JPH06119619A - Combined head for perpendicular magnetic recording and reproduction - Google Patents
Combined head for perpendicular magnetic recording and reproductionInfo
- Publication number
- JPH06119619A JPH06119619A JP26458192A JP26458192A JPH06119619A JP H06119619 A JPH06119619 A JP H06119619A JP 26458192 A JP26458192 A JP 26458192A JP 26458192 A JP26458192 A JP 26458192A JP H06119619 A JPH06119619 A JP H06119619A
- Authority
- JP
- Japan
- Prior art keywords
- head
- recording
- effect element
- magnetic recording
- perpendicular magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Magnetic Heads (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は情報の記録再生に用いる
磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used for recording / reproducing information.
【0002】[0002]
【従来の技術】磁気抵抗効果型ヘッドでは磁気抵抗効果
素子の形状異方性を高めるために、トラック幅より素子
の長さを長くする。トラック幅以外の部分で拾った信号
は雑音となるので、素子の両側に電極を設けて、この電
極と重なった部分の磁気抵抗効果素子を短絡して感度を
極めて小さくする。これにより、電極の間隔がトラック
幅となるようにしている。2. Description of the Related Art In a magnetoresistive head, the element length is made longer than the track width in order to increase the shape anisotropy of the magnetoresistive element. Since the signal picked up in a portion other than the track width becomes noise, electrodes are provided on both sides of the element, and the magnetoresistive effect element in the portion overlapping this electrode is short-circuited to extremely reduce the sensitivity. As a result, the distance between the electrodes is set to be the track width.
【0003】記録ヘッドと再生用の磁気抵抗効果型ヘッ
ドの組合せでは、磁気抵抗効果型ヘッドに合わせて、そ
の上に記録ヘッドを積層している。この時の記録ヘッド
と再生ヘッドとの組合せの精度はホトリソグラフィを行
う装置に依存していた。In the combination of the recording head and the reproducing magnetoresistive head, the recording head is laminated on the magnetoresistive head in accordance with the magnetoresistive head. The accuracy of the combination of the recording head and the reproducing head at this time depended on the photolithography apparatus.
【0004】[0004]
【発明が解決しようとする課題】磁気抵抗効果型ヘッド
の狭トラック化を進めていくと、出力はトラック幅の減
少とともに低下するが、電極と重なった部分で拾う隣接
トラックからの出力は電極間隔に依存せず、この出力は
雑音となるため、信号対雑音比が低下する。また、トラ
ック幅が変わっても記録ヘッドと再生ヘッドとの合せの
誤差は変化しない。このため狭トラック化を進めると、
トラック幅に占める合わせ誤差の影響が大きくなり実効
的なトラック幅が著しく減少する。When the track of the magnetoresistive head is narrowed, the output decreases as the track width decreases, but the output from the adjacent track picked up at the portion overlapping the electrode is the electrode spacing. This output is noisy, and the signal-to-noise ratio is reduced. Further, even if the track width changes, the alignment error between the recording head and the reproducing head does not change. For this reason, as the track becomes narrower,
The effect of the alignment error on the track width increases, and the effective track width decreases significantly.
【0005】本発明の目的は、トラック幅が狭くなって
もトラック外からの雑音の影響を小さくすることのでき
るヘッド構造を提供することにある。本発明の他の目的
は、記録ヘッドと再生ヘッドを高精度に合わせることの
できるヘッド構造を提供することにある。It is an object of the present invention to provide a head structure capable of reducing the influence of noise from outside the track even when the track width is narrow. Another object of the present invention is to provide a head structure capable of aligning a recording head and a reproducing head with high accuracy.
【0006】[0006]
【課題を解決するための手段】上記の課題は、磁気抵抗
効果型素子のうちトラック幅部分だけが記録ビット方向
に垂直となるようにし、トラック幅以外の素子部分を媒
体運動方向とほぼ平行とすることによって解決すること
ができる。SUMMARY OF THE INVENTION The above problem is that only the track width portion of the magnetoresistive effect element is made perpendicular to the recording bit direction, and the element portion other than the track width is made substantially parallel to the medium movement direction. Can be solved by doing.
