JPH0324548A - Light source device - Google Patents

Abstract

PURPOSE:To prevent temperature rise caused by a heating coil by forming the tube wall of a translucent jacket tube where coolant is forcively reciprocated and circulated to the jacket tube in a filter where required wave length of effective component is emitted. CONSTITUTION:According to the type of sensitive material to be sued, the type of light emitting part 1 is previously selected, screen effect is set by the selection of first and second jacket tubes 10 and 21. Thus, a light beam is absorbed/cooled by the coolant P. between the light emitting part 1 and an inner tube 10, is absorbed/cooled by the inner tube filter 10 and absorbed/cooled by water in coolant P, between the inner tube 10 and the outer tube 21. Finally the beam is absorbed/cooled by the water in the coolant P, to the outer tube filter 21. In such a manner, the heating coil of the light from the light emitting part 1 is interrupted by the optical filter effect of the jacket tubes 10 and 21 and cooled by the coolant, and only the prescribed ultraviolet range are radiated to outside. Therefore, temperature rise caused by the heating coil can be prevented.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is used for exposure such as photolithography, in which the wall of a jacket tube through which a cooling liquid is circulated is formed as a filter that allows only effective components of a desired wavelength to pass through. This invention relates to a light source device.

[Prior Art] Conventionally, in exposure apparatuses such as photolithography, an optical filter has been provided separately from a discharge lamp in order to obtain desired ultraviolet rays from a light source device.

[Problem to be solved by the invention]

However, since a large amount of light is required during the above-mentioned exposure, the temperature of the optical filter increases due to the large amount of heat rays absorbed, and it has been extremely difficult to prevent this temperature increase.

[Means to solve the problem]

The present invention has been made to solve the above-mentioned problems, and includes a light-transmitting jacket tube attached to both electrodes for power supply terminals in a discharge tube having an insulated structure with respect to the cooling liquid, and a supply port provided in the jacket tube. and a discharge port, in which the cooling liquid is forced to flow back and forth through the jacket tube, wherein the material of the light-transmitting jacket tube is formed into a filter that emits an active ingredient of a predetermined wavelength; For a cantilever type arc tube supported at one end, it is formed in a double structure to reciprocate the coolant, or for a double supported type arc tube supported at both ends, both ends are attached to the outer periphery. It is characterized in that it is formed in a funnel-shaped single layer structure and allows the cooling liquid to pass through in only one direction, and the double structure transparent jacket tube allows the transparent tube material to come into contact with the cooling liquid and It is fixed by immersion, and the filtered and absorbed light is removed by a cooling liquid as unnecessary components according to wavelength.Furthermore, the double-structure transparent jacket tube is formed of a plurality of cylindrical tubes, and each tube is It is made of materials that exhibit different optical filter effects, and the double-structure transparent jacket tube is fixed to the support of the coolant suction and discharge part through a water leakage prevention material, and is connected to the light source part. The neutral point of the secondary winding of the step-up transformer, which is fixed to the reflector or its exterior body and connected to both electrodes for the power supply terminal, is grounded via an overcurrent detector; The overcurrent detector is characterized in that it is connected so that the primary side of the step-up transformer can be opened by the detected overcurrent.

[Effect]

According to the above structure, the jacket tube reduces the temperature rise of the wall of the discharge lamp tube by the cooling liquid circulating therein, and the temperature rise due to absorption of heat rays by using the jacket tube as a plurality of types of filters. It also prevents Furthermore, the discharge lamp has an insulating structure at both ends thereof, and a cooling liquid supply port and a discharge port are provided at one side end to enable cantilever support, thereby simplifying manufacturing. In addition, an overcurrent detector is installed on the secondary side of the step-up transformer of the power supply, and the primary side of the step-up transformer is opened in the event of an overcurrent, allowing the operator to touch the tube wall of the discharge lamp while working. There is no risk of electric shock if you touch it.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a cross-sectional view of a cantilever-supported light source device;
is a tubular light-emitting section consisting of a bipolar insulated ultra-high pressure mercury lamp. The light emitting part 1 has a transparent cylindrical shape, and the first insulating part 3 and the second insulating part 6 formed at both ends thereof are cylindrical in shape with a slightly larger diameter than the luminous tube body (and both electrode terminals), and are made of insulating material. It is made of high steatite.

