JPH02266215A - Vibrator - Google Patents
VibratorInfo
- Publication number
- JPH02266215A JPH02266215A JP1089398A JP8939889A JPH02266215A JP H02266215 A JPH02266215 A JP H02266215A JP 1089398 A JP1089398 A JP 1089398A JP 8939889 A JP8939889 A JP 8939889A JP H02266215 A JPH02266215 A JP H02266215A
- Authority
- JP
- Japan
- Prior art keywords
- driving
- vibrator
- piezoelectric elements
- vibrating body
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 abstract description 9
- 239000002131 composite material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は振動子に関し、特に駆動用圧電素子と帰還用
圧電素子とを有し、たとえば振動ジャイロなどのように
振動を利用した装置に用いられる振動子に関する。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a vibrator, and in particular, it has a driving piezoelectric element and a feedback piezoelectric element, and is used in a device that uses vibration, such as a vibrating gyro. Regarding the oscillator that can be used.
（従来技術）
第４図はこの発明の背景となる従来の振動ジャイロの一
例を示す図解図である。この振動ジャイロ１は、振動子
２を含む。この振動子２は、正３角柱状の振動体３を含
み、振動体３の１つの側面に駆動用圧電素子４が形成さ
れ、振動体３の他の２つの側面に帰還用圧電素子５ａお
よび５ｂがそれぞれ形成されている。そのため、この振
動子２では、帰還用圧電素子５ａおよび５ｂと駆動用圧
電素子４との間に発振回路６が接続され、帰還用圧電素
子５ａおよび５ｂの出力が発振回路６Ｆ介して駆動用圧
電素子４に帰還される。したがって、この振動子２は自
励振駆動する。(Prior Art) FIG. 4 is an illustrative view showing an example of a conventional vibrating gyroscope which is the background of the present invention. This vibrating gyroscope 1 includes a vibrator 2. This vibrator 2 includes a regular triangular prism-shaped vibrating body 3, a drive piezoelectric element 4 is formed on one side of the vibrating body 3, and a feedback piezoelectric element 5a and a piezoelectric element 5a for feedback are formed on the other two sides of the vibrating body 3. 5b are formed respectively. Therefore, in this vibrator 2, an oscillation circuit 6 is connected between the feedback piezoelectric elements 5a and 5b and the drive piezoelectric element 4, and the outputs of the feedback piezoelectric elements 5a and 5b are passed through the oscillation circuit 6F to the drive piezoelectric element 4. It is fed back to element 4. Therefore, this vibrator 2 is driven by self-oscillation.
そして、この振動ジャイロ１では、帰還用圧電素子５ａ
および５ｂからの出力電圧の差を差動回路７で検出する
ことによって、その回転角速度が測定される。In this vibrating gyroscope 1, the feedback piezoelectric element 5a
By detecting the difference between the output voltages from 5b and 5b using the differential circuit 7, the rotational angular velocity thereof is measured.
（発明が解決しようとする課題）
ところが、上述の振動子２は、１つの駆動用圧電素子４
によって振動体３を振動するので、振動体３の振幅が小
さい。そのため、この振動子２を用いた振動ジャイロ１
は、外部からの不要な振動の影響を受けやすく感度が悪
い。(Problem to be Solved by the Invention) However, the above-mentioned vibrator 2 has only one driving piezoelectric element 4.
Since the vibrating body 3 is vibrated by this, the amplitude of the vibrating body 3 is small. Therefore, the vibrating gyroscope 1 using this vibrator 2
is easily affected by unnecessary external vibrations and has poor sensitivity.
それゆえに、この発明の主たる目的は、振動体の振幅の
大きい、振動子を提供することである。Therefore, the main object of the present invention is to provide a vibrator whose vibrating body has a large amplitude.
（課題を解決するための手段）
この発明は、横断面が多角形の振動体と、振動体の少な
くとも３つの側面にそれぞれ形成される圧電素子とを含
み、圧電素子のうち２以上のものが駆動用に用いられ、
さらに圧電素子のうち他の１以上のものが帰還用に用い
られる、振動子である。(Means for Solving the Problems) The present invention includes a vibrating body having a polygonal cross section and piezoelectric elements formed on at least three side surfaces of the vibrating body, and two or more of the piezoelectric elements Used for driving,
Furthermore, one or more other piezoelectric elements are vibrators used for feedback.