【0007】[0007]
【作用】図1は本発明の薄膜磁気ヘッドの斜視図を、図
2はこれを浮上面側から見たヘッド構造を示し、この図
を用いて本発明の作用を説明する。図に示すように絶縁
層2の斜面部を利用して磁気抵抗効果素子3を折り曲
げ、電極4を形成して再生用ヘッド7を設ける。この再
生用ヘッド7と隣接するように記録用ヘッド8を形成す
る。記録用ヘッド8の主磁極5斜面部の角度θは、絶縁
膜2斜面部の角度θと平行となるようにする。これによ
り、再生ヘッド7のトラック幅は絶縁層2の斜面部分、
記録ヘッド8のトラック幅は磁気コア5の斜面部分で決
まる。FIG. 1 is a perspective view of the thin film magnetic head of the present invention, and FIG. 2 shows the head structure as seen from the air bearing surface side. The operation of the present invention will be described with reference to this drawing. As shown in the figure, the magnetoresistive effect element 3 is bent by utilizing the inclined surface portion of the insulating layer 2 to form the electrode 4, and the reproducing head 7 is provided. The recording head 8 is formed so as to be adjacent to the reproducing head 7. The angle θ of the inclined surface of the main pole 5 of the recording head 8 is set to be parallel to the angle θ of the inclined surface of the insulating film 2. As a result, the track width of the reproducing head 7 is
The track width of the recording head 8 is determined by the slope portion of the magnetic core 5.
【0008】[0008]
【実施例】本発明の第1の実施例を図1と図2を用いて
説明する。スライダ基体1に絶縁層2が形成されてお
り、その端部は角度θの斜面になっている。この上に再
生用ヘッド7を形成する。斜面を乗り越えるように磁気
抵抗効果素子3を形成し、その両端には電極4を設け
る。この再生用ヘッド7と隣接するように記録用ヘッド
8を形成する。記録用ヘッド8は、磁気コア5となる軟
磁性薄膜の周囲にコイル6を巻いた構造となっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. An insulating layer 2 is formed on the slider base 1, and its end portion is a slope having an angle θ. The reproducing head 7 is formed on this. The magnetoresistive effect element 3 is formed so as to get over the slope, and the electrodes 4 are provided at both ends thereof. The recording head 8 is formed so as to be adjacent to the reproducing head 7. The recording head 8 has a structure in which a coil 6 is wound around a soft magnetic thin film that becomes the magnetic core 5.
【0009】スライダ基体1には酸化アルミニウムと酸
化チタンなどからなる焼結体を用いた。絶縁層2には膜
厚2μmのSiO2 膜を用いた。端部をテーパ加工する
ためにテーパ状ホトレジスト膜をマスクにSiO2 膜を
不活性イオンを用いたドライエッチングで加工した。ホ
トレジストの角度やエッチング条件を変えることによっ
てテーパの角度θは変えることができる。磁気抵抗効果
素子3には膜厚20nmのパーマロイを用いた。磁気抵
抗効果素子3を動作させるにはバイアス磁界を印加する
必要があり、図中には省略して示していないが本実施例
では磁気抵抗効果素子3に隣接して導電膜を設けて、こ
れに分流した電流でバイアス磁界を印加した。導電膜に
は膜厚35nmのTi膜を用いた。磁気抵抗効果素子3
の長さは15μm、高さは3μmである。磁気抵抗効果
素子3の両端に設けた電極4には膜厚150nmの銅を
使用した。電極4と磁気抵抗効果素子3の境界が絶縁膜
2の斜面部と重ならないように、斜面部の端部より1μ
m離して設けた。A sintered body made of aluminum oxide, titanium oxide or the like was used for the slider base 1. As the insulating layer 2, a SiO 2 film having a film thickness of 2 μm was used. In order to taper the edges, the SiO 2 film was processed by dry etching using inert ions using a tapered photoresist film as a mask. The taper angle θ can be changed by changing the photoresist angle and the etching conditions. For the magnetoresistive effect element 3, permalloy having a film thickness of 20 nm was used. In order to operate the magnetoresistive effect element 3, it is necessary to apply a bias magnetic field, and although not shown in the drawing, a conductive film is provided adjacent to the magnetoresistive effect element 3 in this embodiment, A bias magnetic field was applied with the current shunted to. A Ti film having a thickness of 35 nm was used as the conductive film. Magnetoresistive element 3
Has a length of 15 μm and a height of 3 μm. Copper having a film thickness of 150 nm was used for the electrodes 4 provided at both ends of the magnetoresistive element 3. In order to prevent the boundary between the electrode 4 and the magnetoresistive effect element 3 from overlapping the slope of the insulating film 2, 1 μm from the end of the slope
It was provided at a distance of m.