The jacket tube 2 is transparent and has a substantially cylindrical shape. The receiving portion 9 provided at one end thereof is composed of a receiving member 17, a tightening jH6, a packing 18, and an O-ring 19. The second jacket pipe 2l and the receiver 17 are tightly assembled via the packing 18, the fastener 16 is screwed and assembled to the receiver 17, and the O-ring 19 between them is pressed, and the first insulating part 3 By making elastic contact with the outer circumferential surface of the first insulating part 3 and the receiving part 9, the first insulating part 3 and the receiving part 9 are tightly assembled. By loosening the fastener l6, the O-ring 19 returns to its original shape, and the tight assembly between the first insulating part 3 and the receiving part 9 is released.

The mounting part 4 includes a holding fitting 11, a fixing fitting 15, and a tightening screw 1.
2. It is composed of a plurality of packings l8. Place the outwardly protruding end of the second jacket pipe 2l on the outer peripheral end of the upper surface of the holding fitting 11 via the packing 8, and screw that end into the fixing fitting 15 and attaching it to the holding fitting l1. In particular, it is designed to be firmly assembled.

The arc tube 1 is directly assembled to the holding fitting 11, and the assembly is carried out by screwing and assembling the tightening screw 12 into the holding fitting 11 through which the arc tube 1 is inserted, and then attaching the locking step 7 (in this case, the flange). shape) and press the locking step 7 to the assembly step 2.
This is achieved by pressing it against the gasket 18 through the packing l8. Although the locking step 7 here has a flange shape, it may have any shape as long as it comes into contact with the assembly step 20, such as a simple step.

Further, the light emitting part l is cantilever-supported in the mounting part 4, and the cooling liquid supplied to the holding fitting 11 from the water supply port 13 is supplied to the inner tube 10a of the jacket tube 2 and the outer tube 10a of the jacket tube 2.
b, enters between the inner tube 10a and the light emitting section 1, and effectively cools the light emitting section 1.

FIG. 2 shows the power supply circuit of the light source device.
A high voltage is applied to the transformer 25
A center tap 26 is provided on the secondary side of the motor, and this center tap 26 is grounded. center tap 26
An overcurrent detection coil 27 is attached to the . The overcurrent detection coil 27 is provided with a normally open contact 28 that closes when an overcurrent is detected. The normally open contact 28 and the solenoid 29 are connected in series, and the normally open contact 28 and the solenoid 29 connected in series are connected to the AC power source 24. A solenoid 29 is provided on the primary side of the transformer 25.
A normally closed switch 30 is provided which is opened by.

Next, an explanation will be given of the operation when the embodiment having the above structure is used for photolithography. As shown in FIG.
A printing plate substrate 4 is provided with a printing plate photosensitive layer 42 adhered to the printing plate substrate 4.
3 is formed, an image forming film 44 is placed on this printing plate substrate 43, and the process is carried out in a vacuum. Then, ultraviolet C having a wavelength that is blocked by the positive portion 44a of the image forming film 44 and passes through the negative portion 44b is irradiated. As a result, the printing plate photosensitive layer 42 has a negative area 44
The portion 42a corresponding to b is exposed to light and photoengraved.

Since the wavelengths absorbed differ depending on the photosensitizer, it is necessary to set the wavelength of the ultraviolet rays to be irradiated in advance. For example, as shown in Fig. 4, the wavelengths to be absorbed are each wavelength λ1 = 200~
300nm, λt = 200-400nm, λ.
When selectively using different photosensitizers such as 300 to 400 nm, it is necessary to set the wavelength of ultraviolet rays to the optimum state. Therefore, when the main spectrum of ultraviolet light of the light emitting portion 1 is λ+' = 253.7 nm, a silica glass filter having an optical filter effect of λ+ = 200 nm to 4 mμ is used. When the main spectrum of ultraviolet light of the light emitting part 1 is λz' = 360 nm, λ2=
310 nn+ to 2 mμ soda glass and lead glass filters are used. The main spectrum of ultraviolet light of light emitting part 1 is λ3
' = 414nm, λ3 = 300
A Soda glass filter of nm to 4Illμ is used. It is also possible to use a combination of glass filters.

