JPH1027838A - Substrate carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying device, which can carry substrates without concealing undesirably the substrates by the comparatively simple constitution and moreover, can correspond also to carrying of the substrates of types of different sizes. SOLUTION: This device is constituted into such a structure that thin plate- shaped substrates are carried in a constant direction in a state that the substrates are placed on a plurality of receiving rollers 3 arranged in the carrying direction of the substrates almost vertically to the rollers 3. In this case, base plates arranged at sites adjacent to the receiving rollers 3 almost vertically along the carrying direction, Bernoulli chucks 2 arranged on these base plates dispersedly in the carrying direction and a substrate carrying means are provided and an attracting force due to the chucks 2 is made to act on the surfaces on one side of the surfaces of the above substrates. Thereby, the attitude of the substrates is held in a state almost vertical to the rollers 3 without bringing the substrates into contact with the chucks 2 on the rollers 3 and in this state, the substrates are carried in the constant direction by the above carrying means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly to an improvement of a transfer apparatus for transferring a rectangular liquid crystal glass substrate, a printed circuit board, a semiconductor substrate or the like in a non-contact vertical state in a certain direction.

[0002]

2. Description of the Related Art In general, a rectangular thin plate-like substrate such as a liquid crystal glass substrate, a printed substrate, or a semiconductor substrate is placed in a horizontal state at a respective manufacturing position in a manufacturing process or the like in accordance with the manufacturing content. And transported using a transport roller.

[0003] For example, the former transport method using a transport belt has features that the apparatus can be simplified and the apparatus price can be reduced, but dust and the like easily adhere to the substrate from the transport belt. The latter transport method using a transport roller transports the substrate with both ends of the substrate placed on the roller, and although the same effect as the former can be expected, the substrate portion placed on the roller The substrate is apt to be scratched, which requires a disposal allowance, and there is a problem that the substrate becomes undesirably large. In addition, since the substrate is horizontally transferred, not only dust easily adheres to the substrate, but also the substrate is easily bent during the transfer. Therefore, for example, there is also a problem that accuracy in a substrate inspection process is impaired.

[0004]

Therefore, conventionally, for example, a transfer device shown in FIG. 9 has been proposed (see Japanese Patent Application Laid-Open No. 5-36658). In the drawing, reference numeral A denotes a base plate which is disposed substantially vertically along the transport direction of the substrate GP, and a plurality of transport rollers B are arranged below the base plate in the transport direction. I have. The transport roller B is driven to rotate in a predetermined direction by driving means including a drive motor (not shown). A protruding portion C is arranged on an upper portion of the base plate A, and a U-shaped guide groove D is formed on a lower surface thereof in the transport direction. Fluid passages E, E are opened (E
a, Ea), and a fluid source F such as clean air is connected to the fluid passages E, E.

The transfer of the substrate GP by this transfer device is performed as follows. First, for example, clean air is supplied from the fluid source F to the fluid passages E, E, and the openings Ea, E
Adjust so that the blowing strength from a becomes uniform. In this state, the transport roller B is rotated and driven in a fixed direction by a driving unit (not shown), and the substrate GP is placed on the transport roller B in a vertical state. Thereby, the substrate GP advances by the transport roller B, and the upper end portion of the substrate GP is inserted into the guide groove D. In this state, the posture of the substrate GP is held in a vertical state by the uniform clean air blown to both surfaces thereof. The substrate GP is transported in a certain direction by the rotation of the transport roller B while maintaining this vertical state.

According to this transfer device, since the substrate GP can be transferred in a non-contact manner, not only the bending and scratching of the substrate GP during the transfer process are eliminated, but also the adhesion of dust is reduced. Therefore, for example, the inspection accuracy in the inspection process of the substrate GP can be effectively improved.

However, in this transfer method, the substrate G
Since the upper end portion of P is inserted into the guide groove D of the protruding portion C, for example, when it is necessary to inspect the entire surface of the substrate GP in an inspection process during transport, the portion inserted into the guide groove D Cannot be tested.

