JPH08106613A - Perpendicular magnetic recording type thin-film magnetic head - Google Patents

Abstract

PURPOSE: To form a magnetic films for poles on a good and smooth surface and to obtain a magnetic head having high reliability by forming the pole film on the magnetic film of a very small film thickness formed on cores and embedded insulating layer. CONSTITUTION: After the nonmagnetic insulating layer consisting of SiO2 , Al2 O3 , etc., is formed by sputtering on a magnetic substrate 1, a coil conductor 5 consisting of Cr/Cu/Cr (Cr: joint surface) is formed with the coil insulator and thereafter, core connecting through-holes 6 are formed. The film of a Co-Ta-Zr based amorphous allay is formed by sputtering and is patterned to form the magnetic cores 7 and thereafter, the film of a nonmagnetic insulating material 3 of forsterite, etc., is formed by sputtering. The insulating layer 3 is so flattened as to remain on the cores by lapping for flattening by mechanical polishing and etch back, etc., by ion etching and further, the nonmagnetic insulating layers of the very small film thickness on the cores are removed. The magnetic film for poles is then formed by sputtering, etc., and is patterned to form the poles.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head for high density magnetic recording / reproducing.

[0002]

2. Description of the Related Art Conventionally, in-plane direction magnetization has been used in the field of magnetic recording, but with the recent trend toward higher densities, perpendicular magnetic recording technology for magnetizing in the direction perpendicular to the medium surface has been rapidly developed. Has progressed to.

As a perpendicular magnetic head, the TV journal Vo
Various reports have been made as shown in l.39, No.4 (1985), and as a method of forming the main pole, a tip of the main pole with a high-permeability film sandwiched between the tips of ferrite is bonded. A method has been proposed. As methods, there are a method in which a main magnetic pole and an auxiliary magnetic pole are arranged on both sides of the medium, and a main magnetic pole excitation type which can be accessed only from the main magnetic pole side. The method of arranging the auxiliary magnetic pole on the back surface of the medium has a structure suitable for recording and reproducing for perpendicular magnetization, but it has problems such as weakness in external noise and a complicated system configuration. Research on magnetic pole excitation type is active.

On the other hand, a perpendicular magnetic recording type thin film magnetic head capable of achieving a finer and lighter head is, for example, as shown in FIG. 24 as shown in the Japan Society of Opportunities (NO.930-45).
A conductor layer 5 that forms a coil layer by sandwiching an insulating layer 4 above and below the magnetic substrate 1, a magnetic core 7, and a main magnetic pole magnetic layer 11
It has a structure in which the layers are sequentially laminated. On the other hand, the Journal of
Magnetics of Japan Vol.15 Supplemeent, No.S2 (1991)
As shown in FIG. 25, the magnetic core 7 and the main magnetic pole magnetic layer 11 are formed on the center of the winding of the conductor coil 5 as shown in FIG. A head is proposed. With the two-sided structure as shown in FIG. 25, the height of the head element can be made smaller than in the case of the planar structure of FIG.

[0005]

The thin-film magnetic head is advantageous in that the head can be made smaller and lighter, and the two-sided structure of the magnetic core / main pole can reduce the height of the head element. However, in the pole forming process, when the relationship between the pole and the core is as shown in FIG. 26, it is possible to form the pole film on the smooth surface, but the pole film is damaged during the upper core patterning. was there. Further, in the case of FIG. 27, since the pole film is formed on the step of the core, there is a problem in the reliability of the film thickness and the film quality at the step. Further, if the structure shown in FIG. 28 is taken,
The main magnetic pole and the auxiliary magnetic pole have a large gap, there is no film formation on the step of the core, and there is no damage to the pole pattern due to etching of the core, but the film quality of the insulating layer at the boundary between the core pattern and the embedded insulating layer. Also, due to uneven wear of the core material and the insulating material at the time of smoothing, a difference in etching rate, and the like, a minute step is formed at the core / insulating layer boundary portion. On the other hand, the pole film formed as the upper layer has a very small film thickness (up to 0.3 μm), so that it is affected by a minute step, which leads to damage of the pole, and there is a problem in yield and reliability. It was

The object of the present invention is to reduce the size and weight of the head,
An object of the present invention is to provide a thin film perpendicular magnetic head that can improve reliability and yield in forming a pole film of the thin film perpendicular magnetic head that can minimize the height of the head element.

