niobium, tantalum, gallium, germanium, indium, beryllium, tin, antimony, copper, silicon, carbon and boron changes the specific electrical resistance with little change in the average temperature coefficient of resistance at 0-800 ° C Because you can do it. As a result, it is possible to cope with a case where the reading sensitivity is increased by increasing the resistance value or a case where it is desired to reduce the resistance value to reduce the power consumption, with the same shape.

Further, the composition ranges of the subcomponents are iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40% or less, and rhodium 10% or less. , Iridium 10
% Or less, osmium 10% or less, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5% or less, molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8 % Or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5%
Below, antimony 3% or less, copper 5% or less, aluminum 5% or less, silicon 5% or less, carbon 2% or less, boron 2
% Or less and 5% or less of rare earth elements is limited to a total of 0.001 to 40% because the average temperature coefficient of resistance at 0 to 800 ° C. is 500 × 10 out of these composition ranges. ^{This is because the} temperature exceeds ^-6.degree. C.- ¹ and deviates from the object of the present invention.

The reason why the heat treatment temperature during the production of the alloy is limited to 200 ° C. or higher is that when heat treatment is performed at a temperature of 200 ° C. or lower, transformation from an ordered phase to an irregular phase occurs and the properties change. This is because the thin film cannot be used at high temperatures. Further, the reason why the heat treatment temperature is limited to 1050 ° C. or less is that when the alloy is heated above this temperature, the alloy is melted or melted. Also, the reason why the heat treatment time is limited to 2 seconds or more and 100 hours or less is that 500 × 1
A temperature coefficient of resistance of ^0-6.degree. C.- ¹ or less is not obtained, deviating from the object of the present invention. Even if heating is performed for 100 hours or more, improvement in main characteristics cannot be obtained, and it is economically disadvantageous. .

The rare earth element is scandium (S
c), yttrium (Y) and a lanthanum-based element, the effects of which are equal and all are the same.

[0049]

An embodiment of the present invention will be described. Example 1 Sample No. 6 (Composition: Au-13% Cr-15
Production and evaluation of alloy of% Pd) A raw material having a total weight of 300 g of gold, chromium and palladium having a purity of 99.9% or more is put in an alumina crucible, melted in a high-frequency induction electric furnace in a vacuum, and thoroughly stirred. A homogeneous molten alloy was obtained. Then, this was poured into a mold having a hole having a diameter of 12 m and a height of 200 mm, and the obtained round bar-shaped ingot was subjected to a swaging machine and a cold drawing machine so as to have a diameter of 0.5 mm.
It became a thin line. Finally, the wire was subjected to various heat treatments in an atmosphere of hydrogen, argon, air, or vacuum to obtain samples. FIG. 3 shows a resistance temperature curve in a 100 ° C. range where the resistance temperature coefficient of the sample heat-treated at 800 ° C. in vacuum becomes zero. From the figure, the variation of the specific resistance value is 0.0
It was as small as 6%, and it was found that the resistance value hardly fluctuated due to the temperature. Further, the specific electrical resistance of this sample obtained from various measurements at 0 ° C. and 0-800 ° C.
Are shown in Table 1.

[0050]

[Table 1]

