JPH05319500A - Chemical supplying apparatus - Google Patents
Chemical supplying apparatusInfo
- Publication number
- JPH05319500A JPH05319500A JP11945992A JP11945992A JPH05319500A JP H05319500 A JPH05319500 A JP H05319500A JP 11945992 A JP11945992 A JP 11945992A JP 11945992 A JP11945992 A JP 11945992A JP H05319500 A JPH05319500 A JP H05319500A
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- nitrogen gas
- container
- chemicals
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Pipeline Systems (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は薬品供給装置に関し、特
に薬品容器内の薬品の空状態を検知する機能を持った薬
品供給装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drug supply device, and more particularly to a drug supply device having a function of detecting an empty condition of a drug in a drug container.
【０００２】[0002]
【従来の技術】従来の薬品供給装置は、図３の構成図に
示すように、薬品容器Ａ３０１用として窒素ガスカプラ
ー３１２と薬品カプラー３１３とを有しており、窒素ガ
スカプラー３１２と窒素ガス配管３０９との接続箇所に
自動弁３０３を有しており、薬品カプラー３１３と薬品
供給配管３１０との接続箇所に自動弁３０４を有してい
る。2. Description of the Related Art A conventional chemical supply apparatus has a nitrogen gas coupler 312 and a chemical coupler 313 for a chemical container A301, as shown in the configuration diagram of FIG. 3, and includes a nitrogen gas coupler 312 and a nitrogen gas pipe. An automatic valve 303 is provided at a connection point with the 309, and an automatic valve 304 is provided at a connection point with the chemical coupler 313 and the chemical supply pipe 310.
【０００３】また同様に、薬品容器Ｂ３０２用として窒
素ガスカプラー３１４と自動弁３０５，および薬品カプ
ラー３１５と自動弁３０６を有している。Similarly, the chemical container B302 has a nitrogen gas coupler 314 and an automatic valve 305, and a chemical coupler 315 and an automatic valve 306.
【０００４】薬品供給配管３１０には、配管内の薬液の
有無を検知するための界面検出器３０７と、供給薬品３
１６，３１７をろ過するためのフィルター３０８が取り
付けられている。制御シーケンサー３１１は、薬品供給
装置の運転動作に関するプログラムを内蔵しており、界
面検出器３０７からの信号処理，各自動弁３０３，３０
４，３０５，３０６の開閉動作等を行うものである。In the chemical supply pipe 310, an interface detector 307 for detecting the presence or absence of the chemical liquid in the pipe, and the supply chemical 3
A filter 308 for filtering 16,317 is attached. The control sequencer 311 contains a program relating to the operation of the chemical supply device, and performs signal processing from the interface detector 307, automatic valves 303 and 30.
The opening / closing operation of 4,305,306 is performed.
【０００５】次に薬品容器Ａ３０１内の薬品３１６をユ
ースポイントへ送液する場合を例にして、従来装置の動
作について以下に述べる。まず、制御シーケンサー３１
１へ薬品容器Ａ３０１内の薬品３１６の供給開始命令を
入力する。制御シーケンサー３１１は自動弁３０３，３
０４を「開」，自動弁３０５，３０６を「閉」に作動さ
せ、薬品容器Ａ３０１内を窒素ガスで加圧し、内部の薬
品３１６をユースポイントへ圧送する。Next, the operation of the conventional apparatus will be described below, taking as an example the case where the medicine 316 in the medicine container A301 is sent to the point of use. First, the control sequencer 31
A command to start supplying the medicine 316 in the medicine container A301 is input to 1. The control sequencer 311 is an automatic valve 303, 3
04 is opened and the automatic valves 305 and 306 are operated to be closed, the inside of the chemical container A301 is pressurized with nitrogen gas, and the internal chemical 316 is pressure-fed.
【０００６】やがて薬品容器Ａ３０１の薬品３１６は空
になり、加圧媒体である窒素ガスが薬品容器Ａ３０１内
から薬品供給配管３１０内に流入し始める。界面検出器
３０７をセットした位置まで流入した窒素ガスが到達す
ると、界面検出器３０７はそれを検知し、制御シーケン
サー３１１に信号を送る。Eventually, the chemical 316 in the chemical container A301 becomes empty, and nitrogen gas, which is a pressurized medium, begins to flow from the chemical container A301 into the chemical supply pipe 310. When the inflowing nitrogen gas reaches the position where the interface detector 307 is set, the interface detector 307 detects it and sends a signal to the control sequencer 311.