Therefore, the type of light emitting section 1 is selected in advance depending on the type of photosensitizer used, and the filter effect is set by selecting the first and second jacket tubes 10.21. Then, by circulating the coolant between the outer space and the inner space as shown by arrow D (see Fig. 5) and causing the light emitting section l to emit light, ultraviolet C of a predetermined wavelength can be brought to the outside of the light emitting device. Can be done.

Lighting of the light emitting unit 1 is performed by a high voltage obtained from an AC power supply 24 via a transformer 25. And, once upon a time,
When the secondary side of the transformer 25 becomes unbalanced and an overcurrent occurs in the center tap 26, the overcurrent coil 27 detects this, closes the normal contact 28, and energizes the solenoid 29. The close switch 30 is opened to stop the power supply.

In addition, the coolant flows into the outer space from the coolant inlet l3, passes through the inner space, and cools the light emitting part 1 that generates heat.
The coolant is discharged from the coolant discharge port 14.

That is, the light beam is transmitted through the coolant P between the light emitting part l and the inner tube lO.
1, then absorbed and cooled by the inner pipe filter 10, further cooled by the cooling liquid P3 between the inner pipe 10 and the outer pipe 21, and finally, the cooling liquid P4 is transferred to the outer pipe filter 2l. It is cooled by absorption when it comes into contact with water, and is characterized by being cooled four times by reciprocating cooling liquid.

In this way, the heat rays of the light from the light emitting part 1 are blocked by the optical filter effect of the jacket tube 10.21, as shown in FIG. 5, and the light is cooled by the cooling liquid. Then, only predetermined ultraviolet rays are radiated to the outside as shown by arrow C. Furthermore, the emitted ultraviolet rays are transmitted to the image film 44.
, and are brought to the printing plate substrate 43. Moreover, the desired ultraviolet rays can be obtained by replacing the jacket tube 21 with one that exhibits the desired optical filter effect.

Furthermore, the jacket tube is formed of a plurality of cylindrical tubes, a cooling liquid is passed between the cylindrical tubes and the light emitting part, and each tube is made of a material that exhibits a different optical filter effect. Good too.

In addition, in the embodiment of the present invention described above, two jacket pipes 10.21 were used, but one jacket pipe 3
1 (see Figure 6). In this case, the cooling liquid is allowed to flow in from one end of one jacket tube, and the coolant is discharged from the other end, and the arc tube is supported at both ends thereof. The lamp is disposed at the central axis of the single-tube type, and the light beam is directed to the cooling liquid L in the jacket tube 31. The heat radiation ray is cooled, and the second heat radiation ray is absorbed and removed by the water in contact with the cooling liquid L2 in the jacket tube 3l. In addition, the shape of the jacket tube is such that both ends are formed in a funnel shape as shown in FIG. 6, and the flow rate of the cooling liquid is increased in the funnel-shaped portion, resulting in good cooling efficiency.

Moreover, FIG. 7 is a cross-sectional view showing the structure of one end of the single-layer jacket pipe. In the figure, 1 is a light emitting part, 3 is an insulating part, 5 is an electrode for a power terminal, and 51 is a locking part to a support body 50. The tip of the jacket tube 52 having a single layer structure is connected to the support 5.
0 through an O-ring packing 53 and is tightened with a fixing screw 54. The outer periphery of the distal end of the locking portion 51 of the light emitting portion l protruding from the support body 50 is tightened by a fixing screw 57 that is threadedly engaged with the distal end portion 50a of the support body via a receiver 55 and a washer 56. In addition, the support 5
An inlet 59 provided inside the housing 0 between the jacket tube 52 and the locking portion of the light emitting part 1 is connected to a support tube 50 which is formed into a hollow interior and carries a cooling liquid. 60 is an O-ring packing provided between the support tip 50a and the receiver 55, and 61 is an O-ring packing provided between the receiver 55 and the washer 56.