Example 2 Sample No. 11 (Composition: Au-1)
Production and evaluation of alloy of 3% Cr-5% Pt) Total weight of gold, chromium and platinum having a purity of 99.9% or more 1
A raw material consisting of 0 g was placed in a high-purity alumina crucible, melted in a Tamman furnace while blowing high-purity argon gas to prevent oxidation, and then thoroughly stirred to obtain a homogeneous molten alloy. Then, this was quickly sucked into a 3.5 mm inner diameter quartz tube to obtain a round bar. The obtained round bar-shaped ingot was swept with a swaging machine and a cold drawing machine to a diameter of 0.1 mm.
It was processed into a 5 mm thin wire. An appropriate length is cut from this thin wire and left as it is, cold-worked or heated at various temperatures of 200 to 800 ° C. for various times of 2 seconds to 100 hours in a hydrogen, argon or atmospheric atmosphere or vacuum. Annealing was performed by gradually cooling to room temperature to obtain a sample for electrical resistance measurement.
Separately, a thin wire having a wire diameter of 0.5 mm was further formed by a precision cold rolling mill into two types of ribbon-like thin plates having a thickness of 0.28 mm and 0.22 mm, and excellent characteristics were obtained from the above heat treatment conditions. An object was selected and heat-treated under the conditions. Next, these ribbon-shaped thin plates having different thicknesses were stacked and wound in a toroidal shape 20 to 50 times, and then heated at 350 to 400 ° C., which was slightly higher than the recrystallization temperature, for 30 minutes to give a habit. After that, a ribbon-shaped coil having a thickness of 0.22 mm was pulled out, and the other toroidal sensor coil having a thickness of 0.28 mm was immersed in a polyimide resin.
After drying and fixing, the resin on the surface of the sensor coil was further ground to make it smooth, loaded into a ceramic case, and then a coaxial cable was soldered to the electrodes to produce an eddy current displacement sensor. 0 ° C. of this sample obtained from various measurements
Table 2 shows the specific electric resistance at 0 ° C. and the temperature coefficient of resistance at 0 to 800 ° C. The same characteristics as those of the measurement sample were obtained when a sensor was used, and it was found that the alloy of the present invention can be used for an eddy current displacement sensor or a resistor used in a high temperature environment of 500 to 800 ° C.

[0052]

[Table 2]

Example 3 Sample No. 35 (Composition: Au-1)
Production and evaluation of alloy of 3% Cr-10% Pd-3% Pt) A raw material having a total weight of 20 g of gold, chromium, palladium and platinum having a purity of 99.9% or more is put in an alumina crucible,
The whole crucible was vacuum-sealed in a transparent quartz tube and continuously solidified by the Tamman-Bridgeman method to obtain a round bar material.
The round bar was subjected to a solution treatment in which the rod was heated at a temperature of 600 to 1050 ° C. for a suitable time in a vacuum and then cooled to a room temperature at a suitable rate. Next, the round bar was processed by a swaging machine and a cold drawing machine to form a thin wire having a diameter of 0.5 mm. Finally, the wire was subjected to various heat treatments in an atmosphere of hydrogen, argon, air, or vacuum to obtain samples. The obtained sample had a metallic luster, and was about seven times as hard as pure gold. Table 3 shows the specific electrical resistance at 0 ° C. and the temperature coefficient of resistance at 0 to 800 ° C. of the sample obtained from various measurements.

[0054]

[Table 3]

Tables 4 and 5 show that thin films prepared by various manufacturing methods were subjected to heat treatment in vacuum under various conditions to obtain typical alloy samples of the present invention. The electric resistance and the temperature coefficient of resistance (TCR) at 0 to 800 ° C. are shown.

[0056]

[Table 4]

[0057]

[Table 5]

[0058]

The alloy of the present invention has an unprecedented excellent characteristic that the temperature coefficient of electric resistance is small from room temperature to high temperature. The conventionally used Au-Cr alloy is 0
100 × 10 ⁻⁶ ° C. in the temperature range of up to 120 ° C.
^Although a very small temperature coefficient value of ^-1 or less can be shown, there is a problem that the temperature coefficient at a high temperature is large and the electric resistance changes with time due to thermal aging at a high temperature. The present invention has solved this problem and has made it possible to obtain a stable material that does not change with time from room temperature to a high temperature. In addition, the temperature coefficient of electric resistance is as small as 500 × 10 ⁻⁶ ° C.- ¹ or less over 0 to 800 ° C., and the temperature coefficient is zero and the fluctuation of resistance value is 0.05% within any 100 ° C. Therefore, the present invention has an effect in that a sensor device such as an eddy current displacement sensor or a resistor using an electric resistance material can be used stably even at a high temperature where stable operation has conventionally been difficult. .