[0007]

The above-mentioned object is to form a pole portion of a perpendicular magnetic recording thin film magnetic head on an insulating layer having a small film thickness formed on a core and a buried insulating layer, and to form it on the core. It is achieved by connecting to the core at the through hole portion, or by forming a pole film on the magnetic film having a small film thickness formed on the core and the buried insulating layer.

[0008]

[Function] A pole film of a thin film perpendicular magnetic head is formed on an insulating layer having a small thickness formed on a core and a buried insulating layer,
By connecting to the core at the through-hole portion formed on the core, or by forming a pole film on the magnetic film with a small film thickness formed on the core and the buried insulating layer, Core quality due to insulation layer film quality, uneven wear of core material and insulation material during smoothing, difference in etching rate, etc.
Since the upper insulating layer or the magnetic layer covers the step at the boundary of the insulating layer, the pole magnetic film can be formed on a good smooth surface, and the perpendicular magnetic recording thin film magnetic with high reliability and yield A head can be provided.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view showing an example of a thin film magnetic head according to the present invention, and FIG. 2 is a sectional view taken along the line AA 'in FIG.
1 is a magnetic substrate, 2 is a non-magnetic insulating substrate, 4 is a signal coil insulating layer, 5 is a signal coil, 7 is a magnetic core, 11 is a main magnetic pole,
Reference numeral 8 is a protective film, and 13 is an auxiliary magnetic pole.

In this embodiment, a Mn-Zn ferrite substrate is used as the magnetic substrate 1. Co-Ta- for the magnetic core material
A Zr-based amorphous alloy is formed by sputtering or the like. The signal coil is formed by depositing Cu with Cr as a bonding layer. Forsterite is formed on the protective film by sputtering, vapor deposition, or the like.

The manufacturing process of the thin film magnetic head according to the present invention will be described below with reference to FIGS.

(FIG. 3) On the magnetic substrate 1, SiO ₂ , Al ₂ O ₃
After forming a non-magnetic insulating layer such as by sputtering, a coil conductor 5 made of Cr / Cu / Cr (Cr; bonding layer) is formed via the coil insulating layer, and then a core connecting through hole 6 is formed. .

(FIG. 4) A Co—Ta—Zr type amorphous alloy is formed by sputtering or the like and patterned to form the magnetic core 7.

(FIG. 5) A non-magnetic insulating material such as forsterite is deposited by sputtering or the like.

(FIG. 6) Planarization by mechanical polishing Lapping or etching back by ion etching is performed to planarize so that an insulating layer remains on the core.

(FIG. 7) The non-magnetic insulating layer having a small film thickness on the core is removed.

At this time, if the angle θ formed between the non-magnetic insulating layer and the magnetic core is an obtuse angle, the efficiency can be improved.

(FIG. 8) After forming a magnetic film for the pole by sputtering or the like, the pole is formed by patterning.

The head is completed through SB cutting, chip formation, and assembly process.

According to the above structure and manufacturing method, the pole portion of the perpendicular magnetic recording type thin film magnetic head is formed on the core and the insulating layer having a small film thickness formed on the embedded insulating layer, and is formed on the core. Since the core is connected at the through hole, the quality of the insulating layer at the core / insulating material boundary, the uneven wear of the core material and the insulating material during smoothing, the difference in the etching rate, etc.
It is possible to provide a perpendicular magnetic recording type thin film magnetic head that can form a magnetic film for a pole without being affected by a step at a boundary portion of an insulating layer and has high reliability and yield.

In the description of this embodiment, the magnetic core and the pole are laminated on the magnetic substrate substantially in parallel, but the magnetic core and the pole are formed substantially perpendicular to the magnetic substrate as shown in FIG. It goes without saying that the same effect can be obtained when performing. Further, although the case where Mn-Zn ferrite of the magnetic substrate is used has been described in the description of this embodiment, it goes without saying that the same effect can be obtained when the magnetic film is formed on the substrate. In addition, Ni-Zn is applied to the magnetic substrate.
By using ferrite, it is not necessary to form an insulating layer between the substrate and the coil, and the manufacturing process can be shortened.