【０００７】界面検出器３０７から信号を受けた制御シ
ーケンサー３１１は、薬品容器Ａ３０１からＢ３０２へ
の切り換えを行うべく、自動弁３０３，３０４を
「閉」，自動弁３０５，３０６を「開」に作動させ、薬
品容器Ｂ３０２を窒素ガスで加圧し、内部の薬品３１７
をユースポイントへ圧送する。Upon receiving the signal from the interface detector 307, the control sequencer 311 operates the automatic valves 303 and 304 to "close" and the automatic valves 305 and 306 to "open" in order to switch from the medicine container A301 to the medicine container B302. Then, the chemical container B302 is pressurized with nitrogen gas, and the chemical 317 inside
Is sent to the use point.
【０００８】以上説明したように従来の薬品供給装置
は、加圧薬品容器の切り換えを界面検出器からの信号に
より行うものであった。As described above, in the conventional chemical supply device, switching of the pressurized chemical container is performed by the signal from the interface detector.
【０００９】[0009]
【発明が解決しようとする課題】この従来の薬品供給装
置では、薬品容器内の薬品が空になった場合の薬品容器
の切り換えを、薬品供給配管に取り付けた界面検出器か
らの信号により行っており、薬品供給配管における界面
検出器のセット位置まで窒素ガスが到達し完全に封入さ
れた状態にならなければ薬品容器の切り換えを行わない
ため、薬品容器が空になるごとに一時的に窒素ガスが薬
品供給配管内に流入し、それゆえユースポイントにおい
て薬品の供給が一時的に（１０数秒程度）中断するとい
う問題点があった。In this conventional chemical supply device, when the chemical in the chemical container becomes empty, the chemical container is switched by a signal from an interface detector attached to the chemical supply pipe. If the nitrogen gas reaches the set position of the interface detector in the chemical supply pipe and it is not completely sealed, the chemical container is not switched, so the nitrogen gas is temporarily changed every time the chemical container becomes empty. However, there is a problem in that the supply of the chemicals is temporarily (about 10 seconds or more) interrupted at the use point.
【００１０】[0010]
【課題を解決するための手段】本発明の薬品供給装置
は、薬品容器が空になった場合、フィルターの二次側の
薬品供給配管内の薬品の圧力変化に従って、薬品容器の
切り換えを行うために薬品供給配管内の圧力をモニター
する圧力計と、この圧力計からのデータを処理する制御
シーケンサーを備えている。According to the chemical supply device of the present invention, when the chemical container becomes empty, the chemical container is switched according to the pressure change of the chemical in the chemical supply pipe on the secondary side of the filter. It is equipped with a pressure gauge that monitors the pressure inside the chemical supply pipe and a control sequencer that processes the data from this pressure gauge.
【００１１】[0011]
【実施例】次に本発明について図面を参照して説明す
る。図１は本発明の第一実施例の構成図である。窒素ガ
スカプラー１１２及び薬品カプラー１１３は薬品容器Ａ
１０１に取り付けられ、窒素ガスカプラー１１２と窒素
ガス配管１０９との接続箇所には自動弁１０３が取り付
けられており、薬品カプラー１１３と薬品供給配管１１
０との接続箇所には自動弁１０４が取り付けられてい
る。また、同様に薬品容器Ｂ１０２用として、窒素ガス
カプラー１１４と自動弁１０５，および薬品カプラー１
１５と自動弁１０６を有している。The present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of the first embodiment of the present invention. The nitrogen gas coupler 112 and the chemical coupler 113 are the chemical container A.
The automatic valve 103 is attached to the connection point between the nitrogen gas coupler 112 and the nitrogen gas pipe 109, and the chemical coupler 113 and the chemical supply pipe 11 are attached.
An automatic valve 104 is attached to a connection point with 0. Similarly, for the chemical container B102, the nitrogen gas coupler 114, the automatic valve 105, and the chemical coupler 1 are used.
15 and an automatic valve 106.