（作用）
１以上の帰還用の圧電素子からの出力を２以上の駆動用
の圧電素子に帰還すると、振動子はそれらの駆動用の圧
電素子で駆動され、振動体はそれらの駆動方向を合成し
た方向に振動する。(Function) When the output from one or more feedback piezoelectric elements is fed back to two or more driving piezoelectric elements, the vibrator is driven by those driving piezoelectric elements, and the vibrating body synthesizes those driving directions. vibrates in the direction of the vibration.
（発明の効果）
この発明°によれば、２以上の駆動用の圧電素子によっ
て振動体を振動するので、１つの駆動用圧電素子によっ
て振動体を振動する従来例に比べて、振動体の振幅が大
きくなる。そのため、この発明にかかる振動子を用いれ
ば、外部からの不要な振動の影響を受けにくい高感度の
振動ジャイロが得られる。(Effects of the Invention) According to the present invention, since the vibrating body is vibrated by two or more driving piezoelectric elements, the amplitude of the vibrating body is lower than that of the conventional example in which the vibrating body is vibrated by one driving piezoelectric element. becomes larger. Therefore, by using the vibrator according to the present invention, a highly sensitive vibrating gyroscope that is less susceptible to unnecessary external vibrations can be obtained.
また、この発明にかかる振動子では、それを２以上の方
向から駆動してそれらの駆動方向を合成した方向に振動
体を振動することができるため、１つの駆動用圧電素子
によって駆動するいわゆる一方向駆動の従来例に比べて
、振動体やそれを支持するための支持部材ないし支持台
などのたとえば経時変化、温度変化、取付は角度の変化
、自重（重心位置）の変化などによる機械的な状態変化
に対して、安定した振動姿勢をとることができる。Furthermore, in the vibrator according to the present invention, the vibrator can be driven from two or more directions and the vibrating body can be vibrated in a direction that is a combination of those driving directions. Compared to conventional examples of directional drive, mechanical problems such as aging, temperature changes, changes in mounting angle, and changes in self-weight (center of gravity) of the vibrating body and the supporting members or supports for supporting it A stable vibration posture can be maintained in response to state changes.
そのため、この発明にかかる振動子は、たとえば振動ジ
ャイロのように振動の微少変化を検出するために基本と
なる振動姿勢が安定であるべき装置に好適に用いられる
。Therefore, the vibrator according to the present invention is suitably used in a device, such as a vibrating gyroscope, in which the basic vibration posture should be stable in order to detect minute changes in vibration.
この発明の上述の目的、その他の目的、特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.
（実施例）
実施例では振動子を用いた振動ジャイロについて説明す
るが、この発明は振動ジャイロ以外に振動を利用した装
置に用いられる振動子に適用されることを予め指摘して
おく。(Embodiment) In the embodiment, a vibrating gyroscope using a vibrator will be described, but it should be pointed out in advance that the present invention is applied to a vibrator used in a device using vibration other than a vibrating gyroscope.
第１図はこの発明の一実施例を示す図解図である。この
振動ジャイロ１０は、振動子１２を含む。FIG. 1 is an illustrative view showing an embodiment of the present invention. This vibrating gyroscope 10 includes a vibrator 12.
振動子１２は、たとえば正３角柱状の振動体１４を含む
。この振動体１４は、たとえばエリンバ、鉄−ニッケル
合金９石英、ガラス、水晶、セラミックなど、−船釣に
機械的な振動を生じる材料で形成される。The vibrator 12 includes a vibrating body 14 in the shape of a regular triangular column, for example. The vibrating body 14 is made of a material that causes mechanical vibrations when fishing on a boat, such as elimba, iron-nickel alloy 9 quartz, glass, crystal, and ceramic.