FIG. 10 is a plan view showing a second embodiment of the thin film magnetic head according to the present invention, FIG. 11 is a sectional view taken along the line BB 'of FIG. 10, and FIG. 12 is an enlarged view of the pole portion of FIG. ,
1 is a magnetic substrate, 2 is a non-magnetic insulating substrate, 4 is a signal coil insulating layer, 5 is a signal coil, 7 is a magnetic core, 11 is a main magnetic pole,
Reference numeral 8 is a protective film, and 13 is an auxiliary magnetic pole.

In this embodiment, a Mn-Zn ferrite substrate is used as the magnetic substrate 1. Co-Ta for the magnetic core material
A -Zr-based amorphous alloy is formed by sputtering or the like. The signal coil is formed by depositing Cu with Cr as a bonding layer. Forsterite is formed on the protective film by sputtering, vapor deposition, or the like.

The manufacturing process of the thin film magnetic head according to the present invention will be described below with reference to FIGS.

(FIG. 13) SiO ₂ and Al ₂ O are formed on the magnetic substrate 1.
After forming a non-magnetic insulating layer such as ₃ by sputtering, a coil conductor 5 made of Cr / Cu / Cr (Cr; bonding layer) is formed via the coil insulating layer, and then a core connecting through hole 6 is formed. To do.

(FIG. 14) Co-Ta-Zr type amorphous alloy is formed by sputtering, mechanical polishing, etch back by ion etching, etc. to fill the core connecting through holes with a magnetic film and flatten it, and then the pole connecting portion is formed. And the auxiliary magnetic pole 13 is formed.

(FIG. 15) A groove for embedding a core is formed in the non-magnetic insulating substrate 2 by dicer or ion etching, and C
A film of an o-Ta-Zr-based amorphous alloy is formed by sputtering or the like.

(FIG. 16) The magnetic film is flattened by mechanical polishing or etching back by ion etching so that a minute film thickness remains on the non-magnetic substrate.

(FIG. 17) The magnetic film on the non-magnetic substrate is removed.

At this time, if the angle θ formed by the non-magnetic insulating substrate and the upper magnetic film is an obtuse angle, the efficiency can be improved.

(FIG. 18) A pole 11 is formed by forming and patterning a magnetic film for the main pole by sputtering or the like.

(FIG. 19) The element formed on the magnetic substrate is S
Cut to B state.

(FIG. 20) The pole formed on the non-magnetic substrate is SB-cut, and then the bonded portion of the pole is smoothed by wrapping or the like.

(FIG. 21) The magnetic substrate element in the SB state and the pole on the non-magnetic insulating substrate are bonded so as to be magnetically coupled and interlocked, and after Gd control, the magnetic substrate is lapped to the optimum element height by wrapping or the like. Thin plate, non-magnetic substrate part is thinned by lapping. Chip, assembly process, etc.
The head is completed.

According to the above structure and manufacturing method, the pole portion of the perpendicular magnetic recording thin film magnetic head is formed on the non-magnetic substrate and the magnetic layer having a small film thickness on the embedded core, and is formed on the non-magnetic substrate. Since the pole tip is formed in the through hole part, the film quality of the magnetic layer at the core / non-magnetic insulating substrate boundary, the uneven wear of the core material and the non-magnetic insulating substrate at the time of smoothing, the core / insulating layer due to the difference in etching rate, etc. It is possible to provide a perpendicular magnetic recording type thin film magnetic head that can form a magnetic film for a pole without being affected by a step in a boundary portion and has high reliability and yield.

