JPH0540914Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field The present invention provides a fixing jig that quickly and accurately determines the center line of a single crystal pulled by the Czyochoralski method, etc. when cylindrical grinding is performed on the single crystal. This is what we provide.

BACKGROUND ART Conventionally, the three-claw method and the four-claw method are known as methods for holding single crystals. However, since the length of the single crystal itself is short, it has been difficult to directly hold the single crystal during centering.

In particular, crystals pulled by the Czyochoralski method etc. have variations in the diameter of the straight body, so
Since it is difficult to perform centering using ordinary jigs and equipment, centering is performed completely manually.

Problems that the invention aims to solve: In the conventional manual method, it not only takes a lot of time to set the center line of the single crystal to the allowable eccentricity with respect to the center line of the cylindrical grinder, but also the center accuracy may vary due to individual differences. The disadvantage is that it causes variations in the The purpose of this invention is to eliminate the above-mentioned drawbacks, and to provide a fixing device for centering cylindrical crystals that can be easily operated even by unskilled workers, has high centering accuracy, good reproducibility, and has a very short working time. The goal is to provide equipment.

Means for Solving the Problems The present invention solves the above problems, and when fixing a cylindrical crystal with a clamp shaft of a cylindrical grinder, the cylindrical crystal is centered in a fixed position for cylindrical grinding. It is a device for dispensing and supplying, and has the following configuration.

(a) A linear motion rail 1 for vertical movement, in which claws 7, 12, 6, 13 having holding parts for horizontally holding a cylindrical crystal are provided on the left and right vertical plates 2, 3.
4, 15 are connected by threaded shafts 10, 11 having handles 8, 9 so as to be movable up and down.

(b) Horizontal movement frames 4, 4' are provided on the vertical plates 2, 3, and the vertical plates 2, 3 are moved via horizontal movement linear movement rails 5, 5' provided on the movement plate 20.
It was connected to the moving plate 20 so as to be movable in the same direction as the axial direction of the cylindrical crystal installed horizontally in the holding part.

(c) The movable frames 17, 1 are attached to the movable plate 20 so that the claws 7, 12, 6, 13 can move forward and backward with respect to the position where the cylindrical crystal is fixed with the clamp shaft.
7' and the plate 16 provided on the fixed base 27.
Via the upper moving linear motion rails 18, 18',
The movable plate 20 can be moved horizontally in a direction perpendicular to the axial direction of the cylindrical crystal.
connected to.

(d) A stopper 19 for positioning the movable plate 20 was provided on the plate 16.

Effect: By the above means, the centering and holding of the single crystal is reliably performed through the claw portion.

Embodiment FIG. 1 shows a front view of the device of the present invention, and FIG. 2 shows a side view. FIG. 3 shows a single crystal gripping state according to the present invention.

The single crystal 1 has clamp claws 6, 7, each having a holding portion having a concave portion having a V-shaped or U-shaped cross section.
It has a structure in which it is held at 12 and 13. In actual operation, both ends of the single crystal to be ground are cut in advance. The width is adjusted by moving the left and right vertical plates 2 and 3 on the vertical and horizontal movement linear movement rails 5 and 5' according to the length of the cut single crystal.
Next, the single crystal 1 (see FIGS. 2 and 3) with both ends cut in advance is placed on the clamp claws 6 and 7 in the transverse direction, and the handles 8 of the threaded shafts 10 and 11 provided on the vertical plates 2 and 3 are placed on the clamp claws 6 and 7. , 9 little by little toward the right. The threaded shaft that is connected to the handle is divided into upper and lower halves with a left-hand thread and a right-hand thread, and as the handle rotates, the clamp claws 6 and 7 on which the single crystal 1 is placed move upward, and the clamp claw 12 , 13 move vertically at the same pitch using left and right vertical movement linear movement rails 14 and 15 as guides. For this reason, the clamp claws 6, 7, 12, 13 are always adjusted so as to face the center of the clamp shafts 24, 24' of the cylindrical grinder. This fixing and gripping operation of the single crystal is performed as shown in FIG. Thereafter, the single crystal connected to the moving plate 20 is moved by the moving linear movement rails 18, 18' provided on the plate 16 to a position corresponding to a stopper 19 in the left-hand direction. A stopper 19 provided on the plate 16 stops the movement of the moving plate 20, and at this position, the center of the single crystal held by the clamp claw and the cylindrical grinder clamp provided on the cylindrical grinder (not shown) are connected. It is designed so that the centers of the shafts 24, 24' coincide.