Furthermore, in the double support method, as shown in FIG. 7, both ends of the attached light emitting unit 1 are fixed with electrically insulating insulators 3, and an O-ring is used to insulate the coolant from leaking through the insulators. Fix the packing 61 through the washer ring 56 with the screw 5
7, and both electrode terminals 5 of the light emitting part 1 are made to protrude outside the cooling jacket tube 52. Therefore, both electrodes of the light emitting section 1 are insulated from the coolant.

Furthermore, it goes without saying that the present invention can be applied not only to photolithography but also to light source devices for various light sources.

(Effects of the Invention) As described above, according to the present invention, the jacket tube has an optical filter effect, so it can transmit the desired ultraviolet rays, and at the same time forms a flow path for the cooling liquid, thereby preventing heat rays from passing through the jacket tube. In addition to preventing temperature rise, it also prevents danger from the high voltage supplied to the light source.Also, since the jacket tube serves as an optical filter and a coolant flow path, It is possible to provide a downsized light source device with an overall simple structure.

[Brief explanation of drawings]

FIG. 1 is a sectional view of essential parts of an embodiment of a light source device according to the present invention, FIG. 2 is a circuit diagram of an embodiment of a power supply device according to the present invention, and FIG. 3 is a diagram to which the present invention is applied. 4 is a characteristic diagram showing the main spectrum of ultraviolet rays for explaining the present invention; FIG. 5 is a main part for explaining the operation of an embodiment of the light source device according to the present invention. 6 is a cross-sectional view showing a jacket tube in another embodiment of the light source device according to the present invention, and FIG. 7 is a cross-sectional view showing a jacket tube in an embodiment of the dual support type light source device according to the present invention. It is a diagram. 1... Light emitting part, 2... Jacket tube, 3
...First insulating part 4... Mounting part, 5... Electrode terminal, 6... Second insulating part, 7... Locking step part, 8... Electrode terminal, 9... Receiving part, 10a... Inner tube of jacket tube, 10b... Outer tube of jacket tube, l1... Holding metal fitting, l2... Tightening screw, 13
...Cooling liquid inlet, l4...Cooling liquid outlet, 1
5...Fixing bracket, l6...Tightening tool, 17...
・Receptacle, l8...Packing, 19...
O-ring, 20... Assembly step, 27... Overcurrent detection coil, 28... Normally open contact, 29... Solenoid, 4
3... Printing plate substrate, 44... Image film, 5
0...Support body, 52...Single structure jacket tube, 54...Fixing screw, 55...Receptacle, 57
...Fixing screw, 59...Inlet. Fig. 3 λj λ deficiency^3 Fig. 6 1. Procedural Dispute Manual (spontaneous) May J7, 1990 l. Incident Display Tokkura Hei 1-159044 2. Title of the invention Light source device 3. Relationship with the case of the person making the amendment Applicant Address: 3-34-1 Chofugaoka, Chofu City, Tokyo Name
Oak Seisakusho Co., Ltd.4. Claims column and detailed description of the invention column 6 of the attorney's specification
．． Contents of the amendment (1) The scope of the claims on page 1, line 4 to line 3, true 4, of the specification will be amended as shown in the attached sheet. (2) Page 5, line 5, page 5, line 6, page 5, line 18,
Correct the description of "Overcurrent detector J" to "Earth leakage current detector J." Correct the description to "Earth leakage current detection coil 27." (4) Page 8, line 13 “When overcurrent is detected”
Correct the statement ``For example, when a human touches the electrode of the light emitting part l and a leakage current is detected.'' (5) On page 10, lines 17 to 19, the statement ``If... occurs in the transformer 25,'' was changed to ``If, for example, a human touches the electrode of the light emitting part l, 25 becomes unbalanced on the secondary side and a leakage current occurs in the center tap 26, the correction is made as follows. (6) On page 16, line 4, “Overcurrent detection coil” was changed to “
Correct it to 'Earth Leakage Current Detection Coil'. Claims (1) A light-transmitting jacket tube is attached to both electrodes for power supply terminals in a discharge tube having an insulating structure with respect to a cooling liquid, and the supply port provided in this jacket tube and the material of the jacket tube have a predetermined wavelength. A light source device characterized in that it is formed in a filter that emits an active ingredient. (2) The light-transmitting jacket tube may be formed in a double structure to reciprocate the cooling liquid with respect to a cantilever type arc tube supported at one end, or a double structure type in which the light transmission jacket tube is supported at both ends. A light source device described by Director Nezumi Kyusei, characterized in that both ends of the arc tube are formed in a funnel-shaped single layer structure on the outer periphery to allow the coolant to pass through in only one direction. (3) The light source device described in the ELi exhibition director, characterized in that the double-structured light-transmitting jacket tube filters the transmitted light by wavelength by changing the material of the light-transmitting jacket tube, and uses the emitted light as a necessary component. ．． (4) The double structure light-transmitting jacket tube is characterized in that the light-transmitting tube material is fixed by contacting and immersing it in a cooling liquid, and the filtered and absorbed light is removed by the cooling liquid as unnecessary components according to wavelength. ←Light source device described in 4(2) g. (5) The double-structure light-transmitting jacket tube is formed of a plurality of cylindrical tubes, each of which is made of a material exhibiting a different optical filter effect. The light source device described. (6) The above-mentioned double-structured transparent jacket tube is fixed to the support base of the coolant suction/discharge port via a water leak prevention material and fixed to the reflector body of the light source unit or its exterior body. The light source device according to claim (2), characterized in that: (7) the neutral point of the secondary winding of the step-up transformer connected to the power supply terminal electrode is grounded via a Hoshizato current detector; 2. The light source device according to claim 1, wherein the current detector is connected so that the primary side of the step-up transformer can be opened by the detected amount of current.

