JPH05137359A - Ultrasonic vibrator and ultrasonic driving apparatus - Google Patents

Abstract

PURPOSE:To provide an ultrasonic vibrator having a compact size and a high energy-efficiency, from which a large vibration output can be taken out and which can move reversibly a driving object when using it as a linear motor and has a few restrictions on its design and can be manufactured easily, and further, to provide an ultrasonic driving apparatus having the vibrator. CONSTITUTION:An ultrasonic vibrator 10 is provided with an elastic body 1 on which piezoelectric elements 2a, 2b, 2c and 2d are fastened and which generates a standing-wave-type bending vibration, laminar type piezoelectric elements 4, 5 whose one-ends are fastened respectively on the elastic body 1 and which are laminated respectively in the direction nearly vertical to the amplitude of the bending vibration and generate respectively reciprocating vibrations in their laminar directions. Also, an ultrasonic driving apparatus has the ultrasonic wave vibrator 10 and is provided with pressure-contacted members which are pressure-contacted with the elastic body 1 or the other ends of the laminar type piezoelectric elements 4, 5 in the direction of the amplitude of the bending vibration and are moved relatively to the elastic body 1 and the laminar type piezoelectric elements 4, 5 by the bending vibration and the reciprocating vibrations.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibrator and an ultrasonic driving device, and more particularly to an ultrasonic vibrator and an ultrasonic driving device having an elastic body for generating a bending vibration of a standing wave type.

[0002]

2. Description of the Related Art In recent years, ultrasonic motors have been spotlighted as new motors replacing electromagnetic motors. This ultrasonic motor is not only new in principle, but has the following advantages over conventional motors.

(1) Thin, lightweight and compact.

(2) A low speed and high torque can be obtained without a gear.

(3) The parts configuration is simple and highly reliable.

(4) There is no exchange of magnetic influence.

(5) Positioning is easy without backlash.

[0008] Thus, research on various applied techniques that should make use of these advantages is under way.

The ultrasonic motor is roughly classified into a rotary type and a linear type.

24 to 27 are views showing a conventional linear type ultrasonic motor.

FIG. 24 shows a first conventional example, in which the Langevin type piezoelectric vibrator 101 on the left side is vibrated and the tip of a horn 102 is applied to a propagation rod 103 made of an elastic body. Then, a bending traveling wave is generated in the propagating rod 103. This bending traveling wave propagates rightward in the propagation rod 103 as indicated by the solid arrow D. Then, this traveling wave excites the Langevin type piezoelectric vibrator 105 via a horn 104 similar to the horn 102 applied to the right end of the propagation rod 103.

At this time, in the figure, the inductance component L and the resistance component R are appropriately selected to perform impedance matching, and all the energy of the traveling wave is absorbed. In this way, the traveling wave always travels constantly from left to right.

Here, when the slider 106 is held in pressure contact with the surface of the propagation rod 103 in which such a bending traveling wave is generated with a certain pressing force, the slider 106 is indicated by a solid arrow H in the figure. , Move to the left.

FIG. 25 is a perspective view schematically showing the relationship between the bending traveling wave of the propagation rod 103 and the slider 106. In the figure, reference numeral 103A is an elastic body corresponding to the propagation rod 103 (see FIG. 24), and reference numeral 106A is a moving body corresponding to the slider 106. As shown,
The mass point P of the elastic body 103A draws an elliptical locus. Therefore, in this figure, when the moving body 106A is brought into pressure contact with the elastic body 103A that draws a counterclockwise elliptical orbit at a predetermined pressure, the moving body 106A is opposite to the traveling direction D of the traveling wave. Direction, that is, to the left in the figure. If the traveling direction of the traveling wave is reversed, the moving body 106A is driven to the right in the figure.

FIG. 26 is a diagram showing the configuration of the second conventional example. A vibrator 108 is attached to the tip of the Langevin type piezoelectric vibrator 107. Then, the vibrating body 1
The tip of 08 is in contact with the slider 106B with a constant pressing force in a state of being inclined by a predetermined angle θ with respect to the normal line of the surface of the slider 106B. When an AC voltage having the same frequency as the natural frequency of the Langevin-type vibrator is applied from the AC power supply 109 to the Langevin-type piezoelectric vibrator 107, the Langevin-type piezoelectric vibrator 107 is provided.
Vibrates vertically. At this time, since the tip of the vibrating body 108 is in contact with the slider 106B at a predetermined angle θ, the vibrating body 108 also vibrates laterally. By combining these vibrations, the tip of the vibrating body 108 draws an elliptical orbit. Thus, the slider 106B moves to the left as shown by the arrow in the figure.

FIG. 27 is a diagram showing a third conventional example, and shows the configuration of the ultrasonic transducer disclosed in Japanese Patent Laid-Open No. 62-135278. Piezoelectric elements 111 and 112 are adhered to both surfaces of a rectangular-shaped conductor vibrator 110. Lead terminals AA and BB for voltage application are drawn from the piezoelectric elements 111 and 112, and a ground terminal E is drawn from the vibrator 110. The shape of the vibrator 110 is such that the resonance frequency of longitudinal vibration and the resonance frequency of flexural vibration of the vibrator 110 match.

Thus, when an AC voltage having the above resonance frequency is applied to the lead terminals AA and BB with a constant phase difference, the mass of the end surface S of the vibrator 110 makes an elliptic motion. Therefore, when the slider 106C is pressed against the end surface S with a constant pressure, the slider 106C is
Moves in the direction of arrow HH in the figure. This moving direction is determined by the phase difference between the voltages applied to the terminals AA and BB.

[0018]

The ultrasonic motor shown in FIGS. 24 to 27 is based on the principle that the energy of the elliptical locus motion at the mass point of the oscillator is transmitted to the moving body (slider) by friction. There is.

In the first conventional example shown in FIG. 24, traveling waves have to be generated in the entire propagating rod 103, so that there is a problem that the efficiency is poor and the entire apparatus becomes large.

Further, in the second conventional example shown in FIG.
There is a problem that the traveling direction of the slider 106B is limited to one direction and the size of the entire device becomes large as in the first conventional example.

