JPH08335620A - Conveyer apparatus for flat object - Google Patents

Abstract

PURPOSE: To provide an automatic conveyer apparatus for flat pieces which is improved to elevate the power of a conveyer system to reduce the apparatus tact time and the size of the apparatus. CONSTITUTION: An automatic conveyer apparatus carries flat pieces from a cassette 2 to a first and second treating parts 6a and 6b in this order and again houses the treated pieces in the cassette 2. A first conveyer 3 carries the pieces from the cassette 2 to the first treating part 6a and from the second treating part 6b to the cassette 2, a second conveyer 5 disposed between these treating parts carries the pieces from the part 6a to the part 6b. Both conveyers can independently do conveying works. A horizontal direct driven shaft driving source of the second conveyer 5 uses a linear motor or rotary motor having a rack-pinion mechanism.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION This invention is used for manufacturing equipment and inspection equipment for flat objects such as semiconductor wafers, glass substrates, disk substrates, and printed circuit boards.

[0002]

2. Description of the Related Art As an automatic conveying device for this kind of flat object, for example, one shown in FIG. 9 is considered. FIG. 9 is a plan view showing its schematic configuration. The cassette unit 101 is
A table on which a cassette 102 for storing a plurality of flat objects can be mounted, and a positioning mechanism for constantly reproducing the cassette position is provided.

The transport section 103 has a horizontal linear X-axis for advancing and retracting a fork 105 holding a flat object with respect to the inside of a cassette or a processing section, and a vertical linear Z-axis for adjusting the height position of the fork 105. , A rotation θ-axis for rotating the fork 105 around the Z-axis, and a horizontal linear motion Y-axis for moving the mechanism portion of the three axes along the rail 110 in the arrangement direction of the processing units. Is a robot having. Further, a pre-alignment unit 104 for controlling the posture of the flat object is provided on the upper surface of the transport unit 103.

The first processing section 106a includes a first stage 107a for holding a flat object. On the upper surface of the first stage 107a, there is a recess into which the fork 105 of the transfer section can enter. The first delivery unit 108a includes the first processing unit 10
A horizontal linear movement axis for moving the arm 109 holding the flat object processed by 6a to and from the first stage 107a and a vertical movement axis for raising and lowering the arm 109 are provided. The transport unit 103 is provided on the upper surface of the first delivery unit 108a.
Is provided with a recess for the fork 105 of
Further, a vacuum suction pad or the like for forcibly holding the flat object is provided.

The second processing section 106b and the second stage 107
b, the second transfer unit 108b is the first processing unit 10 respectively.
6a, the first stage 107a, and the first transfer unit 108a have the same structure and function. FIG. 10 is a diagram showing an example of a transfer procedure by the automatic transfer device of FIG. 9, and is an example in which the total number of flat objects is processed by the first processing unit and the second processing unit. In the figure, the bold arrows indicate the transport route of flat objects, and the numbers attached to the routes correspond to the following.

(1) The transport unit 103 receives the flat object from the cassette 102, and the first stage 1 of the first processing unit 106a
Deliver the flat object to 07a. (2) The first delivery unit 108a receives the flat object processed by the first processing unit 106a from the first processing unit 106a. (3) The transport unit 103 receives the flat object from the first delivery unit 108a, and the second stage 107 of the second processing unit 106b.
Deliver a flat object to b. At this time, the transport unit 103 moves in the Y-axis direction (vertical direction in the drawing) along the rail 110 to the position where the transfer is performed.

(4) The second delivery unit 108b processes the flat object processed by the second processing unit 106b into the second processing unit 106b.
Receive from (5) The transport unit 103 receives the flat object from the second delivery unit 108b, positions it in the plane by the pre-alignment unit, and then delivers the flat object to the cassette 102. As described above, in the conventional automatic transfer apparatus, the transfer section is provided in each of the processing sections, so that the takt time of the apparatus (N + 1th flat object after the Nth flat object is taken out from the cassette 102). The time taken until the sheet is taken out of the cassette 102) is shortened.