【0010】実施例ではアルミナ・チタンカーバイトか
らなるスライダ基体1を使用したが、フェライトや他の
酸化物焼結体など通常スライダ基体に用いられる他の材
料も用いることができる。バイアス手段は電流による方
法を示したが、他のソフトバイアスや永久磁石バイアス
法、さらにこれらを組み合わせた方法も可能である。絶
縁層2の斜面の角度θを変えることによって実効的なト
ラック幅を変えることができるが、角度θが急峻になる
と磁気抵抗効果素子3の磁化状態が安定せず、少なくと
も60度以下にすることが好ましかった。また、斜面角
θを小さくすると斜面の先端が薄くなるため、記録時に
飽和して良好な記録状態を得ることが困難になる。材料
にパーマロイを用いた場合には20度以上の斜面角θが
必要であった。この値は、当然、使用する磁性膜の飽和
磁束密度に依存し、飽和磁束密度の高いほど斜面角θを
小さくしても飽和を生じにくくなる。In the embodiment, the slider base 1 made of alumina / titanium carbide is used, but other materials usually used for the slider base such as ferrite and other oxide sintered bodies can be used. Although the bias means is a method based on current, other soft bias methods, permanent magnet bias methods, and methods combining these methods are also possible. The effective track width can be changed by changing the angle θ of the slope of the insulating layer 2. However, when the angle θ becomes steep, the magnetized state of the magnetoresistive effect element 3 is not stable and should be at least 60 degrees or less. Was preferred. Further, if the slope angle θ is made small, the tip of the slope becomes thin, so that it becomes saturated during recording and it becomes difficult to obtain a good recording state. When permalloy was used as the material, a slope angle θ of 20 degrees or more was required. This value naturally depends on the saturation magnetic flux density of the magnetic film used, and the higher the saturation magnetic flux density, the more difficult the saturation is to occur even if the slope angle θ is reduced.
【0011】本発明の第2の実施例を図3を用いて説明
する。本実施例は第1の実施例と比べて記録用ヘッド8
の作製方法が異なる。スライダ基体1に絶縁層2が形成
されており、そこに角度θの斜面を2箇所設ける。この
上に再生用ヘッド7と記録用ヘッド8を形成する。本実
施例では斜面を絶縁層2上に1回のプロセスで作製する
ことにより、再生ヘッド7の斜面角度θと記録ヘッド8
の斜面角度θの誤差をより小さく正確に形成できる特徴
がある。A second embodiment of the present invention will be described with reference to FIG. This embodiment is different from the first embodiment in recording head 8
The manufacturing method is different. An insulating layer 2 is formed on the slider base 1, and two inclined surfaces with an angle θ are provided there. A reproducing head 7 and a recording head 8 are formed on this. In this embodiment, the slope is formed on the insulating layer 2 in a single process, so that the slope angle θ of the reproducing head 7 and the recording head 8 are increased.
There is a feature that the error of the slope angle θ can be made smaller and accurately.