In order to increase the operation rate of the production line,
When flowing substrates GP of various sizes, the distance between the transport roller B and the protruding portion C must be adjusted.
Since the adjustment has to be performed over the entire length in the transport direction, there is also a problem that the operation of changing the type becomes complicated.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a substrate transfer apparatus which does not undesirably conceal a substrate with a relatively simple structure and which can cope with the transfer of products of different sizes. It is in.

[0010]

SUMMARY OF THE INVENTION Accordingly, in order to achieve the above-mentioned object, the present invention provides a thin plate-like substrate which is placed almost vertically on a plurality of receiving rollers arranged in a transport direction and is fixed in a certain direction. A transfer device for transferring substrates to the receiving roaming device.
A base plate disposed substantially vertically along a transfer direction at a portion adjacent to the base plate, a Bernoulli chuck disposed dispersedly in the transfer direction on the base plate, and a substrate transfer means. By applying the suction force of the Bernoulli chuck to one surface of the substrate, the substrate is held in a substantially vertical state without receiving the substrate on the roller, and the substrate is transported in this state. According to a second aspect of the present invention, the receiving rollers are arranged so as to be inclined upward in the transport direction.

According to a third aspect of the present invention, a thin plate-like substrate is cut out one by one from a loader, and is placed almost vertically on a plurality of receiving rollers arranged in the transport direction. A substrate transfer device for transferring a substrate in a fixed direction, comprising: a base plate disposed substantially vertically along a transfer direction at a portion adjacent to the receiving roller; And hold the substrate in a substantially vertical state without contact.
Bernoulli chuck, substrate transfer means, and receiving roll
A loader portion disposed at the start end side of the rack, the loader portion accommodating at least a substrate in a vertical state at a constant interval, and intermittently intermittently in a certain direction in relation to cutting out of the substrate. And a cutout in which a plurality of rollers are arranged at the lower end of a vertically movable support arm so as to be positioned on substantially the same plane, and a base corresponding to the raised position of the cutout. A second Bernoulli chuck disposed on the base plate portion, the substrate is positioned on the roller of the cut-out portion in the lowered state based on the movement of the tray, and the substrate is raised by raising the cut-out portion. Is mounted on a roller and cut out from the tray, and in the cut-out state, the substrate is held substantially vertically by a second Bernoulli chuck, and is transported to a receiving roller side by transport means. According to a fourth aspect of the present invention, the receiving roller and the loader of the loader section are provided. And characterized by being arranged such that the rising gradient toward the conveying direction.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of the present invention will be described with reference to FIGS. In the drawing, a transfer device according to the present invention has a loading portion P1 and a starting end portion having a loading portion P1.
An inspection unit P2 disposed adjacent to the inspection unit P2;
And an unloader P3 disposed adjacent to the end of the unloader. In particular, the loading section P1 and the unloading section P
Reference numeral 3 is configured so that basic operations and functions are almost the same. For example, the loading section P1 includes the transport section P1A and the cutout section P1B of the substrate, and the unloading section P3 includes the transport section P3A.
And an accommodation portion P3B for the substrate.
Conveying unit P1A, conveying unit P3A, and cutout portion P1B of substrate
The basic operations and functions of the board and the substrate accommodating portion P3B are substantially the same.

A base plate 1 is disposed at a position along the transport line SL of the substrate GP so as to extend substantially vertically across a loading section P1, an inspection section P2, and an unloading section P3. Although the base plate 1 is appropriately divided and arranged, it can be integrated. A plurality of first Bernoulli chucks 2 are arranged on the front side of the base plate 1 (on the side of the transport line SL) at appropriate intervals in relation to the size of the substrate GP. A plurality of receiving rollers 3 are arranged at regular intervals in the lower part. In particular, this receiving roller 3 forms a transport line SL for the substrate GP,
The transport line SL is configured so as to be inclined upward from the loading section P1 toward the inspection section P2 and the unloading section P3. That is, the respective receiving rollers 3 are arranged so as to be inclined upward in the transport direction.