The cylindrical grinder clamp shafts 24, 24' allow
Single crystal 1 is fixed to a cylindrical grinder. after that,
Turn the handles 8, 9 to the left and open the clamp claws 6, 7, 12, 13 up and down to move the centering device body along with the moving plate 20 to the moving rails 18, 1.
Move the top part 8' to the right.

As a result of checking the center accuracy of the above method using a dummy (right circular cylinder), the accuracy was within ±0.1 mm.
Also, the working time was within 3 minutes.

Comparative Example As a conventional example, a single crystal was centered by the method shown in FIG.

That is, conventionally, a single crystal 1a with both ends cut off is held manually, a dummy carbon cap 23a is attached to the seed side of the single crystal 1a, and clamps 24a, 24a are attached to the approximate center of the single crystal 1a using hydraulic cylinders. ' holds the single crystal 1a in a sandwiching manner. Next, while rotating the crystal, a dial gauge 25 fixed with a magnetic base is applied to the outer periphery from the reference surface of the cylindrical grinder.
Measure eccentricity.

In this case, if the amount of eccentricity is not within the allowable value, the single crystal 1a is held by hand again, the clamps 24a, 24a' by the hydraulic cylinders are loosened, the amount of eccentricity is adjusted, and the single crystal 1a is clamped again. Repeat this operation until the amount of eccentricity falls within the allowable value. For this reason, when trying to hold a single crystal in a cylindrical grinder with good centering accuracy using the conventional method, it takes about 10 minutes for an experienced worker and more than 30 minutes for an unskilled worker. Furthermore, there are large differences in centering accuracy depending on the individual.

Effects of the invention With this invention, the center position of the single crystal is determined by simply placing the single crystal on the claw, turning the handle, and holding it with the upper and lower claws. Once clamped, setting is completed, so only one fixing operation is required, which not only greatly reduces work time, but also improves centering accuracy, eliminates individual differences, and allows single crystals to be held in a cylindrical grinder with good reproducibility.

[Brief explanation of the drawing]

FIG. 1 is a front view of the device of the present invention, FIG. 2 is a side view, and FIG. 3 is a schematic diagram showing an embodiment of the present invention.
FIG. 4 is a front view showing a conventional example. 1... Single crystal, 2, 3... Vertical plate, 4,
4'... Lateral movement frame, 5, 5'... Linear movement rail for lateral movement, 6, 7, 12, 13... Clamp claw,
8, 9... Handle, 10, 11... Threaded shaft, 14, 15... Linear movement rail for vertical movement, 16... Plate, 17, 17'... Moving frame,
18, 18'...Movement linear motion rail, 19...
...Stopper, 20...Movement plate, 21...
Cylindrical grinder bed, 23...carbon cap,
24, 24'...clamp shaft, 25...dial gauge, 27...fixing base.

Claims (1)

[Scope of Claim for Utility Model Registration] A device for centering and feeding a cylindrical crystal to a fixed position for cylindrical grinding when the cylindrical crystal is fixed with a clamp shaft of a cylindrical grinder, b) A linear movement rail 1 for vertical movement, in which claws 7, 12, 6, 13 having holding parts for horizontally holding a cylindrical crystal are provided on the left and right vertical plates 2, 3.
4, 15 are connected so as to be vertically movable by means of threaded shafts 10, 11 having handles 8, 9; The vertical plates 2 and 3 are moved through the horizontal movement linear movement rails 5 and 5' provided in the
It is connected to the moving plate 20 so as to be movable in the same direction as the axial direction of the cylindrical crystal installed horizontally on the holding part, and (c) the claw parts 7, 12 are connected to the position where the cylindrical crystal is fixed with the clamp shaft. , 6, 13 can move forward and backward.
7' and the plate 16 provided on the fixed base 27.
Via the upper moving linear motion rails 18, 18',
The movable plate 20 is movable horizontally in a direction perpendicular to the axial direction of the cylindrical crystal.
and (d) a stopper 19 for positioning the moving plate 20 is provided on the plate 16. A fixing device for centering a cylindrical crystal.