【0012】本発明の第3の実施例を図4を用いて説明
する。図4は浮上面側から見た再生用ヘッド7だけを示
しており、図2や図3に示した記録用ヘッド8は省略し
た。本実施例では磁気抵抗効果素子3の後部に磁束リタ
ーンパス9を設けた。磁束リターンパス9として膜厚5
μmのCo系アモルファス膜を形成した。この磁束リタ
ーンパス9を設けたことにより、記録媒体10から再生
ヘッド7に入る磁束は磁気抵抗効果素子3を通りぬけ磁
束リターンパス9をまわって再び記録媒体10に戻る。
これにより、再生出力の再生信号波長応答性が向上し
た。A third embodiment of the present invention will be described with reference to FIG. FIG. 4 shows only the reproducing head 7 viewed from the air bearing surface side, and the recording head 8 shown in FIGS. 2 and 3 is omitted. In this embodiment, the magnetic flux return path 9 is provided at the rear of the magnetoresistive effect element 3. Film thickness 5 as magnetic flux return path 9
A Co-based amorphous film of μm was formed. By providing the magnetic flux return path 9, the magnetic flux entering the reproducing head 7 from the recording medium 10 passes through the magnetoresistive effect element 3, passes through the magnetic flux return path 9 and returns to the recording medium 10 again.
Thereby, the reproduction signal wavelength response of the reproduction output is improved.
【0013】本発明の第4の実施例を図5を用いて説明
する。図5は浮上面側から見た再生用ヘッド7だけを示
しており、図2や図3に示した記録用ヘッド8は省略し
た。本実施例では磁気抵抗効果素子3の前部に磁束導入
パス13を、後部に磁束リターンパス9を設けた。磁束
導入パス13を設けたことにより、再生用ヘッド7と記
録媒体10の接触走行時に電流の記録媒体へのリーク
や、微小な放電を防ぐことができた。A fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 shows only the reproducing head 7 viewed from the air bearing surface side, and the recording head 8 shown in FIGS. 2 and 3 is omitted. In this embodiment, the magnetic flux introducing path 13 is provided in the front part of the magnetoresistive effect element 3, and the magnetic flux return path 9 is provided in the rear part. By providing the magnetic flux introducing path 13, it is possible to prevent a current from leaking to the recording medium and a minute discharge when the reproducing head 7 and the recording medium 10 are in contact with each other.
【0014】本発明の第5の実施例を図6を用いて説明
する。図6は浮上面側から見た再生用ヘッド7だけを示
しており、図2や図3に示した記録用ヘッド8は省略し
た。本実施例では磁気抵抗効果素子3を下部磁気シール
ド層11,上部磁気シールド層12と絶縁層2を介して
形成した。下部および上部磁気シールド層11,12と
して膜厚2μmのCo系アモルファス膜を形成した。斜
面部の角度θは磁気シールド層11の角度θによって決
まる。磁気シールド層11,12を設けたことにより再
生信号は隣接ビットの影響を遮断でき、第3の実施例と
同様に再生信号波長応答性が向上した。A fifth embodiment of the present invention will be described with reference to FIG. FIG. 6 shows only the reproducing head 7 viewed from the air bearing surface side, and the recording head 8 shown in FIGS. 2 and 3 is omitted. In this embodiment, the magnetoresistive effect element 3 is formed via the lower magnetic shield layer 11, the upper magnetic shield layer 12 and the insulating layer 2. As the lower and upper magnetic shield layers 11 and 12, a Co type amorphous film having a film thickness of 2 μm was formed. The angle θ of the slope portion is determined by the angle θ of the magnetic shield layer 11. By providing the magnetic shield layers 11 and 12, the reproduced signal can be shielded from the influence of adjacent bits, and the wavelength response of the reproduced signal is improved as in the third embodiment.