As described above, the loading section P1 is connected to the transport section P1A.
And the cut-out portion P1B of the substrate. The transport portion P1A is configured as follows. That is, the second Bernoulli chucks 2a to 2d (the first chuck 2a and the second chuck 2a) are provided on the surface side of the base plate 1 which is arranged substantially vertically.
b, the third chuck 2c, and the fourth chuck 2d) are arranged at appropriate intervals. In particular, the transport line SL of the inspection unit P2 is provided below the third chuck 2c and the fourth chuck 2d.
A plurality of receiving rollers 3 are arranged so as to be continuous. A pulley 4 is provided at one end of the back side of the base plate 1.
a pulse motor 4 having a driven motor at the other end.
4b are arranged respectively, and each pulley 4b
A belt 5 is stretched between a and 4b. This belt 5
One end of a U-shaped arm 6 positioned so as to straddle the upper end portion of the base plate 1 is fixed to a predetermined portion, and the other end (surface side) is provided with a claw as a conveying means. 7 is a base plate 1
Are fixed so as to be substantially at right angles. A guide block 8 is fixed to an appropriate portion located on the back side of the arm 6, and its U-shaped guide recess is formed by a base.
It is slidably engaged with a long rail portion 9 fixed to the back side of the base plate 1.

On the other hand, the cutout portion P1B which cuts out the substrate GP one by one and supplies it to the transport portion P1A is configured as follows. That is, for example, a cylinder 10 is disposed below the base plate 1, and a first support arm 11 is fixed to a tip of a rod 10a thereof. This first
At the end of the support arm 11, a second support arm 12 having a thinner and inverted T shape is fixed so as to be substantially parallel to the rod 10a.
A plurality of rollers 1 are provided at the lower end of the side facing the base plate 1.
3 are arranged in the same plane. or,
A tray 14 is arranged at a position corresponding to the lowered position of the second support arm 12. The tray 14 includes, for example, a plurality of rod-shaped spacers 16 on a pair of side plates 15, 15.
The spacers 16 are distributed and arranged so that the side surfaces thereof have a substantially U-shape, and the abacus-like grooves 16a are formed in each spacer 16 at a constant pitch. The substrate GP is inserted and arranged in each groove 16a of these spacers 16. In particular, the tray 14 is configured to intermittently move at a constant pitch interval by, for example, a slider 17.

Next, a method of transferring the substrate GP by the transfer device will be described with reference to FIGS. First, as shown in FIG. 8, the substrate GP is placed on the right tray 14 in the figure.
Is accommodated so as to be inserted into the groove 16 a of the spacer 16. Thereafter, the tray 14 is moved to the left along with the slider 17, and the leftmost substrate of the tray 14 is stopped at the cutout position. Then, the setting is made so as to intermittently move in the leftward direction by one pitch in association with the vertical movement of the cylinder-10. Next, as shown in FIG. 5 and FIG.
When the supporting arms 11 and 12 are lowered to the position indicated by the two-dot chain line and stopped, the tray 14 moves by one pitch. Thereby, the roller 13 of the second support arm 12 is
The lower end of the substrate GP is located at the upper part of the substrate GP. When the cylinder 10 is raised in this state, the substrate G
P is the groove 1 of each spacer 16 located particularly above.
It rises while being positioned by 6a. Before the substrate GP has completely escaped from the groove 16a of the spacer 16, the upper portion of the substrate GP has the first chuck 2a,
The influence of the attitude control function by the non-contact suction of the second chuck 2b is reached. Accordingly, the substrate GP is provided with the groove 16 of the spacer 16.
a and the first chuck 2a and the second chuck 2b perform position regulation and attitude control. Second support arm 12
Rises to the position shown by the solid line and stops, the substrate GP is completely cut out of the tray 14 and the groove 16 of the spacer 16 is removed.
You will completely escape from a. In this state,
The posture of the substrate GP is controlled almost vertically by non-contact suction of the first chuck 2a and the second chuck 2b.