【００１２】薬品供給配管１１０には、供給薬品１１
６，１１７をろ過するフィルター１０８が取り付けら
れ、フィルター１０８の２次側には薬品供給配管１１０
内の薬品の圧力をモニターするための圧力計１０７が取
り付けられている。制御シーケンサー１１１は、本実施
例の運転動作に関するプログラムを内蔵しており、圧力
計１０７からのデータ処理，各自動弁１０３，１０４，
１０５，１０６の開閉動作等を行うものである。In the chemical supply pipe 110, the supply chemical 11
A filter 108 for filtering 6, 117 is attached, and a chemical supply pipe 110 is provided on the secondary side of the filter 108.
A pressure gauge 107 for monitoring the pressure of the medicine inside is attached. The control sequencer 111 has a built-in program relating to the operation of the present embodiment, and processes the data from the pressure gauge 107, the automatic valves 103, 104,
Opening and closing operations of 105 and 106 are performed.
【００１３】次に薬品容器Ａ１０１内の薬品１１６をユ
ースポイントへ送液する場合を例にして、本実施例の動
作を以下に述べる。まず、制御シーケンサー１１１へ、
薬品容器Ａ１０１内の薬品１１６の供給開始命令を入力
する。制御シーケンサー１１１は自動弁１０３，１０４
を「開」，自動弁１０５，１０６を「閉」に作動させ、
薬品容器Ａ１０１内を窒素ガスで加圧し、内部の薬品１
１６をユースポイントへ圧送する。Next, the operation of this embodiment will be described below by taking as an example the case where the medicine 116 in the medicine container A101 is sent to the use point. First, to the control sequencer 111,
A command to start supplying the medicine 116 in the medicine container A101 is input. The control sequencer 111 is an automatic valve 103, 104.
"Open" and the automatic valves 105 and 106 to "Close",
Pressurize the inside of the chemical container A101 with nitrogen gas, and
Pump 16 to the point of use.
【００１４】やがて薬品容器Ａ１０１内の薬品１１６は
空になり、加圧媒体である窒素ガスが薬品容器Ａ１０１
内から薬品供給配管１１０内に流入し始める。この薬品
供給配管１１０内に流入した窒素ガスはフィルター１０
８の一次側に滞溜し始める。フィルター１０８は微細孔
を有するテフロン膜を備え、薬液は通すが窒素ガスは通
さないという機能を有する。その結果、フィルター１０
８の２次側の薬品の圧力が低下し始め、圧力計１０７か
らのデータ処理を行っている制御シーケンサー１１１
は、薬品容器Ａ１０１内の薬品１１６が空になったと判
断し、自動弁１０３，１０４を「閉」，自動弁１０５，
１０６を「開」に作動させ、薬品容器Ｂ１０２を窒素ガ
スで加圧し、内部の薬品１１７をユースポイントへ圧送
する。Eventually, the medicine 116 in the medicine container A101 becomes empty, and the nitrogen gas, which is a pressurizing medium, is discharged.
The inside begins to flow into the chemical supply pipe 110. The nitrogen gas flowing into the chemical supply pipe 110 is filtered by the filter 10
8 starts to accumulate on the primary side. The filter 108 is provided with a Teflon membrane having fine pores and has a function of passing a chemical solution but not a nitrogen gas. As a result, the filter 10
8, the pressure of the chemical on the secondary side starts to decrease, and the control sequencer 111 that processes the data from the pressure gauge 107
Judges that the medicine 116 in the medicine container A 101 has become empty, and “closes” the automatic valves 103 and 104,
106 is operated to "open", the chemical container B102 is pressurized with nitrogen gas, and the internal chemical 117 is pressure-fed to the use point.
【００１５】この降下圧力は窒素ガスの流入量にほぼ比
例しているため、２次側の微量薬品の圧力変化を検知し
うる圧力計１０７を使用することによって、１次側の微
量の窒素ガスの流入も検知できる。従って本実施例はタ
イムラグの非常に少ない（１秒以内）の薬品容器の切り
換えが可能であり、それゆえ薬品供給配管内への窒素ガ
スの混入を微量に抑えることができるという効果があ
る。Since this drop pressure is almost proportional to the inflow amount of nitrogen gas, by using the pressure gauge 107 capable of detecting the pressure change of the trace amount of chemicals on the secondary side, the trace amount of nitrogen gas on the primary side is used. Can also be detected. Therefore, in this embodiment, it is possible to switch the chemical container with a very small time lag (within 1 second), and therefore it is possible to suppress the mixture of nitrogen gas into the chemical supply pipe to a very small amount.