Further, in the third conventional example shown in FIG. 27,
The same as the piezoelectric element 111 adhered to both sides of the vibrator 110.
Since the amplitude output is obtained with 2, the slider 10
It is difficult to secure a large force for moving 6C. Therefore, in order to obtain a larger vibration output, the piezoelectric elements 111 and 112 adhered to the side surface of the vibrator 110.
When the number of sheets is increased, there is a drawback that the apparatus becomes larger accordingly. Further, in this conventional example, the longitudinal vibration and the flexural vibration of the vibrator 110 are combined to generate an elliptic motion, but a large output cannot be obtained unless both vibrations are in a resonance state. Therefore, it is necessary to match the resonance frequency of longitudinal vibration with the resonance frequency of flexural vibration. For this reason, it is necessary to determine the shape of the vibrator 110 by trial and error, which requires a lot of labor, and
There was a problem that it was not easy to manufacture.

The present invention has been made in view of the above problems, is compact, has a high energy conversion efficiency, can take out a large vibration output, and can reversibly drive an object to be driven when it is used as a linear motor. It is an object of the present invention to provide an ultrasonic transducer that can be moved to any position, has few design restrictions, and is easy to manufacture, and an ultrasonic driving device having the transducer.

[0023]

In order to achieve the above object, an ultrasonic vibrator according to the present invention has an elastic body to which a piezoelectric element is fixed and which generates a standing wave type bending vibration, and one end of which is made of the elastic material. An ultrasonic driving device, comprising: a laminated piezoelectric element that is fixed to a body and is laminated in a direction substantially perpendicular to the amplitude of the bending vibration to generate reciprocating vibration in the loading direction. Has the ultrasonic vibrator, is pressed against the other end of the elastic body or the laminated piezoelectric element in the amplitude direction of the bending vibration, and the elastic body and the laminated piezoelectric element are caused by the bending vibration and the reciprocating vibration. And a pressure contact member that is moved relative to the pressure contact member.

[0024]

In the present invention, an alternating voltage having the same bending resonance frequency as that of the elastic body is applied to the piezoelectric element attached to the side surface of the elastic body to generate resonant bending vibration in the elastic body. .. At the same time, an alternating voltage of the same frequency as the resonance frequency is applied to the laminated piezoelectric element that is laminated in a direction substantially perpendicular to the amplitude of the resonance bending vibration of the elastic body, and the elastic body is caused to resonate. It also gives vibration in a direction perpendicular to the bending vibration.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of an ultrasonic transducer 10 showing a first embodiment of the present invention.

In the figure, a rectangular thin strip-shaped elastic body 1
Is formed of an elastic metal such as stainless steel, phosphor bronze, brass, or aluminum. At the center of the upper surface of the elastic body 1, a rectangular plate-shaped member such as P
A piezoelectric ceramics (hereinafter referred to as a piezoelectric element) 2a formed of ZT or the like has an adhesive agent such as
It is bonded with an adhesive such as an epoxy resin. A piezoelectric element 2c having the same shape and material as that of the piezoelectric element 2a is attached to one surface of the central portion of the lower surface of the elastic body 1 at a symmetrical position to the position where the piezoelectric element 2a is attached. It is fixed to the surface. Further, piezoelectric elements 2b and 2d, which are slightly smaller than the piezoelectric element 2a and are made of the same material, are fixed to the left and right symmetrical positions in the figure with the piezoelectric element 2c interposed therebetween, with one surface thereof being an adhesive surface.

The polarization directions of these four piezoelectric elements 2a to 2d are the directions indicated by arrows X1 to X4 in the figure.
A surface electrode is formed on the other surface of each of the piezoelectric elements 2a to 2d by baking silver or the like, and these piezoelectric elements 2a to 2d are electrically connected by connecting lines Y1 to Y3 as shown in the drawing. And an electric terminal A is drawn out from the surface of the piezoelectric element 2c, and is connected to an output terminal of an amplifier 36b in the drive circuit of the ultrasonic transducer, for example, the drive circuit shown in FIG. ing.

Further, rectangular protrusions 3a and 3b are projected on the upper surface of the elastic body 1 at positions symmetrical to each other with the piezoelectric element 2a interposed therebetween in a direction perpendicular to the longitudinal direction of the elastic body 1. An electric terminal G is drawn out from the surface of the elastic body 1 on the front side of the front side in the figure in the figure, and is connected to the ground of the drive circuit.

In the drawing of the elastic body 1, thin plate-shaped rectangular piezoelectric ceramics having end faces of substantially the same shape as the left and right end faces are illustrated so that their polarization directions are opposite to each other. As described above, several to several hundreds of them are laminated and bonded with the end faces as the bonding surface. Here, in the figure, the left laminated piezoelectric body is the left laminated piezoelectric body 4, and the right side is the right laminated piezoelectric body 5.
Called. Although not shown, each laminated piezoelectric body is connected at its side surface every other layer by connecting means (not shown). From both side surfaces of the laminated piezoelectric bodies 4 and 5, electric terminals B, B are provided as shown. , G are drawn out, and these terminals are connected to the output terminals of the amplifiers 36c and 36d in the drive circuit and the ground, respectively. An insulating means (not shown) is arranged between the piezoelectric bodies of the laminated piezoelectric body.

The left laminated piezoelectric substance 4 and the right laminated piezoelectric substance 5 described above.
Each of the end surfaces of the fixing portion 6 and 7 has an end surface having substantially the same shape as the end surface, and is made of a metal material such as stainless steel, phosphor bronze, brass, or aluminum.
However, the end surface is fixed as an adhesive surface. Tap holes 8a and 8b for fixing the ultrasonic transducer 10 to a fixing base or the like (not shown) with screws or the like are formed at approximately the centers of the upper surfaces of the fixing portions 6 and 7.

FIG. 2 is a front view of the ultrasonic transducer 10 seen from the front side.

Returning to FIG. 1, the operation of the ultrasonic transducer 10 will be described.

An alternating voltage is applied to the piezoelectric elements 2a to 2d adhered and fixed to the upper and lower surfaces of the elastic body 1. Then, in the vibrator 10, bending vibration (bending vibration) is generated over the entire vibrator 10 in a state where both ends thereof are fixed to the fixed base or the like. Then, when the frequency of the alternating voltage reaches a specific natural frequency fr of the vibrator 10, a standing wave is generated in the vibrator 10 to cause vibration with large amplitude.