[0008]

However, the above-described transfer device and transfer method have the following drawbacks. That is, since the transfer section is provided in each of the processing sections, a space corresponding to that is required, and the transfer section 103 is provided.
The rail 110 of this becomes long. Further, only the transfer unit 103 can move between the two processing units, and the transfer unit 103 must also transfer the flat object between the processing unit and the cassette. From the first processing unit 106a to the second
In order to convey the flat object to the processing unit 106b, the conveying unit 10
In No. 3, it is necessary to grasp the timing when the product is present in the first delivery unit 107a and the product is not present in the second processing unit 106b, and a waiting time for that is required. Therefore, the device tact time is greatly influenced by the waiting time of the transport unit 103, and particularly when the difference between the processing times of the two processing units is large, the device tact time becomes long.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, an apparatus for automatically transporting flat objects according to the present invention includes a cassette for storing a plurality of flat objects and a stage for mounting the flat objects. First and second processing sections having: a first transfer section for transferring the flat object from the cassette to the first processing section and from the second processing section to the cassette; And a second processing unit, which is provided between the first processing unit and the second processing unit and receives the flat object from the first processing unit and delivers the flat object to the second processing unit. The drive mechanism of the second transport unit is provided on two shafts of a vertical direct drive shaft and a horizontal direct drive shaft. Even if the horizontal direct drive shaft drive source is a linear motor, it is a rotary motor with a rack and pinion mechanism. May be. Further, the drive mechanism of the second transfer unit is provided only on the horizontal linear motion shaft, and the stage of the first processing unit is provided with a plurality of transfer members capable of reciprocating simultaneously in the vertical direction. The stage of the second processing unit is provided with a plurality of conveying members that can reciprocate in the vertical direction all at once, and a pair of conveying members that can reciprocate in the vertical direction and open and close in the horizontal direction. May be.

[0010]

In the automatic carrying apparatus of the present invention, the delivery section attached to each processing section as described in the conventional example is eliminated and the first and second processing sections are eliminated.
A second transport unit is newly provided between the processing units of. The second transport unit can perform two operations of receiving the flat object from the first processing unit and delivering it to the second processing unit. This allows
The first transport unit is released from the work of transporting the flat object from the first processing unit to the second processing unit, and transports the flat object from the cassette to the first processing unit or from the second processing unit to the cassette. You can concentrate only on things.

Since the first transport section and the second transport section can operate independently, the capability of the transport system is dramatically improved. For example,
When the first processing unit completes the processing, as soon as the second transport unit receives the processed flat object, the first transport unit can deliver the unprocessed flat object to the first processing unit. If the processing is not completed in the second processing unit, the second transport unit may wait while holding the flat object.

Further, since both the delivery parts in the conventional example can be eliminated, the apparatus space can be reduced even if the second transfer part is newly installed. Furthermore, since the rail of the first transport unit can be shortened accordingly, the moving time of the first transport unit can be shortened.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a plan view showing a schematic structure of an automatic carrying apparatus according to the present invention. The cassette unit 1 is a table on which a cassette 2 for accommodating a plurality of flat objects can be mounted, and includes a positioning mechanism for constantly reproducing the cassette position. Cassette 2
In the vertical direction, a plurality of storage units for storing the flat objects one by one are provided in the vertical direction, and the storage units are structured to support a part of the lower surface of the flat objects.

The first transport unit 3 has a horizontal linear X-axis for advancing and retracting the fork 31 holding a flat object in and out of the cassette and the processing unit, and a vertical linear motion for adjusting the height position of the fork 31. A robot having a Z-axis, a rotation θ-axis for rotating the fork 31 about the Z-axis, and a horizontal linear-motion Y-axis for moving the mechanism part of the three axes in the arrangement direction of the processing section. is there. Rail 30 moves in the Y-axis direction
Is done along.

The fork 31 is plate-shaped and is used with a flat object placed on the upper surface. On its upper surface, a vacuum suction pad for forcibly holding the flat object, a sensor for detecting the presence or absence of the flat object, and the like are provided. A pre-alignment unit 4 is provided on the first transport unit 3. The pre-alignment unit 4 is a mechanism for pressing the end surface of the flat object that is not vacuum-adsorbed on the fork 31 of the first transport unit 3 against the reference pin to determine the posture of the flat object. An air cylinder or a motor is used to press against the reference pin,
Equipped with a relief mechanism that prevents the flat object from being damaged by pressing it more than necessary.