この振動体１４には、その３つの側面の中央部にそれぞ
れ圧電素子１６ａ、１６ｂおよび１６Ｃが形成される。This vibrating body 14 has piezoelectric elements 16a, 16b, and 16C formed at the center of its three side surfaces, respectively.
圧電素子１６ａは、たとえばセラミックからなる圧電層
１８ａを含み、圧電層１８ａの両主面にはそれぞれ電極
２０ａおよび２２ａが形成される。なお、これらの電極
２０ａおよび２２ａは、たとえば金、銀、アルミニウム
、ニッケル、銅−ニッケル合金（モネルメタル）などの
電極材料で、たとえばスパッタリング、蒸着等の薄膜技
術であるいはその材料によっては印刷技術で形成される
。同様に、他の圧電素子１６ｂおよび１６ｃも、それぞ
れ、たとえばセラミックからなる圧電７！１８ｂおよび
１８ｃを含み、それらの圧電層１８ｂと１８ｃとの両主
面にも、電極２゜ｂおよび２２ｃと２０ｂおよび２２ｃ
とが、それぞれ形成されている。そして、これらの圧電
素子１６ａ〜１６Ｃの一方の電極２０ａ〜２０ｃは、た
とえば接着剤で振動体１４に接着される。The piezoelectric element 16a includes a piezoelectric layer 18a made of, for example, ceramic, and electrodes 20a and 22a are formed on both main surfaces of the piezoelectric layer 18a, respectively. Note that these electrodes 20a and 22a are made of an electrode material such as gold, silver, aluminum, nickel, or copper-nickel alloy (monel metal), and may be formed by a thin film technique such as sputtering or vapor deposition, or by a printing technique depending on the material. be done. Similarly, the other piezoelectric elements 16b and 16c include piezoelectrics 7!18b and 18c made of ceramic, for example, and electrodes 2°b and 22c and 20b are also provided on both main surfaces of the piezoelectric layers 18b and 18c. and 22c
are formed respectively. One electrodes 20a to 20c of these piezoelectric elements 16a to 16C are bonded to the vibrating body 14 with adhesive, for example.
なお、振動体１４をたとえばエリンバ、鉄−ニッケル合
金などの金属からなる振動材料で形成すれば、圧電素子
１６ａ〜１６ｃの一方の電極２０ａ〜２０ｃは形成され
なくてもよい。なぜなら、振動体１４がそれらの電極２
０３〜２０ｃを兼ねるからである。この場合、圧電層１
８ａ〜１８ｃは、たとえばＰＺＴ（ジルコン・チタン酸
鉛）。Note that if the vibrating body 14 is formed of a vibrating material made of a metal such as Erinba or an iron-nickel alloy, the electrodes 20a to 20c on one side of the piezoelectric elements 16a to 16c may not be formed. This is because the vibrating body 14
This is because it also serves as 03-20c. In this case, piezoelectric layer 1
8a to 18c are, for example, PZT (zircon lead titanate).
Ｚｎ０（酸化鉛）などの圧電材料でたとえばスパッタリ
ング、蒸着などの薄膜技術によって形成されてもよい。It may also be formed of a piezoelectric material such as Zn0 (lead oxide) by thin film techniques such as sputtering or vapor deposition.
この振動子１２では、圧電素子１６３〜１６ｃのうち任
意の２つが駆動用に用いられ、他の１つが帰還用に用い
られる。この実施例では、たとえば、圧電素子１６ａお
よび１６ｂが駆動用に用いられ、他の圧電素子１６Ｃが
帰還用に用いられる。In this vibrator 12, arbitrary two of the piezoelectric elements 163 to 16c are used for driving, and the other one is used for feedback. In this embodiment, for example, piezoelectric elements 16a and 16b are used for driving, and another piezoelectric element 16C is used for feedback.
そのため、この振動子１２には、帰還用の圧電素子１６
Ｃと駆動用の圧電素子１６ａおよび１６ｂとの間に、振
動子１２を自動振駆動するための帰還ループとして発振
回路２４などが接続される。Therefore, this vibrator 12 includes a piezoelectric element 16 for feedback.
