JPH01170587U - - Google Patents
Info
- Publication number
- JPH01170587U JPH01170587U JP6719588U JP6719588U JPH01170587U JP H01170587 U JPH01170587 U JP H01170587U JP 6719588 U JP6719588 U JP 6719588U JP 6719588 U JP6719588 U JP 6719588U JP H01170587 U JPH01170587 U JP H01170587U
- Authority
- JP
- Japan
- Prior art keywords
- robot
- vacuum
- suction device
- device connected
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 210000000707 wrist Anatomy 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Description
第１図は本考案を適用した円筒座標型ロボツト
の実施例の斜視図、第２図は圧力調整装置の断面
図である。
１，３，４……ジヤバラ、２……手首旋回ユニ
ツト、５……水平伸縮軸カバー、６……手首旋回
フランジ、７……吸引装置、８……ダクト、９…
…ボツクス、９１……側板（ロボツト外壁）、１
０……貫通孔、２０……圧力調整装置、２３……
フレーム、２４，２５……パツキン、２６……弁
、２７……圧縮バネ、２８……円柱材。
FIG. 1 is a perspective view of an embodiment of a cylindrical coordinate robot to which the present invention is applied, and FIG. 2 is a sectional view of a pressure regulating device. 1, 3, 4... Bellows, 2... Wrist rotation unit, 5... Horizontal telescopic shaft cover, 6... Wrist rotation flange, 7... Suction device, 8... Duct, 9...
...Box, 91...Side plate (robot outer wall), 1
0...Through hole, 20...Pressure adjustment device, 23...
Frame, 24, 25...Packskin, 26...Valve, 27...Compression spring, 28...Cylindrical material.
Claims (1)
ム用ロボツトにおいて、ロボツト内部を真空吸引
するためにロボツトに接続された吸引装置とロボ
ツト内外を連通する貫通孔を備え、ロボツト機内
の圧力とロボツト機外の圧力の差から貫通孔を弁
によつて開閉するようにした圧力調整装置が設置
されていることを特徴とするクリーンルーム用ロ
ボツト。 A clean room robot having at least one telescoping shaft is provided with a suction device connected to the robot to vacuum the inside of the robot and a through hole communicating between the inside and outside of the robot, and the robot has a suction device connected to the robot to vacuum the inside of the robot, and a through hole that communicates between the inside and outside of the robot, and the robot has a suction device connected to the robot to vacuum the inside of the robot. A clean room robot characterized in that a pressure regulating device is installed in which a through hole is opened and closed by a valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6719588U JPH01170587U (en) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6719588U JPH01170587U (en) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01170587U true JPH01170587U (en) | 1989-12-01 |
Family
ID=31292578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6719588U Pending JPH01170587U (en) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01170587U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0584690A (en) * | 1991-09-25 | 1993-04-06 | Shin Meiwa Ind Co Ltd | Industrial robot device for vacuum chamber |
| JP2010110830A (en) * | 2008-11-04 | 2010-05-20 | Denso Wave Inc | Clean robot |
-
1988
- 1988-05-20 JP JP6719588U patent/JPH01170587U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0584690A (en) * | 1991-09-25 | 1993-04-06 | Shin Meiwa Ind Co Ltd | Industrial robot device for vacuum chamber |
| JP2010110830A (en) * | 2008-11-04 | 2010-05-20 | Denso Wave Inc | Clean robot |