【0015】本発明の第6の実施例を図7を用いて説明
する。図7は浮上面側から見た記録用ヘッド8だけを示
しており、図2や図3に示した再生用ヘッド7は省略し
た。本実施例では、第2の実施例に示した記録用ヘッド
8の後部に磁束リターンパス9を設けた。これにより記
録用ヘッド8の再生効率が向上し、信号記録時の記録の
度合いを示す入出力特性の測定ができることから、常に
適切な記録電流で記録動作を行うことが可能となった。
また、磁気抵抗効果素子3が使用不能になった緊急時に
は再生用ヘッドとして使用できる。A sixth embodiment of the present invention will be described with reference to FIG. FIG. 7 shows only the recording head 8 viewed from the air bearing surface side, and the reproducing head 7 shown in FIGS. 2 and 3 is omitted. In this embodiment, a magnetic flux return path 9 is provided at the rear of the recording head 8 shown in the second embodiment. As a result, the reproduction efficiency of the recording head 8 is improved, and the input / output characteristics indicating the degree of recording at the time of signal recording can be measured, so that the recording operation can always be performed with an appropriate recording current.
Further, it can be used as a reproducing head in an emergency when the magnetoresistive effect element 3 becomes unusable.
【0016】[0016]
【発明の効果】本発明によって、トラック幅が狭くなっ
てもトラック外からの雑音の影響を小さくすることので
きるヘッド構造を提供することができた。According to the present invention, it is possible to provide a head structure capable of reducing the influence of noise from outside the track even if the track width becomes narrow.
【図1】本発明の一実施例を示す薄膜磁気ヘッドの斜視
図。FIG. 1 is a perspective view of a thin film magnetic head showing an embodiment of the present invention.
【図2】本発明の一実施例を示すヘッドの斜視図。FIG. 2 is a perspective view of a head showing an embodiment of the present invention.
【図3】本発明の第二の実施例を示すヘッドの斜視図。FIG. 3 is a perspective view of a head showing a second embodiment of the present invention.
【図4】本発明の第三の実施例を示すヘッドの斜視図。FIG. 4 is a perspective view of a head showing a third embodiment of the present invention.
【図5】本発明の第四の実施例を示すヘッドの斜視図。FIG. 5 is a perspective view of a head showing a fourth embodiment of the present invention.
【図6】本発明の第五の実施例を示すヘッドの斜視図。FIG. 6 is a perspective view of a head showing a fifth embodiment of the present invention.
【図7】本発明の第六の実施例を示すヘッドの斜視図。FIG. 7 is a perspective view of a head showing a sixth embodiment of the present invention.
1…スライダ基体、2…絶縁層、3…磁気抵抗効果素
子、4…電極、5…磁気コア、6…コイル、10…記録
媒体。DESCRIPTION OF SYMBOLS 1 ... Slider base, 2 ... Insulating layer, 3 ... Magnetoresistive effect element, 4 ... Electrode, 5 ... Magnetic core, 6 ... Coil, 10 ... Recording medium.
Claims (9)
効果型ヘッドにおいて、磁気抵抗効果素子のトラック幅
部分でない部分が媒体の運動方向とほぼ平行であること
を特徴とする垂直磁気記録再生用複合型ヘッド。1. A perpendicular magnetic recording / reproducing device characterized in that, in a magnetoresistive head formed on a substrate to be a slider, a portion other than a track width portion of the magnetoresistive element is substantially parallel to a moving direction of a medium. Composite head.
位置でも、前記磁気抵抗効果素子のトラック幅部分の方
向が、前記媒体の運動方向に垂直ではない垂直磁気記録
再生用複合型ヘッド。2. The composite head for perpendicular magnetic recording / reproducing according to claim 1, wherein the direction of the track width portion of the magnetoresistive effect element is not perpendicular to the movement direction of the medium at any position on the recording medium.
効果素子のトラック幅部分がスライダ基体面上に形成し
た絶縁層端部の斜面部に形成されている垂直磁気記録再
生用複合型ヘッド。3. A perpendicular magnetic recording / reproducing composite head according to claim 1, wherein the track width portion of the magnetoresistive effect element is formed on a sloped portion of an end portion of an insulating layer formed on a slider substrate surface.