The first processing section 6a has a first stage 7a for holding a flat object. The first platform 7a is provided with a recess 8a so that the fork 31 of the first transfer section can enter, and also has a recess 9a so that the arm 51 of the second transfer section can enter. Further, a plurality of vacuum suction pads 10a for holding flat objects, a sensor 11a for detecting the presence or absence of flat objects, and the like are provided.

The second processing section 6b has the same structure as the first processing section 6a. That is, on the second stage 7b,
Recesses 8b and 9b are formed, and a plurality of vacuum suction pads 10b, sensors 11b, etc. are provided on the upper surface of the second mounting table 7b. The second transport unit 5 includes the first processing unit 6a.
The flat object processed in 1 is received from the first stage 7a and is processed by the second processing unit 6b. Therefore, the horizontal linear motion axis for handing over to the second stage 7b and the horizontal linear motion axis are moved up and down. It is equipped with two vertical movement shafts. That is, the second transport unit 5 can perform two operations of “reception” and “delivery”. Since the first transport unit 3 does not need to transport the flat object from the first processing unit 6a to the second processing unit 6b, no waiting time is required for that purpose, and the tact time of the apparatus can be shortened.

FIG. 2 is a diagram showing an example of a transfer procedure by the automatic transfer apparatus of FIG. 1, and is an example in which the total number of flat objects is processed by the first processing section and the second processing section. In the figure, the bold arrows indicate the transport route of flat objects, and the numbers attached to the routes correspond to the following. (1) The first transport unit 3 receives the flat object from the cassette unit 1 and delivers it to the first stage 7a of the first processing unit 6a.

(2) The second transport section 5 receives the processed flat object from the first processing section 6a, and the second processing section 6b receives the second flat object.
The flat object is handed over to the stage 7b. (3) The first transport unit 3 receives the processed flat object from the second stage 7b, positions it in the plane by the pre-alignment unit, and then delivers the flat object to the cassette unit 1. When processing is completed for all flat objects in the cassette 2 of the cassette unit 1 and unprocessed flat objects in other cassettes are processed, another cassette may be replaced with the cassette 2.

As shown in FIG. 2, the transport path is simpler than that in FIG. 9, and the transport speed can be increased.
FIG. 2 is an example in which all the flat objects are processed by the first processing unit and the second processing unit. However, in the case where the first processing unit performs the total processing, the second processing unit performs the non-total processing, and the first processing. Non-exhaustive processing in part,
Even when the second processing unit performs total number processing, it can be dealt with only by changing the processing program. That is, in the case of non-exhaustive processing, a flat object that may not be processed may be configured with a processing program so as to simply pass through the processing unit.

In the above embodiment, the automatic carrying device having two processing parts has been described, but the present invention can be applied to a device having three or more processing parts. For example, when three processing units are provided, a transport unit corresponding to the second transport unit is provided between the first processing unit and the second processing unit and between the second processing unit and the third processing unit, respectively. . Hereinafter, the mechanism of the second transport unit 5 in FIG. 1 will be described in detail.

FIG. 3 is an elevational view showing the mechanical portion of the second transport section and showing the mechanical portion when a linear motor is used as the drive mechanism. The arm 51 is connected to a horizontal translation base 53 via an intermediate block 52. The horizontal translation base 53 is fixed to the vertical translation unit 54, and the arm 51, the intermediate block 52, and the horizontal translation base 53 are integrally driven in the vertical direction.

The horizontal drive has the following mechanism. The arm 51 can move in the horizontal direction with respect to the intermediate block 52 over the effective drive length L1. The movement of the arm 51 depends on the guide rail 58a fixed to the arm 51 and the guide block fixed to the intermediate block 52. Guided by 57a. The intermediate block 52 can be moved on the horizontal translation base 53 in the same direction as the arm 51 over the effective drive length L2, and the movement of the intermediate block 52 depends on the guide block 57b fixed to the intermediate block 52 and the horizontal translation. It is guided by a guide rail 58b fixed to the moving base 53. That is, the horizontal translation shaft has a two-stage structure, and the maximum relative movement distance of the central portion of the arm 51 is L1 + L2, and a large stroke can be obtained.

