JPH10135388A - Manufacture of ic - Google Patents

Manufacture of ic

Info

Publication number
JPH10135388A
JPH10135388A JP8291983A JP29198396A JPH10135388A JP H10135388 A JPH10135388 A JP H10135388A JP 8291983 A JP8291983 A JP 8291983A JP 29198396 A JP29198396 A JP 29198396A JP H10135388 A JPH10135388 A JP H10135388A
Authority
JP
Japan
Prior art keywords
lead
mold
chip
frame
window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP8291983A
Other languages
Japanese (ja)
Inventor
Toru Matsubara
亨 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Macoho Co Ltd
Original Assignee
Macoho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macoho Co Ltd filed Critical Macoho Co Ltd
Priority to JP8291983A priority Critical patent/JPH10135388A/en
Publication of JPH10135388A publication Critical patent/JPH10135388A/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an IC with high quality and high accuracy. SOLUTION: An IC chip 3 is arranged between the end parts of a lead and wire bonded 11 with the lead before being packaged with a synthetic resin to form an IC mold 4. Subsequently, IC leads of predetermined length are projected from respective sides of the IC mold 4. A lead forming mask, where the part corresponding to the IC leads of predetermined length extending from the lead is coated along with the IC mold 4 to leave window parts 6, is then applied to the upper surface of the IC mold 4 and the lead frame 1. Thereafter, water 9 mixed with abrasive grains is jetted under high pressure to the window parts 6 of the lead forming mask 5 from a wet blast machine 7 in order to remove the unnecessary part corresponding to the window parts 6 thus forming an IC lead of required length.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ICの製造方法に
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an IC.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来の
ICの製造方法は、図7〜図10に図示したように、方
形状の外枠の各辺から内側に向かって突出するアウター
リード21,アウターリード21に連設される方形枠状のタ
イバー22,タイバー22の各辺にしてアウターリード21に
対応する位置から内側に向かって突出するインナーリー
ド23を有し、各インナーリード23の端部間に中央プレー
ト26を有するリードフレーム20の該中央プレート26にI
Cチップ24を配設し、続いて、このICチップ24とイン
ナーリード23とをワイヤボンディングしてICチップ24
とインナーリード23とをボンディングワイヤ25で接続
し、続いて、ICチップ24,ボンディングワイヤ25及び
ワイヤボンディング部を合成樹脂でパッケージしてIC
モールド27を形成し、続いて、アウターリード21とイン
ナーリード23とを連設する枠状のタイバー22の不要部分
をプレス加工やレーザ加工により除去してICモールド
27に所定長のICリード28を形成するという工程をとる
のが一般的である。 ここで、タイバー22を形成する理
由について述べると、リードフレーム20を形成した時
に、最初から所定長さのICリード28を形成しておく
と、ICリード28が途中工程で変形するなどの問題があ
る。従って、ICリード28の変形を避けるために、IC
リード28を枠状のタイバー22で分断してアウターリード
21とインナーリード22を形成している。よって、ICモ
ールド27に所定長のICリード28を形成するためには、
枠状のタイバー22を分断する必要がある。
2. Description of the Related Art As shown in FIGS. 7 to 10, a conventional method of manufacturing an IC includes an outer lead 21 projecting inward from each side of a rectangular outer frame. A tie bar 22 having a rectangular frame shape connected to the outer lead 21 and inner leads 23 protruding inward from positions corresponding to the outer leads 21 on respective sides of the tie bar 22; The center plate 26 of the lead frame 20 having a center plate 26 between
A C chip 24 is provided, and then the IC chip 24 and the inner leads 23 are wire-bonded to each other.
And the inner lead 23 are connected by a bonding wire 25. Subsequently, the IC chip 24, the bonding wire 25 and the wire bonding portion are packaged with a synthetic resin to form an IC.
A mold 27 is formed, and then unnecessary portions of the frame-shaped tie bar 22 connecting the outer lead 21 and the inner lead 23 are removed by press working or laser processing to form an IC mold.
Generally, a step of forming an IC lead 28 having a predetermined length on 27 is performed. Here, the reason for forming the tie bar 22 will be described. If the IC lead 28 having a predetermined length is formed from the beginning when the lead frame 20 is formed, there is a problem that the IC lead 28 is deformed in the middle of the process. is there. Therefore, in order to avoid deformation of the IC lead 28,
Outer lead by dividing lead 28 with frame-shaped tie bar 22
21 and an inner lead 22 are formed. Therefore, in order to form the IC lead 28 having a predetermined length on the IC mold 27,
The frame-shaped tie bar 22 needs to be divided.

