JPH054306U - Thin film magnetic head - Google Patents

Abstract

(57) [Summary] [Purpose] To save inspection time for thin-film magnetic heads. [Structure] Only one thin film element is provided for one slider. [Effect] Since there is no unnecessary thin film element, the inspection time can be saved accordingly.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a thin film head for recording / reproducing on a magnetic storage medium such as a magnetic disk.

[0002]

[Prior Art]

 A conventional thin film head will be described with reference to FIGS. In FIG. 3, reference numeral 1 is a substrate for forming a thin film element, and 2 is a slider, which is a floating surface having a wedge-shaped taper portion 3 for flying a few μm above a magnetic recording medium rotating at high speed. 4 is formed and cut out from the substrate 1 to a specified size. Reference numeral 12 is a suspension that supports the slider 2, and reference numeral 5 is a lead wire that connects the coil lead terminal and the head IC. FIG. 5 is an enlarged view of the slider 1, and the thin film element 6 is formed on the side surface of the slider 1. FIG. 4 is an enlarged view of the thin film element 6 formed on the side surface of the slider 2. In the figure, 7 is a lower core, 8 is a gap, 9 is an upper core, 10 is a coil, and 11 is a coil lead terminal, and one is formed on each side surface of the two floating surfaces 4 and 4. FIG. 2 is a diagram showing a process of forming a thin film element. About 800 thin film elements are manufactured on the substrate 1 at a time.

Next, a method of manufacturing the thin film head will be described. In order to form about 800 elements at a time on one substrate, a mask is prepared in advance for each stage, and these are used to make a plate making technique. First, the lower core 7 is formed by permalloy plating or sputtering, and then the gap 8 is formed by aluminum sputtering. Next, in order to insulate the coil from the core, a coil 10 is formed by copper plating or sputtering through an insulating layer, and an upper core 9 is formed on the coil 10 by permalloy plating or sputtering. The wafer process is completed by forming a protective film with an alumina sputter to cover the thin film elements already formed. Subsequently, the substrate is cut out to a specified size, the floating surface 4 is formed, the taper 3 is processed, the lead wire 5 is bonded to the coil lead terminal 11 on the element side to be used, and the slider 2 is mounted on the suspension 12 to complete the process.

[0004]

[Problems to be solved by the device]

 As described above, the conventional thin film head has one element on each side of the two floating surfaces for each slider, and it is necessary to make a thin film element that is not used as a manufacturing target, and it is necessary to inspect the appearance. However, even if the non-use side fails the inspection, it has to be rejected as a slider, which causes problems such as an excessive loss and a long time.

The present invention has been made to solve the above-mentioned problems, and can reduce the inspection time to half that of the conventional one, and to provide a microslider compatible with the recent miniaturization of magnetic disk devices. It is intended to provide a suitable manufacturing method.

[0006]

[Means for Solving the Problems]

 In the thin film magnetic head according to the present invention, the thin film element on the use side is determined in advance and the element on the non use side is removed by etching or the like during the wafer process.

[0007]

[Action]

 Since the thin-film magnetic head in this invention has only one element for each slider, the inspection time can be shortened, and since only the element actually used is used, if the element has some trouble. Can be found immediately from the electromagnetic characteristics, and reliability can be improved because there is no element on the non-use side.

[0008]

【Example】

 Embodiment 1 An embodiment of the present invention will be described below with reference to the drawings. In FIG. 1, reference numeral 2 denotes a slider cut out to a specified size from a substrate. The slider 2 has a floating surface 4 for flying over the magnetic storage medium, and the floating surface 4 has a taper 3 process. Only one thin film element 6 is formed on the side surface of the floating surface 4.

Next, a method for manufacturing the thin film head will be described. Similarly to the conventional thin film head, the lower core 7 is formed on one substrate by permalloy plating or sputtering. At this time, since about 800 lower cores 7 are formed on the substrate 1, unnecessary half lower cores are removed by etching. Next, about 800 gaps 8 are formed by using an alumina spatter, and then similarly removed. The first insulating layer, the coil, the second insulating layer, the third insulating layer, the upper core, and the protective film are similarly formed for all about 800 elements, and then the unnecessary half is removed to complete the wafer process. . After that, the substrate is cut to a specified size, the floating surface 4 is formed, the taper 3 is processed, the lead wire 5 is bonded to the coil lead terminal 11, and the slider 2 is attached to the suspension 12 to complete the process.

It should be noted that, in the above-mentioned embodiment, it is explained that the unnecessary half of the elements are removed after the elements are formed on the substrate. However, a mask capable of forming only the necessary elements is prepared from the beginning to carry out the wafer process. You can go. In addition, the elements to be used may be alternately formed on each substrate on one substrate.

[0011]

[Effect of the device]

 As described above, according to the present invention, the inspection time can be halved because the two sliders in one slider, which are unnecessary for recording / reproducing on the magnetic storage medium, are removed. This has the effect of facilitating the manufacture of small sliders as the recording density of disk devices increases.

[Brief description of drawings]

FIG. 1 is a schematic view of a thin film magnetic head according to an embodiment of the present invention.

FIG. 2 is a wafer process flow chart until completion of a wafer.

FIG. 3 is an image diagram until a slider is cut out from a wafer to form a magnetic head.

FIG. 4 is an enlarged view of a thin film element.

FIG. 5 is a schematic view of a conventional thin film magnetic head.

[Explanation of symbols]

 2 Slider 3 Taper 4 Floating surface 6 Thin film element

Claims (1)

Claims for utility model registration 1. In a magnetic head mounted on a magnetic disk device, a transducer for recording / reproducing on / from a magnetic storage medium is a thin film head formed of thin film elements, and a thin film element serving as a transducer section. The thin film magnetic head is characterized in that each slider has only one element.