In FIG. 4, this relative movement distance is on one side (in the figure,
It is an elevation view which shows the state when it becomes the maximum in (right side).
That is, the relative movement distance of the central portion of the arm 51 is (L1
+ L2) / 2, and the same relative movement distance can be obtained in the opposite direction (left in the figure). As described above, since the stroke is large in both the left and right directions, the second transport unit is one unit, and the goods can be delivered to both the first processing unit and the second processing unit.

FIG. 5 is a sectional view taken along the line AA 'for showing the detailed mechanism of the horizontal linear motion section of FIG. An MC (Moving Coil) type linear motor is used, and a coil 55 is provided on each of the upper surface and the lower surface of the intermediate block 52.
a and 55b are joined. On the lower surface of the arm 51 and the upper surface of the horizontal translation base 53, permanent magnets 56a,
56b is joined. Intermediate block 5 of arm 51
The movement with respect to 2 is due to the magnetic acting force of the coil 55a and the permanent magnet 56a. The movement of the intermediate block 52 with respect to the horizontal translation base 53 is due to the magnetic acting force of the coil 55b and the permanent magnet 56b. When an electric current is applied to the coil 55b,
Since the coil 55b receives a force in the horizontal linear direction by the action of the magnetic field of the permanent magnet 56b, the intermediate block 52 moves on the horizontal linear motion base 53 along the guide rail 58b. On the other hand, when a current is passed through the coil 55a, the coil 55a receives a force in the horizontal linear direction due to the action of the magnetic field of the permanent magnet 56a, so that the arm 51 moves on the intermediate block 52 in the same direction.

Compared to the rotary motor type, the linear motor type does not require a mechanism for converting a rotational force into a direct power, so that space saving, high efficiency, dust-free operation, etc. are possible. FIG. 6 is an elevational view showing a mechanical portion when a rotary motor with a rack and pinion is used as a drive mechanism of the second transport section. Since the basic structure is similar to that shown in FIG.
Only the specific structure and function will be explained in.

The arrangement of the rack and pinion is such that the rack 66a is fixed to the arm 51, the rack 66b is fixed to the horizontal translation base 53, the pinion 65 is rotatably attached to the intermediate block 52, and the racks 66a and 66b move the pinion 65 up and down. Sandwich so that the teeth mesh with each other. When the pinion 65 is rotated by a rotary motor (not shown) built in the intermediate block 52, the intermediate block 52 moves on the horizontal linear motion base 53 along the guide rail 58b, and at the same time, the arm 51.
Moves in the same direction on the intermediate block 52 along the guide rail 58a. That is, the horizontal linear motion shaft can execute two-stage movement, and if the effective drive length of the arm 51 with respect to the intermediate block 52 is L1 and the effective drive length of the intermediate block 52 with respect to the horizontal linear motion base 53 is L2, the arm 51 is shown. The maximum relative movement distance of the central portion of is equal to L1 + L2. The advantage of the rack and pinion type is that the arm 51 and the intermediate block 52 can be moved simultaneously and in the same direction by one drive source, which is advantageous for downsizing.

FIG. 7 is a sectional view taken along the line BB 'of FIG. 6 for showing the detailed mechanism of the horizontal translation unit. Rotary motor 67
Is incorporated in the intermediate block 52 and is arranged so that the pinion 65 can be rotated. The driving force of the rotary motor 69 may be directly transmitted to the pinion 65 or may be transmitted via an intermediate gear. FIG. 8 is a plan view showing a schematic configuration of an automatic carrying device according to another embodiment of the present invention. The structures and functions of the cassette unit 1, the cassette 2, the first transport unit 3, and the pre-alignment unit 4 are all the same as in FIG. 1 described above. The major difference from FIG. 1 is that the first processing unit 6a
It is a mechanism of the second transport unit 60 that transports the flat object to the processing unit 6b.