【0003】また、タイバー22は、ICモールド27形成
時、モールドが所定の位置より余分に流れないようにす
る役割を持っている。
The tie bar 22 has a role of preventing the mold from flowing more than a predetermined position when the IC mold 27 is formed.

【0004】ところで、これまでの枠状のタイバー22の
不要部分を分断・除去する方法としては、まず、プレス
加工で除去する方法があるが、このプレス加工で除去す
る方法では、プレス設備の設備投資に費用が多くかかる
と共に、リードフレーム20に付着した合成樹脂によりプ
レスの金型寿命が短くなったり、リード部の変形が生じ
てしまうという問題がある。
[0004] As a conventional method of cutting and removing unnecessary portions of the frame-shaped tie bar 22, there is a method of removing by press working. There is a problem that the investment is expensive and that the synthetic resin attached to the lead frame 20 shortens the life of the press die and causes deformation of the lead portion.

【0005】また、タイバー22の不要部分をレーザ加工
により除去する方法もあるが、この方法は、レーザによ
りリードフレーム20のタイバー22の不要部分を除去する
時に、除去クズがリードフレーム20に付着してリードフ
レーム20に汚れを生じたり、リードフレーム20にICモ
ールド27形成時に付着した余分(不要)な合成樹脂がレ
ーザにより溶けてリードフレーム20に汚れを生じるよう
な問題がある。そこで、リードフレーム20に生じた汚れ
を除去するための汚れ除去設備を用いて上記汚れを除去
する作業が必要であった。
There is also a method of removing unnecessary portions of the tie bar 22 by laser processing. However, in this method, when the unnecessary portion of the tie bar 22 of the lead frame 20 is removed by a laser, the removal dust adheres to the lead frame 20. Therefore, there is a problem that the lead frame 20 is contaminated, or an unnecessary (unnecessary) synthetic resin adhered to the lead frame 20 when the IC mold 27 is formed is melted by the laser, and the lead frame 20 is contaminated. Therefore, it has been necessary to perform an operation of removing the dirt using a dirt removing device for removing dirt generated on the lead frame 20.

【0006】以上のように、従来のリードフレーム20
は、外枠内にアウターリード21,インナーリード23及び
タイバー22を各々形成しなければならず非常に厄介であ
る。
As described above, the conventional lead frame 20
In this case, the outer leads 21, the inner leads 23 and the tie bars 22 must be formed in the outer frame, which is very troublesome.

【0007】本発明は、前記従来の課題を解決するため
になされたものであり、ICモールドに所定長のICリ
ードを高品質,高精度しかも簡易且つ低コストで形成す
ることができるICの製造方法を提供するものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and it is an object of the present invention to manufacture an IC in which an IC lead having a predetermined length can be formed on an IC mold with high quality, high accuracy, easily and at low cost. It provides a method.

【0008】[0008]

【課題を解決するための手段】添付図面を参照して本発
明の要旨を説明する。
The gist of the present invention will be described with reference to the accompanying drawings.