FIG. 3 is a diagram showing the vibration modes of the standing wave, and (a), (b) and (c) show the vibration modes of the primary mode, secondary mode and tertiary mode, respectively. Shows. In the ultrasonic transducer 10 of the first embodiment, the above 3
Since the second mode is used, the alternating voltage applies a voltage having the natural frequency fr of the third mode. Then, the ultrasonic transducer 10 is excited by the vibration of the third mode shown in FIG. 3C, and the vibrations having the antinodes α, β, γ at the three places are generated. The protrusions 3a and 3b (see FIG. 1) have two of the three antinodes α, β and γ generated in the ultrasonic transducer 10.
It is provided at the positions of the antinodes α and β at one place, that is, at the positions where the largest amplitude is generated, and they vibrate in the same phase in the direction of arrow N in the drawing of FIG.

Returning to FIG. 1 again, the operation of the left and right laminated piezoelectric materials will be described.

The left and right laminated piezoelectric bodies 4 and 5 are respectively
An alternating voltage having a frequency f having a phase opposite to each other is applied.
Then, for example, the left laminated piezoelectric body 4 contracts in the direction of arrow M in the figure, while the right laminated piezoelectric body 5 extends in the direction of arrow M, and the elastic body 1 moves leftward in the figure. .. At the next moment, that is, after 1/2 cycle of the frequency f, the left laminated piezoelectric body 4 extends in the direction of arrow M, the right laminated piezoelectric body 5 contracts in the direction of arrow M, and the elastic body 1 is Move to the right inside. At this time, the protrusions 3a and 3b vibrate at the natural frequency fr in the direction of the arrow N in the figure as described above, and due to the stretching vibration of the left and right laminated piezoelectric bodies 4 and 5,
It vibrates in the direction of arrow M in the figure at the frequency f. Needless to say, the frequency f of the alternating voltage applied to the laminated piezoelectric bodies 4 and 5 may be the same as the frequency fr of the alternating voltage applied to the piezoelectric elements 2a to 2d.

The bending vibration of the elastic body 1 and the laminated piezoelectric body 4, which are caused by applying such an alternating voltage,
It is possible to generate vibrations of various modes as shown in FIGS. 4 (a) to 4 (d) at the tip ends of the protrusions 3a and 3b by synthesizing the vibrations caused by No. 5 by displacing the phase difference. Is. In addition, among the vibration modes shown in FIG. 4, the vibration modes shown in (b) and (d) are called ultrasonic elliptical vibrations.

When ultrasonic elliptical vibration as shown in FIG. 4 (b) is occurring at the tips of the protrusions 3a and 3b, the tips of the protrusions 3a and 3b are indicated by arrows M in FIG. When a slider (not shown) is pressed so as to be movable in any direction, the slider is moved to the right in the figure by the pressing force generated at the tips of the protrusions 3a and 3b that are performing ultrasonic elliptical vibration. Can be moved. When ultrasonic elliptical vibration as shown in FIG. 4D is generated at the tips of the protrusions 3a and 3b, the slider moves to the left in the figure.

FIG. 5 is a view showing one embodiment of the ultrasonic driving device of the present invention using the ultrasonic vibrator of the first embodiment, and is a front view of the ultrasonic vibrator seen from the front side. It is a figure.

As shown in the figure, when the ultrasonic vibrator 10 is mounted on the upper surface of the base 11 for fixing the ultrasonic vibrator 10, the vibrator 10 is mounted on the upper surface of the base 11. Of the protrusions 11a and 11 at positions facing the fixed portions 6 and 7, respectively.
b is formed, and when the ultrasonic transducer 10 is placed, between the portion between the fixed portion 6 and the fixed portion 7 on the lower surface of the ultrasonic transducer 10 and the upper surface of the base 11. Is the piezoelectric element 2b-
There is a gap larger than the extent that the vibration of 2d is not disturbed. Further, the protruding portions 11a and 11b are provided with holes at positions facing the tapped holes 8a and 8b of the ultrasonic transducer 10, and the ultrasonic transducer 10 includes screws 12a and 12b, for example. Using the base 11 as shown in the drawing.
It is designed to be placed and fixed on.

At the tips of the projections 3a, 3b on the upper surface of the ultrasonic transducer 10 mounted and fixed on the base 11, the slider is provided with a pressure contact means composed of a bearing 14, a biasing spring 15, and a fixed support portion 16. 13 is pressed. At this time, the press-contact means presses the slider 13 against the protrusions 3a, 3b with an appropriate force so that the slider 13 can move to the left and right and up and down in the figure to some extent.

When the ultrasonic elliptical vibration as described above is applied to the tips of the protrusions 3a and 3b, the slider 13 linearly moves in the left-right direction in the figure by the above-described action. The projections 3a and 3b do not necessarily have to have the shape of the protrusions as shown in FIG. 1, and may have the shape of protrusions as shown in FIG. 6, for example. In the figure, (a) shows an example in which the width of the protrusions 3aA, 3bA is shortened, and (b) shows an example in which the protrusions 3aB, 3bB are hemispherical. Even when these shapes are adopted, the same effect as in the case of the shapes shown in FIG. 1 can be obtained.

FIG. 7 is a front view of an ultrasonic transducer 20 showing a second embodiment of the present invention.

The difference between this second embodiment and the first embodiment is that the cross-sectional area of the portion 21 of the elastic body 1 to which the piezoelectric elements 2a to 2d are adhered and fixed is the same at both ends of the elastic body 1. The cross-sectional area of the left and right laminated piezoelectric bodies 4 and 5 is relatively small compared to the other, and other configurations and actions are the same as those in the first embodiment. As a result, the ultrasonic transducer 20 of the second embodiment can obtain a larger ultrasonic elliptical vibration than the ultrasonic transducer 10 of the first embodiment.

FIG. 8 is a front view of an ultrasonic transducer 30 showing the third embodiment of the present invention.

The difference of the third embodiment from the first embodiment is that a vibration detecting piezoelectric element 31 for detecting the vibration of the elastic body 1 is provided at a predetermined position of the elastic body 1. ,
The other structure is similar to that of the first embodiment.

In general, the ultrasonic vibrator has a temperature coefficient, and the resonance vibration frequency changes according to the temperature change. Therefore, when actually using the ultrasonic vibrator, it is necessary to devise so that the maximum amplitude can always be obtained, and as a means for achieving this, the vibration state of the ultrasonic vibrator is detected and the optimum frequency is detected. A method of driving the same oscillator can be considered.

The vibration detecting piezoelectric element 31 is disposed at a predetermined position of the elastic body 1, for example, the elastic body 1 in this embodiment.
Between the piezoelectric element 2a and the protrusion 3a on the upper surface of the above, one surface is fixed to the elastic body 1 as an adhesive surface, and the electric terminal F is drawn out from the other surface, which will be described later. It is connected to the input terminal of an amplifier 36a (see FIG. 9) in the drive circuit. Then, the vibration of the elastic body 1 is fed back to the drive circuit.

FIG. 9 shows an ultrasonic transducer 30 according to the third embodiment.
FIG. 3 is a block diagram showing an electric circuit of the drive circuit of FIG.

The output terminal of the oscillation circuit 32 for generating an alternating voltage applied to each piezoelectric element of the ultrasonic transducer 30 has an electric terminal B (see the figure) drawn from the left laminated piezoelectric element 4 via an amplifier 36c. 8), and is also connected to an electric terminal B ′ (see FIG. 8) drawn from the right laminated piezoelectric element 5 through a series circuit including a phase inversion circuit 35 and an amplifier 36d, Alternating voltages whose phases are opposite to each other are applied to the left and right laminated piezoelectric elements. The output terminal of the oscillation circuit 32 is an electrical terminal A drawn from the piezoelectric element 2c via a series circuit including a phase shift circuit 34 and an amplifier 36b.
(See FIG. 8) and is also connected to one input terminal of a phase detection circuit 33 for detecting the phase from the output vibration signal from the vibration detection piezoelectric element 31.

The output terminal of the amplifier 36a to which the output signal from the electric terminal F of the vibration detecting piezoelectric element 31 is input is connected to the input terminal of the oscillating circuit 32 via the rectifier circuit 37, The oscillation circuit 3 based on the output signal
The generation of the alternating voltage of 2 is controlled. The output terminal of the amplifier 36a is connected to the phase detection circuit 3
3 is also connected to one input end of the phase detection circuit 33, and the output end of the phase detection circuit 33 is connected to one input end of the phase shift circuit 34. The alternating voltage appearing at the terminal A is controlled.

Next, the operation of the third embodiment will be described with reference to FIG.
And it demonstrates with reference to FIG.

Now, when the alternating voltage generated by the oscillation circuit 32 is applied to the electric terminals A, B, B'through the phase shift circuit 34, the phase inversion circuit 35, etc., the ultrasonic transducer 30 will be described. The ultrasonic elliptical vibration is generated at the tips of the protruding portions 3a and 3b as described above. At this time, the vibration detecting piezoelectric element 3
A vibration corresponding to the vibration at a certain position of the elastic body 1 is generated in the elastic body 1, and an electric signal (hereinafter referred to as a feedback signal) generated by the vibration is generated in the electric terminal F.
The feedback signal that appears above is input to the oscillation circuit 32 through the amplifier 36a and the rectifier circuit 37. Then, the oscillation circuit 32 adjusts the oscillation frequency of the alternating voltage so that the input feedback signal becomes maximum.

On the other hand, the feedback signal is also input to the phase detection circuit 33, and the phase detection circuit 33 has a phase difference of + 90 ° or −90 ° between the feedback signal and the output signal of the oscillation circuit 32. Thus, the phase shift circuit 34 is controlled.

In this way, the ultrasonic elliptical vibration as shown in FIG. 4B or 4D can be stably excited at the tips of the protrusions 3a and 3b of the ultrasonic transducer 30. ..

FIG. 10 is a perspective view of an ultrasonic transducer 40 showing a fourth embodiment of the present invention.

The difference between the fourth embodiment and the first embodiment is that the first embodiment is a bending vibration of the elastic body.
In contrast to using the third-order mode vibration as shown in (c), the fourth embodiment uses the first-order mode vibration shown in FIG. 3 (a). That is, in the first embodiment described above, the two protrusions that cause ultrasonic elliptical vibration are provided, whereas in the fourth embodiment, the first mode vibration is used, the protrusions are I have it in place.

As shown in the figure, a protrusion 43 is provided at the center of the upper surface of the elastic body 41, and piezoelectric elements 42a and 42b are arranged on the left and right sides of the protrusion 43 in the figure. There is. Further, a piezoelectric element 42c is arranged on the lower surface of the elastic body 41 so as to cover the lower surface. The piezoelectric elements 42a to 42c are arranged so that their polarization directions are indicated by arrows X5 to X7 in the figure.

The other structure and operation of the fourth embodiment are the same as those of the first embodiment.

FIG. 11 is a plan view of an ultrasonic transducer 50 showing the fifth embodiment of the present invention as seen from above.

The difference between this fifth embodiment and the first embodiment is that the shape of the elastic body and the number and arrangement of the piezoelectric elements and laminated piezoelectric bodies are different.

In the figure, the cross-shaped elastic body 51 is formed of an elastic metal such as stainless steel, phosphor bronze, brass, or aluminum. This elastic body 51
Four piezoelectric elements 52a to 52d having a rectangular plate shape are bonded and fixed to the upper surfaces of the cross-shaped arm portions 51a to 51d so that the polarization directions thereof are the same. Although not shown, the piezoelectric elements 52a to 52d on the lower surface of the elastic body 51 are also provided.
At the symmetric position of the position where is bonded and fixed, four piezoelectric elements 52e to 52h similar to the piezoelectric elements 52a to 52d are provided.
However, they are bonded and fixed so that their polarization directions are the same as those of the piezoelectric elements 52a to 52d.

A surface electrode is formed on the surface of each of the piezoelectric elements 52a to 52h.
52h are electrically connected by connecting lines Y4 to Y11 (Y8 to Y11 are not shown) as illustrated, and
An electric terminal A is drawn out from both surfaces of the piezoelectric elements 52b and 52f, and is connected to an output terminal such as an amplifier 36b (see FIG. 9) in the drive circuit of the ultrasonic transducer.

In the center of the upper surface of the elastic body 51, there is provided a projecting portion 53 projecting toward the front side in the figure, and further, in the figure of the arm portion 51c of the elastic body 51, An electric terminal G is drawn out from the lower surface on the front side and is connected to the ground of a drive circuit or the like.

On the end faces of the arm portions 51a to 51d of the elastic body 51, thin plate-shaped rectangular piezoelectric ceramics having end faces having substantially the same shape as the end faces are arranged so that their polarization directions are opposite to each other. , A few to a few hundred as shown,
The end faces are laminated and bonded with the bonding surface. here,
In the drawing, the upper laminated piezoelectric body is referred to as an upper laminated piezoelectric body 54, the lower side thereof is referred to as a lower laminated piezoelectric body 55, the right side thereof is referred to as a right laminated piezoelectric body 56, and the left side thereof is referred to as a left laminated piezoelectric body 57. Further, each laminated piezoelectric body is connected on its side surface by every other layer by a connecting means (not shown), and from both side surfaces of the laminated piezoelectric bodies 54, 55, 56, 57, electric terminals B, B are shown as shown. ', C, C', G are pulled out. An insulating means (not shown) is arranged between the piezoelectric bodies of the laminated piezoelectric body.

Each of the laminated piezoelectric bodies 54, 55, 56, 57
Each of the end faces of the fixing portion 59a has an end face having substantially the same shape as the end face, and is made of a metal material such as stainless steel, phosphor bronze, brass, or aluminum.
.About.59d are fixed by using the end surface as an adhesive surface.
Then, tap holes 58a to 58d for fixing the ultrasonic transducer 50 to the fixing base or the like (not shown) with screws or the like are bored in substantially the center of the upper surface of each of the fixing portions 59a to 59d. ..

Next, the operation of the fifth embodiment will be described.

First, the fixing portions 59a to 59d at the above four locations
Is fixed to the fixed base with screws or the like. Then, an alternating voltage is applied to the electric terminal A, that is, the piezoelectric elements 52a ...
An alternating voltage is applied to 52h to cause the elastic body 51 to excite bending vibration. As a result, the protrusion 53 vibrates in the direction perpendicular to the paper surface in the figure. At the same time, the electrical terminals B,
B ', C, C'also, that is, the above-mentioned laminated piezoelectric bodies 5
Alternating voltages of the same frequency whose phases are adjusted to each other are also applied to 4, 55, 56 and 57 to combine with the bending vibration to excite ultrasonic elliptical vibration at the tip of the protrusion 53.

Now, a flat plate slider (not shown)
In the figure, it is pressed against the tip of the projection 53 through a bearing or the like so as to be movable vertically above the paper surface. here,
When it is desired to move the slider in the direction of arrow T in the figure, alternating voltages having mutually opposite phases are applied to the upper and lower laminated piezoelectric bodies 54 and 55 to excite ultrasonic elliptical vibration on the protrusion 53. .. When the slider is to be moved in the direction of arrow U in the figure, the left and right laminated piezoelectric bodies 57, 56 are
By applying alternating voltages having opposite phases to each other,
The ultrasonic elliptical vibration is excited in 3. When it is desired to move the slider in an arbitrary direction parallel to the paper surface in the drawing, by applying an alternating voltage whose phase is adjusted to each of the upper, lower, left and right laminated piezoelectric bodies 54 to 57, the protrusion 53 is formed. It is possible to arbitrarily change the vibration surface of the ultrasonic elliptical vibration generated at the tip of the.

In general, the laminated piezoelectric material may be damaged when a force in a direction perpendicular to the laminating direction is applied, and in the fifth embodiment, when the laminated piezoelectric materials are simultaneously driven, the laminated piezoelectric materials are mutually faced. Pressing force is applied. However, this pressing force is very small and does not affect the laminated piezoelectric material.

FIG. 12 is a perspective view of an ultrasonic transducer 60 showing a sixth embodiment of the present invention.

The sixth embodiment is different from the first embodiment in that the cross section is circular and the arrangement of the elastic body and the piezoelectric element is different.

In the figure, seven cylindrical elastic bodies 61 are shown.
Six thin cylindrical piezoelectric elements 62a to 62f are bonded and fixed at positions a to 61g substantially corresponding to antinodes of bending vibration so as to be sandwiched between the elastic bodies 61a to 61g as shown in the drawing. The piezoelectric elements 62a to 62f are respectively
In the upper half and the lower half, polarization processing is performed as indicated by arrows Z1 to Z12 in the figure, and wiring processing is performed as illustrated. The electric terminal A is pulled out from the peripheral surface of the piezoelectric element 62f and is connected to the drive circuit.

Further, hemispherical projections 63a, 6 are provided at the same positions on the circumferential surfaces of the elastic bodies 61b, 61f.
3b are respectively projected. Then, the elastic body 61
An electric terminal G is drawn out from the peripheral surfaces of b, 61d and 61f and is connected to the ground of the drive circuit.

Other configurations and operations are the same as those in the first embodiment except that the laminated piezoelectric material and the fixing portion are cylindrical in shape.

FIG. 13 is a perspective view of an ultrasonic transducer 70 showing the seventh embodiment of the present invention.

The seventh embodiment has basically the same structure as that of the first embodiment except that the arrangement of the piezoelectric elements is different.

As shown in the figure, the elastic member 71 on the flat plate is
Similar to the elastic body 1 in the first embodiment, for example,
It is made of elastic metal material such as stainless steel, phosphor bronze, brass and aluminum. Two strip-shaped piezoelectric elements 72a to 72d are attached to the upper and lower surfaces of the elastic body 71, one surface of which is an adhesive surface, and the piezoelectric elements 72a to 72d are attached to the elastic body 71 by a low-viscosity epoxy adhesive as shown in the figure. The polarization directions of the piezoelectric elements 72a to 72d are as shown by arrows in the figure. A surface electrode made of silver paste or electroless plating is formed on the other surface of each of the piezoelectric elements 72a to 72d.
2d is electrically connected as shown, and
The electric terminal A is from the surfaces of the piezoelectric elements 72a and 72b, and the electric terminal A'is from the surfaces of the piezoelectric elements 72c to 72d.
Are drawn out respectively, and are high-frequency power source 153 and phase shifter 154 which are driving circuits for the ultrasonic transducer.
Is connected as shown.

On both end faces of the elastic body 71, thin plate-shaped rectangular piezoelectric ceramics having end faces having substantially the same shape as the end faces are polarized in opposite directions, as in the first embodiment. In this way, as shown in the figure, about several to several hundreds of sheets are laminated and bonded with the end faces as the bonding surfaces. Here, in the figure, the left laminated piezoelectric body is referred to as a left laminated piezoelectric body 74, and the right side thereof is referred to as a right laminated piezoelectric body 75. Although not shown, each laminated piezoelectric body is connected on its side surface every other layer by connecting means (not shown). From both side surfaces of the laminated piezoelectric bodies 74 and 75, electric terminals B and B are connected as shown. , G are drawn out, and these terminals are connected to the high frequency power source 153 and the phase shifter 154, respectively, as shown. The drive circuits described in FIG. 9 may be connected to the electric terminals A, A ′, B and B ′, as in the first embodiment. In this case, the output terminals of the amplifier 36b in the drive circuit are connected to the electric terminals A and A, and the amplifiers 36c and 36 in the drive circuit are connected to the electric terminals B and B '.
The output terminals of d are connected to each other. Insulating means (not shown) is arranged between the piezoelectric elements of the laminated piezoelectric element.

Further, fixing portions 76 and 77 formed of a metal material such as stainless steel, phosphor bronze, brass, or aluminum are provided on the end surfaces of the left laminated piezoelectric body 74 and the right laminated piezoelectric body 75, respectively. The end surface is fixed to the adhesive surface with, for example, a low-viscosity epoxy adhesive. Further, in the figure, the lower portions of the fixing portions 76 and 77 are respectively provided with protrusions 73a and 7 having a semi-cylindrical shape.
3b is formed. The elastic body 71, the laminated piezoelectric elements 74 and 75, and the fixing portions 76 and 77 are electrically insulated from each other by insulating plates (not shown) made of elastic bodies bonded to both ends of the laminated piezoelectric element. There is.

A shaft 150 is penetratingly fixed to the center of the elastic body 71 at the node of the secondary bending vibration from the front surface to the rear surface of the elastic body 71.
The ultrasonic oscillator 70 can be movably and elastically fixed by applying a spring 156 to 0, for example, as shown in FIG.

Here, the operation of the ultrasonic transducer 70 will be described with reference to FIGS. 13 to 16.

First, the operation of the piezoelectric elements 72a to 72d will be described. A high frequency alternating voltage is applied to the piezoelectric elements 72a to 72d. At this time, the frequency of the applied voltage is made to match the natural frequency of the secondary mode relating to the bending vibration of the elastic plate 71. Then, the elastic body 71 causes secondary bending mode vibration having a vibration node αα in the central portion as shown in FIG. Therefore, the protrusions 73a and 73b vibrate in opposite phases to each other. At this time, the direction of the vibration is the vertical direction as shown in FIG.

Next, the operation of the laminated piezoelectric elements 74 and 75 will be described.

A high frequency alternating voltage having the same phase is applied to the laminated piezoelectric elements 74 and 75. The applied voltage is an alternating voltage having the same frequency as the alternating voltage applied to the piezoelectric elements 72a to 72d. The applied voltage causes the laminated piezoelectric elements 74 and 75 to expand and contract, and the protrusions 73a and 73b joined thereto vibrate in the left-right direction in opposite phases as shown in FIG. 15B. With respect to this vibration, it is not necessary to set the frequency of the applied voltage to the resonance frequency for the vibration in the length direction.

By applying the above two alternating voltages at the same time and synthesizing the vibrations, the elliptical vibrations shown in FIG. 15C are generated in both the protrusions 73a and 73b. By this elliptical vibration, for example, as shown in FIG. 16, a thrust force can be generated in the moving body 162 pressed by the spring 156 and the roller 161 against the protrusions 73a and 73b.

As a result, the elliptical vibration can be effectively excited, and resonance is not required in the expansion / contraction direction, so that an ultrasonic vibration device having a high degree of freedom in the shape setting of the vibrator can be realized.

FIG. 17 is a perspective view of an ultrasonic transducer 80 showing the eighth embodiment of the present invention.

The eighth embodiment has the same basic structure as that of the seventh embodiment and is characterized in that the elastic body 71 in this seventh embodiment is provided with a vibration detecting piezoelectric element for feedback. To do.

As shown in the figure, the surface electrode of the piezoelectric element 72a is divided, and a part of the piezoelectric element 72a is used as a vibration detecting piezoelectric element 81. The vibration detecting piezoelectric element 81 has a function similar to that of the vibration detecting piezoelectric element 31 in the third embodiment, and like the third embodiment, the electric terminal F is pulled out from the surface thereof. And is connected to the input end of the amplifier 36a (see FIG. 9) in the drive circuit. Then, the vibration of the elastic body 71 is fed back to the drive circuit.

The drive circuit connected to the seventh embodiment is
A circuit equivalent to the drive circuit in the third embodiment can be used. Therefore, the operation and effect of this embodiment are similar to those of the third embodiment.

In this embodiment, as described above, the vibration detecting piezoelectric element 81 is formed by dividing the piezoelectric element 72a. However, the present invention is not limited to this, and for example, the piezoelectric element 72a may be vibrated. The piezoelectric element 81 for detection may be integrally laminated, or, as in the third embodiment, the piezoelectric element 81 for vibration detection may be provided on the elastic body 71 in the vicinity of the piezoelectric element 72a. May be. In these cases, the same effect as that of this embodiment can be obtained.

FIG. 18 is a perspective view of an ultrasonic transducer 90 showing the ninth embodiment of the present invention.

The ninth embodiment has the same basic structure and operation as the seventh embodiment, and like the sixth embodiment, has a circular cross section and the elastic body and the piezoelectric element. The only difference is the arrangement.

In this embodiment, the elastic body 71 in the seventh embodiment is composed of three columnar elastic bodies 91, and disk-shaped piezoelectric elements 92a and 9a are provided between the elastic bodies 91.
2b are alternately arranged as shown, and the elastic body 91
Disc-shaped laminated piezoelectric elements 94 and 95 are arranged so as to be bonded to both ends of the element. Further, the laminated piezoelectric element 9
Disc-shaped fixing portions 96 and 97 are joined so as to sandwich 4, 95, and hemispherical protrusions 93a and 93b are provided at the same positions on the peripheral surfaces of the fixing portions 96 and 97, respectively. ing. Then, from the peripheral surface of the piezoelectric element 91, the electric terminals A, A ′, and G are also provided, and the laminated piezoelectric element 9
Electrical terminals B and B'are drawn out from the peripheral surfaces of 4, 95, respectively, as shown in the drawing, and are connected to a drive circuit as in the seventh embodiment. It is to be noted that the piezoelectric elements 92a and 92b are polarized in opposite directions in each half of the plane in the direction perpendicular to the plane as shown in the lower portion of FIG. 18, so that the polarization boundary lines become parallel. It is joined to the elastic body 91.

The operation of this embodiment is basically the same as that of the seventh embodiment, and only the differences will be described.

The piezoelectric elements 92a and 92b are connected to the electric terminal B-
By applying a high frequency alternating voltage between G, the piezoelectric elements 92a and 92b vibrate in the thickness direction. At this time,
Since the polarization directions are vertically inverted, the elastic body 91 generates a secondary mode resonance vibration as shown in FIG.

Therefore, as compared with the seventh embodiment, the displacement of bending vibration of the elastic body is reduced, but a larger voltage can be applied, so that higher output can be achieved.