Since these features can be used not only at high temperatures but also at room temperature, they can be expected to exhibit their excellent characteristics in places where the temperature and surrounding conditions change drastically. Aerospace vessels, for example, are subject to rapid changes in temperature, from extremely low temperatures in the upper atmosphere and in outer space to high temperatures caused by rapid temperature rise when exposed to sunlight and atmospheric friction, but are installed in such environments. When a conventional material such as gold or copper is used for a wiring material of an electronic / electric circuit or the like, a transmitted signal level changes. In this respect, the material of the present invention has an effect of not causing such a change, and does not require a protective material or a correction circuit, and is also effective in reducing weight, cost, labor and the like. Moreover, the alloy of the present invention can be used in various environments due to its excellent corrosion resistance and stability over time of properties, and also has higher hardness and higher specific electrical resistance than pure gold,
Compared to the case of using pure gold, it has shape stability and high reading accuracy, and exhibits excellent characteristics when used as a sensor that is highly important to human life.

[Brief description of the drawings]

FIG. 1 is a characteristic diagram showing the temperature dependence of the specific electrical resistance of AuCr binary alloy samples having different compositions.

FIG. 2 is a characteristic diagram showing the composition dependence of the temperature at the center of the range where the temperature coefficient of resistance becomes zero and the order-disorder transformation temperature in an AuCr binary alloy sample.

FIG. 3 is a characteristic diagram showing the temperature dependence of the specific electrical resistance of an Au-13% Cr-15% Pd ternary alloy at 450 to 550 ° C.

Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI C22F 1/00 661 C22F 1/00 661B 686 686A 691 691C 691B 691Z

Claims (24)