Next, when the pulse motor 4 is rotated in the forward direction, the arm 6 fixed to the belt 5 is moved with the guide block 8 engaged with the rail portion 9 as shown in FIG. 3, the claw 7 moves in the same direction. As a result, the substrate GP is transported leftward while being caught by the claws 7 and controlled in a vertical posture. At this time, the lower end of the substrate GP moves smoothly because it is placed on the roller 13, and is eventually transferred to the transport line SL of the receiving roller 3. When the substrate GP is transported to a predetermined position of the inspection section P2, a pulse mode
The tab 4 stops rotating, and accordingly, the movement of the pawl 7 also stops. At the same time, the pulse motor 4 starts rotating in the reverse direction. Accordingly, the pawl 7 separates from the substrate GP, the arm 6 and the pawl 7 return to the origin, and waits for cutting out the next substrate GP. In this state, the substrate GP is continuously sucked by the first Bernoulli chuck 2 in a non-contact state. When the substrate GP stops at the inspection position, inspection is performed on predetermined inspection items such as the quality and appearance of the substrate. When the inspection is completed, the substrate GP is unlocked.
The paper P is transported to the transport section P3A of the roller section P3, and is placed on the roller (13) of the cutout section P3B. Hereinafter, the sheets are stored one by one in the tray 14 by an operation reverse to the operation of the loading section P1. The substrate GP conveyed to the inspection unit P2 is conveyed in a certain direction in a state of being pressed by a subsequent substrate. However, a claw is provided at each work position, and each claw is individually hooked and conveyed by each claw. You can also.

According to this embodiment, the substrate GP placed on the transport line SL is transported in a fixed direction with its back side controlled substantially vertically by non-contact suction of the Bernoulli chuck 2. This eliminates the need for a throw-away allowance for transport, and the size of the substrate GP can be reduced accordingly.

In addition, the substrate GP is transported in a state in which the back side is controlled in attitude by non-contact suction of the Bernoulli chuck 2, and the size of the substrate GP is changed because there is no transport means in the upper part. Even if it is done, it can be transported accurately. Therefore, it is possible to transport varieties of different sizes in a mixed state without requiring complicated switching of equipment.

In addition, since the back surface of the substrate GP is non-contactly adsorbed by the Bernoulli chuck 2, the entire front surface is open. Therefore, for example, the inspection unit P2 can perform a predetermined inspection over the entire surface of the substrate GP without any special measures.

In particular, since the transport line SL is provided with a rising gradient of, for example, about 10 ° from the loading section P1 toward the inspection section P2 and the unloading section P3, the substrate GP is held by the claws 7.
When the substrate GP is conveyed, a braking force is constantly acting on the substrate GP. Therefore, when the substrate GP is stopped, the substrate GP does not go too far due to inertia, and can be stopped at a predetermined position.

Further, in the loading section P1 (or the unloading section P3), the substrate GP is cut out from the tray 14 by the cutting section P.
When the substrate GP is cut by 1B, the position of the substrate GP is controlled by the position regulation by the groove 16a of the spacer 16 and the non-contact suction of the second Bernoulli chucks 2a and 2b. Do not fall,
It can be cut out smoothly.

It should be noted that the present invention is not limited to the above-described embodiment, and for example, the transport line may be formed horizontally. The means for transporting the substrate may be a means using a pusher that reciprocates, an active rotation of a receiving roller, or the like in addition to the claw. Further, the number of the Bernoulli chucks can be appropriately increased or decreased. Further, the structure of the loading section and the unloading section can be changed to a structure other than the elevator system, and the structure can be manually supplied to the transport section.

[0024]

As described above, according to the present invention, the substrate placed on the transport line is transported in a fixed direction with its back side controlled almost vertically by non-contact suction of the Bernoulli chuck. This eliminates the need for a throw-away allowance for transport, and the size of the substrate can be reduced accordingly.

In addition, the substrate is conveyed in a state where the back surface of the substrate is posture-controlled by non-contact suction of the Bernoulli chuck, and there is no conveying means in the upper part.
Even if the size of the substrate is changed, it can be transported accurately. Therefore, it is possible to transport varieties of different sizes in a mixed state without requiring complicated switching of equipment.

Further, since the back side of the substrate is non-contactly adsorbed by the Bernoulli chuck, the entire front side is open. Therefore, for example, in the inspection section, the predetermined inspection can be performed over the entire surface of the substrate.