【0009】方形状のリードフレーム1の外枠の各辺か
ら内側に向かって突出するリード2を設け、該リード2
の端部間にICチップ3を配設し、続いて、このICチ
ップ3とリード2とをワイヤボンディングしてICチッ
プ3とリード2とをボンディングワイヤ11で接続し、続
いて、該ICチップ3,ボンディングワイヤ11及びワイ
ヤボンディング部を合成樹脂でパッケージしてICモー
ルド4を形成し、続いて、リード2を所定長さのICリ
ード10にしICモールド4の各辺から所定長さのICリ
ード10が突出するようにする為、リード2に延設される
所定長さのICリード10に対応する部分及びICモール
ド4を被覆し、その余の部分を窓部6としたリード形成
マスク5を、ICモールド4及びリードフレーム1の上
面に被覆し、該リード形成マスク5の窓部6にウエット
ブラスト機7から砥粒混入水9を高圧噴射して窓部6に
対応する不要部分を除去し必要長さのICリード10を形
成することを特徴とするICの製造方法に係るものであ
る。
A lead 2 projecting inward from each side of the outer frame of a rectangular lead frame 1 is provided.
The IC chip 3 is disposed between the ends of the IC chip 3. Subsequently, the IC chip 3 and the lead 2 are wire-bonded to connect the IC chip 3 and the lead 2 with the bonding wire 11, and then the IC chip 3 3. The IC wire 4 is formed by packaging the bonding wire 11 and the wire bonding portion with a synthetic resin, and then the lead 2 is replaced with the IC lead 10 having a predetermined length, and the IC lead 4 having a predetermined length from each side of the IC mold 4 is formed. In order for the lead 10 to protrude, a part corresponding to the IC lead 10 of a predetermined length extending to the lead 2 and the IC mold 4 are covered, and the lead forming mask 5 having the remaining part as the window part 6 is Then, the upper surface of the IC mold 4 and the lead frame 1 are coated, and abrasive window 9 is sprayed with high pressure from a wet blasting machine 7 onto the window 6 of the lead forming mask 5 to remove unnecessary portions corresponding to the window 6. The present invention relates to a method of manufacturing an IC, wherein an IC lead 10 having a required length is formed.

【0010】[0010]

【発明の作用並びに効果】方形状のリードフレーム1の
外枠の各辺から内側に向かって突出するリード2を設
け、該リード2の端部間にICチップ3を配設し、続い
て、このICチップ3とリード2とをワイヤボンディン
グするから、従来のように、リードフレーム20のアウタ
ーリード21やタイバー22が製造工程で変形することなく
平坦度が良好で、高精度,高品質のICリード10を形成
することができる。
According to the present invention, a lead 2 projecting inward from each side of the outer frame of a rectangular lead frame 1 is provided, and an IC chip 3 is disposed between the ends of the lead 2. Since the IC chip 3 and the lead 2 are wire-bonded, the outer lead 21 and the tie bar 22 of the lead frame 20 are not deformed in the manufacturing process and have good flatness, high accuracy and high quality. The leads 10 can be formed.

【0011】ICチップ3とボンディングワイヤ及びワ
イヤボンディング部とを合成樹脂でパッケージしてIC
モールド4を形成するから、従来のように、アウターリ
ード21やタイバー22がモールド時に変形したりしてモー
ルド加工が精度良く行えないような状況を招くことな
く、高精度,高品質のモールド加工ができる。
An IC chip 3 and a bonding wire and a wire bonding portion are packaged with a synthetic resin to form an IC.
Since the mold 4 is formed, high-precision and high-quality molding can be performed without causing a situation in which the outer lead 21 and the tie bar 22 are deformed at the time of molding and molding cannot be performed with high accuracy as in the related art. it can.

【0012】リード2を所定長さのICリード10にしI
Cモールド4の各辺から所定長さのICリード10が突出
するようにする為、リード2に延設される所定長さのI
Cリード10に対応する部分及びICモールド4を被覆
し、その余の部分を窓部6としたリード形成マスク5
を、ICモールド4及びリードフレーム1の上面に被覆
し、該リード形成マスク5の窓部6にウエットブラスト
機7から砥粒混入水9を高圧噴射して窓部6に対応する
不要部分を除去するから、必要長さのICリード10の形
成を非常に簡易に、高精度,高品質に行うことができる
と同時に、モールド加工時に付着したモールドバリを除
去することもできる。
The lead 2 is replaced by an IC lead 10 having a predetermined length.
In order for an IC lead 10 of a predetermined length to protrude from each side of the C mold 4, a predetermined length of I
A lead forming mask 5 which covers the portion corresponding to the C lead 10 and the IC mold 4 and has the remaining portion as a window 6
Is coated on the upper surfaces of the IC mold 4 and the lead frame 1, and high-pressure jet of abrasive mixed water 9 is applied to the window 6 of the lead forming mask 5 from a wet blast machine 7 to remove unnecessary portions corresponding to the window 6. Therefore, the formation of the IC lead 10 of the required length can be performed very simply, with high accuracy and high quality, and at the same time, mold burrs adhered during molding can be removed.