【００１６】図２は本発明の第二実施例の構成図であ
る。窒素ガスカプラー２１２及び薬品カプラー２１３は
薬品容器Ａ２０１に取り付けられ、窒素ガスカプラー２
１２と窒素ガス配管２０９との接続箇所には自動弁２０
３が取り付けられており、薬品カプラー２１３と薬品供
給配管２１０との接続箇所には自動弁２０４が取り付け
られている。また、同様に薬品容器Ｂ２０２用として、
窒素ガスカプラー２１４と自動弁２０５，および薬品カ
プラー２１５と自動弁２０６を有している。FIG. 2 is a block diagram of the second embodiment of the present invention. The nitrogen gas coupler 212 and the chemical coupler 213 are attached to the chemical container A201, and the nitrogen gas coupler 2
12 is connected to the nitrogen gas pipe 209 at an automatic valve 20.
3 is attached, and an automatic valve 204 is attached to a connection point between the chemical coupler 213 and the chemical supply pipe 210. Similarly, for the chemical container B202,
It has a nitrogen gas coupler 214 and an automatic valve 205, and a chemical coupler 215 and an automatic valve 206.
【００１７】薬品供給配管２１０には、供給薬品２１
６，２１７をろ過するフィルター２０８が取り付けら
れ、フィルター２０８の１次側には圧力計Ａ２０７ａ
が、またフィルター２０８の２次側には圧力計Ｂ２０７
ｂが取り付けられている。制御シーケンサー２１１は、
本実施例の運転動作に関するプログラムを内蔵してお
り、圧力計Ａ２０７ａ及び圧力計Ｂ２０７ｂからのデー
タ処理、各自動弁の開閉動作等を行うものである。In the chemical supply pipe 210, the supply chemical 21
A filter 208 for filtering 6, 217 is attached, and a pressure gauge A207a is provided on the primary side of the filter 208.
However, there is a pressure gauge B207 on the secondary side of the filter 208.
b is attached. The control sequencer 211 is
The program relating to the operation of the present embodiment is built-in, and the data processing from the pressure gauge A207a and the pressure gauge B207b, the opening / closing operation of each automatic valve, etc. are performed.
【００１８】次に薬品容器Ａ２０１内の薬品２１６をユ
ースポイントへ送液する場合を例にして、本実施例の動
作を以下に述べる。まず、制御シーケンサー２１１へ、
薬品容器Ａ２０１内の薬品２１６の供給開始命令を入力
する。制御シーケンサー２１１は自動弁２０３，２０４
を「開」，自動弁２０６，２０６を「閉」に作動させ、
薬品容器Ａ２０１内を窒素ガスで加圧し、内部の薬品２
１６をユースポイントへ圧送する。Next, the operation of this embodiment will be described below, taking as an example the case where the chemical 216 in the chemical container A201 is sent to the point of use. First, to the control sequencer 211,
A command to start supplying the medicine 216 in the medicine container A201 is input. The control sequencer 211 has automatic valves 203 and 204.
"Open" and automatic valves 206, 206 to "Close",
The inside of the chemical container A201 is pressurized with nitrogen gas, and the chemical inside 2
Pump 16 to the point of use.
【００１９】やがて薬品容器Ａ２０１内の薬品２１６は
空になり、加圧媒体である窒素ガスが薬品容器Ａ２０１
内から薬品供給配管２１０内へ流入し始める。この薬品
供給配管２１０内に流入した窒素ガスはフィルター２０
８の１次側に帯溜し、その結果フィルター２０８の１次
側と２次側の差圧が増加し始め、圧力計Ａ２０７ａ及び
圧力計Ｂ２０７ｂからのデータ処理を行っている制御シ
ーケンサー２１１は、薬品容器Ａ２０１内の薬品２１６
が空になったと判断し、自動弁２０３，２０４を
「閉」，自動弁２０５，２０６「開」に作動させ、薬品
容器Ｂ２０２を窒素ガスで加圧し、内部の薬品２１７を
ユースポイントへ圧送する。Eventually, the medicine 216 in the medicine container A201 becomes empty, and nitrogen gas, which is a pressurizing medium, is discharged.
The inside begins to flow into the chemical supply pipe 210. The nitrogen gas flowing into the chemical supply pipe 210 is filtered by the filter 20.