媒体の運動方向とトラック幅部分の前記磁気抵抗効果素
子のなす角度が20度から60度の間にある垂直磁気記
録再生用複合型ヘッド。4. The composite type for perpendicular magnetic recording / reproducing according to claim 1, wherein the angle formed by the magnetoresistive effect element in the track width portion and the movement direction of the recording medium is between 20 ° and 60 °. head.
用ヘッドのトラック幅部分の前記磁気抵抗効果素子と同
じ角度の傾きの磁気コアを持つ記録用ヘッドが、再生用
ヘッドに近接して形成されている垂直磁気記録再生用複
合型ヘッド。5. A recording head having a magnetic core having an inclination angle of the same angle as that of the magnetoresistive effect element in a track width portion of the reproducing head according to claim 1, 2, 3 or 4. A composite type head for perpendicular magnetic recording and reproduction that is formed by
前記磁気抵抗効果素子の後部に磁束リターンパスを設け
た垂直磁気記録再生用複合型ヘッド。6. The method according to claim 1, 2, 3, 4 or 5.
A composite head for perpendicular magnetic recording and reproduction, wherein a magnetic flux return path is provided at the rear of the magnetoresistive effect element.
前記磁気抵抗効果素子の前部に磁束導入パスを設けた垂
直磁気記録再生用複合型ヘッド。7. The method according to claim 1, 2, 3, 4 or 5,
A composite head for perpendicular magnetic recording and reproduction, wherein a magnetic flux introducing path is provided in the front part of the magnetoresistive effect element.
前記磁気抵抗効果素子を絶縁層を介して磁気シールド層
で挟んだ垂直磁気記録再生用複合型ヘッド。8. The method according to claim 1, 2, 3, 4 or 5.
A composite type head for perpendicular magnetic recording and reproduction in which the magnetoresistive effect element is sandwiched between magnetic shield layers with an insulating layer interposed therebetween.
前記記録用ヘッドの磁気コアの後部に磁束リターンパス
を設けた垂直磁気記録再生用複合型ヘッド。9. The method according to claim 1, 2, 3, 4 or 5.
A composite head for perpendicular magnetic recording and reproducing, wherein a magnetic flux return path is provided at the rear of the magnetic core of the recording head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26458192A JPH06119619A (en) | 1992-10-02 | 1992-10-02 | Combined head for perpendicular magnetic recording and reproduction |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26458192A JPH06119619A (en) | 1992-10-02 | 1992-10-02 | Combined head for perpendicular magnetic recording and reproduction |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06119619A true JPH06119619A (en) | 1994-04-28 |
Family
ID=17405282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26458192A Pending JPH06119619A (en) | 1992-10-02 | 1992-10-02 | Combined head for perpendicular magnetic recording and reproduction |
Country Status (1)
Country | Link |
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JP (1) | JPH06119619A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7343667B2 (en) | 2004-09-30 | 2008-03-18 | Hitachi Global Storage Technologies Netherlands B.V. | Methods of making a side-by-side read/write head with a self-aligned trailing shield structure |
US7692893B2 (en) | 2004-06-30 | 2010-04-06 | Hitachi Global Storage Technologies Netherlands, B.V. | Side-by-side magnetic head configuration with flared pole tip layer and read sensor sharing same plane |
US7848063B2 (en) | 2006-06-30 | 2010-12-07 | Kabushiki Kaisha Toshiba | Yoke-type magnetic head and magnetic disk apparatus |
-
1992
- 1992-10-02 JP JP26458192A patent/JPH06119619A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7692893B2 (en) | 2004-06-30 | 2010-04-06 | Hitachi Global Storage Technologies Netherlands, B.V. | Side-by-side magnetic head configuration with flared pole tip layer and read sensor sharing same plane |
US7343667B2 (en) | 2004-09-30 | 2008-03-18 | Hitachi Global Storage Technologies Netherlands B.V. | Methods of making a side-by-side read/write head with a self-aligned trailing shield structure |
US7848063B2 (en) | 2006-06-30 | 2010-12-07 | Kabushiki Kaisha Toshiba | Yoke-type magnetic head and magnetic disk apparatus |
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