In the description of the present embodiment, the case where the pole is formed in a direction substantially perpendicular to the center of the winding coil has been described, but as shown in FIG. 22, at the tip of the element formed on the magnetic substrate, Needless to say, the same effect can be obtained when the pole film-formed surface formed on the non-magnetic insulating substrate and the magnetic substrate serving as the magnetic core are bonded together at the cross section. Further, although the case where Mn-Zn ferrite of the magnetic substrate is used has been described in the description of this embodiment, it goes without saying that the same effect can be obtained when the magnetic film is formed on the substrate. In addition, by using Ni-Zn ferrite for the magnetic substrate,
The formation of the insulating layer between the substrate and the coil is unnecessary, and the manufacturing process can be shortened. Further, in the description of the first and second embodiments, the case where the main magnetic path is the magnetic substrate has been described, but the magnetic core serving as the main magnetic path penetrates the magnetic layer on the substrate, and the main magnetic path penetrates the coil winding. It goes without saying that the same effect can be obtained when the magnetic layer is formed. Further, although the present invention has been described in the form in which the magnetic film is embedded in the non-magnetic substrate on which the magnetic film for the pole is formed, as shown in FIG. 23, the non-magnetic film is embedded in the magnetic substrate to form the magnetic film for the pole. It goes without saying that the same effect can be obtained with the structure. Moreover, it is needless to say that the magnetic flux leakage in the coil portion can be reduced by embedding a non-magnetic film in the magnetic substrate, and a more efficient perpendicular magnetic head can be obtained.

[0038]

As described above, according to the present invention,
The pole film of the thin film perpendicular magnetic head is formed on the insulating layer with a small film thickness formed on the core and the embedded insulating layer, and is connected to the core at the through hole portion formed on the core, or the core and embedded By forming a pole film on the magnetic film with a small film thickness formed on the insulating layer, the film quality of the insulating layer at the boundary of the core / insulating material, uneven wear of the core material and insulating material during smoothing, and etching rate Since the upper insulating layer or the magnetic layer covers the step difference at the boundary between the core and the insulating layer due to the difference between the two, the pole magnetic film can be formed on a good smooth surface, and the reliability and yield are high. A perpendicular magnetic recording type thin film magnetic head can be provided.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of a thin film magnetic head according to the present invention.

FIG. 2 is a sectional view taken along line A-A 'of FIG.

FIG. 3 is a manufacturing process diagram illustrating an example of the thin-film magnetic head according to the present invention.

FIG. 4 is likewise a manufacturing process drawing.

FIG. 5 is also a manufacturing process drawing.

FIG. 6 is likewise a manufacturing process drawing.

FIG. 7 is likewise a manufacturing process drawing.

FIG. 8 is likewise a manufacturing process drawing.

FIG. 9 is a cross-sectional view showing another example of the present invention.

FIG. 10 is a plan view showing a second embodiment of the thin film magnetic head according to the present invention.

11 is a cross-sectional view taken along the line B-B ′ of FIG.

FIG. 12 is an enlarged view of the pole portion of FIG.

FIG. 13 is a manufacturing process diagram for explaining the second embodiment of the thin-film magnetic head according to the present invention.

FIG. 14 is likewise a manufacturing process drawing.

FIG. 15 is likewise a manufacturing process drawing.

FIG. 16 is also a manufacturing process drawing.

FIG. 17 is also a manufacturing process drawing.

FIG. 18 is also a manufacturing process drawing.

FIG. 19 is also a manufacturing process drawing.

FIG. 20 is likewise a manufacturing process drawing.

FIG. 21 is also a manufacturing process drawing.

FIG. 22 is a cross-sectional view showing another example of the present invention.

FIG. 23 is a sectional view showing another example of the same.

FIG. 24 is a diagram showing a conventional perpendicular recording thin film magnetic head.

FIG. 25 is a view showing a thin film magnetic head of the same.

FIG. 26 is a view showing a thin film magnetic head of the same.

FIG. 27 is a diagram showing a thin film magnetic head of the same.

FIG. 28 is a diagram showing a thin film magnetic head of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Magnetic substrate, 2 ... Nonmagnetic substrate, 3 ... Insulating layer, 4 ... Signal coil insulating layer, 5 ... Signal coil, 6 ... Core connection part, 7 ... Magnetic core, 8 ... Protective film, 11 ... Main pole, 13 … Auxiliary magnetic pole.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hitoshi Yanagihara 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Stock Video Media Research Laboratory, Hitachi, Ltd. (72) Inventor Hiroyuki Nagatomo 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Inside Hitachi Media Media Research Laboratories (72) Inventor Toshio Tsuchiya 292 No. Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Shares Inside Hitachi Media Media Research Laboratories (72) Mitsuo Abe 292 Yoshida-cho, Totsuka-ku Yokohama-shi, Kanagawa (72) Inventor Norio Uemura 2-1-2 Marunouchi, Chiyoda-ku, Tokyo Hitachi Metals, Ltd.