The second transport unit 60 receives the flat object processed by the first processing unit 6a from the first stage 7a, and then receives the flat object.
In order to transfer to the second stage table 7b of the processing unit 6b, the entire transport unit can reciprocate in the horizontal direction (Y-axis direction in the figure) along the guide rail 50, but the flat object is moved up and down. It does not have a vertical axis for movement. Instead,
The first platform 7a is provided with a plurality of vertically movable transport pins 12a, which enables the second transport unit 60 to receive a flat object in conjunction with the horizontal movement of the second transport unit 60.
The transport pin 12a enables the first transport unit 3 to receive the flat object in conjunction with the operation of the horizontal linear motion X axis of the first transport unit 3.

On the other hand, the second platform 7b is also provided with a plurality of transport pins 12b that move up and down, and the first transport unit 3 is interlocked with the operation of the horizontal translation X axis of the first transport unit 3 so that the first transport unit 3 is a flat object. It is possible to receive. Further, a pair of L-shaped transfer hands 13 are provided on both sides of the second stage 7b. Transport hand 13
Has a "closed state" in which its upper surface (the short side portion of the L shape) is directly above the second stage 7b so that the flat object can be supported, and an "open state" in which the flat object can be passed in the vertical direction. An opening / closing mechanism that can be set to "state" is provided, and an elevating mechanism that rises when the flat object is received from the second transport unit 60 and descends when the flat object is delivered to the transport pin 12b is provided. The opening / closing mechanism and the elevating mechanism are arranged below the upper surface of the second stage 7b. Another role of the transport hand 13 is that even if a flat object remains on the second stage table 7b, the flat object to be processed next is held immediately above it, and the second stage table 7b becomes empty. The point is that the flat object that was held can be delivered to the transport pin 12b. This contributes to shortening the device takt time.

As described above, the second transfer section 60 receives the flat object in cooperation with the transfer pin 12a of the first stage table 7a, and the transfer hand 13 provided beside the second table stage 7b. Since the flat object is handed over in an interlocking manner, the arm 61 of the second transport unit 60 has a structure having flat portions for holding the left and right ends of the flat object so as to suspend them. Next, the procedure for moving the flat object from the first stage 7a to the second stage 7b will be described in detail.

(1) When the processing of the flat object is completed by the first processing unit 6a, the transport pin 12a rises and lifts the flat object, and the second transport unit 60 enters the flat object receiving position and the transport pin 12a. Lowers and delivers the flat object to the second transport unit 60 during the lowering. (2) While the transport hand 13 of the second processing unit 6b is waiting in the closed state, the second transport unit 60 enters and stops at the flat object delivery position, and the transport hand 13 slightly moves up to flat object. To receive. The 2nd conveyance part 60 retreats out of the 2nd stage 7b.

(3) When another flat object is present on the second stage table 7b, the transport hand 13 stands by while holding the flat object. When the first transport unit 3 receives the immediately preceding processed flat object from the second stage table 7b and the second stage table 7b becomes empty, the transport pin 12b rises and waits in a closed state while rising. When the flat object is received from the transporting hand 13 that is present, the ascent is stopped.

(4) When the transport hand 13 is opened, the transport pin 12b descends to place the flat object on the second stage table 7b. This embodiment is particularly suitable for treating a large flat object such as a glass substrate for liquid crystal. In recent years, glass substrates have tended to be large in size from the viewpoint of demand and improvement in production efficiency, and to be thin from the viewpoint of reducing the mass when incorporated in products. When the glass substrate is placed on the stage and is processed, it is preferable that the surface of the stage is as uneven as possible in order to ensure its flatness. The automatic carrier device according to the present embodiment has an advantage that it is not necessary to provide a large concave portion for the fork or arm of the carrier unit to enter on the upper surface of the stage.

[0035]

As described above, according to the invention described in claim 1, the second carrying section for carrying the flat object from the first processing section to the second processing section is newly provided. This second
The transport unit receives the flat object from the first processing unit,
Two operations are possible: handing over the flat object to the second processing unit. As a result, the first transport unit is released from the work of transporting the flat object from the first processing unit to the second processing unit, and
The waiting time associated with the transportation becomes unnecessary. Since the first transport unit and the second transport unit can independently perform the transport work, the capability of the transport system is greatly improved and the tact time of the apparatus is shortened.