FIG. 19 is an external perspective view and a top view of an ultrasonic oscillator 200 showing a tenth embodiment of the present invention.

The tenth embodiment has the same basic structure as the seventh embodiment as in the above embodiment, and only the differences will be described.

In the seventh embodiment, the spring 156 is applied to the shaft 150 provided at the center of the elastic body which is the node of the secondary bending vibration, and the elastic body 71 is provided as shown in FIG. However, in the present embodiment, the bearing 151 is fitted to the shaft 150 from the outside, and the other part of the bearing holder 152 fitted to the outer ring of the bearing 151 is fixed to the fixing portion (not shown). Let As a result, the ultrasonic transducer 200 can be pressed against the moving body (not shown) by the bearing holder 152 via the bearing 151.

Therefore, since the ultrasonic transducer 200 is held rotatably around the shaft 150,
Displacement in directions other than the rotation direction will be restricted, including vibration.

As a result, in the present embodiment, the ultrasonic vibration is prevented without disturbing the secondary vibration of the elastic body 71 of the ultrasonic vibrator 200 and without causing vibrations or the like that do not contribute to the driving of the ultrasonic vibrator. It becomes possible to hold the sound wave oscillator 200.

FIG. 20 is a perspective view and a top view of an ultrasonic transducer 210 showing an eleventh embodiment of the present invention.

Also in this eleventh embodiment, the basic constitution is the seventh.
This is the same as the embodiment, and only the differences will be described. The present embodiment can be considered as a modification of the tenth embodiment.

In this embodiment, the ultrasonic transducer 210, 2
A conical recess 164 is provided on the front and rear sides of the central portion of the elastic body 71, which is the node of the next bending vibration.
In front of and behind the elastic body 71, a holding member 165 having a cylindrical shape and having a conical recess similar to the recess 164 on one side is provided, and the recess on the one side is the recess. 164 and the other side surface is fixed part 1
It is arranged so as to be fixed to 71. Further, a sphere 163 made of a high hardness material such as stainless steel is disposed between the holding member 165 and the recess 164 so as to abut the inner wall surfaces of the recesses. 16
The ultrasonic transducer 210 is sandwiched by the holding member 165 via 3 to hold the ultrasonic transducer 210. As a result, the ultrasonic transducer 210 moves the holding member 16
5 is pressed against a moving body (not shown) via the ball 163.

Therefore, since the ultrasonic transducer 210 is rotatably held around the holding member 165 as in the tenth embodiment, displacements other than the turning direction are restricted including vibration. Will be done.

As a result, in this embodiment, the structure of the ultrasonic vibrator 210 is simpler than that of the tenth embodiment and the secondary vibration of the elastic body 71 of the ultrasonic vibrator 210 is not hindered, and the ultrasonic vibrator 210 is driven as an ultrasonic vibrator. It is possible to hold the ultrasonic transducer 210 without causing a shake that does not contribute to the vibration.

FIG. 21 is a perspective view and a top view of an ultrasonic oscillator 220 showing a twelfth embodiment of the present invention.

Also in the twelfth embodiment, the basic structure is the seventh.
This is the same as the embodiment, and only the differences will be described. Further, like the 11th embodiment, this embodiment can be considered as a modification of the 10th embodiment.

In this embodiment, the ultrasonic transducer 220 has a 2
A conical recess 164 is provided on the front and rear sides of the central portion of the elastic body 71, which is the node of the next bending vibration.
A holding member 170 is formed in the front and rear of the elastic body 71, which has a columnar shape and a conical projecting portion on one side surface side, and the projecting portion on the one side surface side is the hollow portion. 16
4, and the other side surface is fixed to the fixing portion 171. Further, the holding member 1
Between the 70 and the recessed portion 164, three or more balls 163 made of a high hardness material such as stainless steel are arranged so as to abut each other on the circumferential surface of the protruding portion of the holding member 170. The holding member 170 sandwiches the ultrasonic vibrator 220 via the sphere 163, and holds the ultrasonic vibrator 220. As a result, the ultrasonic transducer 2
20 will be pressed by a holding member 170 through a ball 163 against a moving body (not shown).

Therefore, since the ultrasonic vibrator 220 is rotatably held around the holding member 170 as in the tenth embodiment, displacements other than the turning direction are restricted including vibration. Will be done.

As a result, in this embodiment, as compared with the tenth embodiment, the contact portion between the sphere 163 and the holding member 170 makes point contact, so that the elastic body 71 of the ultrasonic transducer 220 is made.
It is possible to hold the ultrasonic transducer 220 without causing any secondary vibration of the above, and without causing shake or the like that does not contribute to driving as the ultrasonic transducer.

FIG. 22 is a perspective view and a top view of an ultrasonic transducer 230 showing the thirteenth embodiment of the present invention.

In the thirteenth embodiment, the basic structure is the seventh.
This is the same as the embodiment, and only the differences will be described.

In this embodiment, the elastic plate 166 having the narrow portion 167 at one end is provided with the elastic body 71 which is a node of the secondary bending vibration of the ultrasonic transducer 230 in the narrow portion 167.
Stick to the front and back sides of the central part of. The other end of the elastic plate 166 is fixed to a fixing portion (not shown). Therefore, the ultrasonic transducer 230
Is pressed against a moving body (not shown) by the elastic plate 166, and the elastic plate 16 is pressed by the narrow portion 167.
6 is twisted to hold the ultrasonic transducer 230 rotatably.

Compared to the tenth embodiment, this embodiment has an effect that there is no loss due to friction because no sliding occurs at the time of rotation. .

FIG. 23 is a perspective view and a front view of an ultrasonic transducer 240 showing a fourteenth embodiment of the present invention.

The fourteenth embodiment is similar in basic structure to the seventh embodiment, and only the differences will be described.

In this embodiment, instead of the shaft 150 in the seventh embodiment, a prism 168 having an apex 168a of an edge is arranged at the node of vibration. Further, the oscillator 240 is adapted to be pressed against a moving body (not shown) by the edge receiver 169 via the apex 168a of the edge.

Therefore, the vibrator 240 is rotatably held at the apex 168a of the edge.

In this embodiment, compared with the tenth embodiment, since the line contact is maintained without sliding, there is an effect that there is no loss due to friction.

