JPH0695722A - Method for generating equipment machine control sequence - Google Patents

Abstract

PURPOSE:To provide the equipment machine control sequence generating method which can settle the check measuring method in a very short time at the time of settling it by trial and error. CONSTITUTION:A list group is preliminarily determined which is provided with list numbers indicating the operations and processing contents of X and Y axis positioning control unit parts 7 and 8 and position and air pressure measurement control unit parts 9 and 10 and plural parameters where an arbitrary value can be stored for each list number; and when list numbers and parameters selected by an operator are successively inputted to a man-machine interface part 13, a tabulated control sequence is generated in the memory of the man- machine interface part 13 based on them. A main control part 12 interprets list numbers and parameters of the tabulated control sequence and successively executes the contents with respect to each list. Required data preliminarily determined by contents after the operation are sent to and stored in prescribed parameters of the tabulated control sequence, and the main control part 12 executes the control sequence.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention is rewritable, such as an alignment apparatus, with a plurality of positioning control unit sections, a plurality of measurement control unit sections, and a main control section for centrally controlling both control unit sections. The present invention relates to a method for creating an equipment machine control sequence including a man-machine interface unit having a memory.

[0002]

2. Description of the Related Art In addition to a main control sequence for controlling the entire apparatus, an alignment apparatus requires a check control sequence for measuring the positioning accuracy of the equipment and measuring the measurement accuracy.

Therefore, conventionally, a software creation specialist has
In general, not only the main control sequence but also the check control sequence is created.

[0004]

However, in the above conventional method, the measuring method of the positioning accuracy and the measuring method of the measuring accuracy are not fixed, and the measurement is performed based on the check control sequence initially set. As a result of performing the measurement, if a defect is found in the measurement method and it becomes necessary to perform measurement according to another procedure, it is necessary to create a control sequence for checking to suit this, but a software creation specialist There is a problem in that it is time consuming, the situation cannot be dealt with promptly, and the cost also increases when the request is made to.

[0005]

In order to solve the above problems, the present invention provides a plurality of positioning control unit sections, a plurality of measurement control unit sections, and a main control section for centrally controlling both control unit sections. In a method of creating a control sequence in an equipment machine including a man-machine interface unit having a rewritable memory, a list number indicating the operation and processing content of each control unit unit and an arbitrary value is stored for each list number. A list group having a plurality of possible parameters is set in advance, and the list number and the parameters selected by the operator are sequentially input to the man-machine interface section. Control sequence is created, and the main control unit solves the list number and parameters of the tabulated control sequence. Then, the contents are sequentially executed for each list, each control unit operates based on the operation command from the main control unit, and the necessary data determined in advance after the operation is converted into a table in the man-machine interface unit. Is sent to a predetermined parameter of the stored control sequence and stored there, and the main control unit is configured to execute the control sequence by referring to the stored data in the subsequent list number if necessary. Is characterized by.

[0006]

According to the present invention, when the positioning accuracy of the equipment machine is measured, the device user selects a list number required for measurement and the like from the list group and orders it, and a series of the list numbers is selected. When the values of the parameters required for operations, etc. are determined and these data are input to the man-machine interface section, the sequence of controlling the positioning control unit section and the measurement control unit section is stored in the memory of the man-machine interface section based on this. It will be tabulated and automatically created.

The main control unit interprets the list number and parameters in the table, gives an operation command to each control unit unit, and executes a check control sequence.

As described above, the user of the apparatus prepares a control sequence for check measurement for the positioning accuracy and the like which is considered to be the best, by a simple operation of inputting the list number and the parameter through the man-machine interface section. The underlying device can do this.
Therefore, when the check measurement method is established through trial and error, it can be established within an extremely short time. The series of operations can be easily performed by the user of the apparatus and does not bother a software creation specialist, which is advantageous in terms of time and cost.

According to the present invention, in addition to the above-described operation, necessary data determined in advance after the operation corresponding to a certain list number is stored in the table of the man-machine interface section, and the subsequent list numbers are used. Since each control unit can be controlled using the stored data contents as needed, the positioning accuracy can be measured based on a more appropriate check control sequence.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a control sequence creation method for an alignment apparatus will be described below with reference to the drawings.

