JPH0625927Y2 - H-shaped analysis electromagnet - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to an H-shaped analyzing electromagnet for mass analysis of charged particles such as an ion beam, which is used in, for example, an ion implanter, an accelerator, an analyzer and the like. .

[Conventional technology]

FIG. 3 is a schematic sectional view showing an example of a conventional H-shaped analyzing electromagnet. This H-shaped analyzing electromagnet has an analysis tube 6 sandwiched between opposing magnetic poles 21 and 22 of a fan-shaped iron core 2 in a plan view, and coils 3 and 4 are wound around the magnetic poles 21 and 22, respectively. , And yokes (also called return yokes) 23 and 24 are provided on both outer sides thereof, respectively.

By passing charged particles through the analysis tube 6, only charged particles having a desired mass can be mass analyzed and derived.

[Problems to be solved by the invention]

In the H-shaped analyzing electromagnet as described above, there is a problem that it is difficult to remove or attach the internal analysis tube 6 for maintenance and inspection. That is, although the iron core 2 has a structure in which the upper and lower parts can be divided into two parts at the divided parts A and B, it is necessary to completely remove one of the upper and lower iron cores 2 in order to remove or attach the analysis tube 6, and its weight is small. The work is difficult because it is heavy.

Therefore, an object of the present invention is to provide an H-shaped analysis electromagnet improved so that the analysis tube can be easily taken in and out.

[Means for solving problems]

The H-shaped analysis electromagnet of the present invention is an H-shaped analysis electromagnet having an analysis tube sandwiched between opposing magnetic poles and having yokes on both sides of the magnetic pole. It is characterized in that a removable portion is provided for taking in and out.

[Action]

By removing the removable portion provided on the yoke, the analysis tube can be taken in and out through the space thereafter. Therefore, the work is easy.

〔Example〕

FIG. 1 is a schematic sectional view showing an H-shaped analyzing electromagnet according to an embodiment of the present invention, and FIG. 2 is a front view seen in the direction of arrow P in FIG. The same or equivalent parts as those in FIG. 3 are designated by the same reference numerals and the description thereof will be omitted.

In the H-shaped analyzing electromagnet of this embodiment, a removable portion 25 that can be removed to the outside as shown by an arrow D is provided at a portion which is an intermediate portion of the outer yoke 24 and is located just outside the analysis tube 6. It is provided. The height H ₂ of the removable portion 25 is slightly larger than the height H _{1 of the} analysis tube 6, so that the analysis tube 6 can be taken in and out through the space after the removal of the removable portion 25.

Although various means can be used for fixing the removable portion 25 to the yoke 24, in this embodiment, as an example, the fixing member 26 is used for fixing.

It should be noted that the yoke 24 having the above structure is used.
Although a slight gap may occur between the removable portion 25 and the removable portion 25, the gap is very small as compared with the gap between the magnetic poles 21 and 22 and can be ignored in terms of magnetic characteristics.

In the above H-shaped analyzing electromagnet, by removing the removable portion 25, the analysis tube 6 is passed through the space thereafter.
Can be removed from or attached to the iron core 2. In that case, since the removable portion 25 is smaller and lighter than the iron core 2, the detachable portion 25 can be easily attached and detached, and thus the analysis tube 6 can be easily put in and taken out.

The detachable portion 25 may have a structure such as a division portion C, which can be divided into several portions. By doing so, the size and weight per block can be reduced, so that the detachable portion 25 can be more easily attached and detached. It will be easier.

Further, the removable portion 25 is not necessarily the outer yoke 2
4 need not be provided, but may be provided on at least one of the inner and outer yokes 23 and 24 depending on the structure and arrangement of the H-shaped analyzing electromagnet.

[Effect of device]

As described above, according to this invention, the analysis tube can be easily taken in and out.

[Brief description of drawings]

FIG. 1 is a schematic sectional view showing an H-shaped analyzing electromagnet according to an embodiment of the present invention. FIG. 2 is a front view seen in the direction of arrow P in FIG. FIG. 3 is a schematic sectional view showing an example of a conventional H-shaped analyzing electromagnet. 2 ... Iron core, 21, 22 ... Magnetic pole, 23, 24 ... Yoke, 25 ... Removable part, 3, 4 ... Coil, 6 ...
… Analysis tube.

Claims (1)

[Scope of utility model registration request] 1. An H-shaped analyzing electromagnet having an analytical tube sandwiched between opposed magnetic poles and having yokes on both sides of the magnetic pole.
An H-shaped analysis electromagnet, wherein at least one of the two yokes is provided at a removable portion for inserting and removing the analysis tube.