An oscillation circuit 24 or the like is connected between C and the driving piezoelectric elements 16a and 16b as a feedback loop for driving the vibrator 12 in automatic oscillation.
すなわち、帰還用の圧電素子１６ｃの電極２２Ｃは、発
振回路２４の入力端に接続される。そして、この発振回
路２４の出力端は、固定抵抗器２６ａを介して駆動用の
圧電素子１６ａの電極２２ａと固定抵抗器２６ｂを介し
て駆動用の圧電素子１６ｂの電極２２ｂとに接続される
。そのため、帰還用の圧電素子１６ｃの出力は発振回路
２４などを介して２つの駆動用の圧電素子１６ａおよび
１６ｂに帰還され、この振動子１２は自動振駆動する。That is, the electrode 22C of the feedback piezoelectric element 16c is connected to the input end of the oscillation circuit 24. The output end of this oscillation circuit 24 is connected to an electrode 22a of the driving piezoelectric element 16a via a fixed resistor 26a and an electrode 22b of the driving piezoelectric element 16b via a fixed resistor 26b. Therefore, the output of the feedback piezoelectric element 16c is fed back to the two drive piezoelectric elements 16a and 16b via the oscillation circuit 24, etc., and the vibrator 12 is driven by automatic vibration.
この場合、振動子１２の振動体１４は、２つの駆動用の
圧電素子１６ａおよび１６ｂによる２つの駆動方向を合
成した方向に振動する。したがって、この実施例では、
１つの駆動用圧電素子で駆動する従来例に比べて、振動
体１４の振幅が大きくなる。しかも、たとえば経時変化
、温度変化、取付は角度の変化、自重（重心位置）の変
化などによる機械的な状態変化に対して、振動体Ｉ４の
振動姿勢が安定である。In this case, the vibrating body 14 of the vibrator 12 vibrates in a direction that is a combination of two driving directions by the two driving piezoelectric elements 16a and 16b. Therefore, in this example:
The amplitude of the vibrating body 14 is larger than that of the conventional example in which the drive piezoelectric element is driven by one driving piezoelectric element. Moreover, the vibrating posture of the vibrating body I4 is stable against mechanical state changes due to, for example, changes over time, changes in temperature, changes in mounting angle, and changes in own weight (center of gravity position).
一方、駆動用の圧電素子１６ａおよび１６ｂの入力側の
電極２２ａおよび２２ｂには、検出用端子２８ａおよび
２８ｂが、それぞれ接続される。On the other hand, detection terminals 28a and 28b are connected to input side electrodes 22a and 22b of drive piezoelectric elements 16a and 16b, respectively.
これらの検出用端子２８ａおよび２８ｂは、振動ジャイ
ロ１０の回転角速度に応じて変化する駆動用の圧電素子
１６ａおよび１６ｂのインピーダンス変化を検出するた
めのものである。These detection terminals 28a and 28b are for detecting impedance changes of the drive piezoelectric elements 16a and 16b that change in accordance with the rotational angular velocity of the vibrating gyro 10.
これらの検出用端子２８ａおよび２８ｂは、差動回路３
０の２つの入力端に、それぞれ接続される。この差動回
路３０では、駆動用の圧電素子１６ａおよび１６ｂのイ
ンピーダンス変化が、それらの電極２２ａおよび２２ｂ
間の電位差として検出される。したがって、差動回路３
ｏがらの出力によって、振動ジ十イロ１０の回転角速度
を知ることができる。These detection terminals 28a and 28b are connected to the differential circuit 3.
0, respectively. In this differential circuit 30, the impedance change of the drive piezoelectric elements 16a and 16b is
It is detected as a potential difference between Therefore, the differential circuit 3
The rotational angular velocity of the vibrating dial 10 can be determined from the output of the rotor.