Claims (8)

[Claims] 1. A conductor coil on a magnetic substrate via an insulating layer,
In a perpendicular magnetic recording thin film magnetic head in which a magnetic core and a pole magnetic film are sequentially laminated, and the magnetic core is magnetically coupled to a magnetic substrate at a core connecting portion, the pole magnetic film is magnetically coupled to the magnetic core. A magnetic film is formed on the non-magnetic insulating layer on the non-magnetic insulating layer in which the core is embedded, and is magnetically coupled to the magnetic core through the non-magnetic insulating layer on the magnetic core or at a through hole portion formed on the magnetic core. A perpendicular magnetic recording thin film magnetic head characterized in that it is connected to. 2. A conductor coil on a magnetic substrate via an insulating layer,
Magnetic cores are sequentially laminated, the magnetic cores are magnetically coupled to the magnetic substrate at the core connecting portion, the pole magnetic film is formed in a cross section of the magnetic substrate substantially perpendicular to the magnetic core, and the pole magnetic film is the magnetic substrate. In a perpendicular magnetic recording thin film magnetic head formed on a non-magnetic insulating layer after forming a magnetic film for connection and flattened, a non-magnetic insulating layer in which the connecting magnetic core and the magnetic core are embedded. A film is formed on the upper non-magnetic insulating layer and is formed on the magnetic core through the non-magnetic insulating layer, or
A perpendicular magnetic recording type thin film magnetic head characterized in that it is magnetically connected to a magnetic core through a through hole portion formed on the magnetic core. 3. A thin film vertical having a coil / magnetic core structure in which a conductor coil and a magnetic core are sequentially laminated on a magnetic substrate or on a magnetic film on the substrate via an insulating layer, and a pole formed of a thin film. In the magnetic head, the pole portion is formed separately by patterning and patterning a pole magnetic layer on a smooth surface in which a magnetic film is embedded in a groove provided in a non-magnetic insulating substrate, and then forming a coil / magnetic core structure. In a perpendicular magnetic recording thin film magnetic head formed by adhesion, the pole magnetic film is formed on a magnetic film embedded in the non-magnetic insulating substrate and a magnetic layer on the non-magnetic insulating substrate in which the magnetic film is embedded. A perpendicular magnetic recording thin film magnetic head characterized in that a pole tip is formed at a through hole portion formed on a non-magnetic insulating substrate. 4. A thin film vertical having a coil / magnetic core structure formed by sequentially laminating a conductor coil and a magnetic core on a magnetic substrate or on a magnetic film on the substrate with an insulating layer interposed therebetween, and a pole formed of a thin film. In the magnetic head, the pole portion is formed separately by patterning and patterning a pole magnetic layer on a smooth surface in which a non-magnetic insulating film is embedded in a groove provided on a magnetic substrate, and then forming a coil / magnetic core structure. In a perpendicular magnetic recording thin film magnetic head formed by bonding, the pole magnetic film is a nonmagnetic insulating film embedded in the magnetic substrate and a nonmagnetic insulating layer on the magnetic substrate in which the nonmagnetic insulating film is embedded. A perpendicular magnetic recording characterized by being formed on the magnetic substrate and magnetically connected to the magnetic substrate via the non-magnetic insulating layer on the magnetic substrate or at a through hole portion formed on the magnetic substrate. Type thin-film magnetic head. 5. A taper angle of a through hole formed in a nonmagnetic insulating layer on a magnetic core forming a pole or a through hole formed in a nonmagnetic insulating layer on a magnetic substrate has a taper angle of 30 °.
The perpendicular magnetic recording thin film magnetic head according to claim 1, wherein: 6. The perpendicular magnetic recording thin-film magnetic head according to claim 1, wherein the film thickness of the non-magnetic insulating layer on the magnetic core forming the pole is 1 μm or less. 7. A taper angle of a through hole formed in a sulu hole formed in a magnetic layer on a non-magnetic insulating substrate forming a pole is 30 ° or less.
A perpendicular magnetic recording type thin film magnetic head as described above. 8. The film thickness of the magnetic layer on the non-magnetic insulating substrate forming the pole is 1 μm or less.
Or a perpendicular magnetic recording type thin film magnetic head described in 7.