[Claims] 1. An atomic weight ratio of 0.1 to 30% of chromium, a balance of gold and a small amount of impurities, and an average temperature coefficient of resistance at 0 to 800 ° C. of 500 × 10 ⁻⁶ ° C.- ¹ or less. An electric resistance alloy characterized by the above-mentioned. 2. An atomic weight ratio of 0.5 to 30% of chromium, a balance of gold and a small amount of impurities, and an average temperature coefficient of resistance at 200 to 800 ° C. of 400 × 10 ⁻⁶ ° C. ^−1.
An electric resistance alloy having the following. 3. An atomic weight ratio of 0.1 to 30% of chromium and 20% or less of iron, 20% or less of nickel, 20% or less of manganese, 20% or less of manganese, 20% or less of silver, and 20% or less of platinum as auxiliary components. , Palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or more of carbon 2% or less, boron 2% or less and rare earth element 5% or less 0.001 to 40% in total, the balance of gold and a small amount of impurities, and the average temperature coefficient of resistance at 0 to 800 ° C. ^Has an electric resistance of 500 × 10 ⁻⁶ ° C. ⁻¹ or less. 4. An atomic weight ratio of 0.5 to 30% of chromium and, as accessory components, iron 20% or less, nickel 20% or less, cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less. , Palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or two or more of 2% or less of carbon, 2% or less of boron, and 5% or less of rare earth element in total of 0.001 to 40%, the balance being gold and a small amount of impurities, and the average temperature coefficient of resistance at 200 to 800 ° C. Is 400 × 10 ⁻⁶ ° C. ⁻¹
An electric resistance alloy having the following. 5. An alloy comprising 0.1 to 30% of chromium in terms of atomic weight and a balance of gold and a small amount of impurities is formed into a desired shape such as a wire or a plate by hot working or cold working. It comprises a step of heating for 2 seconds to 100 hours in a reducing atmosphere, a non-oxidizing atmosphere or a vacuum at 200 to 1050 ° C, and an average temperature coefficient of resistance at 0 to 800 ° C of 500 × 10 ⁻⁶ · ° C ^-1 or less. A method for producing an electric resistance alloy, comprising obtaining an alloy having the following. 6. An alloy comprising 0.5 to 30% of chromium in terms of atomic weight and the balance of gold and a small amount of impurities is formed into a desired shape such as a wire or a plate by hot working or cold working. A heating step in a reducing atmosphere, a non-oxidizing atmosphere, or a vacuum at 200 to 1050 ° C. for 2 seconds to 100 hours, and an average temperature coefficient of resistance at 200 to 800 ° C. of 400 × 10 ⁻⁶ · ° C. ⁻¹ A method for producing an electric resistance alloy, comprising obtaining an alloy having the following. 7. An atomic weight ratio of 0.1 to 30% of chromium and 20% or less of iron, 20% or less of nickel, 20% or less of cobalt, 20% or less of manganese, 20% or less of silver, and 20% or less of platinum as auxiliary components. , Palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
An alloy having an alloy composition of 0.001 to 40% in total of one or more of 2% or less of carbon, 2% or less of boron and 5% or less of a rare earth element, and a balance of gold and a small amount of impurities is forged, cast and cast. After forming into a desired shape such as a wire or a plate by hot working or cold working, 200 to 10
A step of heating in a reducing atmosphere, a non-oxidizing atmosphere or a vacuum at 50 ° C. for 2 seconds or more and 100 hours or less;
A method for producing an electric resistance alloy, characterized in that an alloy having × 10 ⁻⁶ ° C. ⁻¹ or less is obtained. 8. An atomic weight ratio of 0.5 to 30% of chromium and 20% or less of iron, 20% or less of nickel, 20% or less of manganese, 20% or less of manganese, 20% or less of silver, and 20% or less of platinum as auxiliary components. , Palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
An alloy having an alloy composition of 0.001 to 40% in total of one or more of 2% or less of carbon, 2% or less of boron and 5% or less of a rare earth element, and a balance of gold and a small amount of impurities is forged, cast and cast. After forming into a desired shape such as a wire or a plate by hot working or cold working, 200 to 10
A step of heating for 2 seconds to 100 hours in a reducing atmosphere, a non-oxidizing atmosphere or a vacuum at 50 ° C., and an average temperature coefficient of resistance at 200 to 800 ° C. of 4
A method for producing an electric resistance alloy, characterized in that an alloy having 00 × 10 ⁻⁶ ° C. ⁻¹ or less is obtained. 9. An atomic weight ratio of 0.1 to 30% of chromium, a balance of gold and a small amount of impurities, and an average temperature coefficient of resistance at 0 to 800 ° C. of 500 × 10 ⁻⁶ · ° C. ^-1 or less. An eddy current displacement sensor comprising an electric resistance alloy. 10. An atomic weight ratio of 0.5 to 30% of chromium, the balance of gold and a small amount of impurities, and 200 to 800 ° C.
Average temperature coefficient of resistance at 400 × 10 ⁻⁶ ℃
An eddy current displacement sensor, comprising an electric resistance alloy having ^-1 or less. 11. An atomic weight ratio of 0.1 to 30% of chromium and 20% or less of iron and 20% or less of nickel as accessory components.
Cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or more of carbon 2% or less, boron 2% or less and rare earth element 5% or less 0.001 to 40% in total, the balance of gold and a small amount of impurities, and the average temperature coefficient of resistance at 0 to 800 ° C. An eddy current type displacement sensor characterized by comprising an electric resistance alloy having a resistance of 500 × 10 ⁻⁶ ° C. ⁻¹ or less. 12. An atomic weight ratio of 0.5 to 30% of chromium and 20% or less of iron and 20% or less of nickel as auxiliary components.
Cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or two or more of 2% or less of carbon, 2% or less of boron, and 5% or less of rare earth element in total of 0.001 to 40%, the balance being gold and a small amount of impurities, and the average temperature coefficient of resistance at 200 to 800 ° C. Is 400 × 10 ⁻⁶ ° C. ⁻¹
An eddy current type displacement sensor comprising an electric resistance alloy having the following. 13. An electric resistance alloy obtained by the production method according to claim 5 is formed into a desired shape such as a spiral shape or a toroidal shape, and is fixed to an inorganic or organic electric insulator as it is. 10. The eddy current displacement sensor according to claim 9, wherein the sensor is formed by being embedded in the insulator. 14. An electric resistance alloy obtained by the production method according to claim 6, which is formed into a desired shape such as a spiral shape or a toroidal shape, and is fixed to an inorganic or organic electric insulator as it is. The eddy current type displacement sensor according to claim 9, wherein the eddy current type displacement sensor is formed by being embedded in the insulator. 15. An electric resistance alloy obtained by the production method according to claim 7 is formed into a desired shape such as a spiral shape or a toroidal shape, and is fixed to an inorganic or organic electric insulator as it is. The eddy current type displacement sensor according to claim 11, wherein the eddy current type displacement sensor is formed by being embedded in the insulator. 16. An electric resistance alloy obtained by the production method according to claim 8 is formed into a desired shape such as a spiral shape or a toroidal shape, and is fixed to an inorganic or organic electric insulator as it is. The eddy current type displacement sensor according to claim 11, wherein the eddy current type displacement sensor is formed by being embedded in the insulator. 17. An atomic weight ratio of 0.1 to 30% of chromium, a balance of gold and a small amount of impurities, and an average temperature coefficient of resistance at 0 to 800 ° C. of 500 × 10 ⁻⁶ ° C.- ¹ or less. A resistor comprising an electric resistance alloy. 18. An atomic weight ratio of 0.5 to 30% of chromium, the balance of gold and a small amount of impurities at 200 to 800 ° C.
Average temperature coefficient of resistance at 400 × 10 ⁻⁶ ℃
^A resistor comprising an electric resistance alloy having ^-1 or less. 19. An atomic weight ratio of 0.1 to 30% of chromium and 20% or less of iron and 20% or less of nickel as subcomponents.
Cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or more of carbon 2% or less, boron 2% or less and rare earth element 5% or less 0.001 to 40% in total, the balance of gold and a small amount of impurities, and the average temperature coefficient of resistance at 0 to 800 ° C. Is made of an electric resistance alloy having a resistance of 500 × 10 ⁻⁶ ° C. ⁻¹ or less. 20. In terms of atomic weight ratio, 0.5 to 30% of chromium and 20% or less of iron and 20% or less of nickel as subcomponents.
Cobalt 20% or less, manganese 20% or less, silver 20% or less, platinum 20% or less, palladium 40% or less, rhodium 10% or less, iridium 10% or less, osmium 10%
Hereafter, ruthenium 10% or less, vanadium 5% or less, titanium 5% or less, zirconium 5% or less, hafnium 5%
Molybdenum 8% or less, niobium 5% or less, tungsten 10% or less, tantalum 8% or less, gallium 3% or less, germanium 3% or less, indium 3% or less, beryllium 3% or less, tin 5% or less, antimony 3% Hereinafter, copper 5% or less, aluminum 5% or less, silicon 5% or less,
One or two or more of 2% or less of carbon, 2% or less of boron, and 5% or less of rare earth element in total of 0.001 to 40%, the balance being gold and a small amount of impurities, and the average temperature coefficient of resistance at 200 to 800 ° C. Is 400 × 10 ⁻⁶ ° C. ⁻¹
A resistor comprising an electric resistance alloy having the following. 21. A method according to claim 5, wherein said electric resistance alloy is formed into a desired shape such as a spiral shape or a toroidal shape and fixed as it is to an inorganic or organic electric insulator. 18. The resistor according to claim 17, wherein the resistor is formed by being embedded in the insulator. 22. A method according to claim 6, wherein said electric resistance alloy is formed into a desired shape such as a spiral shape or a toroidal shape and fixed as it is to an inorganic or organic electric insulator. 19. The resistor according to claim 18, wherein the resistor is formed by being buried in the insulator. 23. A method according to claim 7, wherein said electric resistance alloy is formed into a desired shape such as a spiral shape or a toroidal shape and fixed as it is to an inorganic or organic electric insulator. 20. The resistor according to claim 19, wherein the resistor is formed by being embedded in the insulator. 24. A method according to claim 8, wherein said electric resistance alloy is formed into a desired shape such as a spiral shape or a toroidal shape and fixed to an inorganic or organic electric insulator as it is. 21. The resistor according to claim 20, wherein the resistor is formed by being embedded in the insulator.