この振動ジャイロ１０では、第４図に示す従来例に比べ
て、振幅の大きい振動子１２が用いられているため回転
角速度の感度がよくなる。しかも、たとえば経時変化な
どによる機械的な状態変化に対して、振動体１４の振動
姿勢が安定であるので、回転角速度を安定的に測定する
ことができる。This vibrating gyroscope 10 uses a vibrator 12 with a larger amplitude than the conventional example shown in FIG. 4, so the sensitivity of the rotational angular velocity is improved. Moreover, since the vibration posture of the vibrating body 14 is stable against mechanical state changes due to changes over time, for example, the rotational angular velocity can be stably measured.
さらに、この振動ジャイロ１０では、駆動用の圧電素子
１６ａおよび１６ｂの電極２２ａおよび２２ｂ間の電位
差、すなわち駆動用の圧電素子の入力端の電位差を検出
することによって回転角速度を測定するため、それらの
圧電素子１６ａ〜１６Ｃに特性上のばらつきや経時変化
、温度変化があっても、圧電素子の特性やそれらの共振
周波数のずれに影古されることなく回転角速度を正確に
測定することができる。Furthermore, in this vibrating gyroscope 10, the rotational angular velocity is measured by detecting the potential difference between the electrodes 22a and 22b of the drive piezoelectric elements 16a and 16b, that is, the potential difference at the input end of the drive piezoelectric element. Even if the piezoelectric elements 16a to 16C have variations in characteristics, change over time, or change in temperature, the rotational angular velocity can be accurately measured without being affected by the characteristics of the piezoelectric elements or the deviations in their resonance frequencies.
第２図はこの発明の他の実施例を示す図解図である。こ
の実施例では、特に、振動体１４が正４角柱状に形成さ
れ、振動体１４の４つの側面に、それぞれ圧電素子１６
ａ、１６ｂ、１６ｃおよび１６ｄが形成されている。そ
して、たとえば、隣接する２つの圧電素子１６ａおよび
１６ｂが駆動用に用いられ、他の２つの圧電素子１６ｃ
および１６ｄが帰還用に用いられる。そのため、２つの
帰還用の圧電素子１６Ｃおよび１６ｄが可変抵抗器３２
の２つの固定端子３２ａおよび３２ｂにそれぞれ接続さ
れ、可変抵抗器３２の可動端子３２Ｃが発振回路２４の
入力端に接続される。したがって、この実施例では、２
つの帰還用の圧電素子１６Ｃおよび１６ｄからの出力が
合成された形で２つの駆動用の圧電素子１６ａおよび１
６ｂに帰還される。FIG. 2 is an illustrative view showing another embodiment of the invention. In this embodiment, in particular, the vibrating body 14 is formed in the shape of a regular square prism, and piezoelectric elements 16 are provided on each of the four sides of the vibrating body 14.
a, 16b, 16c and 16d are formed. For example, two adjacent piezoelectric elements 16a and 16b are used for driving, and the other two piezoelectric elements 16c
and 16d are used for feedback. Therefore, the two piezoelectric elements 16C and 16d for feedback are connected to the variable resistor 32.
The movable terminal 32C of the variable resistor 32 is connected to the input end of the oscillation circuit 24. Therefore, in this example, 2
The outputs from the two feedback piezoelectric elements 16C and 16d are combined to generate the two drive piezoelectric elements 16a and 16d.
Returned to 6b.
第３図はこの発明のさらに他の実施例を示す図解図であ
る。この実施例では、振動体１４が正６角柱状に形成さ
れ、振動体１４の隣接しない３つの側面に、圧電素子１
６２〜１６Ｃがそれぞれ形成される。そして、この実施
例では、第１図に示す実施例と同様に、たとえば、２つ
の圧電素子１６ａおよび１６ｂが駆動用に用いられ、他
の圧電素子１６ｃが帰還用に用いられる。FIG. 3 is an illustrative view showing still another embodiment of the invention. In this embodiment, the vibrating body 14 is formed into a regular hexagonal column shape, and piezoelectric elements 1 are arranged on three non-adjacent sides of the vibrating body 14.
62 to 16C are formed, respectively. In this embodiment, similarly to the embodiment shown in FIG. 1, for example, two piezoelectric elements 16a and 16b are used for driving, and the other piezoelectric element 16c is used for feedback.