【0013】従って、ICモールド4に所定長さのIC
リード10を高品質,高精度しかも簡易且つ低コストで形
成できるICの製造方法を提供することができる。
Accordingly, the IC mold 4 has a predetermined length of IC.
It is possible to provide a method of manufacturing an IC in which the leads 10 can be formed with high quality, high accuracy, easily and at low cost.

【0014】[0014]

【発明の実施の形態】本発明の一実施例に係るICの製
造方法について以下図面に基づき説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing an IC according to one embodiment of the present invention will be described below with reference to the drawings.

【0015】本実施例は、図1〜図6に図示したように
してICの製造を行う。
In this embodiment, an IC is manufactured as shown in FIGS.

【0016】図1に図示したリードフレーム1は、方形
状の外枠を複数連設したもので、各外枠内の中央部には
ICチップ3を配設するための中央プレート12が設けら
れ、この中央プレート12に向かって突出する前記外枠に
連設される複数本のリード2が設けられている。中央プ
レート12はリードフレーム1の外枠の内側四角と連設さ
れている。
The lead frame 1 shown in FIG. 1 has a plurality of square outer frames connected in series, and a central plate 12 for disposing the IC chip 3 is provided at the center of each outer frame. There are provided a plurality of leads 2 connected to the outer frame projecting toward the central plate 12. The center plate 12 is connected to the inner square of the outer frame of the lead frame 1.

【0017】リードフレーム1に設けるリード2の構成
は、従来タイバー22を設けた場合のインナーリード23の
長さ程度の形状とし、従来のタイバー22位置はリードフ
レーム1の外枠となるように構成している。
The structure of the lead 2 provided on the lead frame 1 has a shape of about the length of the inner lead 23 when the conventional tie bar 22 is provided, and the position of the conventional tie bar 22 is the outer frame of the lead frame 1. doing.

【0018】従って、従来、タイバー22部分でICモー
ルド形成時にモールドが所定の位置より余分に流れない
ようにしていたが本実施例では、リードフレーム1の外
枠がモールドの流れを阻止することとなる。
Therefore, conventionally, when forming the IC mold at the tie bar 22, the mold is prevented from flowing excessively from a predetermined position. In this embodiment, however, the outer frame of the lead frame 1 prevents the mold from flowing. Become.

【0019】このリードフレーム1の中央プレート12に
ICチップ3を配設し、このICチップ3とリードフレ
ーム1の夫々のリード2とをワイヤボンディングしてI
Cチップ3とリード2とをボンディングワイヤ11で接続
し、図2に図示したように、このICチップ3とボンデ
ィングワイヤ11とワイヤボンディング部とを合成樹脂で
パッケージしてICモールド4を形成する。
The IC chip 3 is disposed on the center plate 12 of the lead frame 1, and the IC chip 3 and each lead 2 of the lead frame 1 are wire-bonded to each other.
The C chip 3 and the lead 2 are connected by a bonding wire 11, and as shown in FIG. 2, the IC chip 3, the bonding wire 11 and the wire bonding portion are packaged with a synthetic resin to form an IC mold 4.

【0020】続いて、リード2を所定長さのICリード
10にしICモールド4の各辺から所定長さのICリード
10が突出するようにするために、図3に図示したよう
に、リード2に延設される所定長さのICリード10に対
応する部分、ICモールド4及び外枠の一部を被覆し、
その余の部分を窓部6としたゴム製のリード形成マスク
5を、図4に図示したように、ICモールド4及びリー
ドフレーム1の上面に被覆し、図5に図示したように、
リード形成マスク5の窓部6にウエットブラスト機7の
ノズル8から砥粒混入水9を高圧噴射して、窓部6に対
応する不要部分を除去し、ICモールド4に所定の長さ
のICリード10を形成する。
Subsequently, the lead 2 is replaced with an IC lead having a predetermined length.
10 and IC leads of predetermined length from each side of IC mold 4
As shown in FIG. 3, a portion corresponding to the IC lead 10 having a predetermined length extended from the lead 2, a portion corresponding to the IC mold 4 and a part of the outer frame are covered so that the 10 protrudes.
As shown in FIG. 4, a rubber lead forming mask 5 having the remaining portion as a window 6 is coated on the upper surfaces of the IC mold 4 and the lead frame 1, and as shown in FIG.
A high-pressure jet of abrasive-mixed water 9 is applied to the window 6 of the lead forming mask 5 from the nozzle 8 of the wet blasting machine 7 to remove unnecessary portions corresponding to the window 6, and the IC mold 4 is provided with an IC having a predetermined length. The lead 10 is formed.