8, the differential pressure between the primary side and the secondary side of the filter 208 starts to increase as a result, and the control sequencer 211 that processes the data from the pressure gauges A207a and B207b is Medicine 216 in medicine container A201
Is determined to be empty, the automatic valves 203 and 204 are “closed” and the automatic valves 205 and 206 are “open”, the chemical container B202 is pressurized with nitrogen gas, and the internal chemical 217 is pressure-fed to the use point. ..
【００２０】第二実施例の場合、フィルター前後の差圧
の増大の発生により薬品容器の切り換えを行うものであ
り、第一実施例と同様の効果の他に、供給配管内の脈圧
等の発生による圧力変化による誤動作を防止できるとい
う効果を持つ。In the case of the second embodiment, the chemical containers are switched by the occurrence of an increase in the differential pressure before and after the filter, and in addition to the same effect as in the first embodiment, the pulse pressure in the supply pipe, etc. This has the effect of preventing malfunction due to pressure changes due to occurrence.
【００２１】[0021]
【発明の効果】以上説明したように本発明は、薬品容器
が空になると同時に発生する薬品配管内の薬品の圧力変
化に従って薬品容器の切り換えを行う機能を備えている
ので、タイムラグの無い薬品容器の切り換えが可能であ
り、それゆえ薬品供給配管内への窒素ガスの混入を微量
に抑えることができるという効果がある。As described above, the present invention has the function of switching the chemical container according to the pressure change of the chemical in the chemical pipe which occurs at the same time when the chemical container becomes empty, so that there is no time lag in the chemical container. Can be switched, and therefore, there is an effect that the mixture of nitrogen gas into the chemical supply pipe can be suppressed to a very small amount.
【図１】本発明の第一実施例の構成図である。FIG. 1 is a configuration diagram of a first embodiment of the present invention.
【図２】本発明の第二実施例の構成図である。FIG. 2 is a configuration diagram of a second embodiment of the present invention.
【図３】従来の薬品供給装置の構成図である。FIG. 3 is a configuration diagram of a conventional chemical supply device.
１０１，２０１，３０１ 薬品容器Ａ １０２，２０２，３０２ 薬品容器Ｂ １０３，２０３，３０３ 自動弁 １０４，２０４，３０４ 自動弁 １０５，２０５，３０５ 自動弁 １０６，２０６，３０６ 自動弁 １０７，２０７ａ，２０７ｂ 圧力計 １０８，２０８，３０８ フィルター １０９，２０９，３０９ 窒素ガス配管 １１０，２１０，３１０ 薬品供給配管 １１１，２１１，３１１ 制御シーケンサー １１２，２１２，３１２ 窒素ガスカプラー １１３，２１３，３１３ 薬品カプラー １１４，２１４，３１４ 窒素ガスカプラー １１５，２１５，３１５ 薬品カプラー １１６，２１６，３１６ 薬品 １１７，２１７，３１７ 薬品 ３０７ 界面検出器 101,201,301 Chemical container A 102,202,302 Chemical container B 103,203,303 Automatic valve 104,204,304 Automatic valve 105,205,305 Automatic valve 106,206,306 Automatic valve 107,207a, 207b Pressure Total 108, 208, 308 Filter 109, 209, 309 Nitrogen gas piping 110, 210, 310 Chemical supply piping 111, 211, 311 Control sequencer 112, 212, 312 Nitrogen gas coupler 113, 213, 313 Chemical coupler 114, 214, 314 Nitrogen gas coupler 115,215,315 Chemical coupler 116,216,316 Chemical 117,217,317 Chemical 307 Interface detector
Claims (1)
により薬品供給配管に送液中に容器内の薬品が空になっ
た場合、他の満液容器からの送液に順次、自動的に切り
換える方式の薬品供給装置において、薬品中の微粒子を
捕捉するために薬品供給配管に取り付けられたフィルタ
ーの一次側に、前記容器が空になった場合、加圧ガスが
流入することによって生ずる二次側の薬品の圧力変化を
検出し、この検出信号により薬品容器の切り換えを行う
制御機構を備えることを特徴とする薬品供給装置。1. When a plurality of chemical containers are equipped and the chemicals in the containers become empty while the chemicals are being supplied to the chemical supply pipe by pressurized gas, the automatic supply is performed sequentially from the other full liquid containers. In a chemical supply device of a type that is switched to a different type, when the container becomes empty, a pressurized gas flows into the primary side of a filter attached to a chemical supply pipe for capturing fine particles in the chemical. A drug supply device comprising a control mechanism for detecting a pressure change of a drug on the secondary side and switching a drug container by this detection signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4119459A JP2884909B2 (en) | 1992-05-13 | 1992-05-13 | Chemical supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4119459A JP2884909B2 (en) | 1992-05-13 | 1992-05-13 | Chemical supply device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05319500A true JPH05319500A (en) | 1993-12-03 |