[0124]

As described above, according to the present invention, the object to be driven can be reversibly moved when it is used as a linear motor because it is compact and has a high energy conversion efficiency and can output a large vibration output. Ultrasonic transducer that is possible and easy to manufacture with few design restrictions, and
There is an effect that it is possible to provide an ultrasonic drive device having this vibrator.

[Brief description of drawings]

FIG. 1 is a perspective view of an ultrasonic transducer showing a first embodiment of the present invention.

FIG. 2 is a front view of the ultrasonic transducer of the first embodiment.

FIG. 3 is a diagram showing a vibration mode of a standing wave.

FIG. 4A to FIG. 4D are diagrams showing vibrations in various modes.

FIG. 5 is a front view showing an embodiment of the ultrasonic driving device of the present invention using the ultrasonic vibrator of the first embodiment.

FIG. 6 is a perspective view showing another example of the protrusion of the ultrasonic transducer of the first embodiment.

FIG. 7 is a front view of an ultrasonic transducer showing a second embodiment of the present invention.

FIG. 8 is a front view of an ultrasonic transducer showing a third embodiment of the present invention.

FIG. 9 is a block diagram showing an electric circuit of a drive circuit for an ultrasonic vibrator of the third embodiment.

FIG. 10 is a perspective view of an ultrasonic transducer showing a fourth embodiment of the present invention.

FIG. 11 is a plan view of an ultrasonic transducer according to the fifth embodiment of the present invention as seen from above.

FIG. 12 is a perspective view of an ultrasonic transducer showing a sixth embodiment of the present invention.

FIG. 13 is a perspective view of an ultrasonic transducer showing a seventh embodiment of the present invention.

FIG. 14 is a diagram showing a vibration mode of a standing wave.

15A to 15C are diagrams showing vibrations of various modes.

FIG. 16 is a perspective view showing a specific usage of the seventh embodiment.

FIG. 17 is a perspective view of an ultrasonic transducer showing an eighth embodiment of the present invention.

FIG. 18 is a perspective view of an ultrasonic transducer showing a ninth embodiment of the present invention.

FIG. 19 is a perspective view and a top view of an ultrasonic transducer showing a tenth embodiment of the present invention.

20A and 20B are a perspective view and a top view of an ultrasonic transducer showing an eleventh embodiment of the invention.

FIG. 21 is a perspective view and a top view of an ultrasonic transducer showing a twelfth embodiment of the present invention.

22A and 22B are a perspective view and a top view of an ultrasonic transducer showing a thirteenth embodiment of the present invention.

FIG. 23 is a perspective view and a front view of an ultrasonic transducer showing a fourteenth embodiment of the present invention.

FIG. 24 is a front view showing an example of a conventional linear type ultrasonic motor.

FIG. 25 is a partially enlarged perspective view schematically showing the relationship between the bending traveling wave of the propagation rod of the conventional ultrasonic motor and the slider.

FIG. 26 is a front view showing another example of a conventional linear type ultrasonic motor.

FIG. 27 is a perspective view showing still another example of a conventional linear type ultrasonic motor.

[Explanation of symbols]

1, 71 ... Elastic bodies 2a, 2b, 2c, 2d, 72a, 72b, 72c, 7
2d ... Piezoelectric element 3a, 3b, 73a, 73b ... Projection part 4, 74 ... Left laminated piezoelectric material 5, 75 ... Right laminated piezoelectric material 6, 7, 76, 77 ... Fixing portion 8a, 8b ... Tap hole 10, 20, 30, 40, 50, 60, 70, 80, 9
0, 200, 210, 220, 230, 240 ... Ultrasonic transducer 11 ... Base 13 ... Slider 14 ... Bearing 15 ... Energizing spring 16 ... Fixed support portion 31, 81 ... Vibration detecting piezoelectric element 150 ... Shaft

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Imabayashi 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd.

Claims (6)

[Claims] 1. An elastic body to which a piezoelectric element is fixed and which generates a standing wave type flexural vibration, and one end of which is fixed to an end of the elastic body in a direction substantially perpendicular to the amplitude of the flexural vibration. An ultrasonic transducer, comprising: a laminated piezoelectric element that is laminated to generate reciprocating vibration in the laminating direction. 2. An elastic body to which a piezoelectric element is fixed and which generates a standing wave type flexural vibration, and one end of which is fixed to an end portion of the elastic body in a direction substantially perpendicular to the amplitude of the flexural vibration. The laminated piezoelectric element that is laminated and generates reciprocating vibration in the laminating direction, and is pressed against the other end of the elastic body or the laminated piezoelectric element in the amplitude direction of the bending vibration, and the bending vibration and the reciprocating vibration cause An ultrasonic drive device comprising: a pressure contact member that is moved relative to the elastic body and the laminated piezoelectric element. 3. An elastic body to which a piezoelectric element is fixed and which generates a standing wave type bending vibration; one end is fixed to an end of the elastic body; An ultrasonic transducer, comprising: a laminated piezoelectric element that is laminated in a substantially vertical direction and that generates reciprocating vibration in the laminated direction. 4. An elastic body to which a piezoelectric element is fixed and which generates a standing wave type bending vibration; one end is fixed to an end of the elastic body; On the other hand, a laminated piezoelectric element that is laminated in a direction substantially perpendicular to the laminated piezoelectric element that generates reciprocating vibration in the laminating direction, and is pressed against the antinode of the bending vibration on the surface of the elastic body in the amplitude direction of the bending vibration. An ultrasonic drive device comprising: a pressure contact member that is moved relative to the elastic body by vibration and reciprocating vibration. 5. An elastic body, in which a piezoelectric element is fixed to generate a standing wave type bending vibration and which is supported by a fixing member at a node of the bending vibration, and one end of which is an end portion of the elastic body. An ultrasonic transducer, comprising: a laminated piezoelectric element that is fixed and is laminated in a direction substantially perpendicular to the amplitude of the bending vibration to generate reciprocating vibration in the laminating direction. 6. An elastic body, in which a piezoelectric element is fixed to generate a standing wave type bending vibration, and which is supported by a fixing member at a node of the bending vibration, and one end of the elastic body is attached to an end portion of the elastic body. A laminated piezoelectric element that is fixed and laminated in a direction substantially perpendicular to the amplitude of the bending vibration to generate reciprocating vibration in the laminating direction; and the amplitude of the bending vibration with respect to the other end of the laminated piezoelectric element. And a pressure contact member which is pressure-contacted in a direction and is relatively moved with respect to the laminated piezoelectric element by the bending vibration and the reciprocating vibration, the ultrasonic driving device.