【0021】所定長さのICリードを複数本形成したI
Cモールド4は、リードフレーム1の外枠を除去した
後、図6に図示したように、夫々のICリード10を所定
の形状に加工する。
An IC having a plurality of IC leads of a predetermined length is formed.
After removing the outer frame of the lead frame 1, the C mold 4 processes each IC lead 10 into a predetermined shape as shown in FIG.

【0022】以上のように、本実施例は、方形状のリー
ドフレーム1の外枠の各辺から内側に向かって突出する
リード2を設け、該リード2の端部間にICチップ3を
配設し、続いて、このICチップ3とリード2とをワイ
ヤボンディングするから、従来のように、リードフレー
ム20のアウターリード21やタイバー22が製造工程で変形
することなく平坦度が良好で、高精度,高品質のICリ
ード10を形成することができる。
As described above, in this embodiment, the leads 2 projecting inward from the respective sides of the outer frame of the rectangular lead frame 1 are provided, and the IC chip 3 is arranged between the ends of the leads 2. Then, since the IC chip 3 and the leads 2 are wire-bonded, the outer leads 21 and the tie bars 22 of the lead frame 20 have good flatness without deformation in the manufacturing process and have high flatness. An accurate and high quality IC lead 10 can be formed.

【0023】ICチップ3とボンディングワイヤ11及び
ワイヤボンディング部とを合成樹脂でパッケージしてI
Cモールド4を形成するから、従来のように、アウター
リード21やタイバー22がモールド時に変形したりしてモ
ールド加工が精度良く行えないような状況を招くことな
く、高精度,高品質のモールド加工ができる。
The IC chip 3 and the bonding wires 11 and the wire bonding portion are packaged with a synthetic resin and
Since the C mold 4 is formed, high precision and high quality mold processing can be performed without causing a situation in which the outer leads 21 and the tie bars 22 are deformed during molding as in the related art and molding cannot be performed with high accuracy. Can be.

【0024】リード2を所定長さのICリード10にしI
Cモールド4の各辺から所定長さのICリード10が突出
するようにする為、リード2に延設される所定長さのI
Cリード10に対応する部分及びICモールド4を被覆
し、その余の部分を窓部6としたリード形成マスク5
を、ICモールド4及びリードフレーム1の上面に被覆
し、該リード形成マスク5の窓部6にウエットブラスト
機7から砥粒混入水9を高圧噴射して窓部6に対応する
不要部分を除去するから、必要長さのICリード10の形
成を非常に簡易に、高精度,高品質に行うことができる
と同時に、モールド加工時に付着したモールドバリを除
去することもできる。
The lead 2 is replaced with an IC lead 10 having a predetermined length.
In order for an IC lead 10 of a predetermined length to protrude from each side of the C mold 4, a predetermined length of I
A lead forming mask 5 which covers the portion corresponding to the C lead 10 and the IC mold 4 and has the remaining portion as a window 6
Is coated on the upper surfaces of the IC mold 4 and the lead frame 1, and high-pressure jet of abrasive mixed water 9 is applied to the window 6 of the lead forming mask 5 from a wet blast machine 7 to remove unnecessary portions corresponding to the window 6. Therefore, the formation of the IC lead 10 of the required length can be performed very simply, with high accuracy and high quality, and at the same time, mold burrs adhered during molding can be removed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本実施例のICの製造方法を示す説明図であ
る。
FIG. 1 is an explanatory diagram illustrating a method of manufacturing an IC according to an embodiment.

【図2】本実施例のICの製造方法を示す説明図であ
る。
FIG. 2 is an explanatory diagram illustrating a method of manufacturing an IC according to the present embodiment.

【図3】本実施例のリード形成マスクを示す斜視図であ
る。
FIG. 3 is a perspective view showing a lead forming mask of the present embodiment.