In the alignment apparatus shown in FIG. 1, 1
Is an exposure device, 2 is a pattern, 3 is a reticle stage, 4
Is a projection lens, 5 is a work, and 6 is an XY stage.
An X-axis positioning control unit (positioning control unit) 7 gives a drive command to the X-axis driving means 7a and inputs drive amount data from the X-axis sensor 7b. A Y-axis positioning control unit (positioning control unit) 8 gives a driving command to the Y-axis driving means 8a and inputs driving amount data from the Y-axis sensor 8b. Reference numeral 9 is a position recognition control unit unit (measurement control unit unit) for measuring the position of the work 5, and the position of the mark M attached to the work 5 is recognized by the recognition unit 9b through the projection lens 4 using the laser light from the laser 9a. The position of the work 5 is measured by recognizing it. Reference numeral 10 denotes an atmospheric pressure measurement control unit section (measurement control unit section), which measures atmospheric pressure.

The X-axis positioning control unit section 7, the Y-axis positioning control unit section 8, the position recognition control unit section 9 and the atmospheric pressure measurement control unit section 10 are connected to the main control section 12 via a bus 11. Further, a man-machine interface unit 13 is connected to the main control unit 12 via the bus 11. 13b is an operation panel serving as an input unit, and 13a is C
A display unit 13c composed of an RT and an external storage device are both connected to the man-machine interface unit 13.
In addition, the other positioning control unit parts 14, 14 ... And the other measurement control unit parts 15, 15.
It is connected to the main controller 12 via.

Next, a method of creating the check control sequence will be specifically described by taking the atmospheric pressure correction when positioning the XY stage 6 as an example.

By design, when the XY stage 6 is moved in the X-axis direction from the origin position, it is recognized that the mark M of the work 5 is at a predetermined position in the X-axis direction by the recognition unit of the position recognition control unit 9. 9b. The movement of the XY stage 6 in the X-axis direction is controlled by the X-axis positioning control unit section 7, and the XY stage 6 is moved x in the X-axis direction by the driving means 7a and the sensor 7b. As a result, the position recognition control unit 9 recognizes and measures whether the mark M of the workpiece 5 is at a predetermined position in the X-axis direction or how much the error is. Atmospheric pressure (actually, there are various error factors such as mechanical error of XY stage 6, mounting error of work 5, measurement error of position recognition control unit 9, temperature, humidity, etc., and it is very difficult to establish a measurement method. is there.

In consideration of the effect of (1), the atmospheric pressure is corrected,
Although x is set, it is not easy to set the correction coefficient so as to match the actual condition of the device. When the mark M does not match the predetermined position and an error is measured in the X-axis direction, it is necessary to change the correction coefficient to an appropriate value.

FIG. 2 shows a list of the atmospheric pressure correction and the X-axis movement and a list of parameters. This list group is created in advance in a table, and the operator inputs into the man-machine interface unit 13 the list number and parameters that are considered necessary while looking at this table. In creating the list group, the functions of the positioning control unit and the measurement control unit are analyzed when designing the control software of the equipment machine, and the functions are classified into lists, and each parameter for each list is classified, and then the list shown in FIG. The list group is as shown in FIG. 2 (only a small part of the list group is shown in FIG. 2).

The list NO. The function 1 is reading the atmospheric pressure, and the atmospheric pressure value p measured by the atmospheric pressure measurement control unit 10 is stored in the parameter 4.

List NO. Of FIG. The function of 2 is X-axis movement, which gives a command to the X-axis positioning control unit section 7,
The XY stage 6 is moved in the X-axis direction. X at this time
The axial movement amount x is indicated by the parameter 1 and the movement speed V is indicated by the parameter z.

List NO. Of FIG. The function 3 is reading the recognition position, and reading the error amount of the mark M recognized and measured by the position recognition control unit 9. The parameter 4 stores the X-axis direction error amount Δx, and the parameter 5 stores the Y-axis direction error amount Δy.

The list NO. The function of No. 4 is the atmospheric pressure correction coefficient display, and the correction coefficient k in the X-axis direction
x, and the correction coefficient ky in the Y-axis direction is displayed in Parameter 2.