なお、上述の各実施例では、振動子１２の振動体１４が
正３角柱状、正４角柱状あるいは正６角柱状に形成され
ているが、この発明では、振動体１４は２等辺３角柱状
に形成されてもよい。この場合、振動体１４の等しい側
面に形成される圧電素子を駆動用として用い、他の側面
に形成される圧電素子を帰還用として用いればよい。あ
るいは、振動体１４は、２等辺３角柱状、正４角柱状、
正６角柱状以外の多角柱状に形成されてもよい。この場
合、圧電素子は、振動体の少なくとも３つの側面にそれ
ぞれ形成されればよい。そして、それらの圧電素子のう
ち２以上のものを駆動用に用い、他の圧電素子のうち１
以上のものを帰還用に用いればよい。In each of the above embodiments, the vibrating body 14 of the vibrator 12 is formed in the shape of a regular triangular prism, a regular quadrangular prism, or a regular hexagonal prism, but in the present invention, the vibrating body 14 is formed in an isosceles triangular prism. It may also be formed into a columnar shape. In this case, the piezoelectric elements formed on the same side of the vibrating body 14 may be used for driving, and the piezoelectric elements formed on the other side may be used for feedback. Alternatively, the vibrating body 14 has an isosceles triangular prism shape, a regular quadrilateral prism shape,
It may be formed into a polygonal column shape other than a regular hexagonal column shape. In this case, the piezoelectric elements may be formed on at least three sides of the vibrating body. Two or more of these piezoelectric elements are used for driving, and one of the other piezoelectric elements is used for driving.
The above may be used for return purposes.
第１図はこの発明の一実施例を示す図解図である。
第２図はこの発明の他の実施例を示す図解図である。
第３図はこの発明のさらに他の実施例を示す図解図であ
る。
第４図はこの発明の背景となる従来の振動ジャイロの一
例を示す図解図である。
図において、１２は振動子、１４は振動体、１６ａ、１
６ｂおよび１６Ｃは圧電素子を示す。
特許出願人 株式会社 村田製作所
代理人 弁理士 岡 １） 全 啓
第２図
図FIG. 1 is an illustrative view showing an embodiment of the present invention. FIG. 2 is an illustrative view showing another embodiment of the invention. FIG. 3 is an illustrative view showing still another embodiment of the invention. FIG. 4 is an illustrative view showing an example of a conventional vibrating gyroscope, which is the background of the present invention. In the figure, 12 is a vibrator, 14 is a vibrator, 16a, 1
6b and 16C indicate piezoelectric elements. Patent applicant Murata Manufacturing Co., Ltd. Representative Patent attorney Oka 1) Zen Kei Figure 2
Claims (1)
る圧電素子を含み、 前記圧電素子のうち２以上のものが駆動用に用いられ、
さらに 前記圧電素子のうち他の１以上のものが帰還用に用いら
れる、振動子。[Scope of Claims] A vibrating body having a polygonal cross section, and a piezoelectric element formed on at least three side surfaces of the vibrating body, two or more of the piezoelectric elements being used for driving,
Furthermore, one or more other piezoelectric elements are used for feedback.