| JP2884909B2 JP2884909B2 (en) | 1999-04-19 |
Family
ID=14761890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4119459A Expired - Lifetime JP2884909B2 (en) | 1992-05-13 | 1992-05-13 | Chemical supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2884909B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011068413A (en) * | 2005-06-06 | 2011-04-07 | Advanced Technology Materials Inc | Fluid storage and distribution system and process |
| US20130056112A1 (en) * | 2005-04-25 | 2013-03-07 | Advanced Technology Materials, Inc. | Liner-based liquid storage and dispensing systems with empty detection capability |
| US9211993B2 (en) | 2011-03-01 | 2015-12-15 | Advanced Technology Materials, Inc. | Nested blow molded liner and overpack and methods of making same |
| US9522773B2 (en) | 2009-07-09 | 2016-12-20 | Entegris, Inc. | Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners |
| US9637300B2 (en) | 2010-11-23 | 2017-05-02 | Entegris, Inc. | Liner-based dispenser |
| US10676341B2 (en) | 2010-01-06 | 2020-06-09 | Entegris, Inc. | Liquid dispensing systems with gas removal and sensing capabilities |
| JP2021104826A (en) * | 2019-12-26 | 2021-07-26 | シブヤマシナリー株式会社 | Liquid delivery system and liquid delivery method |
| CN113280262A (en) * | 2021-05-08 | 2021-08-20 | 中山市鸿盛生物科技有限公司 | Chemical raw material measurable supplement system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61164998A (en) * | 1985-01-14 | 1986-07-25 | 日本電信電話株式会社 | Automatic feeder for chemical |
-
1992
- 1992-05-13 JP JP4119459A patent/JP2884909B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61164998A (en) * | 1985-01-14 | 1986-07-25 | 日本電信電話株式会社 | Automatic feeder for chemical |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130056112A1 (en) * | 2005-04-25 | 2013-03-07 | Advanced Technology Materials, Inc. | Liner-based liquid storage and dispensing systems with empty detection capability |
| US9073028B2 (en) | 2005-04-25 | 2015-07-07 | Advanced Technology Materials, Inc. | Liner-based liquid storage and dispensing systems with empty detection capability |
| US9802749B2 (en) | 2005-04-25 | 2017-10-31 | Entegris, Inc. | Liner-based liquid storage and dispensing systems with empty detection capability |
| JP2011068413A (en) * | 2005-06-06 | 2011-04-07 | Advanced Technology Materials Inc | Fluid storage and distribution system and process |
| US9079758B2 (en) | 2005-06-06 | 2015-07-14 | Advanced Technology Materials, Inc. | Fluid storage and dispensing systems and processes |
| US9802808B2 (en) | 2005-06-06 | 2017-10-31 | Entegris, Inc. | Fluid storage and dispensing systems and processes |
| US9522773B2 (en) | 2009-07-09 | 2016-12-20 | Entegris, Inc. | Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners |
| US10676341B2 (en) | 2010-01-06 | 2020-06-09 | Entegris, Inc. | Liquid dispensing systems with gas removal and sensing capabilities |
| US9637300B2 (en) | 2010-11-23 | 2017-05-02 | Entegris, Inc. | Liner-based dispenser |
| US9211993B2 (en) | 2011-03-01 | 2015-12-15 | Advanced Technology Materials, Inc. | Nested blow molded liner and overpack and methods of making same |
| JP2021104826A (en) * | 2019-12-26 | 2021-07-26 | シブヤマシナリー株式会社 | Liquid delivery system and liquid delivery method |
| CN113280262A (en) * | 2021-05-08 | 2021-08-20 | 中山市鸿盛生物科技有限公司 | Chemical raw material measurable supplement system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2884909B2 (en) | 1999-04-19 |
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| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19990112 |