Claims (7)

[Claims] (1) Attach a transparent jacket tube to both electrodes for power supply terminals in a discharge tube that has an insulated structure against the coolant.
Cooling liquid is forced to flow back and forth into the jacket tube through a supply port and a discharge port provided in the jacket tube, and the material of the transparent jacket tube is a filter that emits active ingredients at a predetermined wavelength. A light source device characterized in that it is configured by being formed. (2) The light-transmitting jacket tube may be formed in a double structure to reciprocate the cooling liquid with respect to a cantilevered arc tube supported at one end, or a double-sided structure supported at both ends. The light source according to claim (1), characterized in that both ends of the arc tube are formed in a funnel-shaped single layer structure on the outer periphery so that the cooling liquid passes only in one direction. Device (3) The double-structured light-transmitting jacket tube is characterized in that the light-transmitting tube material is changed to filter the transmitted light according to wavelength, so that the emitted light is used as a necessary component.
The light source device described in Section 1. (4) A patent claim characterized in that the double-structured light-transmitting jacket tube is fixed by contacting and immersing the light-transmitting tube material in a cooling liquid, and filtering and absorbing light rays are removed as unnecessary components according to wavelength by the cooling liquid. The light source device according to the range (2). (5) The double-structure light-transmitting jacket tube is formed of a plurality of cylindrical tubes, and each tube is made of a material that exhibits a different optical filter effect. The light source device according to item (2). (6) The double-structured light-transmitting jacket tube is fixed to the support base of the coolant suction and discharge port via a water leak prevention material and fixed to the reflector of the light source or its exterior body. A light source device according to claim (2). (7) The neutral point of the secondary winding of the step-up transformer connected to the power supply terminal electrode is grounded via an overcurrent detector, and the overcurrent detector uses the detected overcurrent to boost the step-up transformer. 2. The light source device according to claim 1, wherein the primary side of the transformer is connected in an openable manner.