Priority Applications (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8939889A JP2531021B2 (en) | 1989-04-06 | 1989-04-06 | Oscillator |
| GB8918103A GB2223309B (en) | 1988-08-12 | 1989-08-08 | Vibrator and vibratory gyroscope using the same |
| DE3943788A DE3943788C2 (en) | 1988-08-12 | 1989-08-10 | Bearing structure for an oscillator of an oscillating gyroscope |
| DE3943805A DE3943805C2 (en) | 1988-08-12 | 1989-08-10 | Vibratory gyroscope |
| DE3943787A DE3943787C2 (en) | 1988-08-12 | 1989-08-10 | Oscillator exciter used as gyro component |
| DE19893926504 DE3926504C2 (en) | 1988-08-12 | 1989-08-10 | Vibratory gyroscope |
| GB9301204A GB2262343A (en) | 1988-08-12 | 1993-01-22 | A vibrator for use in a vibratory gyroscope |
| GB9301203A GB2262342A (en) | 1988-08-12 | 1993-01-22 | A vibrator for use in a vibratory gyroscope |
| US08/044,630 US5349857A (en) | 1988-08-12 | 1993-04-12 | Vibratory gyroscope |
| US08/263,894 US5505085A (en) | 1988-08-12 | 1994-06-22 | Vibrator and vibratory gyroscope using the same |
| US08/276,759 US5493166A (en) | 1988-08-12 | 1994-07-18 | Vibrator and vibrating gyroscope using the same |
| US08/474,118 US5569969A (en) | 1988-08-12 | 1995-06-07 | Vibrator and vibratory gyroscope using the same |
| US09/163,830 US6161432A (en) | 1988-08-12 | 1998-09-01 | Vibrator and vibratory gyroscope using the same |
| US09/163,829 US6016699A (en) | 1988-08-12 | 1998-09-01 | Vibrator including piezoelectric electrodes of detectors arranged to be non-parallel and non-perpendicular to Coriolis force direction and vibratory gyroscope using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8939889A JP2531021B2 (en) | 1989-04-06 | 1989-04-06 | Oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02266215A true JPH02266215A (en) | 1990-10-31 |
| JP2531021B2 JP2531021B2 (en) | 1996-09-04 |
Family
ID=13969544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8939889A Expired - Lifetime JP2531021B2 (en) | 1988-08-12 | 1989-04-06 | Oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531021B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0560562A (en) * | 1991-08-30 | 1993-03-09 | Akai Electric Co Ltd | Vibrating gyroscope |
| US5270607A (en) * | 1991-06-07 | 1993-12-14 | Akai Electric Co., Ltd. | Vibration control apparatus |
| US5460043A (en) * | 1991-09-17 | 1995-10-24 | Akai Electric Co., Ltd. | Vibratory gyroscope |
| US6845667B1 (en) | 1999-09-16 | 2005-01-25 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
| USRE42731E1 (en) | 1999-09-16 | 2011-09-27 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
| USRE42916E1 (en) * | 1993-04-27 | 2011-11-15 | Watson Industries, Inc. | Single bar type vibrating element angular rate sensor system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59135553A (en) * | 1983-01-24 | 1984-08-03 | Fujitsu Ltd | Holding system of fault information |
| JPS6125409A (en) * | 1984-07-13 | 1986-02-04 | ヤンマー農機株式会社 | Rice planter |
| JPS6215173A (en) * | 1985-07-13 | 1987-01-23 | Nissan Motor Co Ltd | Vehicle motion state quantity computing device |
| JPS6367921U (en) * | 1986-10-24 | 1988-05-07 |
-
1989
- 1989-04-06 JP JP8939889A patent/JP2531021B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59135553A (en) * | 1983-01-24 | 1984-08-03 | Fujitsu Ltd | Holding system of fault information |
| JPS6125409A (en) * | 1984-07-13 | 1986-02-04 | ヤンマー農機株式会社 | Rice planter |
| JPS6215173A (en) * | 1985-07-13 | 1987-01-23 | Nissan Motor Co Ltd | Vehicle motion state quantity computing device |
| JPS6367921U (en) * | 1986-10-24 | 1988-05-07 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5270607A (en) * | 1991-06-07 | 1993-12-14 | Akai Electric Co., Ltd. | Vibration control apparatus |
| JPH0560562A (en) * | 1991-08-30 | 1993-03-09 | Akai Electric Co Ltd | Vibrating gyroscope |
| US5460043A (en) * | 1991-09-17 | 1995-10-24 | Akai Electric Co., Ltd. | Vibratory gyroscope |
| USRE42916E1 (en) * | 1993-04-27 | 2011-11-15 | Watson Industries, Inc. | Single bar type vibrating element angular rate sensor system |
| US6845667B1 (en) | 1999-09-16 | 2005-01-25 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
| USRE42731E1 (en) | 1999-09-16 | 2011-09-27 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
| USRE43755E1 (en) | 1999-09-16 | 2012-10-23 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531021B2 (en) | 1996-09-04 |
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