【図4】本実施例のICの製造方法を示す説明図であ
る。
FIG. 4 is an explanatory diagram illustrating a method of manufacturing an IC according to the present embodiment.

【図5】本実施例のICの製造方法を示す説明図であ
る。
FIG. 5 is an explanatory diagram illustrating a method of manufacturing an IC according to the present embodiment.

【図6】本実施例のICの製造方法により製造したIC
を示す斜視図である。
FIG. 6 is an IC manufactured by the method of manufacturing an IC according to the present embodiment.
FIG.

【図7】従来のICの製造方法を示す説明図である。FIG. 7 is an explanatory view showing a conventional IC manufacturing method.

【図8】従来のICの製造方法を示す説明図である。FIG. 8 is an explanatory view showing a conventional IC manufacturing method.

【図9】従来のICの製造方法により製造したICを示
す斜視図である。
FIG. 9 is a perspective view showing an IC manufactured by a conventional IC manufacturing method.

【図10】従来のICの製造方法により製造したICを
示す斜視図である。
FIG. 10 is a perspective view showing an IC manufactured by a conventional IC manufacturing method.

【符号の説明】[Explanation of symbols]

1 リードフレーム 2 リード 3 ICチップ 4 ICモールド 5 リード形成マスク 6 窓部 7 ウエットブラスト機 9 砥粒混入水 10 ICリード 11 ボンディングワイヤ 12 中央プレート DESCRIPTION OF SYMBOLS 1 Lead frame 2 Lead 3 IC chip 4 IC mold 5 Lead forming mask 6 Window 7 Wet blasting machine 9 Abrasive mixed water 10 IC lead 11 Bonding wire 12 Central plate

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 方形状のリードフレームの外枠の各辺か
ら内側に向かって突出するリードを設け、該リードの端
部間にICチップを配設し、続いて、このICチップと
リードとをワイヤボンディングしてICチップとリード
とをボンディングワイヤで接続し、続いて、該ICチッ
プ,ボンディングワイヤ及びワイヤボンディング部を合
成樹脂でパッケージしてICモールドを形成し、続い
て、リードを所定長さのICリードにしICモールドの
各辺から所定長さのICリードが突出するようにする
為、リードに延設される所定長さのICリードに対応す
る部分及びICモールドを被覆し、その余の部分を窓部
としたリード形成マスクを、ICモールド及びリードフ
レームの上面に被覆し、該リード形成マスクの窓部にウ
エットブラスト機から砥粒混入水を高圧噴射して窓部に
対応する不要部分を除去し必要長さのICリードを形成
することを特徴とするICの製造方法。
1. A lead that protrudes inward from each side of an outer frame of a rectangular lead frame, an IC chip is disposed between the ends of the lead, and then the IC chip and the lead are connected to each other. Is connected by wire bonding to connect the IC chip and the lead with a bonding wire. Subsequently, the IC chip, the bonding wire, and the wire bonding portion are packaged with a synthetic resin to form an IC mold. In order to make the IC lead of a predetermined length protrude from each side of the IC mold, cover the part corresponding to the IC lead of the predetermined length extended to the lead and the IC mold, and Cover the IC mold and the top surface of the lead frame with the portion of the lead forming window as a window, and grind the window of the lead forming mask with a wet blasting machine. A method for manufacturing an IC, comprising: spraying high-pressure granulated water to remove an unnecessary portion corresponding to a window to form an IC lead having a required length.
JP8291983A 1996-11-01 1996-11-01 Manufacture of ic Ceased JPH10135388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8291983A JPH10135388A (en) 1996-11-01 1996-11-01 Manufacture of ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8291983A JPH10135388A (en) 1996-11-01 1996-11-01 Manufacture of ic

Publications (1)

Publication Number Publication Date
JPH10135388A true JPH10135388A (en) 1998-05-22

Family

ID=17776002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8291983A Ceased JPH10135388A (en) 1996-11-01 1996-11-01 Manufacture of ic

Country Status (1)

Country Link
JP (1) JPH10135388A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015062968A (en) * 2013-09-24 2015-04-09 株式会社Iro Ic tag protection structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015062968A (en) * 2013-09-24 2015-04-09 株式会社Iro Ic tag protection structure

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