List NO. Of FIG. The function of 5 is to perform a predetermined calculation to calculate a correction coefficient, and L (list NO.) And P (parameter NO.) Of parameter 1 are used.
A predetermined calculation is performed based on the data indicated by, the data indicated by L and P of the parameter 2, and the data indicated by L and P of the parameter 3, and the correction coefficient k is calculated and stored in the parameter 4. . When obtaining the correction coefficient kx in the X-axis direction, the atmospheric pressure value p (L = 1 and P = 4 in parameter 1) and the X-axis movement amount x (L = in parameter 2) are used as data.
2, P = 1), X-axis direction error amount Δx (L in parameter 3)
= 3, P = 4), the correction coefficient kx in the X-axis direction is calculated based on this, and this is stored in the parameter 4.

List NO. Of FIG. The function of 6 is an X-axis movement amount calculation, and when the designed X-axis movement amount x ₀ is given, this is corrected and calculated to calculate the X-axis movement amount x. Parameter 1 is the design X-axis movement x ₀
However, in the parameter 2, the pressure value p (actually L = 1, P = 4
Becomes ) Is the correction coefficient kx in the X-axis direction in parameter 3.
Is given, a predetermined calculation is performed based on these, and the X-axis movement amount x is obtained and stored in the parameter 4.

The list NO. The function of 7 is to perform parameter transfer, and transfer the data of L and P of parameter 1 to L and P of parameter 2. For example, parameter 1 has L = 6, P = 4, parameter 2 has L = 2, P =
Setting 1 for each means that the X-axis movement amount x obtained by the X-axis movement amount calculation can be used as it is as data for the X-axis movement.

The list number (NO.) Of the list group, its function, and parameter NO. The specified contents and the like can be arbitrarily determined when designing the control software. It is preferable that the unit of parameter length is word (16 bits),
It may be a byte (8 bits) or a double word (32 bits).

Next, the atmospheric pressure correction coefficient kx for the X-axis movement
A method of creating a check control sequence that is determined by actually adapting the alignment apparatus will be described.

CRT of man-machine interface unit 13
A table entry field as shown in FIG. 3 is displayed on 13a. The list No. is displayed on the CRT 13a. 2, a parameter entry field corresponding to the parameters 1 to 3 in FIG. 2 (parameters 4 and 5 are omitted because they do not need to be entered) and a repetition number entry field. There is.

The user of the alignment apparatus selects the list necessary for creating the above-mentioned control sequence for checking while looking at the list group in FIG. 2 and determines the contents of each parameter, while obtaining the necessary data from the operation panel 13b. Input into the man-machine interface section 13 and fill in the table entry fields.

Specifically, as shown in FIG. 4, table entry fields are filled.

When the above-mentioned input to the man-machine interface section 13 is completed, a tabulated control sequence is created in the memory of the man-machine interface section 13, and the main control section 12 stores the list number of the tabulated control sequence. It interprets the parameters and executes the contents sequentially for each list. Each control unit section 7, 8, 9, 1
0, 14, ..., 15, ... Operate based on the operation command from the main control unit 12, and necessary data predetermined by the contents after the operation are controlled by the table of the man-machine interface unit 13. It is sent to certain parameters of the sequence and stored there. The main control unit 12 executes the control sequence by referring to the stored data if necessary with the subsequent list numbers.

FIG. 5 is a flow chart showing the series of processes of the main controller 12.

In step # 1, the main controller 12 is started,
In step # 2, the list NO. Make sure step #
In step 3, the contents of the list are executed based on the contents of each parameter, and each control unit section is operated and calculation is performed. In step # 4, it is determined whether or not the operation result needs to be stored. Is determined in advance (need to have parameters 4 and 5 in FIG. 2), and if necessary, proceed to step # 5,
The operation result is stored in the parameters 4 and 5. If it is not necessary to store the data in step # 4 or if the storage is completed in step # 5, all list NO. Is completed, and if not completed, the following list NO. The same processing as above is executed from step # 2. All lists N in step # 6
O. If it is determined that the process has been completed, the execution of the main control unit 1 is completed when the process is repeated for the number of times of repetition in the next step # 7.

Next, the case shown in FIG. 4 will be specifically described. In step 1, the atmospheric pressure correction coefficient is CRT13.
A list NO. 4 is selected so that the user of the apparatus can confirm kx and ky as the previous correction coefficients (it is also possible to input specific set values for kx and ky). In step 2, list NO. Is issued so as to give a command to read the atmospheric pressure. Select 1. In step 3, the atmospheric pressure value p (1, 4) is used as atmospheric pressure data (6, 2) when calculating the X-axis movement amount. 7. Select the parameter transfer of No. 7, and input the parameter contents. In step 4, the list No. is set so that the correction coefficient kx displayed on the CRT 13a is used for the X-axis movement amount calculation. The parameter shift of 7 is selected, and the kx (4, 1) is used as the basic data (6, 3) of the X-axis movement amount calculation. In step 5, the list NO. 6 is selected so that the X-axis movement amount can be calculated, and its basic data is given. The designed X-axis movement amount x ₀ is input to the parameter 1 (if it is not input, the previous value is used), and the transferred pressure value p and the correction coefficient kx are set to the parameters 2 and 3, respectively. Used (It is also possible to update these values). Then, based on the above basic data, the X-axis movement amount x
Is calculated (see FIG. 2, parameter 4). Step 6
In list NO. Select the parameter transfer of 7
The X-axis movement amount x (6, 4) indicates the list NO. The data of X-axis movement of 2 (2, 1). In step 7, the list NO. The X-axis movement of 2 is selected, the X-axis movement amount x (using the already transferred data) is set as the parameter, and the movement speed V is set as the parameter 2. In step 8, the list NO. 3 is selected, the recognition position is read, and the X-axis direction error amount Δx with respect to the X-axis movement amount x is measured (see FIG. 2, parameter 4). In step 9, the list NO. 5 is selected and the correction coefficient is calculated. As the basic data, the atmospheric pressure value p is set in parameter 1.
L and P are set so that (1, 4), X-axis movement amount x (2, 1), and X-axis direction error amount Δx (3, 4) are transferred. In step 10, the list NO. 7 is selected, and the correction coefficient kx (5,4) is set to list NO. The data (4, 1) of the atmospheric pressure correction coefficient display of No. 4 is set. In step 11, the list NO.
4. The atmospheric pressure correction coefficient display of 4 is selected, and the X axis direction correction coefficient kx of the parameter 1 and the Y axis direction correction coefficient ky of the parameter Z are selected.
Is displayed on the CRT 13a. The newly calculated correction coefficient kx is displayed so that it can be compared with the correction coefficient kx displayed in step 1 on the CRT 13a.

The number of repetitions is set to once.

The above-mentioned check control sequence is executed by the main controller 12 in accordance with the flowchart shown in FIG.

[0035]

According to the present invention, the control sequence for checking can be created by a simple operation in which the user of the apparatus inputs the list number and the parameter through the man-machine interface section. Therefore, when a check measurement method is established through trial and error, it is possible to establish it within an extremely short time.

Further, according to the present invention, the man-machine interface unit table stores necessary data predetermined by the contents after the operation corresponding to a certain list number, and the subsequent list numbers are used to store the necessary data. Since each control unit can be controlled using the stored data content, the positioning accuracy can be measured based on a more appropriate check control sequence.

[Brief description of drawings]

FIG. 1 is a block diagram showing an example of an apparatus used to carry out the present invention.

FIG. 2 is an explanatory diagram showing an example of a list group.

FIG. 3 is an explanatory diagram showing an example of a table displayed on a CRT.

FIG. 4 is an explanatory diagram showing a completed example of a table displayed on a CRT.

FIG. 5 is a flowchart showing an example of a control flow for carrying out the method of the present invention.

[Explanation of symbols]

 7, 8, 9, 10 Control unit section 12 Main control section 13 Man-machine interface section

Claims (1)

[Claims] 1. A positioning control unit section, a plurality of measurement control unit sections, a main control section for centrally controlling both control unit sections, and a man-machine interface section having a rewritable memory. In the method of creating the control sequence in the equipment machine, a list group including a list number indicating the operation and processing content of each control unit section and a plurality of parameters capable of storing an arbitrary value for each list number is set in advance. When the operator sequentially inputs the list number and the parameter selected by the operator to the man-machine interface unit, a tabulated control sequence is created in the memory of the man-machine interface unit based on this.
The main control unit interprets the list numbers and parameters of the tabulated control sequence and executes the contents sequentially for each list.Each control unit unit operates based on the operation command from the main control unit, and the contents after the operation The required data determined in advance are sent to predetermined parameters of the table-based control sequence of the man-machine interface section and stored here, and the main control section stores the stored list number if necessary. A method for creating an equipment machine control sequence, which is configured to execute the control sequence with reference to data.