In particular, if the transport line is provided with an upward gradient in the transport direction, a brake force will always act on the substrate when transporting the substrate. Therefore, when the substrate is stopped, the substrate does not go too far due to inertia, and the substrate can be reliably stopped at a predetermined position.

Further, a second Bernoulli chuck is provided at a cut-out position of the substrate in the loading section.
If the tray is provided with a groove for separating the substrate, when the substrate is cut out from the tray by the cutout portion, the substrate is restricted in position by the groove of the spacer, and non-contact suction of the second Bernoulli chuck is performed. , The substrate can be smoothly cut without falling down in the cutting process.

[Brief description of the drawings]

FIG. 1 is a front view showing one embodiment of the present invention.

FIG. 2 is a front view of a transport unit according to the transport device of the present invention.

FIG. 3 is a plan view of FIG. 2;

FIG. 4 is a view taken in the direction of arrows XX in FIG. 2;

FIG. 5 is an enlarged front view of a cutout portion of a substrate according to the transfer device of the present invention.

FIG. 6 is a side view of FIG. 5;

FIG. 7 is a sectional view taken along line YY of FIG. 5;

FIG. 8 is a side view of a tray of a substrate according to the transfer apparatus of the present invention.

FIG. 9 is a side view of a conventional example in a partially broken state.

[Explanation of symbols]

 GP board P1 Loader section P1A Transfer section P1B Board cutout section P2 Inspection section P3 Unloader section P3A Transfer section P3B Board storage section SL Transfer line 1 Base plate 2 First Bernoulli chuck 2a to 2d Second Bernoulli chuck 3 Receiving roller 4 Pulse motor 4a, 4b pulley 5 Belt 6 Arm 7 Claw 8 Guide block 9 Rail 10 Cylinder 11, 12 Support arm 13 Roll La 14 Tray 15 Side plate 16 Spacer 16a Groove 17 Slider

Claims (4)

[Claims] An apparatus for transporting a substrate in a fixed direction in a state where a thin plate-like substrate is placed substantially vertically on a plurality of receiving rollers arranged in the transport direction, wherein the substrate is adjacent to the receiving roller. A base plate disposed substantially vertically along the transfer direction at a portion to be transferred, a Bernoulli chuck dispersively disposed in the transfer direction on the base plate, and a transfer means for the substrate. By applying the suction force of the Bernoulli chuck to one surface, the substrate is held in a substantially vertical state without contact with the Bernoulli chuck on the roller, and the substrate is kept constant by the transport means in this state. A substrate transfer device for transferring a substrate in a direction. 2. The substrate transfer apparatus according to claim 1, wherein said receiving rollers are arranged so as to be inclined upward in a transfer direction. 3. A substrate transfer apparatus for cutting a thin plate-like substrate one by one from a loader portion and transferring the substrate in a fixed direction while being placed substantially vertically on a plurality of receiving rollers arranged in the transfer direction. A base plate disposed substantially vertically along a conveying direction at a portion adjacent to the receiving roller;
A first Bernoulli chuck that is arranged in a dispersing manner in the transport direction on the substrate and holds the substrate in a substantially vertical state in a non-contact manner;
Means for transporting the substrate, and a roller arranged on the starting end side of the receiving roller.
A loading section, wherein the loading section at least holds the substrate in a vertical state at a constant interval, and intermittently moves in a fixed direction in relation to the cutting of the substrate; A cut-out portion in which a plurality of rollers are arranged at substantially the same plane at the lower end of a possible support arm, and a second portion disposed on a base plate portion corresponding to the raised position of the cut-out portion. The substrate is positioned on the roller of the cut-out portion in the lowered state based on the movement of the tray, and the substrate is placed on the roller by raising the cut-out portion. Wherein the substrate is held substantially vertically by a second Bernoulli chuck in the cutout state, and is transferred to a receiving roller by a transfer means. 4. The substrate transfer apparatus according to claim 3, wherein the receiving rollers and the rollers of the loader section are arranged so as to be inclined upward in the transfer direction.