Furthermore, by newly installing the second transfer section,
Since the delivery section attached to each processing section can be eliminated, the apparatus space can be reduced, and the apparatus can be made smaller and more compact. According to the second aspect, when a linear motor is used as a drive source for the horizontal linear movement of the second transfer section, highly efficient dust-free operation is possible, which is effective particularly when a clean environment is required. is there.

According to the third aspect, as the driving source,
Using a rotary motor with a rack and pinion mechanism has the advantage that a large stroke can be obtained with a single drive source. According to the fourth aspect, since the second transfer unit transfers the flat object in conjunction with the transfer pins or the like provided on the stage of the processing unit, the upper surface of the stage can be made relatively flat and thin. Suitable for processing large flat objects. Further, even if the processing units are separated from each other or the route is a curved path, it is possible to easily cope with them.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of an automatic flat object conveying device according to an embodiment of the present invention.

FIG. 2 is an explanatory view showing a standard conveyance route of a flat object according to an embodiment of the present invention.

FIG. 3 is an elevation view of a second transport unit having a linear motor type drive mechanism according to an embodiment of the present invention.

FIG. 4 is an elevational view showing a configuration when the linear motor type mechanism of FIG. 3 is driven to the maximum extent.

5 is a sectional view taken along the line AA ′ of the linear motor type mechanism of FIG.

FIG. 6 is an elevation view of a second transport unit having a rotary motor drive mechanism with a rack and pinion according to an embodiment of the present invention.

7 is a sectional view of the rotary motor type mechanism with the rack and pinion of FIG. 6 taken along the line BB ′.

FIG. 8 is a plan view showing a schematic configuration of an automatic flat object conveying device according to another embodiment of the present invention.

FIG. 9 is a plan view showing a schematic configuration of a conventional automatic flat object conveying device.

FIG. 10 is an explanatory view showing a standard conveyance route for a conventional flat object.

[Explanation of symbols]

 1 ... Cassette part 2 ... Cassette 3 ... 1st conveyance part 4 ... Pre-alignment part 5, 60 ... 2nd conveyance part 6a ... 1st process part 6b・ ・ ・ Second processing unit 7a ・ ・ ・ First loading platform 7b ・ ・ ・ Second loading platform 12a, 12b ・ ・ ・ Transport pin 13 ・ ・ ・ Transportation hand 50 ・ ・ ・ Guide rails 51,61 ・ ・-Arms 52 ... Intermediate block 53 ... Horizontal translation base 54 ... Vertical translation parts 55a, 55b ... Coils 56a, 56b ... Permanent magnets 57a, 57b ... Guide blocks 58a, 58b・ ・ ・ Guide rail 65 ・ ・ ・ Pinion 66a, 66b ・ ・ ・ Rack 67 ・ ・ ・ Rotation motor

Claims (4)

[Claims] 1. A cassette for accommodating a plurality of flat objects, first and second processing units each having a stage for mounting the flat objects, the cassette to the first processing unit, and the first processing unit. The first transport unit for transporting the flat object from the second processing unit to the cassette and the first and second processing units are provided.
An automatic conveying apparatus for a flat object, comprising: a second conveying unit for receiving the flat object from a processing unit and delivering the flat object to the second processing unit. 2. The drive mechanism of the second transport unit is provided on two shafts of a vertical direct acting shaft and a horizontal direct acting shaft, and the horizontal direct acting shaft drive source is a linear motor. Item 1. An automatic conveying apparatus for a flat object according to Item 1. 3. The drive mechanism of the second transport section is provided on two shafts of a vertical direct acting shaft and a horizontal direct acting shaft, and the horizontal direct acting shaft drive source is a rotary motor with a rack and pinion mechanism. The automatic conveying apparatus for a flat object according to claim 1, which is characterized in that. 4. The drive mechanism of the second transfer unit is provided only on a horizontal linear motion shaft, and a plurality of transfer members capable of reciprocating in the vertical direction all at once on the stage of the first processing unit. A plurality of conveying members that can reciprocate in the vertical direction all at once, and a pair of conveying members that can reciprocate in the vertical direction and open and close in the horizontal direction. The flat object automatic transport apparatus according to claim 1, further comprising: